MEMS DEVICE COMPRISING A MEMBRANE AND AN ACTUATOR

    公开(公告)号:US20200156929A1

    公开(公告)日:2020-05-21

    申请号:US16752321

    申请日:2020-01-24

    Abstract: A MEMS device includes a semiconductor support body having a first cavity, a membrane including a peripheral portion, fixed to the support body, and a suspended portion. A first deformable structure is at a distance from a central part of the suspended portion of the membrane and a second deformable structure is laterally offset relative to the first deformable structure towards the peripheral portion of the membrane. A projecting region is fixed under the membrane. The second deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a first direction, and the first deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a second direction.

    Microfluidic MEMS printing device with piezoelectric actuation

    公开(公告)号:US10232615B2

    公开(公告)日:2019-03-19

    申请号:US15726169

    申请日:2017-10-05

    Abstract: A microfluidic device, having a containment body accommodating a plurality of ejecting elements arranged adjacent to each other. Each ejecting element has a liquid inlet, a containment chamber, a piezoelectric actuator and an ejection nozzle. The piezoelectric actuators of each ejecting element are connected to a control unit configured to generate actuation signals and to be integrated in the containment body.

    MEMS DEVICE COMPRISING A MEMBRANE AND AN ACTUATOR

    公开(公告)号:US20190039880A1

    公开(公告)日:2019-02-07

    申请号:US16050924

    申请日:2018-07-31

    Abstract: A MEMS device includes a semiconductor support body having a first cavity, a membrane including a peripheral portion, fixed to the support body, and a suspended portion. A first deformable structure is at a distance from a central part of the suspended portion of the membrane and a second deformable structure is laterally offset relative to the first deformable structure towards the peripheral portion of the membrane. A projecting region is fixed under the membrane. The second deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a first direction, and the first deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a second direction.

    Microfluidic die with multiple heaters in a chamber
    59.
    发明授权
    Microfluidic die with multiple heaters in a chamber 有权
    具有多个加热器的微流体模具在腔室中

    公开(公告)号:US09248648B2

    公开(公告)日:2016-02-02

    申请号:US14310898

    申请日:2014-06-20

    Abstract: The present disclosure is directed to a microfluidic die that includes a first larger heater and a second smaller heater is a single chamber. The first heater is configured to form a primary bubble that ejects fluid from a nozzle associated with the chamber. The second heater is configured to form a secondary bubble to prevent blow back caused when the primary bubble bursts and ejects fluid from the nozzle. The first and second heater may be coupled to a single input trace and a single ground trace.

    Abstract translation: 本公开涉及包括第一较大加热器并且第二较小加热器是单室的微流体管芯。 第一加热器被配置成形成从与腔室相关联的喷嘴喷出流体的初级气泡。 第二加热器构造成形成二次气泡,以防止当初级泡沫从喷嘴中喷出并喷射流体时引起的回吹。 第一和第二加热器可以耦合到单个输入迹线和单个接地迹线。

    Piezoelectric micromachined ultrasonic transducer comprising a lobed membrane element and methods of manufacturing thereof

    公开(公告)号:US12251729B2

    公开(公告)日:2025-03-18

    申请号:US17497542

    申请日:2021-10-08

    Abstract: A PMUT device includes a membrane element extending perpendicularly to a first direction and configured to generate and receive ultrasonic waves by oscillating about an equilibrium position. At least two piezoelectric elements are included, with each one located over the membrane element along the first direction and configured to cause the membrane element to oscillate when electric signals are applied to the piezoelectric element, and generate electric signals in response to oscillations of the membrane element. The membrane element has a lobed shape along a plane perpendicular to the first direction, with the lobed shape including at least two lobes. The membrane element includes for each piezoelectric member a corresponding membrane portion including a corresponding lobe, with each piezoelectric member being located over its corresponding membrane portion.

Patent Agency Ranking