公开(公告)号：JP2005338069A

公开(公告)日：2005-12-08

申请号：JP2005128647

申请日：2005-04-26

Applicant: Jsr Corp ,  Jsr株式会社

Inventor： SATO KATSUMI ,  INOUE KAZUO ,  FUJIYAMA HITOSHI ,  YOSHIOKA MUTSUHIKO ,  IGARASHI HISAO

IPC: G01R1/073 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To provide a sheetlike probe and its manufacturing method capable of obtaining a stable connection state with a circuit device having a fine pitch electrode, capable of obtaining durability of the electrode structure without dropout from an insulation film and capable of preventing positional misalignment between the electrode structures and an electrodes to be tested caused by temperature variation in a burn-in test. SOLUTION: The sheetlike probe is provided with a porous film in which a plurality of through holes are provided on each position of the contact film is penetratingly supported and at the same time the periphery of the contact film and the porous film are unitized with an insulation layer of flexible resin in the minute hole of the porous film, on the insulation layer a plurality of electrode structures are penetratively supported. Each electrode structure is composed of: a surface electrode part exposed to the surface of the insulation layer; a rear face electrode part exposed to the rear face of the insulation layer; a short circuit part extending from the base part of the surface electrode continuously through the insulation layer in a thickness direction to the rear face electrode for being connected; a retainer part extending outward from the base part of the surface electrode continuously along the surface of the insulation layer; and a support for supporting the insulation layer. COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：为了提供能够获得与具有细间距电极的电路装置的稳定连接状态的片状探针及其制造方法，能够获得电极结构的耐久性而不会从绝缘膜脱落，并且能够 防止由老化试验中的温度变化引起的电极结构与待测电极之间的位置偏移。

解决方案：片状探针设置有多孔膜，其中在接触膜的每个位置上设置有多个通孔，并且同时使接触膜和多孔膜的周边成一体化 在多孔膜的微孔中具有柔性树脂的绝缘层，在绝缘层上穿透多个电极结构。 每个电极结构由暴露于绝缘层表面的表面电极部分组成; 背面电极部分，暴露于绝缘层的背面; 从所述表面电极的基部延伸穿过所述绝缘层的厚度方向的短路部分连接到所述背面电极; 沿着绝缘层的表面连续地从表面电极的基部向外延伸的保持器部分; 以及用于支撑绝缘层的支撑件。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2004361395A

公开(公告)日：2004-12-24

申请号：JP2004131764

申请日：2004-04-27

Applicant: Jsr Corp ,  Jsr株式会社

Inventor： INOUE KAZUO ,  SATO KATSUMI

IPC: G01R1/073 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To provide a sheet-like probe allowing certain prevention of a positional shift of electrode structures and inspected electrodes caused by a temperature change in a burn-in test even if an inspection target is a large-area wafer of a diameter ≥8 inches or a circuit device having the inspected electrodes of an extremely small pitch to stably maintain an excellent electric connection state, and to provide a manufacturing method therefor and application thereof. SOLUTION: In this sheet-like probe, the plurality of electrode structures respectively disposed according to a pattern corresponding to the electrodes to be connected, each having an exposed front face electrode part in the front face and an exposed rear face electrode part in the rear face each have a contact film held by an insulating film of a soft resin and a frame plate supporting the contact film. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：为了提供片状探针，即使检查对象是大面积晶片，也能够预防由老化试验中的温度变化引起的电极结构和检查电极的位置偏移 直径≥8英寸的电路装置或具有极小间距的检查电极的电路装置，以稳定地保持良好的电连接状态，并提供其制造方法及其应用。 解决方案：在该片状探针中，根据与要连接的电极相对应的图案分别设置的多个电极结构，每个电极结构在前表面具有暴露的正面电极部分和暴露的后表面电极部分 在背面各自具有由软质树脂的绝缘膜和支撑接触膜的框架板保持的接触膜。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2004335450A

公开(公告)日：2004-11-25

申请号：JP2004082188

申请日：2004-03-22

Applicant: Jsr Corp ,  Jsr株式会社

Inventor： SATO KATSUMI ,  INOUE KAZUO

IPC: G01R1/06 ,  G01R31/26 ,  G01R31/28 ,  H01L21/66 ,  H01R11/01 ,  H01R13/646 ,  H01R13/658 ,  H01R13/6585 ,  H01R33/76 ,  H01R43/00

Abstract: PROBLEM TO BE SOLVED: To provide an anisotropic conductive connector and an electric inspection device for a circuit device equipped with the same capable of performing expected electrical inspection even for a circuit device having a clock frequency of, for example, 1 GHz or higher. SOLUTION: The anisotropy conductive connector is equipped with a plurality of connecting conductive parts extending in a thickness direction arranged according to a pattern corresponding to the electrodes to be connected, and an elastic anisotropic conductive membrane having an insulating part for insulating the connecting conductive parts from each other. High frequency shielding conductive parts extending in the thickness direction are formed on the elastic anisotropy conductive membrane. The electric inspection device for the circuit device is equipped with the anisotropy conductive connector. COPYRIGHT: (C)2005,JPO&NCIPI

公开(公告)号：JP2004172588A

公开(公告)日：2004-06-17

申请号：JP2003358105

申请日：2003-10-17

Applicant: Jsr Corp ,  Jsr株式会社

Inventor： SATO KATSUMI ,  INOUE KAZUO

IPC: G01R31/02 ,  G01R1/06 ,  G01R1/067 ,  G01R1/073 ,  G01R31/28 ,  H01B5/16 ,  H01L21/66 ,  H01L23/498 ,  H01R11/01 ,  H01R33/76 ,  H05K1/11 ,  H05K3/40 ,  H05K3/42

CPC classification number: G01R1/07314 ,  G01R1/06711 ,  G01R1/06733 ,  H01L23/49811 ,  H01L23/49827 ,  H01L2924/0002 ,  H01L2924/09701 ,  H01R11/01 ,  H01R12/523 ,  H05K1/116 ,  H05K3/4007 ,  H05K3/423 ,  H05K2201/0367 ,  H05K2201/0394 ,  H05K2201/09436 ,  H05K2201/09481 ,  H05K2203/0733 ,  H01L2924/00

Abstract: PROBLEM TO BE SOLVED: To provide a sheet-like connector in which electrode structures provided with surface electrode sections having small diameters, high projecting heights/diameters, and high dimensional accuracy can be formed with high positional accuracy and with which an electrically connected stable state can be obtained even to electrodes arranged in short pitches, and to provide a method of manufacturing the connector and a probe device. SOLUTION: The sheet-like connector has an insulating sheet 11 and a plurality of electrode structures 15 which are arranged on the sheet 11 separately from each other in the facial direction, and each of which is constituted by connecting a projecting surface electrode 16 and a rear electrode to each other through a short-circuiting section. The insulating sheet 11 is composed of a material in which through holes can be formed by etching. The short-circuiting sections are formed by packing a metal in the through holes formed in the sheet 11 by etching. The surface electrodes 16 are formed by packing a metal in the patterned holes of a resist film formed on the surface of the insulating sheet 11. COPYRIGHT: (C)2004,JPO

公开(公告)号：JP2004111930A

公开(公告)日：2004-04-08

申请号：JP2003289032

申请日：2003-08-07

Applicant: Jsr Corp ,  Jsr株式会社

Inventor： SEDAKA RYOJI ,  NAOI MASAYA ,  SATO KATSUMI

IPC: G01R31/26 ,  G01R1/06 ,  H01B1/00 ,  H01B5/16 ,  H01L21/66 ,  H01R11/01

Abstract: PROBLEM TO BE SOLVED: To provide an anisotropically conductive connector capable of maintaining satisfactory conductivity for a long period of time even if the connector is used repeatedly in a large number of times, or the connector is used repeatedly in high temperature environments, and to provide applications of the same. SOLUTION: The anisotropically conductive connector has an elastic anisotropically conductive film in which a plurality of conductive portions for connection, capable of expanding in the thickness direction, are formed. Supposing the total number of the conductive portions for connection is Y, the electrical resistance of the conductive portions is R 1g when a weight of Y×1g is added to the thickness direction of the elastic anisotropically conductive film; and the electrical resistance of the conductive portions is R 6g when a weight of Y×6g is added to the thickness direction of the elastic anisotropically conductive film. Then, the elastic anisotropically conductive film has the following initial characteristics that the number of the conductive parts having R 1g of less than 1Ω is greater than or equal to 90% of the total number of the conductive parts, the number of the conductive parts having R 6g of less than 0.1Ω is greater than or equal to 95% of the total number of the conductive parts, and the number of the conductive parts having R 6g of greater than or equal to 0.5Ω is less than or equal to 1% of the total number of the conductive parts. COPYRIGHT: (C)2004,JPO

Abstract translation: 要解决的问题：为了提供即使重复使用连接器多次也能够长时间保持良好导电性的各向异性导电连接器，或者连接器在高温环境中重复使用， 并提供相同的应用程序。 解决方案：各向异性导电连接器具有弹性各向异性导电膜，其中形成能够在厚度方向上扩展的多个用于连接的导电部分。 假设连接用导电部的总数为Y，则在弹性各向异性导电膜的厚度方向上添加Y×1g的重量时，导电部的电阻为R <1> 1g 。 并且当向弹性各向异性导电膜的厚度方向添加Y×6g的重量时，导电部分的电阻为R 6g 。 然后，弹性各向异性导电膜具有如下的初始特性：R SB小于1Ω的导电部件的数量大于或等于导电部件总数的90％ 具有小于0.1Ω的R 6g 的导电部件的数量大于或等于导电部件总数的95％，并且导电部件的数量R 大于或等于0.5Ω的6g 小于或等于导电部件总数的1％。 版权所有（C）2004，JPO

公开(公告)号：JP2002299530A

公开(公告)日：2002-10-11

申请号：JP2001099936

申请日：2001-03-30

Applicant: JSR CORP

Inventor： IGARASHI HISAO ,  SATO KATSUMI ,  INOUE KAZUO

IPC: H01L23/373

Abstract: PROBLEM TO BE SOLVED: To provide a thermal conduction plate to which a heating element or a heat receiving body can be adhered sufficiently close and which can highly efficiently conduct heat. SOLUTION: This thermal conduction plate is provided with a metallic substrate and a thermal conduction layer integrally provided on at least one surface of the substrate. The thermal conduction layer is composed of a flexible macromolecular material containing magnetic and nonmagnetic thermal conduction particles. The magnetic thermal conduction particles are contained in the layer in an oriented state where the particles are arranged in the thickness direction of the layer.

公开(公告)号：JP2005338073A

公开(公告)日：2005-12-08

申请号：JP2005128651

申请日：2005-04-26

Applicant: Jsr Corp ,  Jsr株式会社

Inventor： YOSHIOKA MUTSUHIKO ,  FUJIYAMA HITOSHI ,  IGARASHI HISAO ,  SATO KATSUMI ,  INOUE KAZUO

IPC: G01R31/26 ,  G01R1/073 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To provide a sheetlike probe and its manufacturing method capable of attaining a stable connection state for a circuit device having minute and fine pitch electrodes, capable of obtaining highly durable electrode structure without dropout from an insulation layer, capable of preventing positional misalignment between the electrode structures and testing electrodes caused by a temperature variation in a burn-in test to a wafer of large area or the circuit device with small pitch inspection electrodes, and capable of stably maintaining excellent connection state. SOLUTION: Each of electrode structure exposed to the surface of the insulation layer and protruding from the surface of the insulation layer is composed of: the front electrode part, the diameter of which becomes smaller according to the elevation from the base to the top; a rear electrode part exposed to the rear surface of insulation surface; the short circuit part extending continuously from the base end of the front electrode part in the thickness direction through the insulation layer and connected with the rear electrode. The sheetlike probe is characterized in that the base diameter of the front electrode is larger than that of the contact part of the short circuit part, and the thickness of the short circuit part is larger than that of the insulation layer. COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：为了提供能够获得具有细小间距电极的电路装置的稳定连接状态的片状探针及其制造方法，能够获得非常耐用的电极结构而不会从绝缘层脱落，能够 防止由于大面积晶片的老化试验的温度变化引起的电极结构和检测电极之间的位置偏移或具有小间距检查电极的电路器件，并且能够稳定地保持良好的连接状态。 解决方案：暴露于绝缘层的表面并从绝缘层的表面突出的每个电极结构包括：前电极部分，其直径根据从基座到 最佳; 一个暴露于绝缘表面后表面的后电极部分; 短路部分从前电极部分的基端部沿着厚度方向连续延伸穿过绝缘层并与后电极连接。 片状探针的特征在于，前电极的基底直径大于短路部分的接触部分的基底直径，并且短路部分的厚度大于绝缘层的厚度。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2005338072A

公开(公告)日：2005-12-08

申请号：JP2005128650

申请日：2005-04-26

Applicant: Jsr Corp ,  Jsr株式会社

Inventor： YOSHIOKA MUTSUHIKO ,  FUJIYAMA HITOSHI ,  IGARASHI HISAO ,  SATO KATSUMI ,  INOUE KAZUO

IPC: G01R31/26 ,  G01R1/06 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To provide a sheetlike probe of a high durability capable of surely attaining a stable electric connection state even for a circuit device provided with thick insulation layer and an electrode structure having a front electrode part of small diameter formed in small pitch. SOLUTION: Each of electrode structure exposed to the surface of the insulation layer and protruding from the surface of the insulation layer is composed of: the front electrode part, the diameter of which becomes smaller according to the elevation from the base to the top; a rear electrode part exposed to the rear surface of insulation surface; the short circuit part extending continuously from the base end of the front electrode in the thickness direction through the insulation layer and connected with the rear electrode. The sheetlike probe is characterized in that the base diameter of the front electrode is larger than that of the contact part of the short circuit part. COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 解决的问题：为了提供即使对于具有厚绝缘层的电路器件和具有形成在其中的小直径的前电极部分的电极结构，也可确保获得稳定的电连接状态的高耐久性的片状探针 小音调 解决方案：暴露于绝缘层的表面并从绝缘层的表面突出的每个电极结构包括：前电极部分，其直径根据从基座到 最佳; 一个暴露于绝缘表面后表面的后电极部分; 短路部分从前电极的基端在厚度方向上连续延伸穿过绝缘层并与后电极连接。 片状探针的特征在于前电极的基底直径大于短路部的接触部的基底直径。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2005026672A

公开(公告)日：2005-01-27

申请号：JP2004157008

申请日：2004-05-27

Applicant: Jsr Corp ,  Jsr株式会社

Inventor： IGARASHI HISAO ,  SATO KATSUMI ,  INOUE KAZUO

IPC: G01R31/26 ,  G01R1/06 ,  H01L21/66 ,  H01R11/01

Abstract: PROBLEM TO BE SOLVED: To provide a miniaturized wafer inspection device wherein the useful life of an inspection circuit substrate thereof is not shortened, by which the inspection of many electrodes to be inspected can be carried out collectively, which has good electric characteristics, and by which an electric inspection of a high-functionality integrated circuit can be carried out; and to provide an anisotropically conductive connector for use in that device. SOLUTION: The anisotropically conductive connector comprises an elastic anisotropically conductive film consisting of a plurality of connecting conductors which are spaced apart from each other and extending in the thickness direction, and insulating portions formed between them; and a frame plate for supporting it. The frame plate consists of a metal material having a linear thermal expansion coefficient of 3×10 -6 -3×10 -5 K -1 . The connecting conductor is formed by densely filling conductive particles exhibiting magnetic properties having a numerical average diameter of 20-80 μm into an elastic polymeric material. A coating layer consisting of a noble metal having a thickness not less than 20 nm is formed on the surface of the conductive particle. The durometer hardness of the connecting conductor is 10-35. The electric resistance between the connecting conductors is not less than 10 MΩ. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：为了提供一种小型化的晶片检查装置，其中其检查电路基板的使用寿命不会缩短，通过该小型化的晶片检查装置可以集体进行要检查的许多电极的检查，其具有良好的电特性 ，并且可以执行高功能集成电路的电检查; 并提供用于该装置中的各向异性导电连接器。 解决方案：各向异性导电连接器包括由彼此间隔开并在厚度方向上延伸的多个连接导体以及在它们之间形成的绝缘部分的弹性各向异性导电膜; 和用于支撑它的框架板。 框架板由具有线性热膨胀系数为3×10 -6 -3×10 -5 K -1 的金属材料组成。 。 连接导体通过将具有数均平均直径为20-80μm的磁特性的导电颗粒密集地填充到弹性聚合物材料中而形成。 在导电性粒子的表面上形成由厚度不小于20nm的贵金属构成的涂层。 连接导体的硬度计硬度为10-35。 连接导体之间的电阻不小于10MΩ。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2004309465A

公开(公告)日：2004-11-04

申请号：JP2004072009

申请日：2004-03-15

Applicant: Jsr Corp ,  Jsr株式会社

Inventor： IGARASHI HISAO ,  SATO KATSUMI ,  INOUE KAZUO

IPC: G01R31/26 ,  G01R1/06 ,  G01R31/28 ,  H01L21/66 ,  H01R11/01

Abstract: PROBLEM TO BE SOLVED: To provide an anisotropically conductive connector which is high in durability with a long service life for a long time, while keeping a proper conductivity when used repeatedly for many times in electrical inspection for a plurality of integrated circuits formed on a wafer, and to provide applications of the anisotropically conductive connector. SOLUTION: The anisotropically conductive connector is provided with an elastically anisotropic conductive film, formed with a plurality of conductive parts containing conductive particles and extending in the thickness direction, wherein the conductive particles contained in the conductive parts are laminated with coating layers of high conductive metal over core particles representing magnetism, and the coating layer is of high hardness. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：为了提供长时间使用寿命长的耐久性高的各向异性导电连接器，同时在形成的多个集成电路的电气检查中多次重复使用时保持适当的导电性 并且提供各向异性导电连接器的应用。 解决方案：各向异性导电连接器设置有弹性各向异性导电膜，其形成有包含导电颗粒并在厚度方向上延伸的多个导电部件，其中包含在导电部件中的导电颗粒与 代表磁性的芯颗粒上的高导电金属，并且涂层具有高硬度。 版权所有（C）2005，JPO＆NCIPI