Abstract:
본 발명은 불화가스 분리 및 회수장치, 및 이를 이용한 불화가스 분리 및 회수방법에 관한 것으로, 상세하게는 불화가스 분리장치 및 불화가스 회수장치를 포함하는 불화가스 분리 및 회수장치에 있어서, 상기 불화가스 분리장치는 상기 불화가스를 포함하는 혼합가스가 공급되는 가스공급부; 상기 가스공급부로부터 혼합가스가 주입되는 주입구, 불화가스가 분리되는 분리막, 상기 분리막에서 불화가스가 분리된 비불화가스가 배출되는 투과구 및 상기 분리막에서 분리된 불화가스가 배출되는 배출구를 구비하여 혼합가스로부터 불화가스를 분리하는 분리막 모듈이 하나 또는 그 이상 구비된 분리부; 상기 분리막 모듈의 배출구와 연결되되, 상기 분리막 모듈로부터 배출되는 불화가스의 유량을 제어하는 배출량 제어부; 및 상기 분리막 모듈의 투과구와 연결되되, 상기 분리막 모듈로부터 비불화가스가 투과되는 구동력을 제공하는 감압펌프를 포함하고, 상기 불화가스 회수장치는 상기 분리장치의 투과구로부터 배출되는 혼합가스를 공급하는 공급부; 상기 가스공급부로부터 혼합가스가 주입되어 불화가스가 흡착되는 불화가스 흡착칼럼이 하나 또는 그 이상 병렬 연결된 흡착부; 상기 흡착부와 연결되어 흡착된 불화가스를 회수하는 감압펌프를 포함하는 불화가스 분리 및 회수장치를 제공한다.
Abstract:
The present invention relates to an apparatus for separating and enriching fluorinated gas and a method for separating and enriching fluorinated gas using the same and more particularly, to an apparatus for separating and enriching fluorinated gas, including an apparatus for recovering fluorinated gas and an apparatus for separating fluorinated gas, wherein the apparatus for recovering fluorinated gas comprises a gas supply part for supplying mixed gas including fluorinated gas; an adsorption part having one or more fluorinated gas adsorption columns connected in parallel to adsorb fluorinated gas as the mixed gas is injected from the gas supply part; a vacuum pump connected to the adsorption part to recover the adsorbed fluorinated gas; and a storage tank for storing the fluorinated gas recovered by the vacuum pump, and wherein the apparatus for separating fluorinated gas comprises a raw material supply part including the storage tank of the apparatus for recovering fluorinated gas; a separation part including one or more separation modules including an inlet for injecting the mixed gas from the raw material supply part, a separation membrane for separating the fluorinated gas, a transmission hole for discharging non-fluorinated gas separated from the fluorinated gas by the separation membrane, and an outlet for discharging the fluorinated gas separated by the separation membrane so as to separate fluorinated gas from the mixed gas; and a discharge quantity control part connected to the outlet of the separation part and controlling the flow rate of the fluorinated gas being discharged from the separation part. The apparatus for separating and enriching fluorinated gas according to the present invention can separate low-pressure fluorinated gas being discharged as process waste gas without using a pressurizing device more efficiently than an existing pressurizing method. [Reference numerals] (AA) Mass flow controller
Abstract:
The present invention relates to a porous metal oxide-carbon composite having an impregnated photoactive metal oxide, a manufacturing method thereof, and a photocatalyst including the same and, more specifically, to a porous metal oxide-carbon composite having titanium dioxide and a post-transition metal impregnated with carbon-based media. The metal oxide-carbon composite according to the present invention can exhibit excellent photocatalytic activities in the range of visible light (λ>=400 nm) as well as in the range of ultraviolet rays and facilitates separation and recovery thereof after use because the particle size thereof is on a scale of approximately hundreds of micrometers. Loss induced by collisions between particles in a fluid state can be prevented, thereby facilitating application of the metal oxide-carbon composite to a commercial process because one particle of the metal oxide-carbon composite can resist the strength of 5 to 15 kg-f/a unit. Besides, the metal oxide-carbon composite according to the present invention can be applied to various fields such as water treatment and air purification industry, thereby being capable of being applied to commercial processes using a photocatalyst because the metal oxide-carbon composite exhibits photocatalytic activities in a wide wavelength range. [Reference numerals] (AA) Comparative example 1; (BB) Example 1; (CC) Example 2; (DD) Example 3