公开(公告)号：JP2014191872A

公开(公告)日：2014-10-06

申请号：JP2013063707

申请日：2013-03-26

Applicant: Hitachi High-Tech Science Corp ,  株式会社日立ハイテクサイエンス

Inventor： YASAKA KOJIN ,  SUGIYAMA YASUHIKO ,  OBA HIROSHI

IPC: H01J27/26

CPC classification number: H01J27/26 ,  H01J1/15 ,  H01J1/18 ,  H01J3/04 ,  H01J27/024 ,  H01J37/08 ,  H01J2237/002 ,  H01J2237/06316

Abstract: PROBLEM TO BE SOLVED: To provide an emitter structure which can enhance the cooling efficiency of an emitter, and can hold the emitter stably with high accuracy for a base member, while reducing the number of components or simplifying the device, and to provide a gas ion source and a focused ion beam device.SOLUTION: An emitter structure includes a pair of electrification pins 65 fixed to a base material 61, a filament 66 connected between the pair of electrification pins 65, and an emitter 52 connected with the filament 66 and having a sharpened tip. A support member 54 is fixed to the base material 61, and the emitter 52 is connected with the support member 54.

Abstract translation: 要解决的问题：提供一种可以提高发射体的冷却效率的发射极结构，并且可以在降低元件数量或简化器件的同时，以高精度稳定地保持发射极，并且提供气体 离子源和聚焦离子束装置。发射器结构包括固定到基底材料61的一对带电引脚65，连接在一对带电引脚65之间的细丝66和与细丝66连接的发射极52和 有锋利的尖端。 支撑构件54固定到基底材料61，并且发射体52与支撑构件54连接。

公开(公告)号：JP2010044993A

公开(公告)日：2010-02-25

申请号：JP2008209814

申请日：2008-08-18

Applicant: Nissin Ion Equipment Co Ltd ,  日新イオン機器株式会社

Inventor： MIYAMOTO NAOKI

IPC: H01J27/14 ,  H01J1/15 ,  H01J1/16 ,  H01J37/08

CPC classification number: H01J27/08 ,  H01J1/16 ,  H01J3/027 ,  H01J3/04 ,  H01J37/065 ,  H01J37/08 ,  H01J2237/06308

Abstract: PROBLEM TO BE SOLVED: To suppress the rise of temperature of an inner conductor of a hot cathode having a coaxial structure to thereby extend the life time of the inner conductor and thus to extend the life time of the hot cathode. SOLUTION: The hot cathode 10 includes a hollow external conductor 2, a hollow inner conductor 1 coaxially disposed inside the external conductor 2, and a connection conductor 3 electrically connecting the conductors 1 and 2. A heating current I H is made to turn back via the connection conductor 3, such that the heating current I H flows through the external conductor 2 in the direction opposite to the direction in which the heating current I H flows through the inner conductor 1. COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：为了抑制具有同轴结构的热阴极的内导体的温度升高，从而延长内导体的使用寿命，从而延长热阴极的使用寿命。 解决方案：热阴极10包括中空的外部导体2，同轴地设置在外部导体2内部的中空内部导体1和电连接导体1和2的连接导体3.加热电流I < 通过连接导体3使回转，使得加热电流I H 沿与加热电流I H 流过内导体1.版权所有（C）2010，JPO＆INPIT

公开(公告)号：US09934928B2

公开(公告)日：2018-04-03

申请号：US14713573

申请日：2015-05-15

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： Shengwu Chang ,  Jeff Burgess ,  William Leavitt ,  Michael St Peter ,  Matt Mosher ,  Joe Olson ,  Frank Sinclair

IPC: H01J37/08 ,  H01J27/08 ,  H01J27/02 ,  H01J9/18 ,  H01J9/385 ,  H01J3/04 ,  H01J5/02

CPC classification number: H01J27/08 ,  H01J3/04 ,  H01J5/02 ,  H01J9/18 ,  H01J9/385 ,  H01J27/024 ,  H01J37/08

Abstract: Provided herein are approaches for improving ion beam extraction stability and ion beam current for an ion extraction system. In one approach, a source housing assembly may include a source housing surrounding an ion source including an arc chamber, the source housing having an extraction aperture plate mounted at a proximal end thereof. The source housing assembly further includes a vacuum liner disposed within an interior of the source housing to form a barrier around a set of vacuum pumping apertures. As configured, openings in the source housing assembly, other than an opening in the extraction aperture plate, are enclosed by the extraction aperture plate and the vacuum liner, thus ensuring appendix arcs or extraneous ions produced outside the arc chamber remain within the source housing. Just those ions produced within the arc chamber exit the source housing through the opening of the extraction aperture plate.

公开(公告)号：US09704685B2

公开(公告)日：2017-07-11

申请号：US15179675

申请日：2016-06-10

Applicant: Massachusetts Institute of Technology

Inventor： Paulo C. Lozano ,  Carla Perez Martinez ,  Corey P. Fucetola ,  Jimmy Andrey Rojas Herrera

IPC: H01J1/00 ,  H01J19/06 ,  H01J1/304 ,  H01J9/02

CPC classification number: H01J1/304 ,  H01J3/04 ,  H01J9/025

Abstract: Embodiments related to the use and production of porous carbon materials in ion emitters and other applications are described.

公开(公告)号：US20160365216A1

公开(公告)日：2016-12-15

申请号：US15179675

申请日：2016-06-10

Applicant: Massachusetts Institute of Technology

Inventor： Paulo C. Lozano ,  Carla Perez Martinez ,  Corey P. Fucetola ,  Jimmy Andrey Rojas Herrera

IPC: H01J1/304 ,  H01J9/02

CPC classification number: H01J1/304 ,  H01J3/04 ,  H01J9/025

Abstract: Embodiments related to the use and production of porous carbon materials in ion emitters and other applications are described

Abstract translation: 描述了在离子发射器和其它应用中使用和生产多孔碳材料的实施例

公开(公告)号：US08581215B2

公开(公告)日：2013-11-12

申请号：US13481923

申请日：2012-05-28

Applicant: Vladimir Balakin

Inventor： Vladimir Balakin

IPC: A61N5/00

CPC classification number: H05H7/10 ,  A61N5/1048 ,  A61N5/1067 ,  A61N2005/1087 ,  H01J3/04 ,  H01J3/14 ,  H05H13/04

Abstract: The invention comprises a patient positioning method and apparatus used in conjunction with multi-axis charged particle or proton beam radiation therapy of cancerous tumors. The patient positioning system is used to translate the patient and/or rotate the patient into a zone where the proton beam can scan the tumor using a targeting system. The patient positioning system is optionally used in conjunction with systems used to constrain movement of the patient, such as semi-vertical, sitting, or laying positioning systems.

Abstract translation: 本发明包括与多轴带电粒子或癌肿瘤的质子束放射治疗结合使用的患者定位方法和装置。 患者定位系统用于翻译患者和/或将患者旋转到质子束可以使用靶向系统扫描肿瘤的区域。 患者定位系统可选地与用于限制患者的运动的系统结合使用，例如半垂直，坐着或铺设定位系统。

公开(公告)号：US08536564B1

公开(公告)日：2013-09-17

申请号：US13246985

申请日：2011-09-28

Applicant: Paul J. Resnick ,  Kristin L. Hertz ,  Christopher Holland ,  David Chichester ,  Paul Schwoebel

Inventor： Paul J. Resnick ,  Kristin L. Hertz ,  Christopher Holland ,  David Chichester ,  Paul Schwoebel

IPC: H01L29/06

CPC classification number: H01J9/02 ,  H01J3/04 ,  H01L21/31111

Abstract: An integrated field emission array for ion desorption includes an electrically conductive substrate; a dielectric layer lying over the electrically conductive substrate comprising a plurality of laterally separated cavities extending through the dielectric layer; a like plurality of conically-shaped emitter tips on posts, each emitter tip/post disposed concentrically within a laterally separated cavity and electrically contacting the substrate; and a gate electrode structure lying over the dielectric layer, including a like plurality of circular gate apertures, each gate aperture disposed concentrically above an emitter tip/post to provide a like plurality of annular gate electrodes and wherein the lower edge of each annular gate electrode proximate the like emitter tip/post is rounded. Also disclosed herein are methods for fabricating an integrated field emission array.

Abstract translation: 用于离子解吸的集成场致发射阵列包括导电基片; 位于所述导电衬底上方的介电层包括延伸穿过所述电介质层的多个横向隔开的空腔; 在柱上具有相似的多个锥形发射器尖端，每个发射极尖端/柱同心地设置在横向分离的空腔内并与衬底电接触; 以及位于电介质层上方的栅极电极结构，包括相似的多个圆形栅极孔，每个栅极孔同心地设置在发射极尖端/柱上方，以提供相似的多个环形栅电极，并且其中每个环形栅电极的下边缘 靠近相似的发射器尖端/柱是圆形的。 本文还公开了用于制造集成场致发射阵列的方法。

公开(公告)号：US08198607B2

公开(公告)日：2012-06-12

申请号：US12614733

申请日：2009-11-09

Applicant: Vladimir Balakin

Inventor： Vladimir Balakin

IPC: A61N5/00

CPC classification number: H05H7/10 ,  A61N2005/1087 ,  H01J3/04 ,  H01J3/14 ,  H05H5/06 ,  H05H13/04

Abstract: The invention comprises a tandem accelerator method and apparatus, which is part of an ion beam injection system used in conjunction with multi-axis charged particle radiation therapy of cancerous tumors. The negative ion beam source includes an injection system vacuum system and a synchrotron vacuum system separated by a foil, where negative ions are converted to positive ions. The foil is sealed to the edges of the vacuum tube providing for a higher partial pressure in the injection system vacuum chamber and a lower pressure in the synchrotron vacuum system. Having the foil physically separating the vacuum chamber into two pressure regions allows for fewer and/or smaller pumps to maintain the lower pressure system in the synchrotron as the inlet hydrogen gas is extracted in a separate contained and isolated space by the injection partial vacuum system.

Abstract translation: 本发明包括串联加速器方法和装置，其是与癌性肿瘤的多轴带电粒子放射治疗结合使用的离子束注射系统的一部分。 负离子束源包括注射系统真空系统和由箔分离的同步加速器真空系统，其中负离子转化为正离子。 箔片密封到真空管的边缘，在注射系统真空室中提供较高的分压，并且在同步加速器真空系统中具有较低的压力。 将真空室物理分离成两个压力区域的箔允许更少和/或更小的泵维持同步加速器中的较低压力系统，因为入口氢气通过注射部分真空系统在单独的包含和隔离的空间中提取。

公开(公告)号：US08129694B2

公开(公告)日：2012-03-06

申请号：US12571589

申请日：2009-10-01

Applicant: Vladimir Balakin

Inventor： Vladimir Balakin

IPC: A61N5/00

CPC classification number: H01J3/04 ,  A61N2005/1087 ,  H01J27/028 ,  H05H7/04 ,  H05H13/04

Abstract: The invention comprises a negative ion beam source vacuum method and apparatus used as part of an ion beam injection system, which is used in conjunction with multi-axis charged particle or proton beam radiation therapy of cancerous tumors. The negative ion beam source contains a vacuum chamber isolated by a vacuum barrier from the vacuum tube of the synchrotron. The negative ion beam source vacuum system preferably includes: a first pump turbo molecular pump, a large holding volume, and a semi-continuously operating pump. By only pumping ion beam source vacuum chamber and by only semi-continuously operating the ion beam source vacuum based on sensor readings about the holding volume, the lifetime of the semi-continuously operating pump is extended.

Abstract translation: 本发明包括负离子束源真空方法和用作离子束注入系统的一部分的装置，其与多轴带电粒子或癌肿瘤的质子束放射治疗结合使用。 负离子束源包含由真空隔离层从同步加速器的真空管隔离的真空室。 负离子束源真空系统优选包括：第一泵涡轮分子泵，大保持体积和半连续运行的泵。 通过仅泵浦离子束源真空室，并且仅基于关于保持体积的传感器读数半连续地操作离子束源真空，半连续操作泵的寿命延长。

公开(公告)号：US20120008249A1

公开(公告)日：2012-01-12

申请号：US13171348

申请日：2011-06-28

Applicant: Brian D. SAWYER ,  Christopher Hizer

Inventor： Brian D. SAWYER ,  Christopher Hizer

IPC: H01T23/00 ,  H05K13/00

CPC classification number: H01J3/04 ,  H01T23/00 ,  H05H1/48 ,  H05H2001/483 ,  Y10T29/49002

Abstract: An ion wind fan can be manufactured efficiently using insert molding. In one embodiment, the present invention includes an ion wind fan having an isolator with an emitter bus plate and an emitter attachment plate insert molded into isolator. A collector electrode is further insert molded into the isolator. The collector electrode is supported in part by two collector supports. One or more wire emitter electrodes are welded to the emitter bus plate at a first end of the emitter wires and to the emitter attachment plate at a second end of the emitter wires.

Abstract translation: 可以使用嵌件成型有效地制造离子风扇。 在一个实施例中，本发明包括具有隔离器的离子风扇，其具有发射极总线板和模制到隔离器中的发射器附件板插件。 集电极进一步嵌入模制到隔离器中。 集电极部分由两个收集器支撑部分支撑。 一根或多根引线电极在发射极线的第一端和发射极连接板的发射极线的第二端焊接到发射极母线板。