公开(公告)号：KR100492159B1

公开(公告)日：2005-06-02

申请号：KR1020020066613

申请日：2002-10-30

Applicant: 삼성전자주식회사

Inventor： 전충삼 ,  최선용 ,  김광수 ,  김주우 ,  최정현 ,  박동진

IPC: H01L21/66

CPC classification number: H01L21/67253 ,  G01N21/9503 ,  G01N21/95607 ,  G01N2021/0162 ,  G01N2021/0187 ,  G01N2021/1736 ,  G01N2021/1772 ,  G01N2021/8411 ,  G01N2021/8896 ,  G01N2021/95615 ,  G01N2201/103 ,  G01N2201/1087

Abstract: 기판의 EBR/EEW 검사, 패턴의 결함 검사 및 레티클 에러 검사를 모두 수행할 수 있는 자동화된 통합 기판 검사 장치가 개시되어 있다. 제1이미지 획득부는 기판의 가장자리의 제1이미지를 획득하며, 제2이미지 획득부는 기판의 패턴에 대한 제2이미지를 획득한다. 제1이미지는 제1스테이지에 지지된 기판으로부터 획득되며, 제2이미지는 제2스테이지에 지지된 기판으로부터 획득된다. 이송 로봇은 제1스테이지로부터 제2스테이지로 기판을 이송한다. 이미지 처리부는 제1이미지로부터 기판의 EBR/EEW 검사를 수행하며, 제2이미지로부터 패턴의 결함 검사 및 레티클 에러 검사를 수행한다. 다양한 기판의 검사 공정을 통합 기판 검사 장치를 통해 수행하므로 기판 검사 공정의 효율이 향상되고, 다양한 기판 검사 공정의 신뢰도가 향상된다.

公开(公告)号：KR1020140130250A

公开(公告)日：2014-11-10

申请号：KR1020130047349

申请日：2013-04-29

Applicant: 한국식품연구원

Inventor： 최성욱 ,  김현정 ,  이나리 ,  장현주 ,  옥경식

IPC: G01N21/00

CPC classification number: G01N21/00 ,  G01N21/01 ,  G01N21/88 ,  G01N21/8806 ,  G01N2201/10 ,  G01N2201/1087

Abstract: 본 발명의 일 실시예와 관련된 스캐닝(scanning) 모듈은 광원으로부터 입사되는 전자기파의 경로를 변경시키는 제 1 경로 변경부와, 상기 제 1 경로 변경부를 이동시켜 상기 전자기파의 경로를 조절하는 제 1 구동부 및, 상기 제 1 경로 변경부에 의해 경로가 변경된 전자기파를 이용하여 피검물의 적어도 일부분에 베셀 빔이 형성되도록 하는 베셀 빔 형성부를 포함포함한다.

Abstract translation: 根据本发明的实施例，扫描模块包括：第一路径改变单元，其改变从光源进入的电磁波的路径; 第一驱动单元，其通过移动第一路径改变单元来调节电磁波的路径; 以及贝塞尔束形成单元，其使用由第一路径改变单元改变路径的电磁波，在要检查的对象的至少一部分中形成贝塞尔光束。

公开(公告)号：EP3268726A1

公开(公告)日：2018-01-17

申请号：EP16709557.9

申请日：2016-03-08

Applicant: Renishaw Plc.

Inventor： SMITH, Timothy ,  BLACKWELL-WHITEHEAD, Richard, John

IPC: G01N21/65 ,  G01J3/44 ,  G01J3/06 ,  G02B21/00

CPC classification number: G01J3/44 ,  G01J3/06 ,  G01J2003/064 ,  G01N21/65 ,  G01N2201/103 ,  G01N2201/1045 ,  G01N2201/1087 ,  G02B21/002

Abstract: A transmission Raman spectroscopy apparatus has a light source for generating a light profile on a sample, a photodetector having at least one photodetector element, collection optics arranged to collect Raman scattered light transmitted through the sample and direct the Raman light onto the at least one photodetector element and a support for supporting the sample. The support and light source are arranged such that the light profile can be moved relative to the sample in order that the at least one photodetector element receives Raman scattered light generated for different locations of the light profile on the sample.

公开(公告)号：EP0207485B1

公开(公告)日：1991-09-04

申请号：EP86108894.6

申请日：1986-06-30

Applicant: DIATRON CORPORATION

Inventor： Dandliker, Walter B. ,  Barr, Howard S. ,  Katzenstein, Henry S. ,  Watson, W. Keith R.

IPC: G01N21/64 ,  H04N5/30 ,  G02F1/03 ,  G02B21/16

CPC classification number: G01N21/6408 ,  G01N21/6456 ,  G01N21/6458 ,  G01N2201/1087 ,  G02B21/16

公开(公告)号：EP0155247B1

公开(公告)日：1991-06-05

申请号：EP85850055.6

申请日：1985-02-19

Applicant: MOLECULAR DYNAMICS

Inventor： Carlsson, Kjell Sture

IPC: G02B21/00

CPC classification number: G02B21/002 ,  G01N21/474 ,  G01N21/5911 ,  G01N21/6456 ,  G01N2201/1087 ,  G02B21/0096

公开(公告)号：EP0207485A3

公开(公告)日：1988-12-21

申请号：EP86108894

申请日：1986-06-30

Applicant: DIATRON CORPORATION

Inventor： Dandliker, Walter B. ,  Barr, Howard S. ,  Katzenstein, Henry S. ,  Watson, W. Keith R.

IPC: G01N21/64 ,  H04N05/30 ,  G02F01/03 ,  G02B21/16

CPC classification number: G01N21/6408 ,  G01N21/6456 ,  G01N21/6458 ,  G01N2201/1087 ,  G02B21/16

Abstract: A fluorometer for measuring a particular fluorescence emanating from a specimen, including producing a burst of concentrated light energy and directing the concentrated light energy toward the specimen to produce a fluorescence from the specimen including the particular fluorescence. Preferably producing an image of the fluoresence. Detecting the fluorescence and producing a signal in accordance with the fluorescence. Controlling the passage of the image of the fluorescence for detecting within a particular time period so as to optimize the detection of the particular fluorescence. Timing the operation to sequence the detection of the fluorescence within the particular time period after the production of the burst of concentrated light energy. Scanning the fluorescence from the specimen for forming signals representative of the fluorescence from the specimen. Analyzing the signals to enhance the portion of the signal representing the particular fluorescence relative to the portion of the signal.

公开(公告)号：EP0155247A3

公开(公告)日：1988-06-08

申请号：EP85850055

申请日：1985-02-19

Applicant: SARASTRO AB

Inventor： Carlsson, Kjell Sture

IPC: G02B21/00

CPC classification number: G02B21/002 ,  G01N21/474 ,  G01N21/5911 ,  G01N21/6456 ,  G01N2201/1087 ,  G02B21/0096

Abstract: A method for microphotometering individual volume elements of a microscope specimen, comprising generating a luminous dot or cursor and progressively illuminating a plurality of part elements in the focal plane of the microscope (30) through the specimen. The mutual position between the specimen and the focal plane is then changed and a plurality of part elements in the focal plane are illuminated. Reflected and/or fluorescent light and transmitted light respectively created by the illumination is collected, detected and stored for generating a three-dimensional image of that part of the specimen composed of the volume elements. Illumination of multiples of part elements is deflected by deflecting the luminous cursor or by moving the specimen or by both deflecting the cursor and also displacing the specimen. The change in the relative mutual position between the specimen and the focal plane of the microscope (30) is effected either by displacing the specimen or the objective. Apparatus for carrying out the method include a specimen table (301), a microscope objective and light source (31, 32, 33). The table (301) or the objective are arranged for stepwise movement along the main axis of the microscope synchronously with punctilinear light scanning of the specimen. The table (301) is arranged for stepwise movement at right angles to the main axis and/or the light source (31, 32, 33) is arranged for deflection over the focal plane through the specimen.

公开(公告)号：EP2620762A4

公开(公告)日：2014-03-26

申请号：EP11826797

申请日：2011-09-16

Applicant: OLYMPUS CORP

Inventor： TANABE TETSUYA

IPC: G01N21/64 ,  G01N15/10

CPC classification number: G01N21/85 ,  G01N15/1434 ,  G01N21/6452 ,  G01N21/6458 ,  G01N2021/6419 ,  G01N2021/6421 ,  G01N2201/1087 ,  G02B21/0052 ,  G02B21/0076 ,  G02B21/008

公开(公告)号：EP0319797B1

公开(公告)日：1996-01-31

申请号：EP88119684.4

申请日：1988-11-25

Applicant: MITSUI MINING & SMELTING CO., LTD.

Inventor： Moriya, Kazuo

IPC: G01N21/88 ,  G06T7/60

CPC classification number: G06T7/0004 ,  G01N21/9505 ,  G01N2021/1785 ,  G01N2021/4735 ,  G01N2021/8887 ,  G01N2201/102 ,  G01N2201/1087 ,  G06T2207/10056 ,  G06T2207/30148

公开(公告)号：EP0263621B1

公开(公告)日：1992-07-22

申请号：EP87308443.8

申请日：1987-09-24

Applicant: Weiser, Sidney

Inventor： Weiser, Sidney

IPC: G01N21/55

CPC classification number: G01N21/55 ,  G01N2201/1045 ,  G01N2201/1087