公开(公告)号：JPS6177004A

公开(公告)日：1986-04-19

申请号：JP19844384

申请日：1984-09-25

Applicant: Canon Inc

Inventor： MOTOI YASUKO ,  SAKAMOTO EIJI ,  KAMIO MASARU ,  SEKIMURA NOBUYUKI

IPC: G02B5/20 ,  H01L27/14 ,  H04N9/04

Abstract: PURPOSE: To simplify a stage and to prevent the decrease in yield owing to a mis-operation, etc. by forming ≥1 colors of dye layers having low transmittance on a substrate then using the dye layers in place of an exposing mask and forming the final dye layer.
CONSTITUTION: The dye film patterns 2, 3 consisting of at least ≥1 colors and having the low transmittance to UV light are formed on the substrate 1. A positive type photoresist layer 4 of which the photosensitive wavelength is UV light is formed on the substrate 1 then the resist film is subjected to light exposure 5 by the UV light from the side of the substrate 1 where the film 4 is not formed. The film 4 is developed to form the resist pattern 4' having the resist remaining only on the upper part of the dye layers. The final dye layer 6 having the transmittance characteristic to the UV light is deposited by evaporation on the substrate 1 and finally the resist pattern is removed.
COPYRIGHT: (C)1986,JPO&Japio

Abstract translation: 目的：为了简化阶段并且通过在基板上形成具有低透射率的染料层的≥1个颜色来防止由于错误操作等而导致的产量下降，然后使用染料层代替曝光掩模并形成 最终的染料层。 构成：在基板1上形成由至少> = 1种颜色构成且对紫外光具有低透射率的染料膜图案2,3，在其上形成感光波长为紫外光的正型光致抗蚀剂层4 衬底1，然后通过来自未形成膜4的衬底1侧的紫外光对抗蚀剂膜进行曝光5。 显影膜4以形成抗蚀剂图案4'，其抗蚀剂仅留在染料层的上部。 具有UV光透射​​特性的最终染料层6通过蒸发沉积在基板1上，最后除去抗蚀剂图案。

公开(公告)号：JPS6159962A

公开(公告)日：1986-03-27

申请号：JP18068484

申请日：1984-08-31

Applicant: Canon Inc

Inventor： KOMATSU TOSHIYUKI ,  FUKAYA MASAKI ,  SHOJI TATSUMI ,  KAMIO MASARU ,  SEKIMURA NOBUYUKI

IPC: H04N1/028

Abstract: PURPOSE: To obtain a color signal corresponding accurately to a read picture element by arranging plural line sensors in parallel for the number of color signal decomposition and providing a color filter for color signal decomposition to a photodetector of each line sensor.
CONSTITUTION: Photosensor arrays (line sensors) 2, 3, 4 are formed in parallel in three lines on a base 1. A red filter 6 is given to the line sensor 2, a green filter 7 is placed on the line sensor 3 and a blue filter 8 is arranged on the line sensor 4. Each phototransistors of the line sensors 2, 3, 4 are given with a drive voltage by drivers IC9, 10, 11 and a signal from the line sensors 2, 3, 4 is read by matrix wiring sections 12, 13, 14. The signal read from a matrix wiring section is outputted as red, green and blue signals from output lines 18, 19, 20 via signal processings IC15, 16, 17.
COPYRIGHT: (C)1986,JPO&Japio

Abstract translation: 目的：通过对多个色信号分解的并行数排列多个线传感器，并将彩色信号分解用滤色器设置在各行传感器的光检测器上，来获得准确对应于读图像元素的颜色信号。 构成：光电传感器阵列（线传感器）2,3,4在基座1上以三条线平行地形成。红色滤光器6被提供给线传感器2，绿色滤光器7放置在线传感器3上， 蓝色滤光器8布置在线传感器4上。线传感器2,3,4的每个光电晶体管通过驱动器IC9,10,11给出驱动电压，并且来自线传感器2,3,4的信号由 从矩阵布线部分读出的信号通过信号处理IC15,16,17从输出线18,19,20输出为红色，绿色和蓝色信号。

公开(公告)号：JPS6141102A

公开(公告)日：1986-02-27

申请号：JP16297384

申请日：1984-08-03

Applicant: Canon Inc

Inventor： SASAMORI EIZO ,  YOKONO KOJIRO ,  KAMIO MASARU ,  SUZUKI TOSHIMOTO

IPC: G02B5/20 ,  H01L27/14 ,  H04N9/04

Abstract: PURPOSE: To obtain a color separating filter having a high effective aperture rate with a simple process for production by repeating a stage for laminating successively a dye layer and photoresist layer on a substrate and subjecting the layers to pattern exposing and development to form a photoresist pattern then subjecting the layers to dry etching and stripping the resist pattern.
CONSTITUTION: The dye layer 2 is coated to the prescribed position on the substrate 1 and the photoresist 3' is deposited thereon. The photoresist is subjected to pattern exposure through the prescribed exposing mask and the unexposed part is dissolved to obtain the photoresist pattern 3. The unnecessary dye layer 2 in the part not coated by the pattern 3 is removed by dry etching. The dye layer 4 is deposited by evaporation on such substrate 1 and similarly the photoresist pattern 5 is formed thereon. The dye layer 4 in the part not coated with the pattern 5 is removed by dry etching. The dye layer 6 is similarly patterned and the substrate is dipped in a stripping soln. to remove the photoresists 3, 5. The color separating filter is thus obtd.
COPYRIGHT: (C)1986,JPO&Japio

Abstract translation: 目的：为了获得具有高有效孔径率的分色滤光片，通过重复在基片上连续地层压染料层和光致抗蚀剂层并对这些层进行图案曝光和显影以形成光致抗蚀剂图案 然后对这些层进行干蚀刻和剥离抗蚀剂图案。 构成：将染料层2涂覆到基板1上的规定位置，并且将光致抗蚀剂3'沉积在其上。 通过规定的曝光掩模对光致抗蚀剂进行图案曝光，并且将未曝光部分溶解以获得光致抗蚀剂图案3.通过干蚀刻除去未被图案3涂覆的部分中的不需要的染料层2。 染料层4通过蒸发沉积在这种基板1上，类似地在其上形成光致抗蚀剂图案5。 通过干蚀刻除去未涂布图案5的部分中的染料层4。 染料层6类似地构图，并将基底浸入剥离溶胶中。 以去除光致抗蚀剂3,5，因此可以得到分色滤色片。

公开(公告)号：JPS6127508A

公开(公告)日：1986-02-07

申请号：JP14893984

申请日：1984-07-17

Applicant: Canon Inc

Inventor： KAMIO MASARU ,  SEKIMURA NOBUYUKI

IPC: G02B5/20 ,  G02B5/22

Abstract: PURPOSE: To improve adaptability to vapor deposition by using a red dye consisting of a perylene tetracarboxylic acid deriv. of the specific constitutional formula, a green dye consisting of phthalocyanine and anthraquinone dyes and a blue dye consisting of a phthalocyanine dye.
CONSTITUTION: Light having resist sensitivity is irradiated ro a substrate 1 on which a resist mask 2 is provided and thereafter the red dye layer 3 consisting of the perylene tetracarboxylic acid deriv. expressed by formula I or formula II(R
1 denotes hydrogen, alkyl group, aryl group) is provided thereon by a vacuum deposition method. Only the resist mask is then dissolved to form the 1st patterned dye layer 4. The position of the resist mask is further deviated and the 2nd patterned green dye layer 5 consisting of the phthalocyanine dye and anthraquinone dye and the 3rd patterned blue dye layer 6 consisting of the phthalocyanine dye are similarly provided, by which a color filter is formed.
COPYRIGHT: (C)1986,JPO&Japio

Abstract translation: 目的：通过使用由苝四羧酸衍生物组成的红色染料来提高气相沉积的适应性。 具体的结构式，由酞菁和蒽醌染料组成的绿色染料和由酞菁染料组成的蓝色染料。 构成：将具有抗敏剂的光照射在其上设置抗蚀剂掩模2的基板1上，之后由由苝四羧酸衍生物构成的红色染料层3照射。 由式I或式II表示（R1表示氢，烷基，芳基）通过真空沉积法在其上提供。 然后仅将抗蚀剂掩模溶解以形成第一图案化染料层4.抗蚀剂掩模的位置进一步偏离，由酞菁染料和蒽醌染料组成的第二图案化绿色染料层5和第三图案化蓝色染料层6组成 的酞菁染料，通过其形成滤色器。

公开(公告)号：JPS60195543A

公开(公告)日：1985-10-04

申请号：JP5122384

申请日：1984-03-19

Applicant: Canon Inc

Inventor： OGURA YASUTSUGU ,  IIJIMA SHIGEJI ,  KASAMORI EIZOU ,  KAMIO MASARU

IPC: G03C5/00 ,  G03F7/26

CPC classification number: G03F1/56

Abstract: PURPOSE:To form a pattern made of a colored layer having a desired shape on a substrate with good precision and good yield without causing cracking, peeling, etc., by imparting strength enough to withstand each patterning step and intimate adhesion to the substrate, to the colored layer contg., a coloring dye. CONSTITUTION:A positive type resist is laminated on a substrate 1 made of glass or resin or the like, exposed to light through a photomask 3 having a prescribed pattern, and developed with a developing soln. to obtain a resist pattern 2a for the lift-off method. A dye is laminated to form a dye layer 4. As the dye to be used for this dye layer 4, pigments, such as phthalocyanine type, naphthol type, and indanthrene type, and dyes, such as oil-soluble type and dispersion type, are enumerated, and a thickness of this layer 4 is properly selected in accordance with the uses of the colored patterns. The substrate 1 having such a dye layer 5 laminated is treated by the method of immersion in a photoresist-removing soln., or the like, and the photoresist layer 2 and the colored layer 5a formed on the layer 2 are removed together from the substrate 1, thus forming a colored pattern made of a colored layer 5b having a desired shape.

Abstract translation: 目的：通过赋予足够的强度以抵抗每个图案化步骤和对基材的紧密粘附，在基材上形成具有期望形状的着色层的图案，具有良好的精度和良好的收率而不引起开裂，剥离等， 着色层，着色染料。 构成：将正型抗蚀剂层压在由玻璃或树脂等制成的基板1上，通过具有规定图案的光掩模3曝光并用显影剂溶胶显影。 以获得用于剥离方法的抗蚀剂图案2a。 将染料层压以形成染料层4.作为用于该染料层4的染料，可以使用酞菁型，萘酚型，阴丹酮型等颜料，以及油溶性型和分散型等染料， 并且根据着色图案的用途适当地选择该层4的厚度。 通过浸渍在光致抗蚀剂去除溶剂等中的方法处理层叠有这种染料层5的基板1，并且从基板一起去除光致抗蚀剂层2和形成在层2上的着色层5a 从而形成由具有期望形状的着色层5b制成的着色图案。

公开(公告)号：JPS5972762A

公开(公告)日：1984-04-24

申请号：JP18399482

申请日：1982-10-20

Applicant: Canon Inc

Inventor： KAMIO MASARU ,  IIJIMA SHIGEJI ,  YOSHIHARA SATOSHI ,  OGURA YASUTSUGU

IPC: G02B5/20 ,  C09J5/00 ,  H01L27/14

CPC classification number: C09J5/00

Abstract: PURPOSE:To eliminate a part, where a bonding agent beneath a light shielding region is not hardened, by limiting the width of the light shielding region of a color separating filter to a specified value or less, thereby providing sufficient diffraction from the transmitting region of ultraviolet rays and the amount of intrusion from the surrounding part. CONSTITUTION:A color separating filter 1 has a light shielding region 3 made of chromium, whose width is 1.5mm. or less, at the surrounding part of the filter 1. A stripe shaped pattern 2 is formed in the light shielding region 3. A solid state image pickup element 4 is of, e.g., a frame transfer type, and has a light receiving part 5, an accumulating part 6, and a bonding pad 7. The solid state image pickup element and the color separating filter are set in a sticking device, and an ultraviolet ray hardening type bonding agent 8 is dropped on the light receiving part 5 of the solid state image pickup element 4. Thereafter, the solid state image pickup element 4 is compressed to the color separating filter 1, and their positions are aligned. Ultraviolet rays are emitted from the side of the color separating filter on the entire surface, and the ultraviolet ray hardening type bonding agent is hardened. Thus, the bonding agent at the part beneath the light shielding region made of chromium can be perfectly hardened, and highly reliable bonding can be performed.

Abstract translation: 目的：通过将分色滤光片的遮光区域的宽度限制在规定值以下，为了消除光屏蔽区域下方的粘合剂未硬化的部分，由此提供来自透光区域 紫外线和周围部分的入侵量。 构成：分色滤色器1具有宽度为1.5mm的由铬制成的遮光区域3。 以下，在遮光区域3上形成有条状的图案2.固态摄像元件4例如为帧传送型，具有受光部5 ，积存部6和接合焊盘7.固体摄像元件和分色滤光器设置在粘贴装置中，并且紫外线固化型粘合剂8落在固体的光接收部分5上 此后，固态图像拾取元件4被压缩到分色滤光器1，并且它们的位置对齐。 在整个表面上从分色滤光片的一侧发出紫外线，紫外线固化型粘合剂硬化。 因此，由铬制成的遮光区域下方的部分的结合剂可以被完全硬化，并且可以进行高可靠性的接合。

公开(公告)号：JPS5972761A

公开(公告)日：1984-04-24

申请号：JP18399382

申请日：1982-10-20

Applicant: Canon Inc

Inventor： KAMIO MASARU ,  IIJIMA SHIGEJI ,  YOSHIHARA SATOSHI ,  OGURA YASUTSUGU

IPC: G02B5/20 ,  C09J5/00 ,  H01L27/14

CPC classification number: C09J5/00

Abstract: PURPOSE:To prevent the deterioration of the coloring matter of a color separation filter even when ultraviolet ray hardening is utilized, by aligning a solid state image pickup element and a color separation filter through an ultraviolet ray hardening type bonding agent, thereafter emitting ultraviolet rays having high illuminance, and temporarily bonding the solid state image pickup element and the color separating filter. CONSTITUTION:A light receiving part 5 of a solid state image pickup element 4 and a color separating filter 1 on a glass substrate 9 are set on a sticking jig so that they face each other. Then an ultraviolet ray hardening type bonding agent 8 is dropped on the central part of a light receiving part 5 of the element 4. Thereafter, the element 4 and the filter 1 are brought closer to 20mum, and their positions are aligned. The element 4 is compressed to the filter 1. Under this state, ultraviolet rays are emitted from a super high voltage mercury lamp (illuminance of ultraviolet rays is 30mW/cm or more) built in a sticking device from the filter 1 side on the entire surface for several seconds. Thus the filter 1 and the element 4 are temporarily fixed. Thereafter, the temporarily fixed element 4 is taken out, and the filter 1 is set so as to face a main hardening device. The ultraviolet rays are emitted at the illuminance of 5mW/cm or less for several tens of minutes, and the bonding agent 8 is permanently hardened.

Abstract translation: 目的：为了防止使用紫外线硬化时的分色滤光片的着色物质的劣化，通过紫外线硬化型粘合剂使固体摄像元件和分色滤光片对准，然后发射具有 高照度，并且暂时粘合固态图像拾取元件和分色滤光器。 构成：将固态摄像元件4的光接收部5和玻璃基板9上的分色滤光器1设置在粘贴夹具上，使得它们彼此面对。 然后在元件4的光接收部分5的中心部分放置紫外线硬化型粘结剂8.此后，使元件4和滤光器1接近20微米，并且它们的位置对准。 元件4被压缩到过滤器1.在这种状态下，从过滤器1侧的超级高压汞灯（紫外线的照度为30mW / cm 2以上）内置于粘贴装置中而发出紫外线 在整个表面上几秒钟。 因此，过滤器1和元件4被暂时固定。 此后，取出临时固定的元件4，将过滤器1设定为面对主硬化装置。 紫外线以5mW / cm 2以下的照度发射数十分钟，粘结剂8永久硬化。