METHOD OF MANUFACTURING MICRO ELECTRO MECHANICAL SYSTEM ELEMENT

    公开(公告)号:JP2003200395A

    公开(公告)日:2003-07-15

    申请号:JP2001394881

    申请日:2001-12-26

    Applicant: SONY CORP

    Abstract: PROBLEM TO BE SOLVED: To flatten a surface of a drive side electrode in an electrostatic drive type MEMS element. SOLUTION: A substrate side electrode is formed on a substrate. A fluid film is formed before or after forming a sacrifical layer. A beam having a drive side electrode is formed on a flattened surface and then the sacrifical layer is removed. COPYRIGHT: (C)2003,JPO

    Simulation method, simulation program, simulator, processing device, and manufacturing method of semiconductor apparatus
    62.
    发明专利
    Simulation method, simulation program, simulator, processing device, and manufacturing method of semiconductor apparatus 有权
    模拟方法,仿真程序,仿真器,处理器件及半导体器件的制造方法

    公开(公告)号:JP2014096400A

    公开(公告)日:2014-05-22

    申请号:JP2012245316

    申请日:2012-11-07

    CPC classification number: G06F17/5009 G06F2217/16

    Abstract: PROBLEM TO BE SOLVED: To provide a simulation method with which computation speed can be increased, computation accuracy can be improved, and computation load can be reduced during simulation of processing.SOLUTION: An information processing apparatus implements computation including the steps of: reversely tracing a first flux incident to arbitrary position on a surface of an object to be processed; calculating a second flux which becomes the first flux, in the case where the first flux irradiates another position on the surface of the object to be processed, by scattering at the other position, and reversely tracing the second flux from the other position; and repeating the calculation and reverse trace of the flux and, when the reversely traced flux does not irradiate the surface of the object to be processed any more, on the condition where the flux is settled within angle distribution of a flux made incident to the object to be processed, calculating the quantity of the flux contributed to the scattering regarding a flux group to the relevant flux.

    Abstract translation: 要解决的问题:为了提供可以提高计算速度的模拟方法,可以提高计算精度,并且可以在处理的模拟期间减少计算负担。解决方案:信息处理设备实现计算,包括以下步骤:反向跟踪 入射到待处理物体的表面上的任意位置的第一通量; 在第一通量照射待处理物体的表面上的另一位置时,通过在另一位置飞散并从另一位置反向追踪第二通量来计算成为第一通量的第二通量; 并重复通量的计算和反向跟踪,并且当反向追踪的通量不再照射待加工物体的表面时,在通量稳定在入射到物体的通量的角度分布内的条件下 要对其进行处理,计算有助于将关于通量组的散射的通量的量到相关通量。

    Three-dimensional shape generation method, program, and recording medium
    63.
    发明专利
    Three-dimensional shape generation method, program, and recording medium 审中-公开
    三维形状生成方法,程序和记录介质

    公开(公告)号:JP2013148940A

    公开(公告)日:2013-08-01

    申请号:JP2012006749

    申请日:2012-01-17

    CPC classification number: G06F17/50 G06F17/10 G06T17/10 G06T2210/21

    Abstract: PROBLEM TO BE SOLVED: To provide a method of generating a three-dimensional (3D) shape that can reproduce a 3D shape having a detailed and complex curved-surface shape.SOLUTION: A method of generating a three-dimensional (3D) shape is performed by specifying a boundary between materials, including the steps of acquiring numerical data on a boundary line of a two-dimensional (2D) shape in a plane, generating a next 2D shape by moving the 2D shape in a direction of intersecting the plane on the basis of numerical data for specifying a shape of the boundary and also by copying or deforming the 2D shape, and configuring a solid on the basis of data on each of generated 2D shapes.

    Abstract translation: 要解决的问题:提供一种产生可再现具有详细且复杂的曲面形状的3D形状的三维(3D)形状的方法。解决方案:一种产生三维(3D)形状的方法是 通过指定材料之间的边界来执行,包括在平面中获取二维(2D)形状的边界线上的数字数据的步骤,通过沿与该平面相交的方向移动2D形状来产生下一个2D形状 用于指定边界的形状的数值数据的基础,以及2D形状的复制或变形,以及基于生成的2D形状的每一个的数据构成实体。

    Shape simulation device, shape simulation program, apparatus and method for manufacturing semiconductor
    64.
    发明专利
    Shape simulation device, shape simulation program, apparatus and method for manufacturing semiconductor 有权
    形状模拟装置,形状模拟程序,装置和制造半导体的方法

    公开(公告)号:JP2011044656A

    公开(公告)日:2011-03-03

    申请号:JP2009193334

    申请日:2009-08-24

    Abstract: PROBLEM TO BE SOLVED: To provide a shape simulation device having improved accuracy of simulation. SOLUTION: A flux calculation part of the simulation device calculates incident fluxes Γ per calculation point 221 on the basis of effective solid angles Se, a wafer aperture ratio Rw and a semi-local aperture ratio Rs. The effective solid angle Se is a solid angle at which a calculation point 221 is opened without being shielded by a pattern in a local area 223 including the calculation point 221 is viewed from the side of the calculation point 221. The wafer aperture ratio Rw is a ratio of an aperture area of a mask 207 covering a wafer 201 to an area of the mask 207. The semi-local aperture ratio Rs is a ratio of the aperture area of the mask 207 in a semi-local area 227 including the local area 223 and smaller than the wafer 201 to an area of the semi-local area 227. COPYRIGHT: (C)2011,JPO&INPIT

    Abstract translation: 要解决的问题:提供具有提高的模拟精度的形状模拟装置。 解决方案:仿真装置的磁通计算部分基于有效立体角Se,晶片开口率Rw和半局部开口率Rs计算每个计算点221的入射磁通Γ。 从计算点221侧观察有效立体角Se是计算点221打开而不被包含计算点221的局部区域223中的图案遮蔽的立体角。晶片开口率Rw为 覆盖晶片201的掩模207的开口面积与掩模207的面积的比率。半局部开口率Rs是包括局部的半局部区域227中的掩模207的开口面积的比率 区域223并且小于晶片201到半局部区域227的区域。版权所有(C)2011,JPO和INPIT

    Information processing unit and information processing method, and program
    65.
    发明专利
    Information processing unit and information processing method, and program 审中-公开
    信息处理单元和信息处理方法及程序

    公开(公告)号:JP2009260436A

    公开(公告)日:2009-11-05

    申请号:JP2008103982

    申请日:2008-04-11

    Abstract: PROBLEM TO BE SOLVED: To provide an information processing unit and an information processing method, capable of compressing data with high quality and efficiency, and to provide a program. SOLUTION: The information processing unit has: a frame unit bit rate calculation circuit 202 for subtracting a rate distribution value obtained by performing variable-rate compression to audio data from the maximum transfer rate of primary video data and audio data to calculate a bit rate in frame units; and a primary video compression processing circuit 206 for compressing the primary video data based on the bit rate in frame units. COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 要解决的问题:提供能够以高质量和高效率压缩数据并提供程序的信息处理单元和信息处理方法。 解决方案:信息处理单元具有:帧单位比特率计算电路202,用于从主视频数据和音频数据的最大传送速率中减去通过对音频数据执行可变速率压缩而获得的速率分布值,以计算 比特率以帧为单位; 以及用于基于帧单位的比特率压缩主视频数据的主视频压缩处理电路206。 版权所有(C)2010,JPO&INPIT

    Reproduction permission information obtaining method, contents reproducing method, and contents reproducing device
    66.
    发明专利
    Reproduction permission information obtaining method, contents reproducing method, and contents reproducing device 审中-公开
    生产许可信息获取方法,内容再现方法和内容再现设备

    公开(公告)号:JP2008262685A

    公开(公告)日:2008-10-30

    申请号:JP2008124829

    申请日:2008-05-12

    Abstract: PROBLEM TO BE SOLVED: To enable a contents original provider to inexpensively provide a recording medium, and to enable a user to inexpensively purchase the recording medium, even when many contents are recorded in one recording medium. SOLUTION: In addition to a reproduction permission information recording region, a contents recording region is provided. Many contents such as image and music are recorded in the reproduction permission information recording region while reproduction of all contents or a part of a plurality of contents is restricted, for example, contents data is ciphered by a contents original provider. When the reproduction-restricted contents are reproduced, the user obtains reproduction permission information, for example, a decoding key from the contents original provider. The obtained reproduction permission information is recorded in the reproduction permission information recording region of the optical disk 1 by a contents reproducing device 20. When the reproduction permission information is recorded in the reproduction permission information recording region, the contents reproducing device 20 reproduces only the contents reproduction of which is indicated. COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:为了使内容原始提供商能够廉价地提供记录介质,并且即使当许多内容被记录在一个记录介质中时,也能够使用户廉价地购买记录介质。 解决方案:除了再现许可信息记录区域之外,还提供了内容记录区域。 诸如图像和音乐的许多内容被记录在再现允许信息记录区域中,而所有内容或一部分内容的再现被限制,例如内容数据被内容原始提供者加密。 当再现限制内容被再现时,用户从内容原始提供者获得例如解码密钥的再现许可信息。 所获得的再现许可信息通过内容再现装置20被记录在光盘1的再现允许信息记录区域中。当再现许可信息被记录在再现允许信息记录区域中时,内容再现装置20仅再现内容 表示其再现。 版权所有(C)2009,JPO&INPIT

    MINUTE RESONATOR, BAND-PASS FILTER, SEMICONDUCTOR DEVICE, AND COMMUNICATIONS APPARATUS

    公开(公告)号:JP2006222562A

    公开(公告)日:2006-08-24

    申请号:JP2005032084

    申请日:2005-02-08

    Applicant: SONY CORP

    Abstract: PROBLEM TO BE SOLVED: To provide a minute resonator of a single structure, capable of outputting signals with two resonance frequencies and inverted in phase to each other, wherein the different resonance frequencies can be adjusted independently. SOLUTION: The minute resonator includes a vibration part 6 supported in a hollow part by support sections 8 (8A, 8B), and an input electrode 3 and an output electrode 4, acting as lower electrodes opposite to the vibration part 6 with the hollow part inbetween, the input electrode 3 and the output electrode 4 are arranged facing each other along a line segment in crossing with the vibration part 6, the vibration part 6 causes twist vibration and deflection vibration, and phases of output signals with the two resonance frequencies close to each other in different resonance modes are shifted with respect to each other by 180 degrees. COPYRIGHT: (C)2006,JPO&NCIPI

    Searching apparatus, searching method, information processing system
    68.
    发明专利
    Searching apparatus, searching method, information processing system 审中-公开
    搜索设备,搜索方法,信息处理系统

    公开(公告)号:JP2006004152A

    公开(公告)日:2006-01-05

    申请号:JP2004179485

    申请日:2004-06-17

    Abstract: PROBLEM TO BE SOLVED: To perform user-friendly and efficient period search. SOLUTION: The year of birth of a user is input, as well as age or grade of the user at the time to be searched in substitution for the period. When inputting the age or the grade of the user, for inputting the age or the grade corresponding to the period to be searched, period ranges sectioned by a prescribed meaning such as, for example, "high school age" or "early 10s" can be specified. Thereby, the period other than one-year unit can be specified for the period search. COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 要解决的问题:执行用户友好和有效的期间搜索。

    解决方案:输入用户的出生年份,以及在搜索时代替用户的年龄或年龄。 在输入用户的年龄或年级时,输入与搜索期间对应的年龄或年级,按照规定的含义(例如“高中年龄”或“10日龄以上”)划分的期间范围 被指定。 因此,可以为期间搜索指定除一年单位以外的期间。 版权所有(C)2006,JPO&NCIPI

    Mems element, optical mems element, diffraction type optical mems element and laser display
    69.
    发明专利
    Mems element, optical mems element, diffraction type optical mems element and laser display 有权
    MEMS元件,光学MEMS元件,衍射型光学MEMS元件和激光显示器

    公开(公告)号:JP2005279831A

    公开(公告)日:2005-10-13

    申请号:JP2004095872

    申请日:2004-03-29

    Abstract: PROBLEM TO BE SOLVED: To reduce deflection of a beam due to internal stress of a laminated film in an electrostatic drive type MEMS element such as an optical MEMS element.
    SOLUTION: This MEMS element has a beam 36 formed of a multi-layer, and a stress balance adjusting layer 41 for restraining the deflection of the beam 36 is formed in the multi-layer.
    COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 要解决的问题:减少由于诸如光学MEMS元件的静电驱动型MEMS元件中的层压膜的内部应力引起的光束的偏转。 解决方案:该MEMS元件具有由多层形成的光束36,并且在多层中形成用于抑制光束36的偏转的应力平衡调节层41。 版权所有(C)2006,JPO&NCIPI

    Disk storage case and recording medium
    70.
    发明专利
    Disk storage case and recording medium 审中-公开
    磁盘存储盒和记录介质

    公开(公告)号:JP2005255203A

    公开(公告)日:2005-09-22

    申请号:JP2004068502

    申请日:2004-03-11

    CPC classification number: G11B33/0427 G11B33/045

    Abstract: PROBLEM TO BE SOLVED: To provide a disc storage case for storing and carrying a disc-shaped recording medium, and a recording medium stored in such a storage case that allows the recording medium to be stored or removed easily and certainly. SOLUTION: The disc storage case stores the disc-shaped recording medium 21 in such a way that the recording medium is held on its one surface side and the other surface side in a sandwiched manner. This prevents application of a stress to the recording medium 21 upon storing or taking out the recording medium 21. COPYRIGHT: (C)2005,JPO&NCIPI

    Abstract translation: 要解决的问题:提供一种用于存储和携带盘形记录介质的盘存储盒,以及存储在这样的存储盒中的记录介质,其允许容易且肯定地存储或移除记录介质。 解决方案:盘存储盒存储盘形记录介质21,使得记录介质以夹持的方式保持在其一个表面侧和另一个表面侧。 这样可以防止在存储或取出记录介质21时对记录介质21施加应力。版权所有:(C)2005,JPO&NCIPI

Patent Agency Ranking