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公开(公告)号：KR1020030091446A
公开(公告)日：2003-12-03
申请号：KR1020020029490
申请日：2002-05-28
Applicant: 삼성전자주식회사
IPC: H01L21/28
CPC classification number: H01L21/76811 , H01L21/76808 , H01L21/76813
Abstract: PURPOSE: A method for forming a dual damascene metal line using a low dielectric constant insulating layer is provided to be capable of preventing the generation of photoresist tail and facet phenomenon. CONSTITUTION: After sequentially forming a lower insulating layer(310), an upper etch stop layer(315), an upper insulating layer(320), a lower hard mask(325), and an upper hard mask(330) on a semiconductor substrate(300), a groove opening portion is formed by selectively patterning the upper hard mask for exposing the predetermined portion of the lower hard mask. Then, a planarization layer(340) is formed on the entire surface of the resultant structure. A hole opening portion is formed by sequentially patterning the planarization layer, the lower hard mask, and the upper hard mask for partially exposing the etch stop layer. Then, the patterned planarization layer is removed.
Abstract translation: 目的：提供一种使用低介电常数绝缘层形成双镶嵌金属线的方法，以能够防止光致抗蚀剂尾部和小面现象的产生。 构成：在半导体衬底上依次形成下绝缘层（310），上蚀刻停止层（315），上绝缘层（320），下硬掩模（325）和上硬掩模（330） （300），通过选择性地图案化上部硬掩模以暴露下部硬掩模的预定部分来形成凹槽开口部分。 然后，在所得结构的整个表面上形成平坦化层340。 通过对平坦化层，下部硬掩模和上部硬掩模进行顺序构图以形成部分地露出蚀刻停止层来形成孔开口部分。 然后，去除图案化的平坦化层。
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公开(公告)号：KR1020030079132A
公开(公告)日：2003-10-10
申请号：KR1020020017949
申请日：2002-04-02
Applicant: 삼성전자주식회사
IPC: H01L21/28
CPC classification number: H01L21/76831 , H01L21/316 , H01L21/31612 , H01L21/31629 , H01L21/31633 , H01L21/31695 , H01L21/76808 , H01L21/76835 , H01L2221/1036
Abstract: PURPOSE: An intermetal dielectric pattern and a method for forming the same are provided to be capable of preventing the generation of photoresist residuals and reducing the thickness of a photoresist layer deposited when carrying out a via hole patterning process by using an upper capping layer. CONSTITUTION: After forming a lower metal line(110) at the upper portion of a semiconductor substrate, an intermetal dielectric is formed on the entire surface of the resultant structure by sequentially depositing a lower insulating layer(130) and an upper insulating layer(150). A via hole(180) is formed by patterning the intermetal dielectric for exposing the upper surface of the lower metal line. An upper capping layer(190) is then formed on the entire surface of the resultant structure. A trench line is formed by sequentially patterning the upper capping layer and the upper insulating layer for exposing the upper portion of the via hole.
Abstract translation: 目的：提供一种金属间电介质图案及其形成方法，以能够防止在通过使用上盖层进行通孔图案形成工艺时沉积的光致抗蚀剂层的产生而产生光致抗蚀剂残留物。 构成：在半导体衬底的上部形成下金属线（110）之后，通过依次沉积下绝缘层（130）和上绝缘层（150），在所得结构的整个表面上形成金属间电介质 ）。 通过图案化金属间电介质以暴露下金属线的上表面来形成通孔（180）。 然后在所得结构的整个表面上形成上覆盖层（190）。 通过顺序地图案化上覆盖层和上绝缘层以暴露通孔的上部而形成沟槽线。
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公开(公告)号：KR100391992B1
公开(公告)日：2003-07-22
申请号：KR1020010036933
申请日：2001-06-27
Applicant: 삼성전자주식회사
IPC: H01L21/283
Abstract: PURPOSE: A method for forming a semiconductor device having low permittivity interlayer dielectric is provided to exactly form a micro pattern on a SiOC layer and to restrain a parasitic capacitance between interconnections or contact plugs by using the SiOC layer having a low dielectric constant. CONSTITUTION: A low permittivity carbon oxide silicon layer made of SiOC is formed on a substrate(100) by a CVD(Chemical Vapour Deposition) using a nitrogen included gas as a source gas or a carrier gas. A plasma processing is performed on the carbon oxide silicon layer by supplying gases, such as a helium, a hydrogen, an N2O, or an Ar gas to a processing chamber. A photoresist is deposited and patterned on the plasma processed carbon oxide silicon layer(111).
Abstract translation: 目的：提供一种形成具有低介电常数层间电介质的半导体器件的方法，以在SiOC层上精确地形成微图案，并通过使用具有低介电常数的SiOC层来抑制互连或接触插塞之间的寄生电容。 构成：使用含氮气体作为源气体或载气，通过CVD（化学气相沉积）在衬底（100）上形成由SiOC制成的低介电常数碳氧化硅层。 通过向处理室供给诸如氦气，氢气，N 2 O或Ar气体的气体在碳氧化硅层上执行等离子体处理。 在等离子体处理的碳氧化硅层（111）上沉积并构图光致抗蚀剂。
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44.发明公开
公开(公告)号：KR1020030047526A
公开(公告)日：2003-06-18
申请号：KR1020010078174
申请日：2001-12-11
Applicant: 삼성전자주식회사
IPC: H04L12/16
Abstract: PURPOSE: A Bluetooth system server providing network service to Bluetooth equipment and a method for providing network service using the same are provided to realize automatic authentication in several places with one registration. CONSTITUTION: A connecting part is connected with a plurality of Bluetooth access points(110). An access point control unit confirms and controls states of the plurality of Bluetooth access points(110). A user information database includes information related to Bluetooth users. A registration authenticating unit receives chip numbers of Bluetooth equipment(100) through the access points(110) for registering the Bluetooth equipment(100) at the user information database and authenticates the registered Bluetooth equipment(100) requesting authentication. A service providing unit provides a network service to the authenticated Bluetooth equipment(100) through the access points(110).
Abstract translation: 目的：为蓝牙设备提供网络服务的蓝牙系统服务器和提供使用该设备的网络服务的方法被提供以在一些注册的几个地方实现自动认证。 构成：连接部分与多个蓝牙接入点（110）连接。 接入点控制单元确认并控制多个蓝牙接入点（110）的状态。 用户信息数据库包括与蓝牙用户相关的信息。 注册认证单元通过用于在用户信息数据库登记蓝牙设备（100）的接入点（110）接收蓝牙设备（100）的芯片号码，并认证登记的蓝牙设备（100）请求认证。 服务提供单元通过接入点（110）向认证的蓝牙设备（100）提供网络服务。
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公开(公告)号：KR1020030029294A
公开(公告)日：2003-04-14
申请号：KR1020010061640
申请日：2001-10-06
Applicant: 삼성전자주식회사
IPC: G06Q30/00
Abstract: PURPOSE: A system and a method for an integrated mileage service are provided to collectively use dispersed mileage, and to make a mileage provider and an advertiser maximize the effect of a sale promotion activity. CONSTITUTION: The system includes a cellular phone(400) of a customer, the mileage provider(410), a cooperated shop(420), the advertiser(430) and an integrated mileage manager(440). The cellular phone(400) is equipped with a combi-chip having a wireless payment function and uses the integrated mileage for payment by downloading and storing the mileage in the combi-chip. The mileage provider provides the mileage whenever a subscriber of the cellular phone(400) buys an article or a service. The integrated mileage manager(440) receives the mileage obtained from the mileage provider(440) or the cooperated shop(420) from each customer. Each mileage is converted into the integrated mileage. The integrated mileage manager transmits the integrated mileage to the cellular phone(400).
Abstract translation: 目的：提供集成里程服务的系统和方法，以共同使用分散里程，并使里程提供商和广告客户最大限度地发挥促销活动的效果。 构成：系统包括客户的蜂窝电话（400），里程提供者（410），合作商店（420），广告商（430）和综合里程管理器（440）。 蜂窝电话（400）配备有具有无线支付功能的组合芯片，并通过下载并将里程存储在组合芯片中来使用集成里程进行支付。 每当蜂窝电话（400）的用户购买物品或服务时，里程提供者提供里程。 综合里程管理员（440）从每个客户接收从里程提供者（440）或协作车间（420）获得的里程。 每个里程转换为综合里程。 集成里程管理器将集成里程传输到蜂窝电话（400）。
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Patent Agency Ranking
公开(公告)号：KR1020030021517A
公开(公告)日：2003-03-15
申请号：KR1020010054806
申请日：2001-09-06
Applicant: 삼성전자주식회사
Abstract: PURPOSE: A quick service system using a two-way pager network and a quick service method adapted to the same are provided to make an enterprise quick service possible by expanding a service based on a local area using a PDA having a two-way pager module mounted therein. CONSTITUTION: A deliveryman waits in an office or on a road and informs the current position of the road to the office using a two-way PDA(S202). An order receiving system of the office records and manages a list of all delivery men(S204). A commodity transmitting client searches an adjacent delivery service company and orders a commodity delivery through a telephone(S206). The order receiving system automatically searches an adjacent deliveryman in the delivery men list(S208). The order receiving system instructs the selected deliveryman to deliver the commodity using a two-way PDA and informs order information supplied by the client(S210). The deliveryman receives the order details using a two-way PDA and checks contents thereof(S212). The deliveryman informs a dispatch to the office using the two-way PDA, checks a position of the transmitting client using the two-way PDA, and visits the client(S214). The deliveryman receives a commodity form the transmitting client(S216). The deliveryman checks a position of a receiving client using the two-way PDA, and visits the receiving client(S218). If the commodity is delivered completely, the deliveryman informs one's position using the two-way PDA(S220).
Abstract translation: 目的：提供一种使用双向寻呼机网络的快速服务系统和适用于其的快速服务方法，以便通过使用具有双向寻呼机模块的PDA扩展基于局域的服务来实现企业快速服务 安装在其中。 规定：送货员在办公室或道路上等待，并使用双向PDA通知现场到办公室的位置（S202）。 办公室的订单接收系统记录并管理所有送货人的清单（S204）。 商品发送客户端搜索相邻发货服务公司并通过电话订购商品交货（S206）。 订单接收系统自动搜索送货员列表中的相邻送货员（S208）。 订单接收系统指示所选择的送货员使用双向PDA递送商品并通知客户提供的订单信息（S210）。 送货员使用双向PDA接收订单细节并检查其内容（S212）。 送货员使用双向PDA向办公室发送调度，使用双向PDA检查发送客户端的位置，并访问客户端（S214）。 送货员从发送客户接收商品（S216）。 发货人使用双向PDA检查接收客户端的位置，并访问接收客户端（S218）。 如果商品完全交付，运送人员使用双向PDA来通知用户的位置（S220）。
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公开(公告)号：KR1020030018741A
公开(公告)日：2003-03-06
申请号：KR1020010053270
申请日：2001-08-31
Applicant: 삼성전자주식회사
IPC: G06Q30/00
Abstract: PURPOSE: A method and a system for providing an electronic coupon are provided to make a customer and a member shop conveniently and effectively use the electronic coupon at selling, and to obtain marketing data by collecting use particulars of the electronic coupon. CONSTITUTION: An electronic coupon reader(2) includes a communication interface(21) for the communication with an electronic coupon publication server(1) transmitting the electronic coupon to a mobile communication terminal(3) of the customer, an RF(Radio Frequency) module(20) for the non-contact RF communication with the terminal(3), and a processor(22) transmitting an electronic coupon ID received from the terminal(3) to the server(1), requesting an approval and receiving a response from the server(1). The RF module(20) includes an RF block(203) transmitting/receiving a non-contact RF signal from the terminal(3) and a logic block(202) extracting the electronic coupon ID from the RF signal and transmitting the RF signal to the processor(22). The electronic coupon reader(1) includes a display, and the processor(22) displays the response for an approval request from the server(1).
Abstract translation: 目的：提供一种提供电子优惠券的方法和系统，使客户和会员店方便有效地使用电子优惠券进行销售，并通过收集电子优惠券的使用细节获取营销数据。 电子票券阅读器（2）包括用于与电子票据出版服务器（1）进行通信的通信接口（21），该电子票券发行服务器将电子票券发送给客户的移动通信终端（3），RF（射频） 用于与所述终端（3）进行非接触式RF通信的模块（20）以及从所述终端（3）向所述服务器（1）发送从所述终端（3）发送的电子优惠券ID的处理器（22），请求批准并接收响应 从服务器（1）。 RF模块（20）包括从终端（3）发送/接收非接触RF信号的RF块（203）和从RF信号提取电子优惠券ID的逻辑块（202），并将RF信号发送到 处理器（22）。 电子票券读取器（1）包括显示器，并且处理器（22）从服务器（1）显示对于批准请求的响应。
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公开(公告)号：KR100365641B1
公开(公告)日：2002-12-26
申请号：KR1020000043961
申请日：2000-07-29
Applicant: 삼성전자주식회사
IPC: H01L21/28
Abstract: 본 발명은 배선의 기생 용량을 줄일 수 있는 반도체 장치 및 그 형성방법에 관한 것으로, 그 형성방법은 기판에 무기 실리콘 산화막과 저유전율 유기 실리콘 산화막을 차례로 적층하는 단계, 패터닝 과정을 통해 상기 유기 실리콘 산화막에 상기 유기 실리콘 산화막 두께의 일부를 깊이로 하는 부분 트렌치를 형성하는 단계, 상기 부분 트렌치 내벽면에 대한 산소 처리를 하는 단계, 상기 부분 트렌치에 대한 불산 습식 식각을 실시하여 트렌치를 완성하는 단계를 구비하여 이루어진다.
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公开(公告)号：KR1020020085072A
公开(公告)日：2002-11-16
申请号：KR1020010024339
申请日：2001-05-04
Applicant: 삼성전자주식회사
IPC: H01L21/28
Abstract: PURPOSE: A gate spacer structure and a method for forming the same are provided to prevent bridge between a gate pattern and a bit line by entirely covering a gate electrode using silicon nitride as a spacer. CONSTITUTION: A gate pattern(200) sequentially stacked on a gate oxide pattern(110), a gate electrode(120) and a capping insulator pattern(130) is formed on a semiconductor substrate(100). An oxide spacer(141) is formed at both sidewalls of the gate electrode(120) and the gate oxide pattern(110). Also, a gate spacer(161) is formed at both sidewalls of the oxide spacer(141) and the capping insulator pattern(130). Thereby, the capping insulator pattern(130) is directly connected to the gate spacer(161). Therefore, the gate electrode(120) and the gate oxide pattern(110) are entirely covered by the capping insulator pattern(130) and the gate spacer(161). The capping insulator pattern(130) and the gate spacer(161) are made of silicon nitride.
Abstract translation: 目的：提供一种栅极间隔结构及其形成方法，以通过使用氮化硅作为间隔物来完全覆盖栅电极来防止栅极图案和位线之间的桥接。 构成：在半导体衬底（100）上形成顺序堆叠在栅极氧化物图案（110）上的栅极图案（200），栅电极（120）和封盖绝缘体图案（130）。 在栅极（120）和栅极氧化物图案（110）的两个侧壁处形成氧化物间隔物（141）。 此外，在氧化物间隔物（141）和封盖绝缘体图案（130）的两个侧壁处形成栅极间隔物（161）。 由此，封盖绝缘体图案130直接连接到栅极间隔物161。 因此，栅极电极（120）和栅极氧化物图案（110）完全被封盖绝缘体图案（130）和栅极间隔物（161）覆盖。 封盖绝缘体图案（130）和栅极间隔物（161）由氮化硅制成。
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