浸渍阴极
    41.
    发明授权

    公开(公告)号:CN86101082B

    公开(公告)日:1988-12-28

    申请号:CN86101082

    申请日:1986-02-06

    CPC classification number: H01L29/515 H01L29/42372

    Abstract: 本发明涉及一种浸渍阴极,其特点是在浸渍阴极圆片表面至少有两层薄膜:下面是由如Os、Ru、Rh、Pd、Ir、Pt、Re、Mo、W、Ta等组成的高熔点金属薄膜;上层是含Sc2O3的高熔点金属层,并覆盖于下层之上。浸渍阴极圆片是用电子发射材料浸渍难熔多孔质基体而制成。本发明也涉及有此阴极的电子管。此阴极表面有长时期稳定的低逸出功单原子层。

    SCANDATE DISPENSER CATHODE
    42.
    发明申请
    SCANDATE DISPENSER CATHODE 审中-公开
    SCANDATE分配器阴极

    公开(公告)号:WO2006067670A3

    公开(公告)日:2006-09-14

    申请号:PCT/IB2005054197

    申请日:2005-12-13

    CPC classification number: H01J1/28

    Abstract: A scandate dispenser cathode having a cathode body (4) arranged on a cathode support (3), a cathode coating (5, 6) comprising a layer system (6) consisting of one or more alternating layers of rhenium or a rhenium alloy (61) and of scandium oxide or a scandium alloy (62), and an activation acceleration layer system (5) arranged between the cathode body (4) and the layer system (6), said activation acceleration layer system comprising at least one release layer (52) comprising alkaline earth metal oxide, preferably barium oxide, and an activator layer system (51) comprising a barrier material with greater oxidation resistance than the material of the cathode body and an activator material for reducing the alkaline earth metal oxide, preferably barium oxide.

    Abstract translation: 具有布置在阴极支撑体(3)上的阴极体(4),阴极涂层(5,6),其包括由铼或铼合金(61)的一个或多个交替层组成的层系统(6) )和氧化钪或钪合金(62)以及布置在阴极体(4)和层系统(6)之间的活化加速层系统(5),所述活化加速层系统包括至少一个释放层 包括碱土金属氧化物,优选氧化钡和活化剂层系统(51),所述活化剂层系统(51)包含比所述阴极体的材料具有更高抗氧化性的阻挡材料和用于还原所述碱土金属氧化物的活化剂材料,优选氧化钡 。

    CATHODE ARRANGEMENT, ELECTRON GUN, AND LITHOGRAPHY SYSTEM COMPRISING SUCH ELECTRON GUN
    43.
    发明申请
    CATHODE ARRANGEMENT, ELECTRON GUN, AND LITHOGRAPHY SYSTEM COMPRISING SUCH ELECTRON GUN 审中-公开
    包括这种电子枪的阴极布置,电子枪和光刻系统

    公开(公告)号:WO2015101537A1

    公开(公告)日:2015-07-09

    申请号:PCT/EP2014078993

    申请日:2014-12-22

    Abstract: The invention relates to a cathode arrangement (20) comprising: a cathode body housing an emission surface (32) for emitting electrons in a longitudinal direction (Z), wherein the emission surface is bounded by an emission perimeter (35); a focusing electrode (40) at least partially enclosing the cathode body in a transversal direction and comprising an electron transmission aperture (44) for focusing the electrons emitted by the emission surface, wherein the aperture is bounded by an aperture perimeter (45), wherein the cathode body is moveably arranged within the focusing electrode over a maximum transversal distance (d1) from an aligned position (R0), and wherein the aperture perimeter transversally extends over the emission surface and beyond the emission perimeter over an overlap distance (d2) that exceeds the maximum transversal distance.

    Abstract translation: 本发明涉及一种阴极布置(20),包括:阴极主体,该阴极主体容纳用于沿纵向方向(Z)发射电子的发射表面(32),其中发射表面由发射周界(35)界定; 聚焦电极(40),所述聚焦电极(40)在横向方向上至少部分地包围所述阴极体并且包括用于聚焦由所述发射表面发射的所述电子的电子传输孔(44),其中所述孔由孔周边(45) 所述阴极体在与所述对准位置(R 0)相距最大横向距离(d 1)的范围内可移动地布置在所述聚焦电极内,并且其中所述孔周边横跨所述发射表面并且在重叠距离(d 2)之上横跨所述发射周界横向延伸, 超过最大横向距离。

    ELEKTRONENKANONE
    44.
    发明申请
    ELEKTRONENKANONE 审中-公开

    公开(公告)号:WO2020058053A1

    公开(公告)日:2020-03-26

    申请号:PCT/EP2019/074183

    申请日:2019-09-11

    Abstract: Es wird eine Elektronenkanone angegeben,die eine einen Kathodenhalter und einen Kathodenkörper aufweisende Kathode und einen Wehnelt-Zylinder umfasst, wobei der Kathodenhalter den Kathodenkörper aufnimmt und der Wehnelt-Zylinder geeignet ist, freie Elektronen, die aus dem Kathodenkörper in Richtung des Wehnelt-Zylinders austreten können, zu einem Elektronenstrahl zu bündeln, und der Wehnelt-Zylinder zumindest abschnittsweise entlang einer dem Kathodenhalter zugewandten ersten Innenfläche formschlüssig auf einer Außenfläche des Kathodenhalters angeordnet ist und den Kathodenhalter zumindest teilweise umschließt.

    CATHODE STRUCTURE AND PRODUCTION METHOD THEREFOR AND ELECTRON GUN AND CATHODE RAY TUBE
    45.
    发明申请
    CATHODE STRUCTURE AND PRODUCTION METHOD THEREFOR AND ELECTRON GUN AND CATHODE RAY TUBE 审中-公开
    阴极结构及其制造方法及电子枪和阴极射线管

    公开(公告)号:WO02052599A1

    公开(公告)日:2002-07-04

    申请号:PCT/JP2001/011494

    申请日:2001-12-26

    CPC classification number: H01J1/16 H01J1/13 H01J1/28 H01J9/04 H01J29/04

    Abstract: A cathode electrode (cathode structure) capable of reducing an electron beam spot diameter and a cathode drive voltage, and ensuring an extended stabilization of a cathode current. A cathode electrode which is formed with a non-electron-beam-emitting dent or region (9a) in the vicinity of the center or the outer periphery of the emissive material (9) of the cathode electrode (1) to thereby emit a hollow electron beam (13), and a production method therefor; and an electron gun and a cathode ray tube.

    Abstract translation: 能够减小电子束光斑直径和阴极驱动电压的阴极电极(阴极结构),并确保阴极电流的稳定化。 一种在阴极电极(1)的发光材料(9)的中心或外周附近形成有非电子束发射凹陷或区域(9a)的阴极,从而发射中空 电子束(13)及其制造方法; 以及电子枪和阴极射线管。

    CATHODE-RAY TUBE HAVING OXIDE CATHODE AND METHOD FOR PRODUCING THE SAME
    46.
    发明申请
    CATHODE-RAY TUBE HAVING OXIDE CATHODE AND METHOD FOR PRODUCING THE SAME 审中-公开
    具有氧化物阴极的阴极射线管及其制造方法

    公开(公告)号:WO99059178A1

    公开(公告)日:1999-11-18

    申请号:PCT/JP1999/002461

    申请日:1999-05-13

    CPC classification number: H01J9/042 H01J1/142 H01J1/20 H01J9/02

    Abstract: A cathode-ray tube having a high resolution achieved without lowering the electron emission characteristics. A printing paste containing a mixture, in combination, of first particles of needle-like shape and second particles of lump shape both of a carbonate of an alkaline earth metal is used to serve as an electron emitting material. The paste is applied to a metallic base by screen-printing and dried. The resultant base is assembled as an oxide cathode in a cathode-ray tube. To turn the carbonate into an oxide, the tube is evacuated and the cathode is heated. Thus, the surface of the cathode is planarized.

    Abstract translation: 具有高分辨率的阴极射线管,而不降低电子发射特性。 使用包含针状的第一颗粒和块状的第二颗粒的​​两种碱土金属碳酸盐的组合的印刷浆料用作电子发射材料。 通过丝网印刷将糊剂施加到金属基底上并干燥。 所得的基底在阴极射线管中作为氧化物阴极组装。 为了将碳酸盐变成氧化物,将管抽真空并加热阴极。 因此,阴极的表面被平坦化。

    CATHODE ARRANGEMENT, ELECTRON GUN, AND LITHOGRAPHY SYSTEM COMPRISING SUCH ELECTRON GUN
    47.
    发明申请
    CATHODE ARRANGEMENT, ELECTRON GUN, AND LITHOGRAPHY SYSTEM COMPRISING SUCH ELECTRON GUN 审中-公开
    电子装置,电子枪和包含这种电子枪的平移系统

    公开(公告)号:WO2015101538A4

    公开(公告)日:2015-08-27

    申请号:PCT/EP2014078995

    申请日:2014-12-22

    Abstract: The invention relates to a cathode arrangement (20) comprising: • - a thermionic cathode comprising an emission portion (30) provided with an emission surface for emitting electrons, and a reservoir (38) for holding a material, wherein the material, when heated, releases work function lowering particles that diffuse towards the emission portion and emanate at the emission surface at a first evaporation rate; • - a focusing electrode (40) comprising a focusing surface for focusing the electrons emitted from the emission surface of the cathode; and • - an adjustable heat source (50) configured for keeping the focusing surface at a temperature at which accumulation of work function lowering particles on the focusing surface is prevented.

    Abstract translation: 本发明涉及一种阴极装置(20),包括: - 一个热离子阴极,包括一个设有发射电子的发射表面的发射部分(30)和一个用于保持材料的储存器(38),其中该材料在被加热时 释放功能降低颗粒,其朝向发射部分扩散并以第一蒸发速率发射在发射表面; •聚焦电极(40),包括用于聚焦从阴极的发射表面发射的电子的聚焦表面; 和 - 可调热源(50),其被配置用于将聚焦表面保持在降低聚焦表面上的颗粒的功函数累积的温度。

    CATHODE ARRANGEMENT, ELECTRON GUN, AND LITHOGRAPHY SYSTEM COMPRISING SUCH ELECTRON GUN

    公开(公告)号:WO2015101537A4

    公开(公告)日:2015-07-09

    申请号:PCT/EP2014/078993

    申请日:2014-12-22

    Abstract: The invention relates to a cathode arrangement (20) comprising: a cathode body housing an emission surface (32) for emitting electrons in a longitudinal direction (Z), wherein the emission surface is bounded by an emission perimeter (35); a focusing electrode (40) at least partially enclosing the cathode body in a transversal direction and comprising an electron transmission aperture (44) for focusing the electrons emitted by the emission surface, wherein the aperture is bounded by an aperture perimeter (45), wherein the cathode body is moveably arranged within the focusing electrode over a maximum transversal distance (d1) from an aligned position (R0), and wherein the aperture perimeter transversally extends over the emission surface and beyond the emission perimeter over an overlap distance (d2) that exceeds the maximum transversal distance.

    EMITTER FOR A THERMIONIC DISPENSER CATHODE, METHOD OF MANUFACTURING IT AND THERMIONIC DEVICE INCLUDING IT
    49.
    发明申请
    EMITTER FOR A THERMIONIC DISPENSER CATHODE, METHOD OF MANUFACTURING IT AND THERMIONIC DEVICE INCLUDING IT 审中-公开
    温度调节器阴极发射器,制造IT和THERMIONIC设备的方法,包括IT

    公开(公告)号:WO2008035053A2

    公开(公告)日:2008-03-27

    申请号:PCT/GB2007/003529

    申请日:2007-09-18

    Abstract: A method of manufacturing an emitter (8; 10) for a thermionic dispenser cathode, includes forming a porous emitter body with substantially interconnected pores, having an emission surface (11; 16) from which, upon application of heat, electrons are emitted. The porous emitter body is suitable for transporting through the substantially interconnected pores, a compound released upon application of heat, to the emission surface (11; 16), which compound, when deposited on the emission surface (11; 16), serves to lower an effective work function of the emitter (8; 10). The porous emitter body is formed by means of a process of deposition of material. At least a region of the porous emitter body is provided with a continuously varying porosity. The porosity is continuously varied by controlling at least one parameter of the deposition process.

    Abstract translation: 制造用于热离子分配器阴极的发射器(8; 10)的方法包括形成具有基本互连的孔的多孔发射器主体,其具有发射表面(11; 16),在施加 的热量,电子被发射。 多孔发射体适合于通过基本上相互连接的孔传送通过施加热量释放的化合物到发射表面(11; 16),当沉积在发射表面(11; 16)上时,该化合物用于降低 发射器(8; 10)的有效功函数。 多孔发射体通过材料沉积过程形成。 多孔发射体的至少一个区域具有连续变化的孔隙率。 通过控制沉积过程的至少一个参数来连续改变孔隙率。

    CATHODE FOR ELECTRON EMISSION
    50.
    发明申请
    CATHODE FOR ELECTRON EMISSION 审中-公开
    电子发射阴极

    公开(公告)号:WO2006061774A1

    公开(公告)日:2006-06-15

    申请号:PCT/IB2005/054061

    申请日:2005-12-05

    CPC classification number: H01J1/28

    Abstract: A cathode for electron emission, comprising a heating device (1, 2) for generating temperatures above 300°C, an electrically conductive cathode support (3) which is connected to the heating device (1, 2), and a cathode coating which is applied to the cathode support (3) and consists of an electron-emitting material (4) comprising at least one alkali metal selected from the group consisting of sodium, potassium, rubidium and cesium, with an emission current density > 10 A/m2 at an operating temperature between 300°C and 600°C.

    Abstract translation: 一种用于电子发射的阴极,包括用于产生高于300℃的温度的加热装置(1,2),连接到加热装置(1,2)的导电阴极支撑件(3)和阴极涂层 施加到阴极支撑体(3)上并且由包含至少一种选自钠,钾,铷和铯的碱金属的电子发射材料(4)组成,发射电流密度> 10A / m 2 工作温度在300°C至600°C之间。

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