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公开(公告)号：CA2367983C
公开(公告)日：2008-11-25
申请号：CA2367983
申请日：2000-03-15
Applicant: INPUT OUTPUT INC
Inventor： STALNAKER W MARC , GOLDBERG HOWARD D , YU DULI , SELVAKUMAR ARJUN , MARSH JAMES L
IPC: G01P21/00 , H05K5/00 , G01D11/24 , G01D18/00 , G01H1/00 , G01L27/00 , G01N1/02 , G01P1/02 , G01P15/08 , G01P15/125 , G01P15/13 , G01V1/047 , G01V1/053 , G01V1/104 , G01V1/18 , G01V1/40 , G02B7/00 , H01L21/60 , H01L29/84
Abstract: A system for resiliently attaching a mass to a package. The system includes a mass, a housing, resilient couplings for resiliently attaching the mass to t he housing, bumpers for slidingly supporting the mass, and electrical connections for electrically coupling the mass to the housing.
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公开(公告)号：DE60034451T2
公开(公告)日：2007-08-30
申请号：DE60034451
申请日：2000-03-17
Applicant: INPUT OUTPUT INC
Inventor： RUSHEFSKY LARRY , SIGMAR AXEL , GOLDBERG HOWARD D , STALNAKER W MARC , RINNE RAY , BALDERES DEMETRIOS , LEMKE AL , IP MATTHEW , BEHN LAWRENCE P , DOMAGALSKI KLAUS , YU LIANZHONG , SELVAKUMAR ARJUN , YU DULI , MARSH JAMES L , MAXWELL PETER , MORGAN DAVID , BUIE THOMAS , FABER KEES , ALTMAN SJOERD , LAROO RICHARD
IPC: G01D11/24 , G01P21/00 , G01D18/00 , G01D21/00 , G01H1/00 , G01L27/00 , G01N1/02 , G01P1/02 , G01P15/00 , G01P15/08 , G01P15/125 , G01P15/13 , G01V1/047 , G01V1/053 , G01V1/104 , G01V1/18 , G01V1/40 , H01L21/60 , H01L29/84 , H05K5/00
Abstract: An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).
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公开(公告)号：AT360191T
公开(公告)日：2007-05-15
申请号：AT00915012
申请日：2000-03-17
Applicant: INPUT OUTPUT INC
Inventor： RUSHEFSKY LARRY , SIGMAR AXEL , GOLDBERG HOWARD D , STALNAKER W MARC , RINNE RAY , BALDERES DEMETRIOS , LEMKE AL , IP MATTHEW , BEHN LAWRENCE P , DOMAGALSKI KLAUS , YU LIANZHONG , SELVAKUMAR ARJUN , YU DULI , MARSH JAMES L , MAXWELL PETER , MORGAN DAVID , BUIE THOMAS , FABER KEES , ALTMAN SJOERD , LAROO RICHARD
IPC: G01P21/00 , G01D11/24 , G01D18/00 , G01H1/00 , G01L27/00 , G01N1/02 , G01P1/02 , G01P15/08 , G01P15/125 , G01P15/13 , G01V1/047 , G01V1/053 , G01V1/104 , G01V1/18 , G01V1/40 , H01L21/60 , H01L29/84 , H05K5/00 , G01P15/00 , G01D21/00
Abstract: An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).
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公开(公告)号：NO20025744L
公开(公告)日：2003-01-28
申请号：NO20025744
申请日：2002-11-29
Applicant: INPUT OUTPUT INC
Inventor： RIED ROBERT P , SELVAKUMAR ARJUN , GOLDBERG HOWARD D , SCHMIDT MARTIN A , YU LIANZHONG
IPC: G01P15/08 , G01P15/125 , G01V1/18 , A61B15/125
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公开(公告)号：NO20025744A
公开(公告)日：2003-01-28
申请号：NO20025744
申请日：2002-11-29
Applicant: INPUT OUTPUT INC
Inventor： RIED ROBERT P , SELVAKUMAR ARJUN , GOLDBERG HOWARD D , SCHMIDT MARTIN A , YU LIANZHONG
IPC: G01P15/08 , G01P15/125 , G01V1/18 , A61B15/125
CPC classification number: G01V1/181 , G01P15/0802 , G01P15/125
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Patent Agency Ranking
公开(公告)号：NO20021507A
公开(公告)日：2002-03-26
申请号：NO20021507
申请日：2002-03-26
Applicant: INPUT OUTPUT INC
Inventor： YU LIANZHONG , GOLDBERG HOWARD D , YU DULI
IPC: G02B26/10 , B81B3/00 , B81B7/00 , B81C1/00 , B81C99/00 , C23F1/02 , G01P9/04 , G02B26/08 , G03F7/20 , B81B1/00
CPC classification number: B81C1/00142 , B81B2201/042 , B81B2203/0315 , B81C1/00896 , B81C2203/0118 , B81C2203/036 , G02B26/0816
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公开(公告)号：NO20020140A
公开(公告)日：2002-03-12
申请号：NO20020140
申请日：2002-01-11
Applicant: INPUT OUTPUT INC
Inventor： YU DULI , YU LIANZHONG , GOLDBERG HOWARD D , SCHMIDT MARTIN A , RIED ROBERT P
CPC classification number: G02B26/0841 , G02B7/1821
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公开(公告)号：NO20020139A
公开(公告)日：2002-03-12
申请号：NO20020139
申请日：2002-01-11
Applicant: INPUT OUTPUT INC
Inventor： YU DULI , YU LIANZHONG , GOLDBERG HOWARD D , RIED ROBERT P
CPC classification number: G02B26/0816 , B81B2201/042 , B81C1/00396 , B81C2201/0132 , B81C2201/0133 , B81C2203/0109 , C23F1/02
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公开(公告)号：NO20014464L
公开(公告)日：2001-11-16
申请号：NO20014464
申请日：2001-09-14
Applicant: INPUT OUTPUT INC
Inventor： SELVAKUMAR ARJUN , GOLDBERG HOWARD D , YU DULI , IP MATTHEW , SCHMIDT MARTIN A , MARSH JAMES L , FUNG BING-FAI , SIMON PHILIP
IPC: G01P21/00 , G01D11/24 , G01D18/00 , G01H1/00 , G01L27/00 , G01N1/02 , G01P1/02 , G01P15/08 , G01P15/125 , G01P15/13 , G01V1/047 , G01V1/053 , G01V1/104 , G01V1/18 , G01V1/40 , H01L21/60 , H01L29/84 , H05K5/00 , G01P
Abstract: An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).
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公开(公告)号：NO20014460L
公开(公告)日：2001-11-16
申请号：NO20014460
申请日：2001-09-14
Applicant: INPUT OUTPUT INC
Inventor： RUSHEFSKY LARRY , SIGMAR AXEL , GOLDBERG HOWARD D , STALNAKER W MARC , RINNE RAY , BALDERES DEMETRIOS , LEMKE AL , IP MATTHEW , BEHN LAWRENCE P , DOMAGALSKI KLAUS , YU LIANZHONG , SELVAKUMAR ARJUN , YU DULI , MARSH JAMES L , MAXWELL PETER , MORGAN DAVID , BUIE THOMAS , FABER KEES , ALTMAN SJOERD , LAROO RICHARD
IPC: G01P21/00 , G01D11/24 , G01D18/00 , G01H1/00 , G01L27/00 , G01N1/02 , G01P1/02 , G01P15/08 , G01P15/125 , G01P15/13 , G01V1/047 , G01V1/053 , G01V1/104 , G01V1/18 , G01V1/40 , H01L21/60 , H01L29/84 , H05K5/00 , G01D21/00 , B65D85/38
Abstract: An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).
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