Abstract:
A first member (32) is provided with an electrostatic actuator (46), and a second member (33) is provided with a drive IC (72) for driving said electrostatic actuator (46). The first member (32) and the second member (33) are joined by join parts (35 and 36) at the outer edges thereof such that the surface on which the electrostatic actuator (46) is provided and the surface on which the drive IC (72) is provided face each other. The electrostatic actuator (46) and the drive IC (72) are hermetically sealed in a space (34) enclosed by the first member (32), the second member (33), and the join parts (35 and 36). The electrostatic (46) actuator and the drive IC (72) for driving said electrostatic actuator are thus stacked vertically, making it possible to reduce the size of the mounting footprint.
Abstract:
A carbon nanotube assembly comprises a plurality of carbon nanotubes arranged into a patterned frame (10) and extending from a base (33) of the patterned frame to a face (31) of the patterned frame, the patterned frame having a height of at least about 10 μm or greater. At least one passage (14) extends through or is defined in the patterned frame, the at least one passage extending from the base of the patterned frame to the face of the patterned frame. An interstitial material at least partially fills interstices between at least some of the carbon nanotubes.
Abstract:
A multi-stable electromechanical switch having an open state and a closed state, the electromechanical switch comprising: a moveable member, at least one pair of receiving terminals biased to a bias position corresponding to the open state, wherein each terminal of the at least one pair of receiving terminals is configured to interface with the moveable member in the closed state; and an actuating circuit configured to provide electrostatic energy and to thereby displace the at least one pair of receiving terminals from the bias position, and to displace the moveable member toward the bias position; wherein the receiving terminals are further configured to return towards the bias position when the electrostatic energy is removed, and to thereby create an electrical connection with the moveable member, thereby retaining the electromechanical switch in the closed state.
Abstract:
Curved out of plane metal components are formed on PCB substrates (11) by electroplating two layers (13, 14) of the same metal such that each layer has a different internal stress. This produces as curvature of the layer (13, 14) which enables coils, curved cantilever beams and springs to be fabricated. The amplitude and direction of curvature can be controlled by controlling the stress and thickness of each layer. The stress is controlled by controlling the composition of the electroplating bath.
Abstract:
According to one embodiment, a movable MEMS component suspended over a substrate is provided. The component can include a structural layer having a movable electrode separated from a substrate by a gap. The component can also include at least one standoff bump attached to the structural layer and extending into the gap for preventing contact of the movable electrode with conductive material when the component moves. The structural layer is folded.