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公开(公告)号:DE10318078A1
公开(公告)日:2004-11-25
申请号:DE10318078
申请日:2003-04-17
Applicant: INFINEON TECHNOLOGIES AG
Inventor: BRINTZINGER AXEL , TROVARELLI OCTAVIO
Abstract: Protecting the wiring on wafers/chips comprises covering the wafer (1) with the wiring on its whole surface with an organic layer (12) to protect the wiring from corrosion and oxidation and form a sealed coating of the metal surface of the wiring.
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公开(公告)号:DE10241589A1
公开(公告)日:2004-03-25
申请号:DE10241589
申请日:2002-09-05
Applicant: INFINEON TECHNOLOGIES AG
Inventor: BRINTZINGER AXEL , UHLENDORF INGO , SCHENK ANDRE , WOLLANKE ALEXANDER
IPC: H01L21/44 , H01L21/60 , H01L23/485
Abstract: Process for solder-stop structuring protrusions on wafers (3) such as three dimensional contact structures (1) in the form of elastic or flexible contact bumps comprises depositing a resist on the tip of the three dimensional structure, depositing a solder-stop layer over a metallization including the resist, and removing the resist on the tip of the three dimensional structure including the solder-stop layer covering it.
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