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744 records (took 0.026 seconds)

    43.
    发明专利
    失效

    公开(公告)号：JPS5026314B1

    公开(公告)日：1975-08-30

    申请号：JP1884972

    申请日：1972-02-23

    IPC: G01L21/32 ,  H01J41/04

    44.
    实用新型
    失效

    公开(公告)号：JPS458933Y1

    公开(公告)日：1970-04-25

    申请号：JP7632265

    申请日：1965-09-20

    IPC: H01J41/04

    Device for measuring mean free path, vacuum indicator, and method for measuring mean free path
    48.
    发明专利
    Device for measuring mean free path, vacuum indicator, and method for measuring mean free path 审中-公开
    用于测量平均无路径的装置，真空指示器和用于测量平均无路径的方法

    公开(公告)号：JP2011096446A

    公开(公告)日：2011-05-12

    申请号：JP2009247774

    申请日：2009-10-28

    Applicant: Canon Anelva Corp ,  キヤノンアネルバ株式会社

    Inventor： SHIOKAWA YOSHIRO ,  NAKAMURA MEGUMI ,  HO TSUYOSHI

    IPC: H01J41/04 ,  G01L21/32 ,  G01N27/62 ,  G01N27/64 ,  H01J41/06 ,  H01J49/10

    Abstract: PROBLEM TO BE SOLVED: To provide: a device for measuring a mean free path, which can accurately and simply measure a mean free path of charged particles even at an atmosphere of a degree of poor vacuum and/or an atmosphere of activated gas; a vacuum indicator; and a method for measuring the mean free path.
    SOLUTION: The device 1007 includes a filament 111 separated from atmospheric gas in a vacuum, an UV transparent type vacuum partition 700 for transmitting vacuum UV light 330, and a vacuum UV light source 600 arranged in the atmospheric gas and having a light/electron conversion electrode 610 which discharges photoelectrons 340 by receiving the vacuum UV light 330. Further, the device 1007 includes: a first collector for detecting the number of first charged particles out of charged particles where a flying distance from the vacuum ultraviolet light source 600 is zero or more; and a second collector for detecting the number of second charged particles out of charged particles at a distance longer than the flying distance of the first charged particles. A control section 1000 of the device 1007 calculates a mean free path from a ratio of the numbers of first and second charged particles.
    COPYRIGHT: (C)2011,JPO&INPIT

    Abstract translation: 要解决的问题：提供：一种用于测量平均自由程的装置，其可以精确和简单地测量带电粒子的平均自由程，即使在真空度差和/或激活的气氛的气氛下 加油站; 真空指示器 以及用于测量平均自由程的方法。 解决方案：装置1007包括在真空中与大气气体分离的灯丝111，用于透射真空UV光330的UV透明型真空隔板700和布置在大气中的具有光的真空UV光源600 /电子转换电极610，其通过接收真空紫外光330而放电光电子340.此外，装置1007包括：第一集电体，用于检测来自真空紫外光源600的飞行距离的带电粒子中的第一带电粒子的数量 为零或以上; 以及第二集电体，用于以比第一带电粒子的飞行距离长的距离检测带电粒子中的第二带电粒子的数量。 装置1007的控制部1000根据第一和第二带电粒子的数量的比率计算平均自由程。 版权所有（C）2011，JPO＆INPIT

    Quadrupole mass spectrometer with total pressure measuring electrode, and vacuum device using it
    50.
    发明专利
    Quadrupole mass spectrometer with total pressure measuring electrode, and vacuum device using it 审中-公开
    具有总压力测量电极的QUADRUPOLE质谱仪和使用其的真空装置

    公开(公告)号：JP2006266854A

    公开(公告)日：2006-10-05

    申请号：JP2005085044

    申请日：2005-03-23

    Applicant: Shinku Jikkenshitsu:Kk ,  有限会社真空実験室

    Inventor： WATANABE FUMIO ,  WATANABE REIKI

    IPC: G01N27/62 ,  G01N27/64 ,  H01J41/04 ,  H01J49/14 ,  H01J49/42

    CPC classification number: H01J49/147 ,  H01J41/10 ,  H01J49/4215

    Abstract: PROBLEM TO BE SOLVED: To provide a quadrupole mass spectrometer capable of performing highly accurate pressure measurement and highly accurate gas analysis simultaneously, and a means dispensing with an ionization vacuum gage by using only the quadrupole mass spectrometer for pressure measurement to be mounted on one vacuum device.
    SOLUTION: Concerning a quadrupole mass spectrometer Q for measuring a partial pressure intensity classified by the kind of gas in the vacuum device 9 from an ion current intensity, this quadrupole mass spectrometer with a total pressure measuring electrode is provided with the total pressure measuring electrode 1 for surveying an ion density in a demarcated space A formed by a grid electrode 2 and an ion focusing electrode 4. This vacuum device has only the quadrupole mass spectrometer Q mounted thereon for measuring the partial pressure intensity classified by the kind of gas in the vacuum device 9 from the ion current intensity, and does not have the ionization vacuum gage except the quadrupole mass spectrometer.
    COPYRIGHT: (C)2007,JPO&INPIT

    Abstract translation: 要解决的问题：提供能够同时执行高精度的压力测量和高精度气体分析的四极质谱仪，以及仅使用用于测量的四极质谱仪来安装电离真空计的装置 在一个真空装置上。 解决方案：对于通过离子电流强度测量由真空装置9中的气体种类分类的分压强度的四极质谱仪Q，具有总压力测量电极的四极质谱仪具有总压力 测量电极1，用于测量由栅电极2和离子聚焦电极4形成的分界空间A中的离子密度。该真空装置仅具有安装在其上的四极质谱仪Q，用于测量由气体种类分类的分压强度 在离子电流强度的真空装置9中，除了四极质谱仪之外，不具有电离真空计。 版权所有（C）2007，JPO＆INPIT

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