Abstract:
PURPOSE: A non volatile single electron transistor memory is provided to secure a repeatability and a uniformity of an island by using a quantum dot for precisely controlling the size of the island to a unit of nanometer. CONSTITUTION: A non volatile single electron transistor memory comprises a silicon substrate(100), quantum dots(110) of a predetermined size, a source(120) and a drain(130), and a side gate. A SiO2 oxidation layer(100b) is formed on the silicon substrate. The quantum dots of a predetermined size are separated a predetermined interval from each other on the SiO2 oxidation layer. The source and drain are formed by evaporating a metal on the SiO2 oxidation layer including the quantum dots, having a predetermined number of the quantum dots used as an island, between the source and the drain. The side gate is formed on the SiO2 oxidation layer at a side surface of the source and drain, having a predetermined interval from the source and drain.