DETERMINATION OF INDUCED CHANGE OF POLARIZATION STATE OF LIGHT
    61.
    发明申请
    DETERMINATION OF INDUCED CHANGE OF POLARIZATION STATE OF LIGHT 审中-公开
    诱导光的偏振态变化的确定

    公开(公告)号:WO1992021949A1

    公开(公告)日:1992-12-10

    申请号:PCT/DK1992000177

    申请日:1992-06-04

    Abstract: A method of determining induced change of polarization state of light in a polarization element comprising transmitting unpolarized light from a light source at the one end of an optical transmitter waveguide means (21) to polarizer means (31) at the other end; polarizing the unpolarized light by the polarizer means (31); transmitting the polarized light through the polarization element (41, 41A, 41B) using at least one reflective optical element; analyzing the transmitted polarized light from the polarization element by an analyzer means (32); and transmitting the analysed polarized light from the one end of optical receiver waveguide means (22) to a light detector at the other end; wherein the unpolarized light polarized by the polarizer means (31), the polarized light analysed by the analyzer means (32), or both, are non-collimated; and the polarized light in the light path between the polarizer means (31) and the analyzer means (32) is collected and reflected by at least one reflective imaging optical element (51) so that the analyzed light exits the analyzer means (32) from the same side as the unpolarized light enters the polarizer (31). Further, fiber optic sensor devices for determining induced change of polarization state of light in a polarization element, particularly linear birefringence induced by electric voltage, electric field, and mechanical force, and circular birefringence induced by electric current and magnetic field.

    Abstract translation: 一种确定偏振元件中的光的偏振状态的诱导变化的方法,包括将光发射器波导装置(21)的一端的光源的非偏振光传输到另一端的偏振器装置(31) 通过偏振器装置(31)偏振非偏振光; 使用至少一个反射光学元件透射偏振光(41,41A,41B); 通过分析器装置(32)分析来自偏振元件的透射偏振光; 并将分析的偏振光从光接收器波导装置(22)的一端传输到另一端的光检测器; 其中由偏振器装置(31)偏振的非偏振光,由分析装置(32)分析的偏振光或两者都是非准直的; 并且偏振器装置(31)和分析装置(32)之间的光路中的偏振光被至少一个反射成像光学元件(51)收集并反射,使得分析的光从分析器装置(32)离开 与非偏振光相同的一侧进入偏振器(31)。 此外,用于确定偏振元件中的光的偏振态的诱导变化的光纤传感器装置,特别是由电压,电场和机械力引起的线性双折射,以及由电流和磁场引起的圆形双折射。

    積層板構造用センサシステム
    63.
    发明专利
    積層板構造用センサシステム 审中-公开
    一种传感器系统,用于层压结构

    公开(公告)号:JP2017037061A

    公开(公告)日:2017-02-16

    申请号:JP2016117786

    申请日:2016-06-14

    Abstract: 【課題】積層板構造の内部における条件を直接モニタリングできるセンサシステムの提供。 【解決手段】積層板構造300の内部条件をモニタリングするためのセンサシステム302には、積層板構造の第1の層306と第2の層308との間に配置されたセンサアセンブリ302が含まれる。センサアセンブリ302は、互いに既定の距離で間隔を開けて配置された、第1のアンカー部材310及び第2のアンカー部材312、その間に形成されるセンサチャンバ314を含み、また、センサチャンバ314を通って延伸する感知ライン316を含む。感知ライン316は、積層板構造300内の応力、温度、温度変化のうちの1つを感知する。感知ライン316は、第1の輸送管318と第2の輸送管320を通って延伸する。 【選択図】図3

    Abstract translation: 提供一种能够在上述层叠体的内部直接监视条件的传感器系统。 用于监视所述层叠结构300的内部状态的传感器系统302包括布置在叠层中的第一层结构306和第二层之间的传感器组件302 308 。 传感器组件302中的预定的距离被布置间隔彼此分离,第一锚定构件310和第二锚定构件312,包括形成在它们之间,还通过传感器室314的传感器室314 它包括延伸碲的感测线316。 感测线316级的感官强调在上述层叠体300中,温度,温度变化中的一个。 感测线316通过第一输送管318和第二输送管320延伸。 点域

    Stress measuring method and apparatus therefor
    67.
    发明专利
    Stress measuring method and apparatus therefor 有权
    应力测量方法及其设备

    公开(公告)号:JP2005201749A

    公开(公告)日:2005-07-28

    申请号:JP2004007599

    申请日:2004-01-15

    CPC classification number: G01L5/0047 G01L1/241

    Abstract: PROBLEM TO BE SOLVED: To precisely detect stress of a sample semiconductor wafer, as the absolute value, without rotating the sample or the overall optical system. SOLUTION: A birefringent phase difference is generated when a laser light R is modulated by photo elastic modulation by a PEM (photo elastic modulator) 6, and is detected after passing through a first and a second 1/4 wave plates. The reference signal data thereof are stored in a signal processor. The laser light R of the polarized wave, modulated by the photo elastic modulation by the PEM 6 and passing through the 1/4 wave plates, has the birefringent phase difference, and is transmitted through the semiconductor wafer D having the residual stress. When transmitted through a test piece, the direction of the stress of the test piece is detected when the angle with respect to the linearly polarized light is 0 degrees and 90 degrees. The transmission electric signal thereof is transmitted to an analog/digital converter 16. The signal is inputted into the signal processor, where the transmission signal is generated. The signal processor reads out the stored reference signal data and the transmission signal data, and calculates the reference birefringent phase difference and the absolute value of the birefringent phase difference. COPYRIGHT: (C)2005,JPO&NCIPI

    Abstract translation: 要解决的问题:为了精确地检测样品半导体晶片的应力,作为绝对值,不旋转样品或整个光学系统。 解决方案:当通过光弹性调制由PEM(光弹性调制器)6调制激光R时,产生双折射相位差,并且在通过第一和第二1/4波片之后检测。 其参考信号数据被存储在信号处理器中。 通过PEM 6的光弹性调制并通过1/4波片的偏振波的激光R具有双折射相位差,并透过具有残余应力的半导体晶片D. 当通过测试件传送时,当相对于线偏振光的角度为0度和90度时,检测试件的应力方向。 其发送电信号被发送到模拟/数字转换器16.该信号被输入到生成发送信号的信号处理器中。 信号处理器读出存储的参考信号数据和发送信号数据,并计算参考双折射相位差和双折射相位差的绝对值。 版权所有(C)2005,JPO&NCIPI

Patent Agency Ranking