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公开(公告)号：US11530917B2
公开(公告)日：2022-12-20
申请号：US16580618
申请日：2019-09-24
Applicant: The Charles Stark Draper Laboratory, Inc.
Inventor： Eugene H. Cook , Jonathan J. Bernstein , Mirela G. Bancu , Marc Steven Weinberg , William Sawyer
IPC: G01C19/5621 , B81C1/00 , B81B3/00 , G01C19/5628
Abstract: Methods for fabricating MEMS tuning fork gyroscope sensor system using silicon wafers. This provides the possibly to avoid glass. The sense plates can be formed in a device layer of a silicon on insulator (SOI) wafer or in a deposited polysilicon layer in a few examples.
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公开(公告)号：US10113873B2
公开(公告)日：2018-10-30
申请号：US15160421
申请日：2016-05-20
Applicant: THE CHARLES STARK DRAPER LABORATORY, INC.
Inventor： Eugene H. Cook , Marc S. Weinberg , Jonathan J. Bernstein
IPC: G01C19/574 , G01C19/5684 , G01C19/5726 , G01C19/5733
Abstract: According to one aspect, embodiments herein provide a gyroscope comprising a central anchor, a plurality of internal flexures, a plurality of masses, each mass coupled to the central anchor via at least one of the plurality of internal flexures and configured to translate in a plane of the gyroscope, and a plurality of mass-to-mass couplers, each mass-to-mass coupler coupled between two adjacent masses of the plurality of masses, and a plurality of transducers, each configured to perform at least one of driving and sensing motion of a corresponding one of the plurality of masses, wherein the plurality of transducers is configured to drive the plurality of masses in at least a first vibratory mode and a second vibratory mode.
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公开(公告)号：US20180245946A1
公开(公告)日：2018-08-30
申请号：US15906177
申请日：2018-02-27
Applicant: THE CHARLES STARK DRAPER LABORATORY, INC.
Inventor： Marc Steven Weinberg , Ralph Cohn , Eugene H. Cook
IPC: G01C25/00 , G01C19/5776
CPC classification number: G01C25/00 , G01C19/5684 , G01C19/5776 , G01C25/005
Abstract: According to one aspect, embodiments herein provide a whole angle gyroscope comprising a central point, at least one mass arranged symmetrically about the central point, a plurality of transducers, each configured to perform at least one of driving and sensing motion of the at least one mass, and a processor coupled to the plurality of transducers, the processor configured to operate the plurality of transducers to drive the at least one mass in at least a first vibratory mode and a second vibratory mode, identify a rate dead zone of the whole angle gyroscope, and operate the plurality of transducers to apply a force to the at least one mass to reduce the identified rate dead zone of the whole angle gyroscope.
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公开(公告)号：US10014204B2
公开(公告)日：2018-07-03
申请号：US15207185
申请日：2016-07-11
Applicant: THE CHARLES STARK DRAPER LABORATORY, INC.
Inventor： Eugene H. Cook , Amy Duwel , David J. Carter , Gayatri E. Perlin
IPC: H01L21/683 , H01L21/304 , H01L21/3065 , H01L21/78 , H01L23/00 , G06K19/073
CPC classification number: H01L21/6835 , G06K19/07381 , H01L21/304 , H01L21/30604 , H01L21/3065 , H01L21/78 , H01L23/57 , H01L2221/68327
Abstract: A method of fabricating ultra-thin semiconductor devices includes forming an array of semiconductor dielets mechanically suspended on a frame with at least one tether connecting each semiconductor dielet of the array of semiconductor dielets to the frame.
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公开(公告)号：US20170367418A1
公开(公告)日：2017-12-28
申请号：US15534907
申请日：2015-12-09
Applicant: THE CHARLES STARK DRAPER LABORATORY, INC.
Inventor： David J. Carter , Tirunelveli S. Sriram , Parshant Kumar , Clayton Morris , William W. McFarland , Eugene H. Cook , John LeBlanc , Alla Gimbel
CPC classification number: A41D19/01564 , B29C33/3842 , B29C33/424 , B29C33/58 , B29C37/0053 , B29C39/026 , B29C39/10 , B29C39/26 , B29C45/372 , B29C2059/023 , B29D99/0067 , B29K2075/00 , B29K2105/0097 , B29K2863/00 , B29K2891/00 , B29L2031/4864
Abstract: A mold for casting a micro-scale structure includes an upper surface including a first cavity having a first depth. A negative pattern for an array of micro-scale structures is defined in a surface of the first cavity. The mold includes at least one second cavity having a second depth defined in the cavity outside of the negative pattern for the array of micro-scale structures. The at least one second cavity defines a negative pattern for a standoff of the micro-scale structure. A fabric retaining frame is disposed in the first cavity.
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Patent Agency Ranking
公开(公告)号：US20170102263A1
公开(公告)日：2017-04-13
申请号：US15288843
申请日：2016-10-07
Inventor： Jonathan J. Bernstein , Marc S. Weinberg , Amy Duwel , Paul A. Ward , Nicol E. McGruer , Matteo Rinaldi , Eugene H. Cook
CPC classification number: G01P15/135 , H01H1/0036 , H01H35/144 , H01H2001/0063 , H01H2001/0078 , H01H2001/0084
Abstract: An environmental physical sensor is provided that includes a power input terminal, a sensor output terminal, and a resonant switch. The resonant switch includes a mechanical element that is responsive to an environmental stimulus and is coupled to an electrical switch. The electrical switch is operable between an open position and a closed position and electrically connects the power input terminal to the sensor output terminal when in the closed position. The mechanical element is configured to intermittently actuate the electrical switch into the closed position responsive to the environmental stimulus.
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公开(公告)号：US12092460B2
公开(公告)日：2024-09-17
申请号：US17980045
申请日：2022-11-03
Applicant: The Charles Stark Draper Laboratory, Inc.
Inventor： Eugene H. Cook , Jonathan J. Bernstein , Mirela G. Bancu , Marc Steven Weinberg , William Sawyer
IPC: G01C19/5621 , B81B3/00 , B81C1/00 , G01C19/5628
CPC classification number: G01C19/5621 , B81B3/0097 , B81C1/00166 , G01C19/5628 , B81B2201/0242 , B81B2203/04 , B81B2207/096 , B81C2201/0132 , B81C2201/0133 , B81C2203/035 , B81C2203/036
Abstract: Methods for fabricating MEMS tuning fork gyroscope sensor system using silicon wafers. This provides the possibly to avoid glass. The sense plates can be formed in a device layer of a silicon on insulator (SOI) wafer or in a deposited polysilicon layer in a few examples.
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公开(公告)号：US11237335B1
公开(公告)日：2022-02-01
申请号：US16586249
申请日：2019-09-27
Applicant: The Charles Stark Draper Laboratory, Inc.
Inventor： Michael G. Moebius , Steven J. Spector , Eugene H. Cook , Jonathan J. Bernstein
IPC: G02B6/35
Abstract: MEMS-actuated optical switches can be implemented on photonic chips. These switches are compact, essentially planar, simple to implement and include only one moving MEMS component per switch. The switches exhibit low optical loss, require low power to operate, and are simple to control and easy to integrate with other optical devices. Each switch has two optical waveguides that are optically coupled in an ON switch state and not coupled in an OFF switch state. An end or a medial section of one of the two waveguides may translate between the ON and OFF states to affect the coupling. Alternatively, a coupling frustrator may translate between the ON and OFF states to affect the coupling.
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公开(公告)号：US20200096336A1
公开(公告)日：2020-03-26
申请号：US16580618
申请日：2019-09-24
Applicant: The Charles Stark Draper Laboratory, Inc.
Inventor： Eugene H. Cook , Jonathan J. Bernstein , Mirela G. Bancu , Marc Steven Weinberg , William Sawyer
IPC: G01C19/5621 , B81C1/00 , B81B3/00 , G01C19/5628
Abstract: Methods for fabricating MEMS tuning fork gyroscope sensor system using silicon wafers. This provides the possibly to avoid glass. The sense plates can be formed in a device layer of a silicon on insulator (SOI) wafer or in a deposited polysilicon layer in a few examples.
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公开(公告)号：US10345332B2
公开(公告)日：2019-07-09
申请号：US15288843
申请日：2016-10-07
Inventor： Jonathan J. Bernstein , Marc S. Weinberg , Amy Duwel , Paul A. Ward , Nicol E. McGruer , Matteo Rinaldi , Eugene H. Cook
IPC: G01P15/135 , H01H1/00 , H01H35/14
Abstract: An environmental physical sensor is provided that includes a power input terminal, a sensor output terminal, and a resonant switch. The resonant switch includes a mechanical element that is responsive to an environmental stimulus and is coupled to an electrical switch. The electrical switch is operable between an open position and a closed position and electrically connects the power input terminal to the sensor output terminal when in the closed position. The mechanical element is configured to intermittently actuate the electrical switch into the closed position responsive to the environmental stimulus.
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