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    Apparatus with a rotatable MEMS device
    61.
    发明授权
    Apparatus with a rotatable MEMS device 有权

    公开(公告)号：US09664897B1

    公开(公告)日：2017-05-30

    申请号：US14883474

    申请日：2015-10-14

    Applicant: Intel Corporation

    Inventor： Arnon Hirshberg

    IPC: G02B26/08 ,  G02B26/10 ,  H02N1/00

    CPC classification number: G02B26/085 ,  B81B5/00 ,  B81B2201/034 ,  G02B26/105 ,  H02K33/18 ,  H02N1/006

    Abstract: Embodiments of the present disclosure are directed toward an apparatus with a rotatable MEMS device. The apparatus may include a magnetic circuit with two magnets disposed opposite each other to produce a magnetic field between the magnets. The MEMS device may be placed in a frame disposed between the magnets. The MEMS device may include a driving coil disposed around the device, and may be rotatable around a first axis of the frame, in response to application of electromagnetic force produced by interaction of electric current to pass through the driving coil, with the magnetic field. The frame may include another driving coil, and may be rotatable around a second axis orthogonal to first axis, in response to application of electromagnetic force produced by interaction of electric current to pass through the second driving coil, with the magnetic field. Other embodiments may be described and/or claimed.

    Kinetic energy atom-powered engine
    63.
    发明授权
    Kinetic energy atom-powered engine 有权

    公开(公告)号：US09470090B2

    公开(公告)日：2016-10-18

    申请号：US14696266

    申请日：2015-04-24

    Applicant: Lee Ervin

    Inventor： Lee Ervin

    IPC: F01D1/18 ,  F01D25/14 ,  F01D25/00 ,  B81B5/00 ,  F03B17/00

    CPC classification number: F01D1/18 ,  B81B5/00 ,  B81B2201/03 ,  B81B2201/034 ,  B81B2203/06 ,  F01D25/005 ,  F01D25/14 ,  F03B17/00 ,  Y02E10/20 ,  Y02E10/28

    Abstract: A device for converting the kinetic energy of molecules into useful work includes an actuator configured to move within a fluid or gas due to collisions with the molecules of the fluid or gas. The actuator has dimensions that subject it to the Brownian motion of the surrounding molecules. The actuator utilizes objects having multiple surfaces where the different surfaces result in differing coefficients of restitution. The Brownian motion of surrounding molecules produce molecular impacts with the surfaces. Each surface then experiences relative differences in transferred energy from the kinetic collisions. The sum effect of the collisions produces net velocity in a desired direction. The controlled motion can be utilized in a variety of manners to perform work, such as generating electricity or transporting materials.

    MEMS rotary fuze architecture for out-of-line applications
    64.
    发明授权
    MEMS rotary fuze architecture for out-of-line applications 有权
    用于离线应用的MEMS旋转引信架构

    公开(公告)号：US09441931B1

    公开(公告)日：2016-09-13

    申请号：US14756652

    申请日：2015-09-29

    Applicant: Department of the Navy

    Inventor： Troy Caruso ,  Thinh Hoang ,  Daniel Jean ,  Kevin Cochran ,  Andrew Jen ,  Scott Rauscher ,  Kristopher Nodianos

    IPC: F42C15/188 ,  F42C15/40 ,  F42C19/12 ,  B81B3/00 ,  B81C1/00

    CPC classification number: F42C15/188 ,  B81B3/0024 ,  B81B2201/031 ,  B81B2201/034 ,  B81B2203/056 ,  F42C15/40

    Abstract: An apparatus used in a fuze device, which includes a MEMS micro-rotor. The micro-rotor of the apparatus may move an explosive material, for example, a fuze material, from an out-of-line position to an in-line position. The micro-rotor includes an integral cavity in which the material may be safely loaded and held in the out-of-line position. At an appropriate time, the fuze device of a fully assembled ordnance may be armed. When the apparatus is activated, the micro-rotor carefully moves the explosive material to the in-line position, where the ordnance is armed.

    Abstract translation: 一种在引信装置中使用的装置，其包括MEMS微转子。 装置的微型转子可以将爆炸物质例如引信材料从脱线位置移动到直列位置。 微转子包括整体空腔，其中材料可以被安全地装载并保持在离线位置。 在适当的时候，完全组装的军械的引信装置可以装备。 当设备启动时，微型转子会将爆炸物小心地移动到装备武器的在线位置。

    Micromachine switch, filter circuit, duplexer circuit, and communication device
    68.
    发明授权
    Micromachine switch, filter circuit, duplexer circuit, and communication device 有权
    微机械开关，滤波电路，双工器电路和通讯装置

    公开(公告)号：US08022794B2

    公开(公告)日：2011-09-20

    申请号：US12297334

    申请日：2007-04-25

    Applicant: Hiroshi Nakatsuka ,  Takehiko Yamakawa ,  Keiji Onishi

    Inventor： Hiroshi Nakatsuka ,  Takehiko Yamakawa ,  Keiji Onishi

    IPC: H01P1/10 ,  H01H57/00

    CPC classification number: B81B5/00 ,  B81B2201/018 ,  B81B2201/034 ,  H01H1/0036 ,  H01P1/127

    Abstract: A micromachine switch switches an electrical connection between signal electrodes in accordance with control signals. The micromachine switch includes a substrate, a rotating body provided on the substrate, and a movable electrode provided on the rotating body. The micromachine switch also includes a first signal electrode, one end of which is electrically connected to one end of the movable electrode, and a second signal electrode provided near the rotating body to be positioned such that a rotation of the rotating body causes the second signal electrode to be electrically connected to another end of the movable electrode. Further, a drive section causes, based on a first control signal, the rotating body to rotate until the movable electrode and the second signal electrode are electrically connected, and causes, based on a second control signal, the rotating body to rotate until the movable electrode and the second signal electrode are disconnected.

    Abstract translation: 微机械开关根据控制信号切换信号电极之间的电气连接。 微机械开关包括基板，设置在基板上的旋转体和设置在旋转体上的可动电极。 微机械开关还包括第一信号电极，其一端电连接到可动电极的一端，以及第二信号电极，设置在旋转体附近，以定位成使得旋转体的旋转引起第二信号 电极电连接到可动电极的另一端。 此外，驱动部基于第一控制信号使旋转体旋转直到可动电极和第二信号电极电连接，并且基于第二控制信号使旋转体旋转直到可动 电极和第二信号电极断开。

    Radially Staged Microscale Turbomolecular Pump
    69.
    发明申请
    Radially Staged Microscale Turbomolecular Pump 审中-公开
    径向分级微尺度涡轮分子泵

    公开(公告)号：US20090081022A1

    公开(公告)日：2009-03-26

    申请号：US11859682

    申请日：2007-09-21

    Applicant: Wei Yang

    Inventor： Wei Yang

    IPC: F04D19/04 ,  F04D17/08

    CPC classification number: F04D17/168 ,  B81B3/0021 ,  B81B2201/034 ,  B81B2201/036 ,  B81B2203/056 ,  F04D17/127

    Abstract: A radial turbomolecular vacuum pump that includes a rotor made from a silicon rotor surface comprising monolithically fabricated micro blades, and a stator made from a silicon stator surface comprising corresponding monolithically fabricated grooves. The micro blades and grooves are arranged in multiple rings, and the rotor and stator disks are placed in proximity, creating interdigitated stator and rotor blade rings. The interdigitated stator and rotor blade rings form a multi-stage compression in the radial direction.

    Abstract translation: 一种径向涡轮分子真空泵，包括由包括单片制造的微型叶片的硅转子表面制成的转子，以及由硅定子表面制成的定子，其包括相应的单片制造的凹槽。 微型叶片和槽布置在多个环中，并且转子和定子盘被放置在邻近处，产生相互指向的定子和转子叶片环。 交叉定子和转子叶片环在径向方向形成多级压缩。

    MICRO ELECTRO MECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF
    70.
    发明申请
    MICRO ELECTRO MECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF 有权
    微电子机械装置及其制造方法

    公开(公告)号：US20080017925A1

    公开(公告)日：2008-01-24

    申请号：US11777409

    申请日：2007-07-13

    Applicant: Mayumi YAMAGUCHI ,  Konami IZUMI

    Inventor： Mayumi YAMAGUCHI ,  Konami IZUMI

    IPC: H01L29/06 ,  H01L21/00

    CPC classification number: H01L29/84 ,  B81B2201/034 ,  B81C1/00246 ,  B81C2203/0742

    Abstract: To manufacture a micro structure and an electric circuit included in a micro electro mechanical device over the same insulating surface in the same step. In the micro electro mechanical device, an electric circuit including a transistor and a micro structure are integrated over a substrate having an insulating surface. The micro structure includes a structural layer having the same stacked-layer structure as a layered product of a gate insulating layer of the transistor and a semiconductor layer provided over the gate insulating layer. That is, the structural layer includes a layer formed of the same insulating film as the gate insulating layer and a layer formed of the same semiconductor film as the semiconductor layer of the transistor. Further, the micro structure is manufactured by using each of conductive layers used for a gate electrode, a source electrode, and a drain electrode of the transistor as a sacrificial layer.

    Abstract translation: 在相同的步骤中，在相同的绝缘表面上制造包括在微机电装置中的微结构和电路。 在微机电装置中，包括晶体管和微结构的电路集成在具有绝缘表面的基板上。 微结构包括具有与晶体管的栅极绝缘层的层叠体和设置在栅极绝缘层上的半导体层相同的层叠结构的结构层。 也就是说，结构层包括由与绝缘层相同的绝缘膜形成的层和由与晶体管的半导体层相同的半导体膜形成的层。 此外，通过使用用作晶体管的栅电极，源电极和漏电极的导电层作为牺牲层来制造微结构。

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