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    MICROMACHINE AND METHOD OF MANUFACTURING THE MICROMACHINE
    4.
    发明公开
    MICROMACHINE AND METHOD OF MANUFACTURING THE MICROMACHINE 审中-公开
    微机械和方法中微型电机的生产

    公开(公告)号：EP1544162A4

    公开(公告)日：2005-10-05

    申请号：EP03771265

    申请日：2003-07-14

    Applicant: SONY CORP

    Inventor： TADA MASAHIRO ,  KINOSHITA TAKASHI ,  TANIGUCHI TAKESHI ,  IKEDA KOICHI

    IPC: B81B3/00 ,  B81C1/00 ,  H03H3/007 ,  H03H9/02 ,  H03H9/24 ,  H03H9/46

    CPC classification number: H03H9/2463 ,  H03H3/0072

    Abstract: A micromachine (20) for a high frequency filter having a high Q value and a high frequency band, comprising an input electrode (7b), an output electrode (7a), and a support electrode (7c) installed on a substrate (4), and a band-shaped vibrator electrode (15) formed by laying a beam (vibration part)(16) on the upper part of the output electrode (7a) through a clearance part (A) in the state of supporting both end parts thereof on the input electrode (7b) and the substrate (4) through the support electrode (7c), wherein the both end parts of the vibrator electrode (15) are completely fixed to the input electrode (7b) and the support electrode (7c) on the entire surface thereof ranging from the tip to the beam (16) thereof.

    Shunt switch
    5.
    发明专利
    Shunt switch 审中-公开
    分路开关

    公开(公告)号：JP2011188182A

    公开(公告)日：2011-09-22

    申请号：JP2010050482

    申请日：2010-03-08

    Applicant: Sony Corp ,  ソニー株式会社

    Inventor： AKIBA AKIRA ,  IKEDA KOICHI

    IPC: H01P1/12 ,  B81B3/00 ,  H01H59/00

    Abstract: PROBLEM TO BE SOLVED: To provide a shunt switch capable of achieving high reliability and improving isolation. SOLUTION: A shunt switch 1 includes: a fixed contact 15a corresponding to a part of a transmission line 11; and a movable contact 15b which corresponds to a part of a ground line 17, and is disposed opposite to the fixed contact 15a and displaced along a direction parallel to a substrate surface, so as to be contacted with or separated from the fixed contact 15a. On respective surfaces of the fixed contact 15a and the movable contact 15b, dielectric films 12, 16 are formed. In the state where the fixed contact 15a and the movable contact 15b are separated (open state), signal transmission is performed in the transmission line 11 and in the state where they are contacted (closed state), the transmission line 11 is grounded through the movable contact 15b to a ground. A shunt circuit is formed by capacitive coupling and a contact touch is made by displacing the movable contact 15b along the substrate surface, thereby suppressing electrical interference to the shunt circuit. COPYRIGHT: (C)2011,JPO&INPIT

    Abstract translation: 要解决的问题：提供能够实现高可靠性和改善隔离的分流开关。 解决方案：并联开关1包括：对应于传输线11的一部分的固定触点15a; 以及对应于接地线17的一部分的可动触头15b，并且与固定触点15a相对设置并沿平行于基板表面的方向移位，以便与固定触点15a接触或分离。 在固定触点15a和可动触点15b的各个表面上形成介电膜12,16。 在固定触点15a和可动触点15b分离（开放状态）的状态下，在传输线11中进行信号传输，并且在接触状态（闭合状态）时，传输线11通过 活动触点15b到地面。 通过电容耦合形成分路电路，通过沿着基板表面移动可动触点15b来进行接触触摸，从而抑制对分路电路的电气干扰。 版权所有（C）2011，JPO＆INPIT

    Transmission/reception element
    6.
    发明专利
    Transmission/reception element 有权
    传输/接收元件

    公开(公告)号：JP2011160207A

    公开(公告)日：2011-08-18

    申请号：JP2010020371

    申请日：2010-02-01

    Applicant: Sony Corp ,  ソニー株式会社

    Inventor： AKIBA AKIRA ,  IKEDA KOICHI

    IPC: H01Q9/14 ,  H01Q5/10 ,  H01Q5/321 ,  H01Q9/28 ,  H01Q13/08

    CPC classification number: H01Q9/00

    Abstract: PROBLEM TO BE SOLVED: To provide a transmission/reception element that is capable of frequency switching among a plurality of patterns while being able to retain satisfactorily the radiation characteristics.
    SOLUTION: A reconfigurable antenna 1 includes a contact-point group 10 for controlling electrical coupling between metal patterns 13a and 13b, which are disposed with space from each other to the space between the metal patterns 13a and 13b. The contact-point group 10 includes a plurality of contact-point pairs 10a, each of which is arranged in parallel, and is mechanically driven by a drive section 20. The electrical length changes and electromagnetic waves are radiated at the frequency corresponding to each electrical length by switching a state of the electrical coupling between the metal patterns 13a, 13b. A drive circuit 20b is isolated from each of the metal patterns 13a, 13b to suppress an influence of electromagnetic radiation to be generated from the drive circuit 20b by mechanically driving the contact-point group 10. A space which deteriorates radiation characteristics is micrified between each of the metal patterns 13a and 13b by using the contact-point group 10 including the plurality of contact pairs 10a, each of which is arranged in parallel.
    COPYRIGHT: (C)2011,JPO&INPIT

    Abstract translation: 要解决的问题：提供能够在多个图案之间进行频率切换同时能够令人满意地保持辐射特性的发送/接收元件。 解决方案：可重构天线1包括用于控制金属图案13a和13b之间的电耦合的接触点组10，它们彼此间隔开设置到金属图案13a和13b之间的空间。 接触点组10包括多个接触点对10a，每个接触点对10a平行布置并由驱动部分20机械地驱动。电长度变化，电磁波以对应于每个电气的频率辐射 通过切换金属图案13a，13b之间的电耦合的状态来实现长度。 驱动电路20b与金属图案13a，13b隔离，以通过机械驱动接触点组10来抑制从驱动电路20b产生的电磁辐射的影响。辐射特性恶化的空间在每个 通过使用包括多个平行布置的多个接触对10a的接触点组10来形成金属图案13a和13b。 版权所有（C）2011，JPO＆INPIT

    Micromachine
    7.
    发明专利
    Micromachine 审中-公开

    公开(公告)号：JP2004130396A

    公开(公告)日：2004-04-30

    申请号：JP2002294628

    申请日：2002-10-08

    Applicant: Sony Corp ,  ソニー株式会社

    Inventor： IKEDA KOICHI ,  KINOSHITA TAKASHI

    IPC: B81B3/00 ,  H02N1/00

    Abstract: PROBLEM TO BE SOLVED: To provide a micromachine which vibrates a vibrating part with high precision, while preventing the influence of vibration of support parts upon the vibrating part.
    SOLUTION: This micromachine is provided with the support parts 10a erected on a board 2, and the vibrating part 11 extending above the board 2 from the support parts 10a through a space part A. The joint part side of the support part 10a to the boards 2 is shaped to project downward from the vibrating part 11. The support part 10a and the vibrating part 11 may be integrally formed by patterning of the same films 7, 8 or may be formed as separate bodies.
    COPYRIGHT: (C)2004,JPO

    Production method for hollow structure and production method for mems element
    8.
    发明专利
    Production method for hollow structure and production method for mems element 审中-公开

    公开(公告)号：JP2004106074A

    公开(公告)日：2004-04-08

    申请号：JP2002268817

    申请日：2002-09-13

    Applicant: Sony Corp ,  ソニー株式会社

    Inventor： IKEDA KOICHI ,  KINOSHITA TAKASHI

    IPC: B81C1/00 ,  H01L21/3065

    Abstract: PROBLEM TO BE SOLVED: To optimize a pattern layout of gas introduction holes in an etching process for a sacrifice layer in the production of a MEMS element.
    SOLUTION: A production method for hollow structure comprises the steps of forming a drive member on an upper surface of the sacrifice layer formed on a substrate and forming a plurality of the gas introduction holes in the drive member, feeding etching gas through the gas introduction holes 18 and selectively removing the sacrifice layer by etching to form a space between the substrate and the drive member. The plurality of the gas introduction holes 18 are formed over the whole area of the sacrifice layer, and at least mutual distances between the gas introduction holes 18 are equalized.
    COPYRIGHT: (C)2004,JPO

    Optical mems element, its manufacturing method, glv device, and laser display
    9.
    发明专利
    Optical mems element, its manufacturing method, glv device, and laser display 审中-公开

    公开(公告)号：JP2004102150A

    公开(公告)日：2004-04-02

    申请号：JP2002266942

    申请日：2002-09-12

    Applicant: Sony Corp ,  ソニー株式会社

    Inventor： KASAI HIROTO ,  IKEDA KOICHI

    IPC: G02B26/08 ,  B81B3/00 ,  B81B7/04 ,  B81C1/00

    Abstract: PROBLEM TO BE SOLVED: To provide an optical MEMS element having a mirror layer maintaining a high physical characteristic and a high optical characteristic which are obtained at the time of film formation.
    SOLUTION: The optical MEMS element 50 which is an optical MEMS element having a center beam structure is provided with an insulating substrate 52, a lower electrode 54 formed on the substrate 52, a bridge-like ribbon 56 formed by an insulating film, an upper electrode 58 laminated on the ribbon 56, and a mirror layer 60 formed on the upper electrode 58. Laminated films of the ribbon 56 and the upper electrode 58 are formed like a bridge by intersecting with the lower electrode 54 and constitute a beam 61 that both the end parts of the laminated films are supported on the insulating substrate 52 by cylindrical parts 62 consisting of similar laminated films and the beam 61 which is a center beam is electrically insulated from the lower electrode 54 through a gap part 64. The mirror layer 60 is an optical film aiming at only light reflection and diffraction and is formed in an area opposed to the lower electrode 54 out of the upper electrode 58. The mirror layer 60 is selectively deposited only in a required area by using a mask.
    COPYRIGHT: (C)2004,JPO

    METHOD OF MANUFACTURING MICRO ELECTRO MECHANICAL SYSTEM ELEMENT
    10.
    发明专利
    METHOD OF MANUFACTURING MICRO ELECTRO MECHANICAL SYSTEM ELEMENT 审中-公开

    公开(公告)号：JP2003200395A

    公开(公告)日：2003-07-15

    申请号：JP2001394881

    申请日：2001-12-26

    Applicant: SONY CORP

    Inventor： IKEDA KOICHI ,  KINOSHITA TAKASHI

    IPC: B81C1/00 ,  B81B3/00 ,  H01L21/00

    Abstract: PROBLEM TO BE SOLVED: To flatten a surface of a drive side electrode in an electrostatic drive type MEMS element. SOLUTION: A substrate side electrode is formed on a substrate. A fluid film is formed before or after forming a sacrifical layer. A beam having a drive side electrode is formed on a flattened surface and then the sacrifical layer is removed. COPYRIGHT: (C)2003,JPO

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