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    Filter having adjustable spectral transmittance function
    45.
    发明授权
    Filter having adjustable spectral transmittance function 失效
    滤光片具有可调光谱透过率功能

    公开(公告)号：US5121239A

    公开(公告)日：1992-06-09

    申请号：US424479

    申请日：1989-10-20

    Applicant: David L. Post

    Inventor： David L. Post

    IPC: G01J3/12

    CPC classification number: G01J3/12 ,  G01J2003/1204 ,  G01J2003/1269 ,  G01J2003/1282 ,  G01J3/0229

    Abstract: An optical filter having a variable spectral transmittance function of selectable shape is described which includes a spectrum forming element for dispersing a light beam into a characteristic spectrum, an optical system for forming an image of the spectrum and directing the image into a multi-element electronic spatial light modulator, such as a liquid crystal display or electrophoretic display, and an optical system for projecting the spectrally filtered light as a directed beam.

    Abstract translation: 描述了具有可选形状的可变光谱透射率函数的滤光器，其包括用于将光束分散到特征光谱中的光谱形成元件，用于形成光谱图像的光学系统并将图像引导到多元素电子 空间光调制器，例如液晶显示器或电泳显示器，以及用于将光谱滤波的光投影为定向光束的光学系统。

    VERY HIGH RESOLUTION SPECTROMETER FOR MONITORING OF SEMICONDUCTOR PROCESSES
    49.
    发明公开
    VERY HIGH RESOLUTION SPECTROMETER FOR MONITORING OF SEMICONDUCTOR PROCESSES 审中-公开

    公开(公告)号：US20240019302A1

    公开(公告)日：2024-01-18

    申请号：US18352091

    申请日：2023-07-13

    Applicant: Verity Instruments, Inc.

    Inventor： Andrew Weeks Kueny

    IPC: G01J3/02 ,  G01J3/12 ,  G01J3/26

    CPC classification number: G01J3/0208 ,  G01J3/12 ,  G01J3/26 ,  G01J2003/1204 ,  G01J2003/1213

    Abstract: An optical instrument of very high resolution is provided that can be used for monitoring semiconductor processes. Very high resolution may be considered in this application space to be resolutions sufficient to permit resolving of individual molecular rovibrational emission lines. In one example an optical instrument is provided that includes: (1) an optical interface that receives an optical fiber, (2) a narrow band pass filter that filters out a portion of an optical signal received via the optical fiber, (3) optical components that are selectively combined to process at least a portion of the unfiltered optical signal, wherein the optical components include a sensor that receives the unfiltered optical signal, and (4) one or more processors that process electrical signals from the sensor. The optical instrument can be a spectrometer suitable for a process control instrument.

    LAMELLAR GRATING INTERFEROMETER HAVING STRESS-DISPERSIBLE SUPPORT STRUCTURE
    50.
    发明申请
    LAMELLAR GRATING INTERFEROMETER HAVING STRESS-DISPERSIBLE SUPPORT STRUCTURE 审中-公开

    公开(公告)号：US20180149518A1

    公开(公告)日：2018-05-31

    申请号：US15653945

    申请日：2017-07-19

    Applicant: AGENCY FOR DEFENSE DEVELOPMENT

    Inventor： Jaehwan LEE ,  Youngil KANG ,  Jongmin LEE ,  Incheol KIM ,  Dohyun PARK

    IPC: G01J3/02 ,  G01J3/26

    CPC classification number: G01J3/0202 ,  G01J3/26 ,  G01J2003/1204

    Abstract: The present invention relates to a lamella grating interferometer capable of being employed in a Fourier transform infrared (FTIR) spectrometer, the interferometer including a reflective surface in a circular shape and provided with a fixed portion including fixed mirrors and a movable portion including movable mirrors that are arranged with the fixed mirrors in a crossing manner to form a lamella structure with the fixed mirrors, a plurality of driving units disposed at outside the reflective surface and configured to apply driving forces for moving the movable portion, and a plurality of driving arms connecting the driving units to the movable portion of the reflective surface, respectively, and configured to move the movable portion in response to the driving forces applied by the driving units, wherein each of the plurality of driving arms is formed in a structure of repeating a preset bent shape plural times.

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