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公开(公告)号:DE69817642D1
公开(公告)日:2003-10-09
申请号:DE69817642
申请日:1998-03-10
Applicant: SUMITOMO ELECTRIC INDUSTRIES
Inventor: SAITO HIROHISA , TSUNO TAKASHI , SHIOMI HIROMU , KUMAZAWA YOSHIAKI , IMAI TAKAHIRO
Abstract: An electron-emitting element comprises a diamond substrate, and a diamond protrusion grown on a surface of the diamond substrate so as to have a pointed portion in a form capable of emitting an electron. Since the diamond protrusion formed by growth has a sharply pointed tip portion, it can fully emit electrons. Preferably, the surface of the diamond substrate is a ä100ü face, and the diamond protrusion is surrounded by ä111ü faces.
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公开(公告)号:DE69526748T2
公开(公告)日:2002-09-05
申请号:DE69526748
申请日:1995-02-24
Applicant: SUMITOMO ELECTRIC INDUSTRIES
Inventor: UTUMI YOSHIHARU , IMAI TAKAHIRO , FUJIMORI NAOJI
Abstract: An aluminum nitride film substrate comprising a single crystal diamond having, on its (111) plane, (1) a C-axis oriented aluminum nitride film or (2) an aluminum nitride single crystal film, the C-plane of the aluminum nitride single crystal being parallel to the (111) plane of said single crystal diamond; an aluminum nitride film substrate comprising a substrate having thereon a (111) direction oriented diamond polycrystalline film, and further having thereon a C-axis oriented aluminum nitride film; and a process for producing these aluminum nitride film substrate.
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公开(公告)号:DE69430024D1
公开(公告)日:2002-04-11
申请号:DE69430024
申请日:1994-06-14
Applicant: SUMITOMO ELECTRIC INDUSTRIES
Inventor: YAMAMOTO YOSHIYUKI , TSUNO TAKASHI , IMAI TAKAHIRO , FUJIMORI NAOJI
IPC: H01L21/48 , H01L23/367 , H01L23/373
Abstract: A process for the production of a heat sink comprising a diamond substrate and fins of diamond projecting therefrom for improving heat dissipation, the fins being spaced apart to define open channels therebetween, which process comprises the steps of: (a) cutting a diamond plate prepared by gaseous phase synthesis to obtain diamond base materials; (b) placing the diamond base materials on a supporting member designed in such a manner that gaps are provided for inserting fins, wherein the highest part of the fins to be inserted and the surface of the diamond divided base materials is substantially the same in height, and inserting the fins in the gaps; and (c) growing diamond on the diamond divided base materials and fins and obtaining the said diamond heat sink without removing the diamond divided base materials.
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公开(公告)号:DE69802037D1
公开(公告)日:2001-11-22
申请号:DE69802037
申请日:1998-04-17
Applicant: SUMITOMO ELECTRIC INDUSTRIES
Inventor: SAITO HIROHISA , TSUNO TAKASHI , IMAI TAKAHIRO , KUMAZAWA YOSHIAKI
Abstract: An initial single-crystalline diamond base material (50) is prepared from a flat plate having a major surface (50a) and side surfaces consisting of low-index planes for homoepitaxially vapor-depositing single-crystalline diamond on the single-crystalline diamond base material (50), thereby forming single-crystalline diamond having a large area. Holding means (1) for the single-crystalline diamond base material (50) consists of a material hardly forming a compound with carbon, or is coated with such a material. According to this method and this apparatus, single-crystalline diamond can be stably formed on the surfaces of the base material (50). Consequently, single-crystalline diamond of high quality having a large area can be stably produced in a shorter time by either plasma CVD or a thermal filament method.
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公开(公告)号:DE69520196T2
公开(公告)日:2001-07-19
申请号:DE69520196
申请日:1995-12-05
Applicant: SUMITOMO ELECTRIC INDUSTRIES
Inventor: TANAKA MOTOYUKI , IMAI TAKAHIRO , FUJIMORI NAOJI
Abstract: A single crystal quartz thin film having a thickness of 5 nm to 50 mu m can be prepared by forming the thin film on a single crystal substrate by a sol-gel process and peeling the thin film from the substrate. The present invention can provide the single crystal quartz thin film at a low price without a large and complex apparatus.
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公开(公告)号:DE69417627T2
公开(公告)日:1999-09-09
申请号:DE69417627
申请日:1994-01-13
Applicant: SUMITOMO ELECTRIC INDUSTRIES
Inventor: IMAI TAKAHIRO , TSUNO TAKASHI , YAMAMOTO YOSHIYUKI , FUJIMORI NAOJI
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公开(公告)号:DE3856278T2
公开(公告)日:1999-05-20
申请号:DE3856278
申请日:1988-03-11
Applicant: SUMITOMO ELECTRIC INDUSTRIES
Inventor: IMAI TAKAHIRO , FUJIMORI NAOJI , NAKAHATA HIDEAKI
Abstract: A thin film single crystal substrate which comprises a base substrate made of single crystal diamond having the (100) or (110) plane orientation, an intermediate layer of single crystal silicon carbide, and at least one thin film of a single crystal of a material selected from the group consisting of silicon, boron nitride, gallium nitride, indium nitride, aluminum nitride, boron phosphide, cadmium selenide, germanium, gallium arsenide, gallium phosphide, indium phosphide, gallium antimonide, indium arsenide, indium antimonide, aluminum phosphide, aluminum arsenide, aluminum antimonide, cadmium telluride, mercury sulfide, zinc oxide, zinc sulfide, zinc selenide and zinc telluride.
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公开(公告)号:DE69417627D1
公开(公告)日:1999-05-12
申请号:DE69417627
申请日:1994-01-13
Applicant: SUMITOMO ELECTRIC INDUSTRIES
Inventor: IMAI TAKAHIRO , TSUNO TAKASHI , YAMAMOTO YOSHIYUKI , FUJIMORI NAOJI
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公开(公告)号:CA2241402A1
公开(公告)日:1999-02-28
申请号:CA2241402
申请日:1998-06-23
Applicant: SUMITOMO ELECTRIC INDUSTRIES
Inventor: IMAI TAKAHIRO , YAMAMOTO YOSHIYUKI
IPC: H01L23/373 , H01L23/473 , H01S5/00 , H01L23/46 , H01S3/043
Abstract: A heat dissipator includes a heat-conductive substrate, a lid and a heat-conductive cover layer, and a coolant groove for passing coolant is formed on a major surface of the substrate. The lid is positioned on the coolant groove to seal the same, and the cover layer covers the major surface of substrate and the lid.
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公开(公告)号:DE69411374D1
公开(公告)日:1998-08-06
申请号:DE69411374
申请日:1994-04-05
Applicant: SUMITOMO ELECTRIC INDUSTRIES
Inventor: YAMAMOTO YOSHIYUKI , IMAI TAKAHIRO , TSUNO TAKASHI , FUJIMORI NAOJI
IPC: C04B35/584 , C04B35/628 , C04B35/80 , C08K9/02 , C22C26/00 , C23C16/00 , C23C16/01 , C23C16/26 , C23C16/27 , C23C16/56 , C22C1/09 , C22C29/00
Abstract: An object of the present invention is to provide adhesion or bonding to a matrix in relation to a composite material which is reinforced with vapor-deposited diamond. In order to improve bondability to the matrix, hydrogen is removed from the surface of vapor-deposited diamond fiber. For the removal of hydrogen, the diamond is heated under an oxidative atmosphere at a temperature of about 150 DEG C to about 800 DEG C, or under a non-oxidative atmosphere at a temperature of about 800 DEG C to about 1500 DEG C. The surface of the vapor-deposited diamond containing not more than about 1 x 10 /cm of hydrogen atoms is bonded to the matrix of resin or a metal with sufficient strength. In order to improve bondability to the matrix (1), the surface of diamond (2) is coated with graphite, Al, Si or B, or a carbide or a nitride thereof (3). In order to reinforce bondability, diamond doped with B or N is employed as a reinforcing material. The matrix (1) is prepared from a metal, ceramics or resin.
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