METHOD FOR GENERATING COMPENSATION MATRIX DURING SUBSTRATE INSPECTION
    53.
    发明公开
    METHOD FOR GENERATING COMPENSATION MATRIX DURING SUBSTRATE INSPECTION 有权
    用于生产MATRIX补偿时的测试基板

    公开(公告)号:EP3046406A4

    公开(公告)日:2016-11-16

    申请号:EP14844693

    申请日:2014-09-11

    Abstract: The present invention relates to a method for generating a compensation matrix during a substrate inspection. The method comprises the steps of: selecting information of N1 (N1 ‰§2) feature objects which are randomly predetermined within a field of view (FOV) on a substrate; generating a first compensation matrix on the basis of information of the feature objects which are extracted on the substrate; comparing an offset value of each of all the feature objects with a predetermined reference value by applying all the feature objects within the FOV to the compensation matrix to count the number of the feature objects of which the offset value of the each of all the feature objects is less than the predetermined reference value; and repeatedly performing the above steps N2 times (N2‰§1), and generating a second compensation matrix using information of the feature objects which have the offset value which is less than the predetermined reference value, in case the number of the counted feature objects is the maximum.

    METHOD FOR GENERATING COMPENSATION MATRIX DURING SUBSTRATE INSPECTION
    55.
    发明公开
    METHOD FOR GENERATING COMPENSATION MATRIX DURING SUBSTRATE INSPECTION 有权
    VERFAHREN ZUR ERZEUGUNG EINER KOMPENSATIONSMATRIXWÄHRENDEINERSUBSTRATPRÜFUNG

    公开(公告)号:EP3046406A1

    公开(公告)日:2016-07-20

    申请号:EP14844693.3

    申请日:2014-09-11

    Abstract: The present invention relates to a method for generating a compensation matrix during a substrate inspection. The method comprises the steps of: selecting information of N1 (N1 ≧2) feature objects which are randomly predetermined within a field of view (FOV) on a substrate; generating a first compensation matrix on the basis of information of the feature objects which are extracted on the substrate; comparing an offset value of each of all the feature objects with a predetermined reference value by applying all the feature objects within the FOV to the compensation matrix to count the number of the feature objects of which the offset value of the each of all the feature objects is less than the predetermined reference value; and repeatedly performing the above steps N2 times (N2≧1), and generating a second compensation matrix using information of the feature objects which have the offset value which is less than the predetermined reference value, in case the number of the counted feature objects is the maximum.

    Abstract translation: 本发明涉及在衬底检查期间产生补偿矩阵的方法。 该方法包括以下步骤:在衬底上选择在视场(FOV)内随机预定的N1(N1‰§2)特征对象的信息; 基于在所述基板上提取的所述特征对象的信息生成第一补偿矩阵; 通过将FOV内的所有特征对象应用于补偿矩阵来对所有特征对象中的每一个的偏移值与预定的参考值进行比较,以对所有特征对象中的每一个的偏移值进行计数的特征对象的数量 小于预定参考值; 并重复执行上述步骤N2次(N2‰§1),并且使用具有小于预定参考值的偏移值的特征对象的信息生成第二补偿矩阵,在计数特征对象的数量 是最大值。

    PROCEDE ET DISPOSITIF EMBARQUE D'ANALYSE DE FLUIDE DANS UN MOTEUR THERMIQUE

    公开(公告)号:EP2929321A1

    公开(公告)日:2015-10-14

    申请号:EP13815047.9

    申请日:2013-12-04

    Applicant: SP3H

    Abstract: The invention relates to a method of controlling a product analysis spectrometer, the method comprising steps consisting in: acquiring a measurement (LFL, TPL) representative of the operation of a light source (LS), determining as a function of the measurement a value of supply current (LCx) of the light source, and/or a value of duration of integration (ITy) of photosensitive cells (y) of a sensor (OPS), which are disposed on a path of a light beam (LB) emitted by the light source and having interacted with a product to be analyzed, and if the value of duration of integration and/or of supply current lies between threshold values, providing to the light source a supply current corresponding to the determined value of supply current, adjusting the duration of integration of a photosensitive cell to the determined value of duration of integration, and acquiring measurements of luminous intensity (MSy) which are provided by the sensor, making it possible to form a spectrum.

    Abstract translation: 本发明涉及一种控制产品分析光谱仪的方法,该方法包括以下步骤:获取表示光源(LS)的操作的测量值(LFL,TPL),根据测量值确定 (LB)的路径上设置的传感器(OPS)的光敏单元(y)的光源的供电电流(LCx)和/或积分持续时间(ITy) 光源并且与待分析的产品相互作用,并且如果积分持续时间和/或供应电流的值位于阈值之间,则向光源提供对应于确定的供应电流值的供应电流,调节 感光单元整合到所确定的积分持续时间值的持续时间,以及获取由传感器提供的发光强度(MSy)的测量结果,使得可以形成光谱。

    DETERMINING PERCENT SOLIDS IN SUSPENSION USING RAMAN SPECTROSCOPY
    58.
    发明公开
    DETERMINING PERCENT SOLIDS IN SUSPENSION USING RAMAN SPECTROSCOPY 有权
    固体的百分比份额的悬浮液中通过拉曼光谱测定

    公开(公告)号:EP2567219A1

    公开(公告)日:2013-03-13

    申请号:EP11778235.9

    申请日:2011-05-04

    Abstract: Methods and apparatus are provided for determining weight percent of solids in a suspension using Raman spectroscopy. The methods can be utilized to acquire Raman spectral data from the suspension and to determine weight percent of solids in a process being carried out, for example, in a vessel, without the need to remove samples for analysis. The weight percent of the solids can be determined with a desired accuracy in a relatively short time, typically 10 minutes or less. The acquired Raman spectral data may be processed by chemometric software using, for example, a Partial Least Squares algorithm and data pretreatment to provide a predicted value of weight percent solids. In some embodiments, the invention is used to determine the weight percent of microparticles of a diketopiperazine in an aqueous solution.

    Détection d'espèces gazeuses minoritaires par spectroscopie d'émission optique
    59.
    发明公开
    Détection d'espèces gazeuses minoritaires par spectroscopie d'émission optique 有权
    Detektion speziellerMinoritätsgasemit optischer Emissionsspektroskopie

    公开(公告)号:EP1568987A1

    公开(公告)日:2005-08-31

    申请号:EP05290302.8

    申请日:2005-02-10

    Applicant: ALCATEL

    Abstract: L'invention propose un procédé et un dispositif de détection d'espèces gazeuses minoritaires dans un mélange par spectroscopie d'émission optique au moyen d'un spectromètre optique (8), dans lequel on utilise la radiation émise par un plasma (4) présent dans le mélange gazeux à analyser, et on retient, dans le spectre de cette radiation, les raies d'une espèce gazeuse majoritaire dont l'amplitude est sensible à la présence de l'espèce minoritaire, et on déduit de l'amplitude de cette ou de ces raies sensibles une information sur la concentration de l'espèce gazeuse minoritaire. Il est alors possible d'assurer une surveillance d'espèces gazeuses minoritaires en temps réel.

    Abstract translation: 该方法涉及保留主要和容易激发的气体物质的特征线,例如 氮气,在等离子体发射的辐射的原始光谱中(4)。 主要物种的幅度对次要和难以兴奋的物种的存在敏感,例如 湿度。 关于小物种浓度的信息从线路的幅度中扣除。 还包括用于检测次要和难以激发的气态物质的装置的独立权利要求。

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