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公开(公告)号：JPS63140115A
公开(公告)日：1988-06-11
申请号：JP28707086
申请日：1986-12-02
Applicant: CANON KK
Inventor： FURUKAWA KANAME , KUSUNOKI HARUYUKI , YAMAURA TOSHIHIKO , HIGOMURA MAKOTO , KARIYA TAKUO , YAMAMOTO SEKINORI
Abstract: PURPOSE:To supply a fluid to a moving body and discharge a fluid from the moving body keeping vacuum atmosphere by providing a turning portion on a part of fluid circulation means connected to a fluid bearing to be freely deformed, and forming the fluid circulation means by a plurality of pipes. CONSTITUTION:Pipeline arms 8a, 8b are fixed in such a manner as to fit to end connections 12a-d, 17a-d. Either the first member 101 or the second member 102 is fixed to a frame or a stage. In this arrangement, as the first member 101 and the second member 102 can be rotated through ball bearings 23a, 23b, the pipeline arms 8a, 8b can be turned centering around the joint. Since air leaking from vises 26a, 26b is sealed by a cover 27 with an O-ring, even if the above turning movement is conducted, the leakage of air can be prevented. Thus a fluid can be supplied to a moving body and the fluid can be discharged from the moving body.
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公开(公告)号：JPS62245311A
公开(公告)日：1987-10-26
申请号：JP8721086
申请日：1986-04-17
Applicant: CANON KK
Inventor： OISHI SHINJI , HIGOMURA MAKOTO
Abstract: PURPOSE:To improve a follow-up characteristic at an accelerating time, and to reduce vibration at a ceasing time, by switching the gain of a speed feedback corresponding to a control system. CONSTITUTION:A servomotor control device is constituted of a system controller 1 which outputs a various kinds of data, and a control mode switching signal, a deviation counter 2, an F/V converter 8, and a targeted value register 10, etc. At such a time, the device is constituted so that a speed deviation amplifier shared in a conventional device, is divided into the first speed deviation amplifier 13 for a speed control time only, and the second speed deviation amplifier 14 to obtain a viscous component at a position control time, and also, the gain of a speed feedback loop is switched corresponding to the control system. In this way, an analog switch 11 is connected B side until arriving at a targeted position, thereby performing a speed control only by a speed feedback, and a position control is performed by connecting the switch 11 to A side after arriving at the targeted position. Also, at such a time, the position control is performed by adding the speed feedback on the loop of a position at the second amplifier 14.
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公开(公告)号：JPS62230383A
公开(公告)日：1987-10-09
申请号：JP6847886
申请日：1986-03-28
Applicant: CANON KK
Inventor： OISHI SHINJI , HIGOMURA MAKOTO
Abstract: PURPOSE:To obtain a linear servomotor device, in which torque nonuni formity is reduced and which is stabilzied to a temperature charge, etc., by using an optical means such as a reflection type photo-interrupter as a position detecting element for a moving piece. CONSTITUTION:A servomotor has a field system section with field magnets l, a lower yoke 2, an upper yoke 3 and side yokes 4 and a moving piece 5. The moving piece 5 has coils 6, 6' movable among magnetic fields formed by the field system section and reflection type photo interrupters 8, 8', 9, 9' fixed to the moving piece 5 by a mount 10. A reflecting plate l shaped by white and black patterns in response to the polarity of the magnets l is mounted to a field magnet section. Each photo-interrupter 8, 8', 9, 9' outputs position detecting signals corresponding to the white and black pattern set up to the reflecting plate 11 in response to the movement of the moving piece 5. Either of signals at plural kinds of levels predetermined in response to the position detecting signals is outputted from a switch circuit.
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公开(公告)号：JPS62171012A
公开(公告)日：1987-07-28
申请号：JP1114586
申请日：1986-01-23
Applicant: CANON KK
Inventor： HIGOMURA MAKOTO
IPC: G05D3/12 , H01L21/027 , H01L21/30
Abstract: PURPOSE:To shorten positioning time and to improve positioning accuracy by permitting a speed function generator to change a speed curve, correcting a decelerating start position and controlling positioning. CONSTITUTION:If the position deviation value of a position deviation counter 4 is higher than the switching position data P of a switching position deviation register 18, an analog switch 6 is switched to a speed control side to control speed. At that time of controlling speed, a D/A converter 2 outputs a speed command voltage based on a speed curve generated by the speed function generator 1, and gives it to speed servo systems 7-9. Thus the speed curve is changed to vary the speed and position of a movable body 10. If the contents of a counter 4 agree with those of a register 18, a motor 8 begins to decelerate, and the switch 6 is switched to the position control side. At the time of the 2nd action a decelerating point start position is corrected from a correction value obtained from the 1st action. Accordingly the stop position approximates a stop target position to shorten the positioning time.
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公开(公告)号：JPS62168089A
公开(公告)日：1987-07-24
申请号：JP892586
申请日：1986-01-21
Applicant: CANON KK
Inventor： KINO SHIGEO , NEGISHI MASATO , MATSUSHITA KOICHI , HORIKOSHI YASUO , HIGOMURA MAKOTO
IPC: G12B5/00 , H01L21/027 , H01L21/30 , H01L21/67 , H01L21/68
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Patent Agency Ranking
公开(公告)号：JPS6241976A
公开(公告)日：1987-02-23
申请号：JP17926385
申请日：1985-08-16
Applicant: CANON KK
Inventor： SAKAI RIICHI , HIGOMURA MAKOTO
Abstract: PURPOSE:To digitally control the whole length of an actuator by forming said actuator with plural unit shape memory alloy materials and appropriately selecting any of said unit shape memory alloy materials to operate said actuator. CONSTITUTION:A pulley 10a is rotated by means of an actuator A which is combined with a bias spring 10b, to fold the wrist and the like of a robot, etc. Unit parts u0-un made of plural unit shape memory alloy materials of the same length or having different lengths making a geometrical series of formal ratio 2, are joined in an integrated form, via heat insulating materials respectively, to constitute the actuator A. A heating means 2 and a cooling means 6 are provided to each of these unit parts u0-un. And, the heating means 2 is brought into contact with any of the unit parts u0-un which is appropriately selected, to obtain a length desired to be varied and operate the actuator A, which can be restored by the cooling means 6.
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公开(公告)号：JPS6161091B2
公开(公告)日：1986-12-24
申请号：JP14965977
申请日：1977-12-13
Applicant: CANON KK
Inventor： HIGOMURA MAKOTO , OKUMURA ICHIRO , NARUMI KOJI , SAWAAI RYOICHI
IPC: G03B43/02
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公开(公告)号：JPS60259347A
公开(公告)日：1985-12-21
申请号：JP11329084
申请日：1984-06-02
Applicant: CANON KK
Inventor： HIGOMURA MAKOTO
IPC: H01L41/083 , B23Q1/34 , B23Q5/28 , G05D3/00 , G05D3/12
Abstract: PURPOSE:To aim at miniaturizing a semiconductor manufacturing device having a finely moving device, etc., by incorporating a pressure detecting piezoelectric element in a laminated type piezoelectric element so that the displacement of the finely moving device is feedback-controlled to a desired value in accordance with a voltage delivered from the pressure detecting piezoelectric element. CONSTITUTION:When a desired displacement value is given to a displacement-pressure transducer circuit 6, the output voltage 6 of the tranducer circuit 6 is amplified by a piezoelectric element driving voltage amplifier 8, and is then applied to a driving piezoelectric element 2a. Thereby a strain is generated in the piezoelectric element 2a to deform a parallel spring mechanism 1 so that a tool bed is finely displaced by a predetermined distance. At this time a pressure for deforming the parellel spring mechanism 1 is generated in a laminated type piezoelectric element 2, and therefore the voltage applied to the driving piezoelectric element 2a varies. Accordingly, the displacement value of the piezoelectric element 2 tends to come off from its desired value, however at this time a generated voltage in accordance with the generated pressure is detected by a voltage detecting amplifier 7 through a pressure detecting piezoelectric element 2b and an electrode 5. The output voltage of the amplifier 7 is fed-back to the voltage delivered from the transducer circuit 6 to control the voltage of the piezoelectric element 2a.
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公开(公告)号：JPS56129986A
公开(公告)日：1981-10-12
申请号：JP3251580
申请日：1980-03-14
Applicant: CANON KK
Inventor： IWAFUNE TOSHIO , HIGOMURA MAKOTO , KATOU MASAHIRO , OOTSU YOSHIAKI
Abstract: PURPOSE:To compress the character pattern information of displayed character and to enable to recognize the displayed character, by providing the storage means storing the recognized object character, count means counting the number of ON-bit, and discriminating means discriminting the recognition object character. CONSTITUTION:Lead-in processing which seeks the corresponding display character on PM among the images of display section of electronic desk top calculator strored in the pattern memory PM, is made and the corresponding part is confirmed. Next, one of displayed characters among the displayed characters is read out from PM, and the ON-bit representing the part corresponding to the characters of the character pattern is counted. The characters to be recognized based on the data of ON-bit number are limited. Further, mask check is made and the character to be recognized is discriminated. Next, the checking of all the displayed characters for electronic desk top calculator is checked, and if NO, the next character is processed as mentioned above, and if YES, overall discrimination is made. If defective displayed characters are present, the defective goods discharge device NE is driven via the input/output circuit IO by treating it as NG to eliminate the electronic desk top calculator. If GO, the next calculator is inspected.
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公开(公告)号：JPS56111863A
公开(公告)日：1981-09-03
申请号：JP1569180
申请日：1980-02-12
Applicant: CANON KK
Inventor： OOTSUBO KAZUHIRO , HIGOMURA MAKOTO , SHIMADA KAZUE
Abstract: PURPOSE:To enable display contents to be discriminated accurately and rapidly by vocally displaying various operation states in a copying machine by the combination of a sound signal generating circuit and a speaker. CONSTITUTION:Now, when a copying completion signal is outputted from a detector 33, an encoder 34 supplies the encoding output based on said signal to a read- only memory 35 and selects the word string ''copying completed''. The memory 35 is controlled time dividedly by a sound producing timing circuit 36, and supplies the level constant A and filter constant A and filter constant B of the selected word string to a filter 37 for generating sound signals. The filter 37 controls the signal inputted from a white noise generator 38 by the level constant A and the filter constant B, and produces the sound signal. This sound signal is supplied via an output amplifier 39 to a speaker 40, from which ''copying completed'' is vocally displayed.
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