公开(公告)号：JPH10317130A

公开(公告)日：1998-12-02

申请号：JP12516197

申请日：1997-05-15

Applicant: SONY CORP

Inventor： SATO TAKASHI

IPC: C23C14/32 ,  H01L21/203

Abstract: PROBLEM TO BE SOLVED: To prevent contamination in the inside of a chamber, to prevent the intrusion of impurities into coating, to reduce deterioration of the characteristics of vapor deposited coating, to enable the production of thin coating having desired characteristics and to reduce the dispersion of the quality. SOLUTION: By grounding an antenna 3 via a choke coil 15, high frequency can not pass through the choke coil 15, only self-bias as the d.c. components thereof passes through the choke coil, grounds and disappears. In this way, positive ions do not collide against the antenna 3, the beating-away of substances from the antenna 3 is eliminated, contamination caused by their sticking and intrusion to the inside of a chamber 2, a substrate or the like is eliminated, moreover, by applying high frequency and d.c. electric power to a substrate electrode 1 in a superimposing way, the prevention of the electrification of the substrate is executed by the high frequency, and netative d.c. bias voltage drawing ions can be controlled by a DC power source 14 at the outside of the chamber 2. In this way, the negative voltage to be applied to the substrate electrode can securely be controlled by the output voltage of the DC power source, by which the cleaning of the substrate and the filling density of vapor deposited coating can be improved.

公开(公告)号：JPH09279339A

公开(公告)日：1997-10-28

申请号：JP8973496

申请日：1996-04-11

Applicant: SONY CORP

Inventor： SATO TAKASHI

IPC: C23C14/06 ,  C23C14/08 ,  C23C14/40 ,  H01L21/203 ,  H01L21/31

Abstract: PROBLEM TO BE SOLVED: To provide a sputtering device which is capable of forming a film consisting of the material of a target on a substrate and executing a plasma treatment of active species, such as oxygen or nitrogen but does not give rise to reverse sputtering. SOLUTION: A choke coil 13 is connected to via a changeover switch 14 to the fixed contact 8c side of a changeover switch 8 and one end thereof is grounded. At the time of the plasma treatment, the changeover switch 8 is connected to the fixed contact 8c side and another changeover switch 14 is connected to the fixed contact 12. A DC component, therefore, flows without flowing a high-frequency component to the ground through the choke coil 13 and only the high-frequency potential not biased to a negative potential side is eventually impressed on a substrate electrode 6. The occurrence of the reverse sputtering is thereby averted.

公开(公告)号：JPH09147460A

公开(公告)日：1997-06-06

申请号：JP30081595

申请日：1995-11-20

Applicant: SONY CORP

Inventor： SAITO KENGO ,  NAKAJIMA IKUYUKI ,  KANO TOSHIO ,  SATO TAKASHI ,  MASUGI SHINJI

IPC: G11B15/60 ,  G11B15/64

Abstract: PROBLEM TO BE SOLVED: To satisfactorily suppress vibration of a magnetic tape in a position adjacent to a magnetic head and to easily set up a track servo even if a track pitch is small and also to limit a spacing amt. between the magnetic head and the magnetic tape to a min. SOLUTION: The magnetic head 15 is arranged on one surface side of the magnetic tape T, and a stabilizing plate 6 is provided on the other surface side of the magnetic tape T and also in a position opposite to the magnetic tape T. Then, the magnetic head 15 has a slider surface 6a on the side of the magnetic tape touching surface, and the slider surface 6a is provided with a recessed part.

公开(公告)号：JPH0945242A

公开(公告)日：1997-02-14

申请号：JP21010095

申请日：1995-07-25

Applicant: SONY CORP

Inventor： WATABE CHIYOJI ,  TERASAWA TOSHIHISA ,  SATO TAKASHI

IPC: H01J9/227

Abstract: PROBLEM TO BE SOLVED: To reduce the contract of a boundary line without following cost increase, and eliminate the failure of the presence of the boundary line on a picture surface, by changing the preparing method for a phosphor slurry of color formed at first from a conventional method, in forming a phosphor on the inner surface of a cathode-ray tube panel. SOLUTION: A three-color phosphor is formed by repeating the formation of a phosphor three times, wherein a phosphor slurry, including at least a phosphor, a binder, light cross-linking material, and water, is applied to the inner surface of a cathode-ray tube panel, and then the phosphor slurry is exposed and developed. At that time, about the phosphor slurry of a color to be formed at first, adjustment for reducing the contrast of a boundary line, resulting from drying the slurry in a process of applying, is performed by adjusting a ratio and/or viscosity of the phosphor slurry to the binder of the phosphor, instead of by mixing a surface active agent.

公开(公告)号：JPH08203045A

公开(公告)日：1996-08-09

申请号：JP1009695

申请日：1995-01-25

Applicant: SONY CORP

Inventor： SAWAI ATSUSHI ,  SATO TAKASHI

IPC: G11B5/53

Abstract: PURPOSE: To stabilize the connection of a signal line when a rotating part is rotated at a high speed. CONSTITUTION: A connector 12 is provided in the vicinity of the edge part of a circuit board 10 mounted on a rotary part of the rotary head drum device and a signal line 14 composed of e.g. a flexible printed board is connected to the connector 12 from the edge part side of the circuit board 10. A locking mechanism 122 is provided on the main body 121 of the connector 12, e.g. the signal line 14 is inserted while pulling the locking mechanism 122 outward (an arrow A) and the signal line 14 is connected by pushing on the locking mechanism 122 inward (arrow B). A case 9 is provided so as to cover the whole circuit board 10 while pushing the locking mechanism 122 inward and the locking mechanism 122 of the connector 12 on the circuit board 10 is restrained in the direction on which centrifugal force exerts (the arrow A) by means of a member 13 provided inside the case 9.

公开(公告)号：JP2522194B2

公开(公告)日：1996-08-07

申请号：JP35009193

申请日：1993-12-30

Applicant: SONY CORP

Inventor： HIMENO TAKUJI ,  SATO TAKASHI

IPC: H05K1/02 ,  H05K9/00

公开(公告)号：JPH0863724A

公开(公告)日：1996-03-08

申请号：JP21950094

申请日：1994-08-22

Applicant: SONY CORP

Inventor： SATO TAKASHI

IPC: G11B5/53

Abstract: PURPOSE: To delay progress of friction at the time of initial sliding by providing a polygonal a cross section in a part to be in contact with a rotary electrically conductive member of a brush-like electrically conductive member. CONSTITUTION: The sliding contact device is equipped with the rotary electrically conductive member 23 having a groove 23a and capable of rotating with a rotary body and the brush-like electrically conductive member 24 to be in contact with the groove 23a of the member 23. The rotary body is preferably a rotary drum of a rotary magnetic head device, and the part of the brush-like electrically conductive member 24 to be in contact with the rotary electrically conductive member 23 has preferably an approximately triangular shape. Then, the rotary magnetic head device is preferably a rotary magnetic recording device for recording a signal on a magnetic tape, and moreover, the rotary magnetic head device is preferably a rotary magnetic reproducing device for reproducing a signal on a magnetic tape. In addition, the groove 23a has preferably a V-shape in its cross section, and a variable amt. of contact resistance can be suppressed to a minimum by these factors, and also the progress of friction at the initial sliding time can thus be delayed.

公开(公告)号：JPH07326489A

公开(公告)日：1995-12-12

申请号：JP14075594

申请日：1994-05-31

Applicant: SONY CORP

Inventor： SATO TAKASHI

IPC: H05H1/00

Abstract: PURPOSE:To provide a general-purpose discharge detector that utilizes a new means different from conventional means of detecting plasma emission or the reflected waves of high-frequency inputs, etc. CONSTITUTION:This discharge detector has a floating electrode 12 provided in a plasma generating space, e.g. the plasma generating space of the chamber A of a sputtering device and a voltmeter 14 whereby floating potential generated in a floating electrode is measured in relation to reference potential. When plasma is generated, electrons collide with the floating electrode 12 and accumulate charge there, so generating electric potential in the floating electrode. The difference between that potential and the reference potential is measured by the voltmeter, so that the generation and stable keeping of the plasma can be detected. Also, any abnormalities such as the extinction of the plasma can be detected promptly by detecting changes in the potential difference. The value of current flowing between the floating electrode and ground may be measured in place of the potential difference.

公开(公告)号：JPH06259721A

公开(公告)日：1994-09-16

申请号：JP23305393

申请日：1993-09-20

Applicant: SONY CORP

Inventor： SAITO TADASHI ,  OGATA SEIICHI ,  SUGANO TAKASHI ,  TAKAHASHI SHINJI ,  WATANABE TOSHINOBU ,  KOBAYASHI TOMIO ,  SATO TAKASHI

IPC: G11B5/127 ,  G11B5/147

Abstract: PURPOSE:To improve the adhesion of a substrate to a glass bonding film or the adhesion of the glass bonding film to a metallic magnetic film and to enhance the yield and reliability of magnetic heads. CONSTITUTION:A metallic magnetic film 3 is held between a pair of substrates 1A, 1B in the thickness direction and they are bonded and integrated with a glass bonding film 7 to obtain a magnetic core half 20A and 20B. A pair of such magnetic core halves 20A, 20B are butted so that edges of the metallic magnetic films 3 confront each other and a magnetic gap (g) is formed between the butted faces. A boundary film 8 of a material having a higher m.p. than the material of the glass bonding film 7 is interposed between the substrate 1B and the glass bonding film 7. The substrate may be made of ferrite.

公开(公告)号：JPH06197024A

公开(公告)日：1994-07-15

申请号：JP13428793

申请日：1993-06-04

Applicant: SONY CORP

Inventor： INO HIROYUKI ,  SATO TAKASHI ,  NAKAGAWA TOSHIYUKI

IPC: G11B20/14 ,  H03M5/06 ,  H03M5/14 ,  H03M7/14 ,  H04L25/49

Abstract: PURPOSE:To adapt a DSV control characteristic to a specification being a requirement of a transmission system by controlling a DSV of a modulation code based on an inserted pattern so as to minimize the increase in the redundancy as required. CONSTITUTION:A coding circuit 11 converts an input data series into a code series A suitable for transmission. A pattern generating circuit 12 generates a pattern of a prescribed length at a prescribed interval inversely proportional to a low frequency cut-off frequency of a modulation code. A pattern insertion circuit 13 inserts the pattern to the code series A at a prescribed interval. A modulation circuit 14 applies NRZI modulation to a code series B with the pattern inserted thereto and outputs the result. A timing management circuit 15 controls the pattern insertion circuit 13 or the like.