公开(公告)号：EP1620878A4

公开(公告)日：2008-03-26

申请号：EP04759531

申请日：2004-04-14

Applicant: SAINT GOBAIN CERAMICS

Inventor： NARENDAR YESHWANTH ,  BUCKLEY RICHARD F ,  HAERLE ANDREW G ,  HENGST RICHARD R

IPC: H01L21/311 ,  C01B31/36 ,  C04B35/565 ,  C04B35/622 ,  C04B41/45 ,  C04B41/80 ,  H01L21/673

CPC classification number: C04B41/459 ,  C01B32/956 ,  C01P2006/80 ,  C04B35/565 ,  C04B35/62222 ,  C04B41/009 ,  C04B41/80 ,  C04B2235/3826 ,  C04B2235/428 ,  C04B2235/72 ,  C04B2235/80 ,  C04B2235/963 ,  H01L21/6733 ,  Y10T428/12576 ,  Y10T428/26 ,  C04B41/4519 ,  C04B41/4556 ,  C04B41/5035

Abstract: Various semiconductor processing components and methods for forming same are disclosed. In one embodiment a semiconductor processing component is formed of SiC, and an outer surface portion of the component has a surface impurity level that is not greater than 10 times a bulk impurity level. In another embodiment a method for treating a semiconductor processing component includes exposing the component to a halogen gas at an elevated temperature, oxidizing the component to form an oxide layer, and removing the oxide layer.

公开(公告)号：CA2673769C

公开(公告)日：2012-08-21

申请号：CA2673769

申请日：2008-01-15

Applicant: SAINT GOBAIN CERAMICS

Inventor： BAUER RALPH ,  HAERLE ANDREW G ,  YENER DORUK O ,  THERON CLAIRE ,  KAVANAUGH MICHAEL D

IPC: C01F7/02 ,  C01F7/44

Abstract: Ceramic particulate material includes alumina particles, the particles having a specific surface area (SSA) not less than 15 m2/g and not greater than 75 m2/g and a sphericity quantified by at least one of (i) a means roundness not less than 0.710 as measured by Roundness Correlation Image Analysis, and (ii) a concavity less than 20%, wherein concavity is the percent of alumina particles based on a sample of at least 100 particles, which have a concve outer peripheral portion that extends along a distance not less than 10% of d50by TEM inspection, the concave outer peripheral portion having a negative radius of curvature as viewed from an interior of the particle.

公开(公告)号：BRPI0617413A2

公开(公告)日：2011-07-26

申请号：BRPI0617413

申请日：2006-10-13

Applicant: SAINT GOBAIN CERAMICS

Inventor： HAERLE ANDREW G ,  WANG JUN

IPC: C09K3/14 ,  C01F7/02 ,  C09G1/02

Abstract: An abrasive particulate material is disclosed that includes alumina particles. The alumina particles include a transition alumina and at least 5.0 wt % of an amorphous phase. The transition alumina particles also have a density not greater than about 3.20 g/cm3.

公开(公告)号：AU2008206388B2

公开(公告)日：2011-05-26

申请号：AU2008206388

申请日：2008-01-15

Applicant: SAINT GOBAIN CERAMICS & PLASTICS INC

Inventor： THERON CLAIRE ,  BAUER RALPH ,  YENER DORUK O ,  KAVANAUGH MICHAEL D ,  HAERLE ANDREW G

IPC: C01F7/02 ,  C01F7/44

Abstract: Processes for forming ceramic particulate material. The ceramic particulate material includes alumina particles, the particles having a specific surface area (SSA) not less than 15 m2/g and not greater than 75 m2/g and a sphericity quantified by at least one of (i) a mean roundness not less than 0.710 as measured by Roundness Correlation Image Analysis, and (ii) a concavity less than 20%, wherein concavity is the percent of alumina particles based on a sample of at least 100 particles, which have a concave outer peripheral portion that extends along a distance not less than 10% of d50 by TEM inspection, the concave outer peripheral portion having a negative radius of curvature as viewed from an interior of the particle.

公开(公告)号：UA87938C2

公开(公告)日：2009-08-25

申请号：UAA200804717

申请日：2006-10-13

Applicant: SAINT GOBAIN CERAMICS

Inventor： HAERLE ANDREW G ,  WANG JUN

IPC: C09K3/14 ,  C01F7/02 ,  C09G1/00 ,  H01L21/306

Abstract: Раскрытзернистыйабразивныйматериал, которыйсодержитчастицыоксидаалюминия. Частицыоксидаалюминиявключаютпереходнойоксидалюминияи, поменьшеймере, 5,0 вес. % аморфнойфазы. Частицыпереходногооксидаалюминиятакжеимеютплотность, неболеечем 3,20 г/см.

公开(公告)号：AU2006297240B2

公开(公告)日：2009-04-09

申请号：AU2006297240

申请日：2006-09-29

Applicant: SAINT GOBAIN CERAMICS & PLASTICS INC

Inventor： LACONTO RONALD W ,  HAERLE ANDREW G

IPC: C09G1/02 ,  H01L21/321

Abstract: A polishing slurry includes liquid medium and particulate abrasive. The particulate abrasive includes soft abrasive particles, hard abrasive particles, and colloidal silica particles, wherein the soft abrasive particles have a Mohs hardness of not greater than 8 and the hard abrasive particles have a Mohs hardness of not less than 8, and wherein the soft abrasive particles and the hard abrasive particles are present at a weight ratio of not less than 2:1.

公开(公告)号：ZA200803185B

公开(公告)日：2009-01-28

申请号：ZA200803185

申请日：2008-04-10

Applicant: SAINT GOBAIN CERAMICS

Inventor： HAERLE ANDREW G ,  JUN WANG

IPC: C01F20090101 ,  C09G20090101 ,  C09K20090101

Abstract: An abrasive particulate material is disclosed that includes alumina particles. The alumina particles include a transition alumina and at least 5.0 wt % of an amorphous phase. The transition alumina particles also have a density not greater than about 3.20 g/cm3.

公开(公告)号：NO20082195L

公开(公告)日：2008-07-03

申请号：NO20082195

申请日：2008-05-13

Applicant: SAINT GOBAIN CERAMICS

Inventor： HAERLE ANDREW G ,  WANG JUN

IPC: C09K3/14 ,  C09G1/02

Abstract: An abrasive particulate material is disclosed that includes alumina particles. The alumina particles include a transition alumina and at least 5.0 wt % of an amorphous phase. The transition alumina particles also have a density not greater than about 3.20 g/cm3.

公开(公告)号：NO20082052L

公开(公告)日：2008-04-29

申请号：NO20082052

申请日：2008-04-29

Applicant: SAINT GOBAIN CERAMICS

Inventor： LACONTO RONALD W ,  HAERLE ANDREW G

IPC: C09G1/02

Abstract: A polishing slurry includes liquid medium and particulate abrasive. The particulate abrasive includes soft abrasive particles, hard abrasive particles, and colloidal silica particles, wherein the soft abrasive particles have a Mohs hardness of not greater than 8 and the hard abrasive particles have a Mohs hardness of not less than 8, and wherein the soft abrasive particles and the hard abrasive particles are present at a weight ratio of not less than 2:1.

公开(公告)号：CA2625273A1

公开(公告)日：2007-04-26

申请号：CA2625273

申请日：2006-10-13

Applicant: SAINT GOBAIN CERAMICS

Inventor： WANG JUN ,  HAERLE ANDREW G

IPC: C09K3/14 ,  C01F7/02 ,  C09G1/02

Abstract: An abrasive particulate material is disclosed that includes alumina particles. The alumina particles include a transition alumina and at least 5.0 wt % of an amorphous phase. The transition alumina particles also have a density not greater than about 3.20 g/cm3.