SPECTROMÈTRE POUR L'ANALYSE DU SPECTRE D'UN FAISCEAU LUMINEUX
    41.
    发明公开
    SPECTROMÈTRE POUR L'ANALYSE DU SPECTRE D'UN FAISCEAU LUMINEUX 审中-公开
    SPECTROMÈTREPOUR L'ANALYZE DU SPTER D'UN FAISCEAU LUMINEUX

    公开(公告)号:EP2929307A1

    公开(公告)日:2015-10-14

    申请号:EP13808131.0

    申请日:2013-11-29

    Abstract: The present invention relates to a spectrometer (100) for analysing the spectrum of an upstream light beam (1), comprising an entrance slit (101) and collimating means (110) suitable for generating, from the upstream light beam, a collimated light beam (10), characterised in that it also comprises: a polarisation-dependent diffraction grating (120) suitable for diffracting, at each wavelength (11, 12) of the spectrum of the upstream light beam, the collimated light beam into a first diffracted light beam (11, 12) and a second diffracted light beam (21, 22); optical recombining means (130) comprising a planar optical reflecting surface (130) perpendicular to the grating and suitable for deviating at least the second diffracted light beam; and focusing means (140) suitable for focusing, at each wavelength, the first diffracted light beam and the second diffracted light beam onto one and the same focusing area (141).

    Abstract translation: 本发明涉及用于分析上游光束(1)的光谱的光谱仪(100),其包括入口狭缝(101)和准直装置(110),该准直装置适合于从上游光束产生准直光束 (10),其特征在于,其还包括:偏振相关衍射光栅(120),其适于在所述上游光束的光谱的每个波长(11,12)处衍射所述准直光束成为第一衍射光 光束(11,12)和第二衍射光束(21,22); 光学复合装置(130),包括平面光学反射表面(130),所述平面光学反射表面(130)垂直于所述光栅并且适于至少偏转所述第二衍射光束; 以及聚焦装置(140),适用于在每个波长将第一衍射光束和第二衍射光束聚焦到同一个聚焦区域(141)上。

    METHOD AND APPARATUS FOR LASER DIFFERENTIAL CONFOCAL SPECTRUM MICROSCOPY
    42.
    发明公开
    METHOD AND APPARATUS FOR LASER DIFFERENTIAL CONFOCAL SPECTRUM MICROSCOPY 审中-公开
    VERFAHREN UND VORRICHTUNGFÜREINE LASERDIFFERENTIELLE MIKROSKOPIE MIT KONFOKALEM SPEKTRUM

    公开(公告)号:EP2799844A1

    公开(公告)日:2014-11-05

    申请号:EP13871421.7

    申请日:2013-08-08

    CPC classification number: G01N21/47 G01N21/65 G01N21/658 G01N2201/063

    Abstract: The present invention belongs to a technical field of optical microscopic imaging and spectral measurement, and discloses a laser differential confocal mapping-spectrum microscopic imaging method and device. The core concept of the present invention is to combine the differential confocal detection and the spectrum detection techniques and use a dichroic beam splitting system (13) to separate the Rayleigh light for geometric position detection from the Raman scattering light for spectrum detection, by mean of the property that the zero-cross point of the differential confocal curve (43) accurately corresponds to the focus of the objective, the spectral information at focus of the excitation spot being accurately captured by a zero trigger to accomplish the spectrum detection with high spatial resolution. Therefore, the present invention provides a method and device that may be able to accomplish the spectrum detection with high spatial resolution to a micro-area of a sample. The advantages of the present invention include accurate positioning, high spatial resolution, high spectrum detection sensitivity and controllable size of measuring converging spot, and etc. Therefore, the present invention has broad application prospects in biomedical, forensic and other fields.

    Abstract translation: 本发明属于光学显微成像和光谱测量的技术领域,并且公开了一种激光微分共焦映射光谱显微成像方法和装置。 本发明的核心概念是组合差分共聚焦检测和光谱检测技术,并使用二向色分束系统(13)将用于几何位置检测的瑞利光与用于光谱检测的拉曼散射光分离,通过 差分共聚焦点曲线(43)的零交叉点与物镜的焦点精确对应的特性是,通过零触发准确地捕获激发光点焦点处的光谱信息,以实现高空间分辨率的光谱检测 。 因此,本发明提供了一种能够以高空间分辨率对样品的微区进行光谱检测的方法和装置。 本发明的优点包括精确定位,高空间分辨率,高光谱检测灵敏度和测量聚光点的可控尺寸等。因此,本发明在生物医学,法医学等领域具有广阔的应用前景。

    PARTICLE CHARACTERISATION INSTRUMENT
    44.
    发明公开
    PARTICLE CHARACTERISATION INSTRUMENT 审中-公开
    粒子表征仪器

    公开(公告)号:EP3309536A1

    公开(公告)日:2018-04-18

    申请号:EP16193377.5

    申请日:2016-10-11

    Abstract: A particle characterisation instrument (200), comprising a light source (201), a sample cell (202), an optical element (204) between the light source (201) and sample cell (202) and a detector (203). The optical element (204) is configured to modify light from the light source (201) to create a modified beam (207), the modified beam (207): a) interfering with itself to create an effective beam (208) in the sample cell (202) along an illumination axis (206) and b) diverging in the far field to produce a dark region (209) along the illumination axis (206) that is substantially not illuminated at a distance from the sample cell (202). The detector (203) is at the distance from the sample cell (202), and is configured to detect light scattered from the effective beam (208) by a sample in the sample cell (202), the detector (203) positioned to detect forward or back scattered light along a scattering axis (306) that is at an angle of 0° to 10° from the illumination axis (206).

    Abstract translation: 一种包括光源(201),样品池(202),在光源(201)和样品池(202)和检测器(203)之间的光学元件(204)的粒子表征仪器(200)。 所述光学元件(204)被配置为修改来自所述光源(201)的光以创建修改后的光束(207),所述修改后的光束(207):a)自行干涉以在所述样本中创建有效光束 沿着照明轴线(206)照射单元(202),以及b)在远场内发散以产生沿着照明轴线(206)的暗区域(209),其在距样本单元(202)一定距离处基本上未被照射。 检测器(203)与样本单元(202)相距一定距离,并且被配置为检测由样本单元(202)中的样本从有效射束(208)散射的光,检测器(203)被定位成检测 沿着与照明轴(206)成0°至10°的角度的散射轴(306)的前向或后向散射光。

    APPARATUS AND METHODS FOR ANALYZING THE OUTPUT OF MICROFLUIDIC DEVICES

    公开(公告)号:EP3180600A4

    公开(公告)日:2018-03-14

    申请号:EP15831303

    申请日:2015-08-14

    Abstract: Microfluidic devices for analyzing droplets are disclosed. A described microfluidic device includes a substrate and a microfluidic channel formed on the substrate. The microfluidic channel includes passages where each passage has a mask pattern configured to modulate a signal of a droplet passing through that passage, such that droplets passing through the passages produce signals. The microfluidic device also includes a detector configured to detect the signals. Methods of analyzing droplets with a microfluidic device having a microfluidic channel formed on a substrate are disclosed. A described method includes passing droplets through the passages, modulating signals from the droplets using mask patterns, formed on the passages; and detecting the signals.

    INTEGRATED CHROMATIC CONFOCAL SENSOR
    46.
    发明公开
    INTEGRATED CHROMATIC CONFOCAL SENSOR 审中-公开
    集成的色度共焦传感器

    公开(公告)号:EP3228979A1

    公开(公告)日:2017-10-11

    申请号:EP16180407.5

    申请日:2016-07-20

    Abstract: The present invention concerns a confocal chromatic device, comprising: at least one chromatic lens (13) with an extended axial chromatism; at least one broadband light source (19); at least one optical detection means (20, 21); and at least one measurement channel (24) with a planar Y-junction (18) made with a planar waveguide optics technology, and arranged for transferring light from said at least one light source (19) towards said at least one chromatic lens (13) and for transferring light reflected back through said at least one chromatic lens (13) towards said at least one optical detection means (20, 21).

    Abstract translation: 本发明涉及一种共焦彩色装置,包括:至少一个具有延伸的轴向色差的色差透镜(13) 至少一个宽带光源(19); 至少一个光学检测装置(20,21); 以及至少一个测量通道(24),其具有用平面波导光学技术制造的平面Y形接头(18),并且被布置为将来自所述至少一个光源(19)的光传输到所述至少一个色透镜(13 )并且用于将通过所述至少一个色透镜(13)反射回来的光朝向所述至少一个光学检测装置(20,21)传送。

    METHOD FOR 2D/3D INSPECTION OF AN OBJECT SUCH AS A WAFER
    47.
    发明公开
    METHOD FOR 2D/3D INSPECTION OF AN OBJECT SUCH AS A WAFER 审中-公开
    用于2D / 3D检查对象的方法,如晶片

    公开(公告)号:EP3228978A1

    公开(公告)日:2017-10-11

    申请号:EP16175444.5

    申请日:2016-06-21

    Abstract: The present invention concerns a method for inspecting the surface of an object (10) such as a wafer comprising tridimensional structures (11), using a confocal chromatic device with a plurality of optical measurement channels (24) and a chromatic lens (13) allowing optical wavelengths of a broadband light source (19) to be focused at different axial distances defining a chromatic measurement range, the method comprising a step of obtaining an intensity information corresponding to the intensity of the light actually focused on an interface of the object (10) within the chromatic measurement range at a plurality of measurement points (15) on the object (10) by measuring a total intensity over the full spectrum of the light collected by at least some of the optical measurement channels (24) in a confocal configuration.

    Abstract translation: 本发明涉及一种使用具有多个光学测量通道(24)和彩色透镜(13)的共焦彩色装置来检查诸如包括三维结构(11)的物体(10)的表面的方法, 宽带光源(19)的光学波长被聚焦在限定色度测量范围的不同轴向距离处,所述方法包括获得与实际聚焦在所述物体(10)的界面上的光的强度相对应的强度信息的步骤 )通过测量由共焦构造中的至少一些光学测量通道(24)收集的光的全光谱上的总强度而在物体(10)上的多个测量点(15)处的色度测量范围内 。

    構造化照明装置及び構造化照明顕微鏡装置
    49.
    发明申请
    構造化照明装置及び構造化照明顕微鏡装置 审中-公开
    结构照明装置和结构化照明显微镜装置

    公开(公告)号:WO2015008415A1

    公开(公告)日:2015-01-22

    申请号:PCT/JP2014/002855

    申请日:2014-05-29

    Abstract:  複数波長の各々で所望の超解像効果を得るために、本発明を例示する構造化照明装置は、複数波長の光を同時又は順次に射出する光源からの射出光束を複数の回折光束に回折する回折部と、前記回折部で回折された前記複数の回折光束による干渉縞を標本面に形成する光学系とを備え、前記光学系は、第1の光学系と、前記複数の回折光束を前記第1の光学系の瞳面又は瞳近傍面の各位置へ集光させる第2の光学系とを含み、前記複数波長に対する前記第2の光学系の倍率特性dY(λ)は、以下の条件を満たす。 (fo・nw-afλ/P) ≦ dY(λ) ≦ (fo・NA -afλ/P)、a=1(M=1、2の場合)、a=2(M=3の場合) 但し、Mは前記回折部が有する周期構造の方向数であり、λは前記複数波長の各々であり、dY(λ)は、前記複数波長の基準波長をλ 0 としたとき、基準波長λ 0 の像高2f・λ 0 /Pと、前記複数波長の各々の波長λの像高2f・λ/Pとの差であり、foは前記第1の光学系の基準波長λ 0 の焦点距離、fは前記第2の光学系の基準波長λ 0 の焦点距離、Pは前記回折部の構造周期、NAは前記第1の光学系の開口数であり、nwは標本の屈折率である。

    Abstract translation: 为了在多个波长的每一个中获得期望的超分辨率效果,根据本发明的实施例的结构化照明装置设置有用于将多个衍射光束衍射到发射光的衍射单元 同时或顺序地发射多个波长的光的光源的光束;以及用于在样品表面上形成由衍射单元衍射的衍射光的干涉图案的光学系统。 光学系统包括第一光学系统和第二光学系统,用于将衍射光束收集到第一光学系统的光瞳平面上或瞳孔附近的平面上。 第二光学系统相对于波长的放大特性(dY(λ))满足以下条件。 (fo·nw-afλ/ P)≤dY(λ)≤(fo·NA-afλ/ P)和a = 1(当M = 1或2)或a = 2(当M = 3时),其中M表示 衍射单位的周期结构的方向数λ表示各波长,dY(λ)表示基准波长λ0的图像高度2f·λ0/ P与图像高度2f·λ/ P的差 对于多个波长的参考波长为λ0时,从多个波长中的每个波长λ,fo表示第一光学系统的参考波长λ0的焦距,f表示参考波长λ0的焦距 第二光学系统的P表示衍射单元的结构周期,NA表示第一光学系统的开口数,nw表示样品的折射率。

    激光差动共焦图谱显微成像方法与装置

    公开(公告)号:WO2014110900A1

    公开(公告)日:2014-07-24

    申请号:PCT/CN2013/081066

    申请日:2013-08-08

    CPC classification number: G01N21/47 G01N21/65 G01N21/658 G01N2201/063

    Abstract: 一种激光差动共焦图谱成像方法与装置,融合差动共焦探测和光谱探测技术,并利用二向色分光系统对瑞利光和拉曼散射光进行分离,其中,拉曼散射光进行光谱探测,瑞利光进行几何位置探测,利用差动共焦曲线过零点与焦点位置精确对应这一特性,通过过零点触发来精确捕获激发光斑焦点位置的光谱信息,实现高空间分辨的光谱探测,构成可实现样品微区高空间分辨光谱探测的方法和装置。上述方法和装置具有定位准确,高空间分辨,光谱探测灵敏度高和测量聚焦光斑尺寸可控等优点,在生物医学、法庭取证等领域有应用前景。

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