公开(公告)号：EP0559433B1

公开(公告)日：1996-12-27

申请号：EP93301579.4

申请日：1993-03-02

Applicant: NIPPON SHEET GLASS CO., LTD.

Inventor： Ikafuji, Masaharu 6-3 Nippon Sheet Glass Company ,  Ichise, Nagayoshi ,  Odawara, Mitsuo ,  Abe, Junichi

IPC: G01N21/89

CPC classification number: G01N21/896 ,  G01N2201/1085

公开(公告)号：EP0594735A4

公开(公告)日：1994-08-10

申请号：EP92915627

申请日：1992-07-07

Applicant: REYNOLDS METALS CO

Inventor： HARTMAN NILE F ,  LARSEN JAMES W ,  VERBER CARL M

IPC: G01N21/59 ,  G01N21/86 ,  G01N21/88 ,  G01N21/89 ,  G01N21/892 ,  G01N21/93

CPC classification number: G01N21/8901 ,  G01N2021/4711 ,  G01N2021/5961 ,  G01N2021/8627 ,  G01N2201/0233 ,  G01N2201/04 ,  G01N2201/1085

Abstract: An apparatus (10) for inspecting the surface of an object S moving in the direction of travel (23) relative to the apparatus comprises a modular sensing head assembly (11) including a plurality of sensing head modules (12, 13), each of which includes a number of sensing stations (16 - 21). Each sensing station includes a light source (77, 81, 84) for generating a line of light extending across substantially the width of the surface of the object and a plurality of optical detector means for detecting light scattered from the line of light by the surface of the object. The optical detectors are positioned and oriented to receive scattered light scattered along paths lying in detection planes which are perpendicular to each other and perpendicular to the surface of the object. Signal processing electronics are provided to convert the light received by the detectors into analog signals which are multiplexed, converted to digital signals, filtered and then compared to preselected thresholds to determine the existence of any defects in the surface.

公开(公告)号：EP0594735A1

公开(公告)日：1994-05-04

申请号：EP92915627.0

申请日：1992-07-07

Applicant: REYNOLDS METALS COMPANY

Inventor： HARTMAN, Nile, F. ,  LARSEN, James, W. ,  VERBER, Carl, M.

IPC: G01N21

CPC classification number: G01N21/8901 ,  G01N2021/4711 ,  G01N2021/5961 ,  G01N2021/8627 ,  G01N2201/0233 ,  G01N2201/04 ,  G01N2201/1085

Abstract: Appareil (10) servant à examiner la surface d'un objets se déplaçant dans un sens de parcours (23) par rapport à l'appareil. Ledit appareil (10) est constitué d'un ensemble tête de détection (11) modulaire comprenant une pluralité de modules (12, 13) de tête de détection qui comportent chacun plusieurs unités de détection (16, 21). Chaque unité de détection comprend une source de lumière (77, 81, 84) qui génère un rayon de lumière s'étendant pratiquement sur la largeur de la surface de l'objet, et plusieurs détecteurs optiques qui détectent la lumière du rayon de lumière qui est dispersée par la surface de l'objet. Les détecteurs optiques sont positionnés et orientés de manière à recevoir la lumière dispersée selon des trajectoires situées dans des plans de détection qui sont perpendiculaires entre eux et par rapport à la surface de l'objet. Des systèmes électroniques de traitement des signaux sont prévus pour transformer la lumière reçue par les détecteurs en signaux analogiques qui sont multiplexés, convertis en signaux numériques, filtrés et ensuite comparés à des seuils présélectionnés pour déterminer la présence d'un quelconque défaut dans cette surface.

Abstract translation: 装置（10），用于检查沿相对于装置的行进方向（23）移动的物体的表面。 该设备（10）包括模块化传感头组件（11），该模块化传感头组件包括多个传感头模块（12,13），每个模块具有多个传感单元（16,21）。 每个检测单元包括产生基本上跨物体表面的宽度延伸的光束的光源（77,81,84），以及检测光束的光的多个光学检测器，其中 被物体的表面分散。 光学传感器被定位和定向以接收沿彼此垂直并且到物体表面的检测平面中的路径的散射光。 提供电子信号处理系统以将由检测器接收的光转换为模拟信号，所述模拟信号被多路复用，转换为数字信号，过滤并且然后与预选阈值进行比较以确定该表面中存在任何缺陷。

公开(公告)号：EP0406030A2

公开(公告)日：1991-01-02

申请号：EP90400529.5

申请日：1990-02-26

Applicant: QC OPTICS, INC.

Inventor： Johnson, Carly E. ,  Ormsby, Jay L. ,  Chase, Eric T. ,  Quackenbos, George S. ,  Broude, Sergey V. ,  Boudour, Abdu

IPC: G01N21/88

CPC classification number: G01N21/95607 ,  G01N2021/4714 ,  G01N2021/95676 ,  G01N2201/1085

Abstract: An optical inspection system and method for detecting flaws on a diffractive surface such as a reticle or wafer, includes illuminating a surface to be inspected to generate a first scattered energy angular distribution in response to a flaw on the surface and a second scattered energy angular distribution in response to an unflawed surface; the first and second energy distributions are sensed and the minimum energy detection energy level is established; determining whether the minimum detected energy level is in a first or second predetermined energy range and indicating that no flaw is present when the minimum detected energy level is in the first range and a flaw is present when the minimum detected energy level is in the second range.

Abstract translation: 为具有衍射表面检测的缺陷的光学检查系统和方法：诸如掩模版或晶片，包括：照明表面，以进行检查，以产生响应的第一散射能量角分布到一个缺陷的表面上以及第二散射能量的角分布 响应于在无缺陷表面上; 所述第一和第二能量分布进行感测和最小能量检测能量水平被建立; 确定性采矿无论最小检测的能量电平是在第一或第二预定能量范围和表示没有无缺陷是存在当最小检测的能量电平是在第一范围和一个缺陷是存在当最小检测的能量电平是在所述第二范围 ，

公开(公告)号：JP4688667B2

公开(公告)日：2011-05-25

申请号：JP2005364420

申请日：2005-12-19

Applicant: パロ・アルト・リサーチ・センター・インコーポレーテッドPalo Alto Research Center Incorporated

Inventor： エヌ カリー ダグラス ,  エイチ ブルース リチャード

IPC: G01N21/64 ,  G01N21/78

CPC classification number: G01N21/6456 ,  G01N15/1468 ,  G01N2201/1085

公开(公告)号：JPS61107106A

公开(公告)日：1986-05-26

申请号：JP22875984

申请日：1984-10-30

Applicant: Meinan Mach Works Inc

Inventor： IWAMOTO HIROHIKO

IPC: G02B6/00 ,  G01B11/30 ,  G01N21/89 ,  G01N21/892 ,  G01N21/898 ,  G02B6/04 ,  G02B6/08

CPC classification number: G01N21/8986 ,  G01N2201/1085

Abstract: PURPOSE: To well perform detection, by providing a light source to one side of a shield plate, of which the leading end is contacted with the surface of plywood in a slidable manner while providing an optical fiber to the other side thereof and contacting one end of the optical fiber with the surface of the plywood in a slidable manner and directing the other end thereof to a light detector.
CONSTITUTION: When plywood 1 is inspected while moved, light emitted to the direction shown by the arrow from the light source provided to the left side of a shield part 2 passes through a concaved flaw 1a to be incident to a large number of optical fibers 3 from one terminals 3a thereof and only the optical fiber 3, of which the terminal part is positioned above said flaw 1a, strongly emits light from the other terminal part 3b thereof toward a light detector. The light detector detects the presence of the concaved flaw 1a, for example, due to a worm-eaten hole by the difference in the brightness with the other optical fiber 3. Furthermore, the flaw at a built-up part can be detected in the same way.
COPYRIGHT: (C)1986,JPO&Japio

Abstract translation: 目的：为了良好地执行检测，通过在屏蔽板的一侧提供光源，其中前端以可滑动的方式与胶合板的表面接触，同时向其另一侧提供光纤并使一端 的光纤，其中胶合板的表面以可滑动的方式并将其另一端引导到光检测器。 构成：当移动时检查胶合板1时，从设置在屏蔽部分2的左侧的光源向箭头所示的方向发射的光通过凹陷缺损1a以入射到大量光纤3 从其一个端子3a，并且只有端子部分位于所述缺陷1a上方的光纤3强烈地从其另一个端子部分3b向光检测器发射光。 光检测器例如由于通过与其他光纤3的亮度差而被蠕虫吃掉的孔来检测凹陷缺陷1a的存在。此外，可以在 同样的方式。

公开(公告)号：KR100815722B1

公开(公告)日：2008-03-20

申请号：KR1020050038838

申请日：2005-05-10

Applicant: 후지쯔 가부시끼가이샤

Inventor： 안도모리토시 ,  사카이사토루

IPC: G01N21/88

CPC classification number: G01N21/896 ,  G01N2021/9513 ,  G01N2201/1085

Abstract: 본 발명은 물질 표면의 결함 상태를 상세하게 검출할 수 있는 표면 검사 장치 및 표면 검사 방법을 제공하는 것을 목적으로 한다.
검사면(40)에 조사된 조사광이 반사되었을 때의 반사광의 강도에 기초하여 검사면(40)을 검사하는 표면 검사 장치 및 표면 검사 방법에 있어서, 광섬유(41) 및 확산판(42)은 검사면(40)측일수록 강도가 큰 광 강도 분포를 갖는 조사광을 검사면(40)에 조사하고, CCD 센서(44)는 조사광이 검사면(40)에 의해 반사되었을 때의 반사광의 강도를 검출한다.

公开(公告)号：KR1019900005643B1

公开(公告)日：1990-08-01

申请号：KR1019850008057

申请日：1985-10-30

Applicant: 가부시키가이샤 메이난 세이사꾸쇼

Inventor： 이와모또야스히꼬

IPC: G01B11/30

CPC classification number: G01N21/8986 ,  G01N2201/1085

Abstract: The plywood board which is undergoing examination is moved in the arrowed direction with its upper surface in intimate contact with the trailing edge of a metallic leaf spring acting as the light shielding plate. The shield is inclined and may alternately be made of a flexible rubbr or plastic. A light source is uniformly covering the full width of the board. On the rear side of the shield is an array of closely spaced optical fibres, the distal ends of which are focused on an optical detector. Any defect in the surface or abnormal undulation of the surface results in a gap beneath the shielding plate and light transmission to optical fibres.

Abstract translation: 正在进行检查的胶合板被沿着箭头方向移动，其上表面与用作遮光板的金属板簧的后缘紧密接触。 屏蔽是倾斜的，也可以由柔性橡胶或塑料制成。 光源均匀地覆盖板的整个宽度。 在屏蔽的后侧是紧密间隔的光纤的阵列，其远端聚焦在光学检测器上。 表面的任何缺陷或表面的异常波动导致屏蔽板下面的间隙和光纤的光传输。

公开(公告)号：EP1674852B1

公开(公告)日：2017-10-11

申请号：EP05112479.0

申请日：2005-12-20

Applicant: SRI International

Inventor： Curry, Douglas N. ,  Bruce, Richard H.

IPC: G01N15/14 ,  G01N21/64

CPC classification number: G01N21/6456 ,  G01N15/1468 ,  G01N2201/1085

公开(公告)号：EP2385362A1

公开(公告)日：2011-11-09

申请号：EP10192451.2

申请日：2010-11-24

Applicant: Brightview Systems Ltd.

Inventor： Finarov, Moshe

IPC: G01N21/65

CPC classification number: G01B11/06 ,  G01B11/0625 ,  G01N21/31 ,  G01N21/6489 ,  G01N21/65 ,  G01N21/8422 ,  G01N21/8901 ,  G01N2021/3568 ,  G01N2021/8908 ,  G01N2201/0826 ,  G01N2201/0833 ,  G01N2201/1085

Abstract: Photovoltaic thin film quality control is obtained where the thin film is supported by a support and a section of the film is illuminated by a polychromatic or monochromatic illumination source. The source forms on the thin film an illuminated line. The light collected from discrete sampled points located on the illuminated line is transferred to a photo-sensitive sensor through an optical switch. The spectral signal of the light reflected, transmitted or scattered by the sampled points is collected by the sensor, processed and photovoltaic thin film parameters applicable to the quality control are derived e.g. thin film thickness, index of refraction, extinction coefficient, absorption coefficient, energy gap, conductivity, crystallinity, surface roughness, crystal phase, material composition and photoluminescence spectrum and intensity. Manufacturing equipment parameters influencing the material properties may be changed to provide a uniform thin film layer with pre-defined properties.

Abstract translation: 获得光电薄膜质量控制，其中薄膜由支撑体支撑并且膜的一部分被多色或单色照明源照射。 源在薄膜上形成一条照明线。 从位于照明线上的离散采样点收集的光通过光学开关转移到光敏传感器。 由采样点反射，传播或散射的光的光谱信号由传感器收集，处理和适用于质量控制的光伏薄膜参数例如被导出。 薄膜厚度，折射率，消光系数，吸收系数，能隙，导电率，结晶度，表面粗糙度，结晶相，材料组成和光致发光光谱和强度。 可以改变影响材料性能的制造设备参数，以提供具有预定特性的均匀薄膜层。