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公开(公告)号：WO2006103945A1
公开(公告)日：2006-10-05
申请号：PCT/JP2006/305238
申请日：2006-03-16
CPC classification number: H01T19/00 , C01B13/11 , C01B2201/12 , C01B2201/14 , C01B2201/22 , C01B2201/24 , C01B2201/32 , C01B2201/34 , C01B2201/60 , C01B2201/64 , C01B2201/76 , C01B2201/90
Abstract: 無声放電式プラズマ発生装置が、誘電体と、誘電体を挟んで対向配置された１組の電極と、電極間に交流電圧を印加して放電させる交流電源とを含み、放電を発生させる放電空間にガスを供給してプラズマを形成する。電極の少なくとも一方は、誘電体の上に形成された導電性の給電薄膜からなり、誘電体が破損して電極間にアーク放電が発生した場合に、アーク放電が発生した部分の給電薄膜を消滅または酸化させて、アーク放電の発生を停止させる。
Abstract translation: 一种无声放电型等离子体发生器，包括电介质，相对设置在电介质上的一组电极，以及用于向电极之间施加交流电压以引起放电的交流电源，等离子体通过向放电产生放电 空间。 电极中的至少一个由形成在电介质上的导电进料薄膜组成，并且当电介质损坏以在电极之间产生电弧放电时，放电产生的馈电薄膜部分被消除或氧化以停止 电弧放电器一代。
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公开(公告)号：WO2003086966A1
公开(公告)日：2003-10-23
申请号：PCT/SE2003/000552
申请日：2003-04-04
Applicant: VATRELLA AB , ARLEMARK, Jan
Inventor： ARLEMARK, Jan
IPC: C01B13/11
CPC classification number: C01B13/11 , C01B2201/12 , C01B2201/64 , C01B2201/66 , C01B2201/76 , C01B2201/90
Abstract: In a closed ozone generator unit (2) oxygen gas is transformed into ozone gas by means of alternating current, the oxygen gas being substantially pressurized before entry into the unit (2). The unit is exposed to an external pressure substantially equal to or higher than the pressure of the oxygen gas.
Abstract translation: 在封闭的臭氧发生器单元（2）中，氧气通过交流电转化成臭氧气体，氧气在进入单元（2）之前基本上被加压。 该单元暴露于基本上等于或高于氧气压力的外部压力。
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公开(公告)号：EP3162760A4
公开(公告)日：2017-11-08
申请号：EP15812317
申请日：2015-04-15
Applicant: MITSUBISHI ELECTRIC CORP
Inventor： WADA NOBORU , INANAGA YASUTAKA
CPC classification number: C01B13/115 , B01D53/56 , C01B13/11 , C01B2201/10 , C01B2201/22 , C01B2201/64 , C01B2201/76 , C01B2201/90
Abstract: In an ozone generating system which performs intermittent operation, that is, an operation in an ozone generating operation period in which ozone is generated by discharging gas including oxygen at a discharge electrode part and an operation in an ozone generating operation standby period in which ozone is not generated by stopping discharge are alternately repeated, a gas circulating device which circulates gas in the ozone generating apparatus and removes at least nitric acid from the gas which is circulated is connected to the ozone generating apparatus.
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公开(公告)号：EP2891625B1
公开(公告)日：2017-01-04
申请号：EP12883647.5
申请日：2012-08-30
Inventor： TABATA, Yoichiro , NISHIMURA, Shinichi , NAKAMURA, Noriyuki , OKIHARA, Yujiro
CPC classification number: C01B13/11 , B01J35/004 , B01J35/02 , C01B2201/10 , C01B2201/20 , C01B2201/64 , C01B2201/70 , C01B2201/90
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公开(公告)号：EP2835347B1
公开(公告)日：2016-07-27
申请号：EP13772459.7
申请日：2013-02-12
Applicant: Mitsubishi Electric Corporation
Inventor： WADA, Noboru , ESAKI, Norimitsu , NAKATANI, Hajime , INANAGA, Yasutaka , ODAI, Yoshiaki
CPC classification number: C01B13/11 , B01J19/088 , B01J2219/00051 , B01J2219/00164 , B01J2219/0809 , C01B2201/10 , C01B2201/14 , C01B2201/22 , C01B2201/32 , C01B2201/64 , C01B2201/76 , C01B2201/90 , Y02P20/129
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Patent Agency Ranking
公开(公告)号：EP2891625A4
公开(公告)日：2016-04-20
申请号：EP12883647
申请日：2012-08-30
Applicant: TOSHIBA MITSUBISHI ELEC INC
Inventor： TABATA YOICHIRO , NISHIMURA SHINICHI , NAKAMURA NORIYUKI , OKIHARA YUJIRO
CPC classification number: C01B13/11 , B01J35/004 , B01J35/02 , C01B2201/10 , C01B2201/20 , C01B2201/64 , C01B2201/70 , C01B2201/90
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公开(公告)号：EP1719735B1
公开(公告)日：2015-09-02
申请号：EP04807008.0
申请日：2004-12-14
Inventor： TABATA, Yoichiro, Toshiba Mitsubishi-Electric I.S. , OKIHARA, Yujiro, Toshiba Mitsubishi-Electric I.S. , ISHIKAWA, Masayuki, Toshiba Mitsubishi-Elec. I.S. , SAITSU, Tetsuya, Toshiba Mitsubishi-Electric I.S. , YOTSUMOTO, Hatsuo, Toshiba Mitsubishi-Elec. I.S.
CPC classification number: C01B13/11 , B01J35/004 , C01B2201/12 , C01B2201/32 , C01B2201/34 , C01B2201/60 , C01B2201/64 , C01B2201/70 , C01B2201/80 , C01B2201/82 , C01B2201/90
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公开(公告)号：EP2767507A1
公开(公告)日：2014-08-20
申请号：EP14166615.6
申请日：2010-09-06
Inventor： Okihara, Yujiro , Tabata, Yoichiro , Nakamura, Noriyuki , Saitsu, Tetsuya , Yotsumoto, Hatsuo , Itoh, Nobuyuki
IPC: C01B13/11
CPC classification number: B01J19/088 , B01J2219/0805 , C01B13/11 , C01B2201/64 , C01B2201/76 , C01B2201/90
Abstract: An ozone gas supply system (20) includes a plurality of ozone generation units (7-1 to 7-n) and supplies, to a plurality of ozone treatment apparatuses, an ozone gas having been set to a predetermined supply flow rate and a predetermined concentration. Each of said plurality of ozone generation units comprises: an ozone generator (1) for generating an ozone gas; an ozone power source (2) for controlling power to be supplied to said ozone generator; and control means (3 to 5, 51) associated with said ozone generator. Said ozone gas supply system further comprises: an ozone gas output flow rate management unit (9) configured to receive a plurality of ozone gas outputs from a plurality of said ozone generators in said plurality of ozone generation units, and be capable of performing an ozone gas output flow rate control for selectively outputting one or a combination of two or more of said plurality of ozone gas outputs to any of said plurality of ozone treatment apparatuses by means of an opening/closing operation of a plurality of ozone gas control valves (9a, 9b, 9c, 9bc, 9ab, 9ca) provided in an ozone gas output flow rate management unit; and an ozone gas output flow rate management unit control part (8) for, based on a process ozone gas event signal (16) supplied from said plurality of ozone treatment apparatuses, controlling said ozone gas output of each said plurality of ozone generation units and causing said ozone gas output flow rate management unit to control said ozone gas output flow rate.
Abstract translation: 臭氧气体供给系统（20）包括多个臭氧发生单元（7-1〜7-n），并且向多个臭氧处理装置输送已经设定为规定的供给流量和规定的臭氧气体的臭氧气体 浓度。 所述多个臭氧发生单元中的每一个包括：用于产生臭氧气体的臭氧发生器（1）; 臭氧源（2），用于控制向所述臭氧发生器供应的电力; 以及与所述臭氧发生器相关联的控制装置（3至5,51）。 所述臭氧气体供给系统还包括：臭氧气体输出流量管理单元（9），被配置为从所述多个臭氧产生单元中的多个所述臭氧发生器接收多个臭氧气体输出，并且能够执行臭氧 气体输出流量控制，用于通过多个臭氧气体控制阀（9a）的打开/关闭操作来选择性地将所述多个臭氧气体输出中的一个或多个的一个或多个组合输出到所述多个臭氧处理装置中的任一个 ，9b，9c，9bc，9ab，9ca）设置在臭氧气体输出流量管理单元中; 以及臭氧气体输出流量管理单元控制部（8），其基于从所述多个臭氧处理装置供给的处理臭氧气体事件信号（16），控制所述多个臭氧发生单元的臭氧气体输出， 使所述臭氧气体输出流量管理单元控制所述臭氧气体输出流量。
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公开(公告)号：EP2505550A1
公开(公告)日：2012-10-03
申请号：EP10832935.0
申请日：2010-09-06
Inventor： OKIHARA Yujiro , TABATA Yoichiro , NAKAMURA Noriyuki , SAITSU Tetsuya , YOTSUMOTO Hatsuo , ITOH Nobuyuki
IPC: C01B13/11
CPC classification number: B01J19/088 , B01J2219/0805 , C01B13/11 , C01B2201/64 , C01B2201/76 , C01B2201/90
Abstract: An object of the present invention is to provide a downsized ozone generation unit including control means having plurality of means for outputting an ozone gas, and the ozone generation unit. In the present invention, a gas pipe integrated block (30) has a plurality of internal pipe paths (R30a to R30f). The plurality of internal pipe paths are connected to an ozone generator (1), control means (an MFC (3), a gas filter (51), and an APC (4)), a raw gas supply port (14), an ozone gas output port (15), and cooling water inlet/outlet ports (13A, 13B), to thereby form a unit in which a raw gas input pipe path and an ozone gas output pipe path are integrated. The raw gas input pipe path extends from the raw gas supply port through the APC to the ozone gas generator. The ozone gas output pipe path extends from the ozone generator through the gas filter, the ozone concentration meter 5, and the MFC 3, to the ozone gas output port.
Abstract translation: 本发明的一个目的是提供一种小型化的臭氧产生单元，其包括具有多个用于输出臭氧气体的装置的控制装置以及臭氧发生单元。 在本发明中，气体管道集成块（30）具有多个内部管道（R30a至R30f）。 多个内部管路与臭氧发生器（1），控制装置（MFC（3），气体过滤器（51）和APC（4））连接，原料气体供给口（14）， 臭氧气体输出口15和冷却水入口/出口口13A，13B，从而形成将原料气体输入管道和臭氧气体输出管道一体化的单元。 原料气体输入管道从原料气供应口通过APC延伸到臭氧气体发生器。 臭氧气体输出管道从臭氧发生器通过气体过滤器，臭氧浓度计5和MFC 3延伸到臭氧气体输出端口。
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公开(公告)号：EP1795500A4
公开(公告)日：2010-03-17
申请号：EP04788340
申请日：2004-09-29
Applicant: TOSHIBA MITSUBISHI ELEC INC
Inventor： TABATA YOICHIRO , OKIHARA YUJIRO , ISHIKAWA MASAYUKI , SAITSU TETSUYA
CPC classification number: H02M7/48 , C01B13/115 , C01B2201/12 , C01B2201/40 , C01B2201/76 , C01B2201/84 , C01B2201/90
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