Abstract:
Disclosed are methods and devices suitable for generating electron beams and pulses of radiation. Specifically, in some disclosed embodiments, multiple emitting electrodes of a ferroelectric emitter are sequentially activated, generating a relatively long electron beam pulse that is substantially a series of substantially consecutive short electron beam pulses generated by the sequentially-activated individual emitting electrodes.
Abstract:
A ferroelectric emitter is described. The ferroelectric emitter of the present invention includes a ferroelectric layer having a first side, an opposing second side, and a top surface, a first and a second electrode formed along the top surface of the ferroelectric layer, and a mask layer which has a predetermined pattern and is formed along the top surface of the ferroelectric layer between the first and second electrodes. When used in ferroelectric switching emission lithography, the ferroelectric emitter of the present invention allows electron emission from a wide or narrow gap of a mask layer and from an isolated pattern such as a doughnut shape while facilitating re-poling in pyroelectric electron emission.
Abstract:
PURPOSE: A ferroelectric emitter is provided to allow electrons to be emitted from narrow or wide portion of a mask pattern, pattern a closed doughnut pattern, and eliminate heating to Curie temperature in electron emission of a pyroelectric. CONSTITUTION: A ferroelectric emitter comprises a ferroelectric layer(11) and an insert electrode(12) at the top center of the ferroelectric layer(11). A dielectric layer(13) is formed on both sides of the top of the ferroelectric layer(11) and the top of the insert electrode(12) to cover the insert electrode(12). A pattern is formed into the top of the dielectric layer(13). The insert electrode(12) is located under the patterned portion of the dielectric layer(13). A dummy electrode(14) is formed on a remaining portion, that is not patterned, of the top of the dielectric layer(13). A bottom electrode(15) is formed under the ferroelectric(11) to apply external charges during operation of the ferroelectric emitter.
Abstract:
Provided is a piezoelectric-film-type electron emitter which enables suppression of reduction of electron emission quantity due to repeated use thereof, and which exhibits high durability. The electron emitter includes a substrate (11); an emitter section (12) formed of a dielectric material; a first electrode (14) formed on the top surface of the emitter section; and a second electrode (16) formed on the bottom surface of the emitter section. The dielectric material forming the emitter section contains a dielectric composition having an electric-field-induced strain (i.e., percent deformation under application of an electric field of 4 kV/mm, as measured in a direction perpendicular to the electric field) of 0.07% or less.
Abstract:
A dielectric device of higher performance is provided. An electron emitter (12), to which the dielectric device is applied is provided with: an emitter including a dielectric; and an upper electrode (14) and a lower electrode (16) to which drive voltage is applied in order to emit electrons. The emitter is formed by the aerosol deposition method or the sol impregnation method, and the surface roughness of the upper surface thereof is controlled in the range from 0.1 to 3 in Ra.
Abstract:
An electron emission element, which comprises an electric field application unit composed of a dielectric, a first electrode formed on one surface thereof, and a second electrode formed on the same surface, for forming a slit along with a drive electrode, and which is formed on a substrate.
Abstract:
Provided is a piezoelectric-film-type electron emitter which enables suppression of reduction of electron emission quantity due to repeated use thereof, and which exhibits high durability. The electron emitter includes a substrate (11); an emitter section (12) formed of a dielectric material; a first electrode (14) formed on the top surface of the emitter section; and a second electrode (16) formed on the bottom surface of the emitter section. The dielectric material forming the emitter section contains a dielectric composition having an electric-field-induced strain (i.e., percent deformation under application of an electric field of 4 kV/mm, as measured in a direction perpendicular to the electric field) of 0.07% or less.
Abstract:
An electron-emitting element includes an electric field applying portion (1) composed of a dielectric, a first electrode (2) formed on one surface of the electric field applying portion, and a second electrode (3) being formed on the surface and forming a slit in cooperation with the first electrode, and is formed on a substrate (4).
Abstract:
Provided is a dielectric composition which, when applied to an electron emitter, enables suppression of reduction of electron emission quantity with passage of time. The dielectric composition contains, as a primary component, a PMN-PZ-PT ternary solid solution composition represented by the following formula Pb x Bi p (Mg y/3 Nb 2/3 ) a Ti b-z M z Zr c O 3 [wherein x, p, and y satisfy the following relations: 0.85 ≤ x ≤ 1.05, 0.02 ≤ p ≤ 0.1, and 0.8 ≤ y ≤ 1.0; a, b, and c are decimal numbers falling within a region formed by connecting the following five points (0.550, 0.425, 0.025), (0.550, 0.150, 0.300), (0.100, 0.150, 0.750), (0.100, 0.525, 0.375), and (0.375, 0.425, 0.200); z satisfies the following relation: 0.02 ≤ z ≤ 0.10; and M is at least one element selected from among Nb, Ta, Mo, and W], and contains Ni in an amount of 0.05 to 2.0 wt.% as reduced to NiO.