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    Spectrometer with a shaped oriented slit
    2.
    发明公开
    Spectrometer with a shaped oriented slit 失效
    Spektrometer mit einem orientiert-geformten Schlitz

    公开(公告)号：EP0833135A1

    公开(公告)日：1998-04-01

    申请号：EP97307356.2

    申请日：1997-09-22

    Applicant: VARIAN ASSOCIATES, INC.

    Inventor： Chien, Ring-Ling

    IPC: G01J3/04 ,  G01J3/18 ,  G01J3/28

    CPC classification number: G01J3/1809 ,  G01J3/189

    Abstract: An improved spectrometer comprises a slit in light blocking plate, an echelle grating, and a detector array. The slit is shaped and oriented to align an image of a light beam projected through the slit, onto the echelle grating and onto the detector in a desired orientation and shape relative to the detector array. Precise adjustment of the shape and orientation of the slit is dependent on the orientation of the detector with respect to the dispersion direction of the echelle grating. The spectrometer provides high detector resolution with reduced read-out time.

    Abstract translation: 改进的电子光谱仪包括遮光板中的狭缝，梯形光栅和检测器阵列。 狭缝被成形并定向成使得通过狭缝投射的光束的图像以相对于检测器阵列的期望的取向和形状对准到梯形栅格和检测器上。 狭缝的形状和取向的精确调整取决于检测器相对于梯形光栅的分散方向的取向。 梯形光谱仪提供高检测分辨率，减少读出时间。

    Conical diffraction grazing incidence spectrometer and diffraction grating for use in the spectrometer
    5.
    发明申请
    Conical diffraction grazing incidence spectrometer and diffraction grating for use in the spectrometer 失效

    公开(公告)号：US20030016355A1

    公开(公告)日：2003-01-23

    申请号：US10191993

    申请日：2002-07-10

    Applicant: Japan Atomic Energy Research Insititute

    Inventor： Masato Koike ,  Kazuo Sano ,  Yoshihisa Harada

    IPC: G01J003/18

    CPC classification number: G02B5/1861 ,  G01J3/18 ,  G01J3/1833 ,  G01J3/189

    Abstract: An x-y coordinate is set on the surface of diffraction grating 3 with non-uniformly spaced grooves and expressed by the following series expansion which is a groove function describing a point (w,l) on the nth groove from the origin: 1 n = 1 null null null i , j null n i null null null j null w i null l j null null null ( i + j null 1 ) The focal length (r0null) and the expansion coefficient nij in this series expansion are so determined that all expanded terms Fij in the following optical path function are zero at a desired wavelength: 2 F = null i , j null F i null null null j null w i null l j = null i , j null [ M i null null null j + ( m null null null null null ) null n i null null null j ] null w i null l j null null null ( i + j > 0 ) the optical path being for the light that passes through entrance slit 1 to be reflected by concave mirror 2 and diffracted at a point (w,l) on the surface of diffraction grating 3 before it reaches exit slit 4. The positions of two point light sources C5 and D6 in a holographic recording system are so determined as to realize the required value of nij.

    OPTICAL SPECTROMETER HAVING AN ASTIGMATISM COMPENSATION
    6.
    发明申请
    OPTICAL SPECTROMETER HAVING AN ASTIGMATISM COMPENSATION 审中-公开
    散光光谱仪

    公开(公告)号：WO01069190A1

    公开(公告)日：2001-09-20

    申请号：PCT/EP2001/000742

    申请日：2001-01-24

    IPC: G01J3/04 ,  G01J3/14 ,  G01J3/18

    CPC classification number: G01J3/14 ,  G01J3/04 ,  G01J3/1809 ,  G01J3/189

    Abstract: The invention relates to an optical spectrometer that has an astigmatic aberration and contains a grating for the dispersion in a first dispersion direction and a second dispersing element for the dispersion in a second dispersion direction which, together with the first dispersion direction, forms an angle. A collimating mirror, a camera mirror and an entrance slit arrangement are provided. A first entrance slit and a second entrance slit are provided for defining bundles. The entrance slits are arranged in such a way that the sagittal image of the first entrance slit and the meridional image of the second entrance slit coincide in an image plane of the spectrometer. The grating can be illuminated at an off-plane angle and the first and the second entrance slits are arranged on the optical axis, whereby said slits enclose an angle that is different from 90 DEG C. The first and the second distances from the entrance slits to the collimating mirror and the angle of the first entrance slit around the optical axis can be selected in such a way that the sagittal image points for all bundles which extend through the first entrance slit are essentially represented in a line in the image plane of the spectrometer. Said line extends in a basically vertical manner in relation to the first dispersion direction.

    Abstract translation: 具有像散像差的光学光谱仪，包括：在第一方向分散的光栅为分散体，并且在其与第一分散方向的角度的分散第二方向对色散的第二色散元件。 仍然有准直器，照相机和反射镜入射狭缝布置。 第一和第二进入槽被提供给限束。 入口狭缝被布置成重合的第一个条目槽和在光谱仪的图像平面狭缝所述第二入口的子午图像的矢状图像。 网格是在截止平面角并布置在不同的90度的角度彼此在光轴上的第一和第二入口狭缝照射。 对于准直器反射镜，且在光轴周围的第一入口缝隙的角度进入塔的第一和第二距离可以被选择为使得对于所有的束中的弧矢图像点，它通过所述第一入口狭缝运行，基本上在光谱仪的图像平面上的线 成像，并且该线基本上垂直于分散体的第一方向。

    Simultaneous Multi-Angle Spectroscopy
    7.
    发明申请
    Simultaneous Multi-Angle Spectroscopy 有权

    公开(公告)号：US20170356800A1

    公开(公告)日：2017-12-14

    申请号：US15344825

    申请日：2016-11-07

    Applicant: KLA-Tencor Corporation

    Inventor： Shankar Krishnan ,  Alexander Buettner ,  Kerstin Purrucker ,  David Y. Wang

    IPC: G01J3/18 ,  G01J3/28 ,  G01N21/25 ,  G01N33/00 ,  G01N21/27 ,  G01J3/10 ,  G01J3/02

    CPC classification number: G01J3/189 ,  G01J3/0289 ,  G01J3/10 ,  G01J3/2803 ,  G01N21/255 ,  G01N21/27 ,  G01N33/00 ,  G01N2033/0095

    Abstract: Methods and systems for performing simultaneous spectroscopic measurements of semiconductor structures over a broad range of angles of incidence (AOI), azimuth angles, or both, are presented herein. Spectra including two or more sub-ranges of angles of incidence, azimuth angles, or both, are simultaneously measured over different sensor areas at high throughput. Collected light is linearly dispersed across different photosensitive areas of one or more detectors according to wavelength for each subrange of AOIs, azimuth angles, or both. Each different photosensitive area is arranged on the one or more detectors to perform a separate spectroscopic measurement for each different range of AOIs, azimuth angles, or both. In this manner, a broad range of AOIs, azimuth angles, or both, are detected with high signal to noise ratio, simultaneously. This approach enables high throughput measurements of high aspect ratio structures with high throughput, precision, and accuracy.

    Echelle spectrometer with a shaped oriented slit
    9.
    发明授权
    Echelle spectrometer with a shaped oriented slit 失效
    Echelle光谱仪具有成形定向的狭缝

    公开(公告)号：US5719672A

    公开(公告)日：1998-02-17

    申请号：US721148

    申请日：1996-09-26

    Applicant: Ring-Ling Chien

    Inventor： Ring-Ling Chien

    IPC: G21K1/06 ,  G01J3/18 ,  G02B5/18 ,  G01J3/04

    CPC classification number: G01J3/1809 ,  G01J3/189

    Abstract: An improved echelle spectrometer comprises a slit in light blocking plate, an echelle grating, and a detector array. The slit is shaped and oriented to align an image of a light beam projected through the slit, onto the echelle grating and onto the detector in a desired orientation and shape relative to the detector array. Precise adjustment of the shape and orientation of the slit is dependent on the orientation of the detector with respect to the dispersion direction of the echelle grating. The echelle spectrometer provides high detector resolution with reduced read-out time.

    Abstract translation: 改进的电子光谱仪包括遮光板中的狭缝，梯形光栅和检测器阵列。 狭缝被成形并定向成使得通过狭缝投射的光束的图像以相对于检测器阵列的期望的取向和形状对准到梯形光栅并且到达检测器上。 狭缝的形状和取向的精确调整取决于检测器相对于梯形光栅的色散方向的取向。 梯形光谱仪提供高检测器分辨率，减少读出时间。

    Monochromator with concave grating
    10.
    发明授权
    Monochromator with concave grating 失效
    具有凹面光栅的单色器

    公开(公告)号：US4455088A

    公开(公告)日：1984-06-19

    申请号：US347417

    申请日：1982-02-10

    Applicant: Masato Koike

    Inventor： Masato Koike

    IPC: G01J3/18 ,  G01J3/20

    CPC classification number: G01J3/1838 ,  G01J3/189

    Abstract: A constant deviation monochromator with a holographically formed concave grating and entrance and exit slits positioned on opposite sides of the plane including the Rowland circle of the grating, wherein the grating has been formed by using two coherent light sources positioned on the same side of the Rowland plane, whereby aberrations and stray light are substantially reduced.

    Abstract translation: 具有全息形成的凹形光栅的恒定偏差单色仪和位于包括光栅的罗兰圆的平面的相对侧上的入射和出射狭缝，其中通过使用位于罗兰的同一侧上的两个相干光源形成光栅 从而大大减少像差和杂散光。

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