Abstract:
PROBLEM TO BE SOLVED: To achieve high-quality and high-speed communication without increasing a mounting region.SOLUTION: A signal transmission cable includes a first connector, a second connector, and a cable connecting the first connector and the second connector. Each of the first connector and the second connector has at least one or more layers of organic substrates. The cable has a dielectric layer and a metal layer. The dielectric layer of the cable is formed by extending part of the organic substrates of the first connector and the second connector. A tip of the metal layer of the cable is directly connected to an output terminal of a chip disposed on the organic substrates of the first connector and the second connector.
Abstract:
PROBLEM TO BE SOLVED: To load the same substrate with a semiconductor element and a micro-electromechanical device by manufacturing the semiconductor element and the micro-mechanical device on the same substrate, and then forming wiring for connecting the semiconductor element and the micro-mechanical device to each other. SOLUTION: This semiconductor compound device 1 includes: a semiconductor element 21 formed on the substrate 11; an insulating film 41 formed on the substrate 11 to cover the semiconductor element 21; the micro-electromechanical device 31 formed on the insulating film 41; and a wiring layer 50 for connecting the semiconductor element 21 and the micro-electromechanical device 31 to each other. The device solves the above problem. COPYRIGHT: (C)2007,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a filter device for developing a filtering function equivalent to that of a band-pass filter, without mutual mechanical connecting the beam electrodes of two minute resonators. SOLUTION: A plurality of minute resonators 15, 16, 17, 18 are electrically interconnected in a lattice form among two input terminals for balanced input and two output terminals for balanced output, by respectively connecting the minute resonator 15 (16), each having a beam structure in series between the input terminal 11 (12) and the output terminal 13 (14) and by respectively connecting the minute resonator 17 (18), each having a beam structure in series in between the input terminal 11 (12) and the output terminal 14 (13). COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To provide a semiconductor memory device of the so-called 'stack capacitor structure', which has a structure capable of reliably preventing peeling-off of a lower electrode. SOLUTION: The semiconductor memory device comprises (A) a transistor, (B) a capacitor section provided on the upper part of the transistor via an interlayer insulating layer 16 and consisting of a lower electrode 31, a capacitor layer 32 formed of a high dielectric material or a ferroelectric material and an upper electrode 33, (C) a contact plug 21, (D) a diffusion barrier layer 23, and (E) an adhesive layer 30 provided between at least the electrode 31 and the layer 23; the layer 30 contains a noble metallic element as the principal component, and further contains a metal element excepting the noble metallic material, an alkali element and an alkali rare-earth metal as an component, and consists of an alloy which does not contain an oxygen element.
Abstract:
PROBLEM TO BE SOLVED: To provide an interposer which exhibits excellent high frequency characteristics while simplifying the manufacturing process.SOLUTION: A through electrode 12 is provided through a substrate 11, a dielectric layer 14A is formed on the substrate 11 and then interconnections 16A and 16B and an antenna 17 are formed on the dielectric layer 14A. Subsequently, dielectric layers 14 and 14C are laminated, respectively, on the undersurface of the substrate 11 and on the dielectric layer 14A, and a recess 19A is provided in the substrate 11 thus completing an interposer 10A. After bonding a semiconductor chip 20 to the top face side of the substrate 11, the undersurface side of the substrate 11 is mounted on a printed board 30. Since the interconnections 16A and 16B for connecting the semiconductor chip 20 and the printed board 30 are provided on the substrate 11, the manufacturing process is simplified.
Abstract:
PROBLEM TO BE SOLVED: To provide a high-frequency device capable of suppressing reduction of high-frequency characteristics of a high-frequency device having openings on a substrate. SOLUTION: On a substrate 11, a dielectric layer 15A, high-frequency element 16s (slot antenna 16A, microstrip line 16B), a dielectric layer 15B and an RFIC circuit 18 are formed in order. Openings 17 (17A, 17B) are provided in the substrate 11 located opposite to the high-frequency elements 16 (slot antenna 16A, microstrip line 16B). On the dielectric layer 15, complementing layers 21 (21A, 21b) constituted of dielectric materials or magnetic materials are provided in positions opposed to the openings 17 (17A, 17B). Thus, reduction of a dielectric constant or permeability caused by forming the openings 17 is complemented in the substrate 11and reduction of high-frequency characteristics of a high-frequency device 1 can be suppressed. COPYRIGHT: (C)2011,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide an electric machine element which can reduce a gap length between a lower electrode and an upper electrode of a movable element thereof. SOLUTION: The electric machine element is composed of the movable element 25 having the lower electrode 23 and the upper electrode via a space 24 therebetween, and either one or both of the lower electrode 23 and the upper electrode 25 are formed of a laminated structure. COPYRIGHT: (C)2008,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To form a cavity wherein a micro machine surely operates, without damaging the reliability of an electronic circuit. SOLUTION: A micro machine operation structure 7 is arranged in an opening 12a for etching which is formed in a wiring interlayer insulating layer 9, and an etching stop layer 4 is arranged under the micro machine operation structure 7. An etching protection wall 12 is formed on the inside wall surface of the opening 12a in the wiring interlayer insulating layer 9 at a necessary clearance with the micro machine operation structure 7, and a cavity 13 is formed in the arrangement portion of the micro machine operation structure 7 so as to keep its entire outer surface not being in contact with the other part. Thus, the deterioration of characteristic in an adjacent wiring due to the formation of the cavity 13 is avoided by the etching protection wall 12. COPYRIGHT: (C)2007,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To manufacture a hollow structure element having high durability by preventing the first and secondary stictions. SOLUTION: A structure 2 is provided through a sacrifice layer imbedded in a recessed portion 10a provided on a base plate 10, and a hollow structure element 1 structures a hollow space S in the recessed portion 10a by etching the sacrifice layer. On an inner surface of the recessed portion 10a, a thin film 11 made from material capable of forming a predetermined product by reacting with etchant etching the sacrifice layer is provided. The manufacturing method forms the thin film 11 made from the material capable of forming the predetermined product by reacting with the etchant etching the sacrifice layer on the inner surface of the recessed portion 10a, after forming the recessed portion 10a on the base plate 10, and imbeds the sacrifice layer through the thin film 11. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To provide a stacked cell which has a constitution suitable for the high integration and fining of a semiconductor memory device and has a constitution for preventing the oxidation of a plug in a manufacturing process of the cell, and to provide a manufacturing method of the cell. SOLUTION: The stacked cell 100 comprises an insulating film 12, a plug 114 provided through the insulating film 12, a lower electrode 18 provided to the upper side of the insulating film 12 and electrically combined with the plug 114, an anti-plug oxygen ingression preventing film 102 provided as a foundation film of the lower electrode 18 between the lower electrode 18 and the insulating film 12, and a dielectric film 120 and an upper electrode 22 laminated on the lower electrode 18 one by one. COPYRIGHT: (C)2004,JPO&NCIPI