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    A MEMS DEVICE
    43.
    发明申请
    A MEMS DEVICE 审中-公开
    MEMS器件

    公开(公告)号：WO2013185812A1

    公开(公告)日：2013-12-19

    申请号：PCT/EP2012/061196

    申请日：2012-06-13

    Applicant: LEMOPTIX SA ,  ABELÉ, Nicolas ,  KHECHANA, Faouzi ,  GAMET, Julien

    Inventor： ABELÉ, Nicolas ,  KHECHANA, Faouzi ,  GAMET, Julien

    IPC: G02B26/08

    CPC classification number: G02B26/0833 ,  B81B3/0072 ,  B81B2201/042 ,  B81B2203/0154 ,  B81B2203/0181 ,  B81B2203/06 ,  G02B26/085 ,  G02B26/101 ,  G02B26/105

    Abstract: According to the present invention there is provided a MEMS device comprising, a mirror which is connected to a fixed portion by means of a first and second torsional arm, each of the first and second torsional arms are configured such that they can twist about torsional axes so as to oscillate the mirror about a first oscillation axes, and wherein the first and second torsional arms are each configured to have two or more meanders and wherein the first and second torsional arms are arranged symmetrically relative to the first oscillation axis.

    Abstract translation: 根据本发明，提供了一种MEMS装置，其包括：通过第一和第二扭转臂连接到固定部分的反射镜，第一和第二扭转臂中的每一个被构造成使得它们能够扭转扭转轴 以使所述反射镜围绕第一振荡轴线振荡，并且其中所述第一和第二扭转臂各自构造成具有两个或多个曲折，并且其中所述第一和第二扭转臂相对于所述第一振荡轴对称地布置。

    MICRO-PROJECTION DEVICE WITH ANTI-SPECKLE VIBRATION MODE
    46.
    发明申请
    MICRO-PROJECTION DEVICE WITH ANTI-SPECKLE VIBRATION MODE 审中-公开
    具有抗振动模式的微型投影装置

    公开(公告)号：WO2011134514A1

    公开(公告)日：2011-11-03

    申请号：PCT/EP2010/055761

    申请日：2010-04-28

    Applicant: LEMOPTIX SA ,  KILCHER, Lucio ,  KHECHANA, Faouzi ,  ABELÉ, Nicolas

    Inventor： KILCHER, Lucio ,  KHECHANA, Faouzi ,  ABELÉ, Nicolas

    IPC: G02B27/48 ,  H04N9/31

    CPC classification number: G02B27/48 ,  G02B26/0833 ,  G02B26/105 ,  G03B21/2033 ,  H04N9/3129

    Abstract: A micro-projection system for projecting light on a projection surface, comprising: -at least one coherent light source (101); -optical elements (102, 108, 109) in the optical path between said coherent light source and said projection surface; -said optical elements including at least one reflective member (102) actuated by a drive signal for deviating light from said light source so as to scan a projected image onto said projecting surface; -said optical elements including at least one vibrating element (102) actuated by a vibrating signal so as to reduce speckle onto said projecting surface. The corresponding method for reducing speckle is also provided.

    Abstract translation: 一种用于在投影表面上投射光的微投影系统，包括： - 至少一个相干光源（101）; - 所述相干光源和所述投影表面之间的光路中的光学元件（102,108,109）; 所述光学元件包括由驱动信号驱动的至少一个反射构件（102），用于偏离来自所述光源的光，以将投影图像扫描到所述突出表面上; 所述光学元件包括由振动信号致动的至少一个振动元件（102），以便将斑点减少到所述突出表面上。 还提供了减少斑点的相应方法。

    OPTICAL MEMS SCANNING MICRO-MIRROR WITH SPECKLE REDUCTION
    47.
    发明申请
    OPTICAL MEMS SCANNING MICRO-MIRROR WITH SPECKLE REDUCTION 审中-公开
    光学MEMS扫描微镜与减少光谱

    公开(公告)号：WO2011134513A1

    公开(公告)日：2011-11-03

    申请号：PCT/EP2010/055760

    申请日：2010-04-28

    Applicant: LEMOPTIX SA ,  KILCHER, Lucio ,  ABELÉ, Nicolas ,  KHECHANA, Faouzi

    Inventor： KILCHER, Lucio ,  ABELÉ, Nicolas ,  KHECHANA, Faouzi

    IPC: G02B27/48

    CPC classification number: G02B27/48 ,  G02B5/0215 ,  G02B5/0231 ,  G02B5/0278 ,  G02B26/0833 ,  G03B21/28

    Abstract: Optical MEMS scanning micro-mirror comprising: -a movable scanning micro-mirror (101) pivotally connected to a MEMS body (102) substantially surrounding the lateral sides of the micro-mirror; -an transparent prism (500, 600) substantially covering the reflection side of the micro-mirror; -wherein said prism has its outer face non-parallel to the micro-mirror neutral plane N-N, thereby providing a dual anti-speckle and anti-reflection effect, namely against parasitic light. The invention also provides the corresponding micro-projection system and method for reducing speckle.

    Abstract translation: 光学MEMS扫描微镜包括： - 可枢转地连接到基本上围绕微镜的侧面的MEMS主体（102）的可移动扫描微镜（101） - 基本上覆盖微反射镜的反射面的透明棱镜（500,600）; - 其中所述棱镜的外表面不平行于微镜中性面N-N，从而提供双重防斑和抗反射效果，即抵抗寄生光。 本发明还提供了相应的微投影系统和减少斑点的方法。

    METHOD AND APPARATUS FOR CONTROLLING A MEMS MICRO-MIRROR DEVICE
    48.
    发明申请
    METHOD AND APPARATUS FOR CONTROLLING A MEMS MICRO-MIRROR DEVICE 审中-公开
    用于控制MEMS微镜器件的方法和装置

    公开(公告)号：WO2011095231A1

    公开(公告)日：2011-08-11

    申请号：PCT/EP2010/051517

    申请日：2010-02-08

    Applicant: LEMOPTIX SA ,  KILCHER, Lucio ,  ABELÉ, Nicolas ,  CHEVALLAZ, Eric

    Inventor： KILCHER, Lucio ,  ABELÉ, Nicolas ,  CHEVALLAZ, Eric

    IPC: G02B26/08 ,  G02B26/10 ,  H02P25/02

    CPC classification number: G02B26/085 ,  G02B26/105 ,  H02K33/16 ,  H02P25/034

    Abstract: The present invention concerns a method and an apparatus for controlling a MEMS micro-mirror device. The invention enables the control of the micro-mirror deflection angle and of the micro-mirror scanning frequency, essential for the projection as it relates directly to the size of the projected image. The MEMS micro-mirror device has a fixed part (102) and a micro-mirror (100) that can oscillate along at least one oscillation axis, a magnet (200) either placed next to said fixed part (102) or on the said movable part (100) and a sensing coil (202) placed on said moving part (100) or on said fixed part (102). A detecting circuit detects at least one value (Uιnd) of the inducted voltage in said sensing coil (202) for each period and for each oscillation axis, and a calculating circuit (404) calculates the amplitude of the movement of said micro-mirror (100) by means of said value (Umd)- Another independent electrical drive coil can be used in order to have two independent electrical coils respectively for driving the micro- mirror and for sensing its positions. The invention can prevent an unexpected default of the projection system.

    Abstract translation: 本发明涉及一种用于控制MEMS微镜装置的方法和装置。 本发明使得能够控制微镜偏转角和微镜扫描频率，这对于投影是至关重要的，直接涉及投影图像的尺寸。 MEMS微镜装置具有固定部分（102）和能够沿着至少一个振荡轴线摆动的微反射镜（100），或者放置在所述固定部分（102）旁边或所述固定部分上的磁体（200） 可移动部件（100）和放置在所述移动部件（100）上或所述固定部件（102）上的感测线圈（202）。 检测电路针对每个周期和每个振荡轴检测所述检测线圈（202）中的感应电压的至少一个值（Uδnd），并且计算电路（404）计算所述微电路的运动幅度， 通过所述值（Umd）可以使用另一个独立的电驱动线圈，以分别具有两个独立的电线圈来驱动微反射镜并感测其位置。 本发明可以防止投影系统的意外默认。

    OPTICAL MICRO-PROJECTION SYSTEM AND PROJECTION METHOD
    49.
    发明申请
    OPTICAL MICRO-PROJECTION SYSTEM AND PROJECTION METHOD 审中-公开
    光学微投影系统和投影方法

    公开(公告)号：WO2011012168A1

    公开(公告)日：2011-02-03

    申请号：PCT/EP2009/059937

    申请日：2009-07-31

    Applicant: LEMOPTIX SA ,  KILCHER, Lucio ,  KHECHANA, Faouzi

    Inventor： KILCHER, Lucio ,  KHECHANA, Faouzi

    IPC: H04N9/31

    CPC classification number: H04N9/3194 ,  G01S7/4814 ,  G01S17/102 ,  G01S17/42 ,  G02B26/0833 ,  G06F3/017 ,  G06F3/0304 ,  H04N9/3129 ,  H04N9/3155 ,  H04N9/3185 ,  H04N9/3188

    Abstract: An optical micro-projection system comprising the following components: - at least one laser light source (200, 400, 402, 600); - at least one movable mirror (102, 103, 203) for deviating light from said light source to allow generation of images on a projection surface (104, 301, 303, 306, 603); -a self mixing module for measurement of the distance (604) between the projection source and a projection surface, said self mixing module comprising : -at least one photodiode (401, 601) for monitoring the light emission power of the laser light source; -an optical power variation counter for counting optical power variations (605); -successive displacements of said mirror allowing the self mixing module providing successive projection distance measurements of a plurality of points of said projection surface. A projection method for optical micro-projection system and a distance measurement method are also provided.

    Abstract translation: 一种光学微投影系统，包括以下部件： - 至少一个激光源（200,400,402,600）; - 用于使来自所述光源的光偏离以允许在投影表面（104,301,303,306,603）上产生图像的至少一个可移动镜（102,103,203）; - 用于测量所述投影源和投影表面之间的距离（604）的自混合模块，所述自混合模块包括： - 用于监测所述激光源的发光功率的至少一个光电二极管（401,601）; - 用于计数光功率变化的光功率变化计数器（605）; 所述反射镜的过渡位移允许自混合模块提供所述投影表面的多个点的连续的投射距离测量。 还提供了一种用于光学微投影系统的投影方法和距离测量方法。

    AN ACTUATOR
    50.
    发明公开
    AN ACTUATOR 审中-公开
    执行器

    公开(公告)号：EP2771732A1

    公开(公告)日：2014-09-03

    申请号：EP12775177.4

    申请日：2012-09-25

    Applicant: Lemoptix SA

    Inventor： GAMET, Julien ,  KHECHANA, Faouzi

    IPC: G02B26/08 ,  B81B3/00

    CPC classification number: H02K33/00 ,  B81B3/0072 ,  B81B2201/038 ,  B81B2201/042 ,  B81B2203/058 ,  G02B26/08 ,  G02B26/085 ,  H02K9/22 ,  H02K33/02 ,  H02K33/16

    Abstract: According to the present invention there is provided an actuator comprising, a movable member, the movable member comprising a support frame which is configured such that it can oscillate about a first oscillation axis and a mirror which is fixed to the support frame such that oscillation of the support frame will effect oscillation of the mirror; an coil, which cooperates with the support frame; one or more boundary portions provided between the support frame and the mirror which reduce the influence of warp transmitted from an edge of the support frame to the mirror, as the support frame oscillates about the first oscillation axis; wherein the support frame further comprises one or more cut-out regions, wherein the one or more cut-out regions are configured to be parallel to at least a portion of the coil, to reduce stress on the coil as the support frame oscillates about the first oscillation axis and/or to reduce the temperature dependence of the properties of the actuator.

    Abstract translation: 根据本发明，提供了一种致动器，包括：一个可移动部件，该可移动部件包括一个支撑框架，该支撑框架构造成可以围绕第一摆动轴线摆动;以及镜子，固定在支撑框架上， 支架会影响反光镜的摆动; 与支撑框架配合的线圈; 当所述支撑框围绕所述第一摆动轴线摆动时，在所述支撑框架和所述镜子之间设置一个或多个边界部分，所述边界部分减少从所述支撑框架的边缘传输到所述镜子的翘曲的影响; 其中所述支撑框架还包括一个或多个切除区域，其中所述一个或多个切除区域被配置为平行于所述线圈的至少一部分，以在所述支撑框架围绕所述线圈振荡时减小所述线圈上的压力 第一摆动轴线和/或降低致动器的特性的温度依赖性。

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