公开(公告)号：US09478384B2

公开(公告)日：2016-10-25

申请号：US13703190

申请日：2011-07-07

Applicant: Stefan Muthmann ,  Aad Gordijn ,  Reinhard Carius ,  Markus Huelsbeck ,  Dzmitry Hrunski

Inventor： Stefan Muthmann ,  Aad Gordijn ,  Reinhard Carius ,  Markus Huelsbeck ,  Dzmitry Hrunski

IPC: H01J37/04 ,  H01J37/22 ,  H01J37/32 ,  H01J1/02 ,  C23C14/52 ,  C23C16/44 ,  C23C16/509 ,  C23C16/52 ,  G01J3/44

CPC classification number: H01J1/02 ,  C23C14/52 ,  C23C16/44 ,  C23C16/5096 ,  C23C16/52 ,  G01J3/44 ,  H01J37/32 ,  H01J37/32623 ,  H01J37/32972

Abstract: A RF electrode for generating, plasma in a plasma chamber comprising an optical feedthrough. A plasma chamber comprising an RF electrode and a counter-electrode with a substrate support for holding a substrate, wherein a high-frequency alternating field for generating the plasma can be formed between the RF electrode and the counter-electrode. The chamber comprising an RF electrode with an optical feedthrough. A method, for in situ analysis or in situ processing of a layer or plasma in a plasma chamber, wherein the layer is disposed on counter-electrode and an RF electrode is disposed on the side lacing the layer. Selection of an RF electrode having an optical feedthrough, and at least one step in which electromagnetic radiation is supplied through the optical feedthrough for purposes of analysis or processing of the layer or the plasma, and by at least one other step in which the scattered or emitted or reflected radiation is supplied to an analysis unit.

Abstract translation: 一种用于在包括光学馈通的等离子体室中产生等离子体的RF电极。 一种包括RF电极和具有用于保持衬底的衬底支撑件的对电极的等离子体室，其中可以在RF电极和对电极之间形成用于产生等离子体的高频交变场。 该腔室包括具有光学馈通的RF电极。 一种用于等离子体室中的层或等离子体的原位分析或原位处理的方法，其中所述层设置在对电极上，并且RF电极设置在层叠该层的一侧。 选择具有光学馈通的RF电极，以及至少一个步骤，其中通过光学馈通提供电磁辐射用于分析或处理该层或等离子体，以及至少一个其它步骤，其中散射或 发射或反射的辐射被提供给分析单元。

公开(公告)号：US09117616B2

公开(公告)日：2015-08-25

申请号：US14414517

申请日：2013-06-27

Applicant: SP TECH CO., LTD.

Inventor： Hee Sik Sohn

IPC: H01J1/88 ,  H01J19/42 ,  H05H1/24 ,  H01J1/02 ,  A61L9/22 ,  A61L2/14

CPC classification number: H01J1/88 ,  A61L2/14 ,  A61L9/22 ,  H01J1/02 ,  H01T19/04 ,  H01T23/00 ,  H05H1/2406 ,  H05H2001/2412 ,  H05H2001/2437

Abstract: Provided is a dielectric barrier discharge-type electrode structure for generating plasma. The electrode structure, according to the present invention, comprises: an upper conductive body electrode and a lower conductive body electrode; at least one conductive body electrode protrusion portion, which is formed on at least one surface of the upper conductive body electrode and/or the lower conductive body electrode; a dielectric layer which is formed on at least one of the inner surfaces of the upper conductive body electrode and the lower conductive body electrode that face each other, so as to have a substantially uniform thickness; and a specific gap (d) which is formed between the upper and lower conductive body electrodes and the dielectric layer, or between dielectric layers, due to the protruding effect of the conductive body electrode protrusion portion when the upper conductive body electrode and the lower conductive body electrodes come into close contact, wherein the plasma is generated by applying a pulse power or an alternating power to the upper conductive body electrode and the lower conductive body electrode.

Abstract translation: 提供一种用于产生等离子体的电介质阻挡放电型电极结构。 根据本发明的电极结构包括：上导电体电极和下导电体电极; 形成在上导电体电极和/或下导电体电极的至少一个表面上的至少一个导电体电极突出部分; 形成在所述上导电体电极和所述下导电体电极的至少一个内表面上彼此面对的电介质层，以具有基本均匀的厚度; 以及由上导电体电极和下导电体的导电体电极突出部的突出效果而在上下导电体电极与电介质层之间或电介质层之间形成的特定间隙（d） 体电极紧密接触，其中通过向上导电体电极和下导电体电极施加脉冲功率或交流电力来产生等离子体。

公开(公告)号：US08686459B2

公开(公告)日：2014-04-01

申请号：US12236132

申请日：2008-09-23

Applicant: Eishi Tsutsumi ,  Tsutomu Nakanishi ,  Akira Fujimoto ,  Koji Asakawa

Inventor： Eishi Tsutsumi ,  Tsutomu Nakanishi ,  Akira Fujimoto ,  Koji Asakawa

IPC: H01L33/00

CPC classification number: H01B13/0036 ,  H01J1/02 ,  H01J9/02 ,  H01J17/04 ,  H01J63/02 ,  H01J2217/49207

Abstract: The present invention provides a light-transmitting metal electrode including a substrate and a metal electrode layer having plural openings. The metal electrode layer also has such a continuous metal part that any pair of point-positions in the part is continuously connected without breaks. The openings in the metal electrode layer are periodically arranged to form plural microdomains. The plural microdomains are so placed that the in-plane arranging directions thereof are oriented independently of each other. The thickness of the metal electrode layer is in the range of 10 to 200 nm.

Abstract translation: 本发明提供一种透光性金属电极，其具有基板和具有多个开口部的金属电极层。 金属电极层还具有这样的连续的金属部分，即零件中的任何一个点位置连续连接而不断裂。 周期性地布置金属电极层中的开口以形成多个微区域。 多个微区被放置成使得其面内排列方向彼此独立地取向。 金属电极层的厚度在10〜200nm的范围内。

公开(公告)号：US08603836B2

公开(公告)日：2013-12-10

申请号：US13372881

申请日：2012-02-14

Applicant: Seon Mi Yoon ,  Jae Young Choi ,  Dong Kee Yi ,  Seong Jae Choi ,  Hyeon Jin Shin

Inventor： Seon Mi Yoon ,  Jae Young Choi ,  Dong Kee Yi ,  Seong Jae Choi ,  Hyeon Jin Shin

IPC: H01L21/00

CPC classification number: H01J9/02 ,  B82Y10/00 ,  G02F1/13439 ,  H01B1/127 ,  H01B1/24 ,  H01J1/02

Abstract: Disclosed is a transparent carbon nanotube (CNT) electrode using a conductive dispersant. The transparent CNT electrode comprises a transparent substrate and a CNT thin film formed on a surface the transparent substrate wherein the CNT thin film is formed of a CNT composition comprising CNTs and a doped dispersant. Further disclosed is a method for producing the transparent CNT electrode.The transparent CNT electrode exhibits excellent conductive properties, can be produced in an economical and simple manner by a room temperature wet process, and can be applied to flexible displays. The transparent CNT electrode can be used to fabricate a variety of devices, including image sensors, solar cells, liquid crystal displays, organic electroluminescence (EL) displays and touch screen panels, that are required to have both light transmission properties and conductive properties.

Abstract translation: 公开了使用导电分散剂的透明碳纳米管（CNT）电极。 透明CNT电极包括透明基板和形成在透明基板的表面上的CNT薄膜，其中CNT薄膜由包含CNT和掺杂分散剂的CNT组合物形成。 进一步公开的是制造透明CNT电极的方法。 透明CNT电极具有优异的导电性能，可以通过室温湿法以经济和简单的方式制造，并且可以应用于柔性显示器。 透明CNT电极可用于制造具有透光性和导电性两者所需的各种装置，包括图像传感器，太阳能电池，液晶显示器，有机电致发光（EL）显示器和触摸屏面板。

公开(公告)号：US20130300289A1

公开(公告)日：2013-11-14

申请号：US13943137

申请日：2013-07-16

Applicant: Battelle Energy Alliance, LLC

Inventor： Peter C. Kong ,  Jon D. Grandy ,  Brent A. Detering ,  Larry D. Zuck

IPC: H01J1/02 ,  H05H1/50 ,  H05H7/00

CPC classification number: H01J1/02 ,  H05H1/50 ,  H05H7/00

Abstract: Electrode assemblies for plasma reactors include a structure or device for constraining an arc endpoint to a selected area or region on an electrode. In some embodiments, the structure or device may comprise one or more insulating members covering a portion of an electrode. In additional embodiments, the structure or device may provide a magnetic field configured to control a location of an arc endpoint on the electrode. Plasma generating modules, apparatus, and systems include such electrode assemblies. Methods for generating a plasma include covering at least a portion of a surface of an electrode with an electrically insulating member to constrain a location of an arc endpoint on the electrode. Additional methods for generating a plasma include generating a magnetic field to constrain a location of an arc endpoint on an electrode.

Abstract translation: 用于等离子体反应器的电极组件包括用于将电弧端点约束到电极上的选定区域或区域的结构或装置。 在一些实施例中，结构或装置可以包括覆盖电极的一部分的一个或多个绝缘构件。 在另外的实施例中，结构或装置可以提供被配置为控制电极上的电弧终点的位置的磁场。 等离子体发生模块，装置和系统包括这样的电极组件。 用于产生等离子体的方法包括用电绝缘构件覆盖电极的至少一部分表面以约束电极上的电弧端点的位置。 用于产生等离子体的附加方法包括产生磁场以约束电极上的电弧终点的位置。

公开(公告)号：US20130284948A1

公开(公告)日：2013-10-31

申请号：US13997522

申请日：2011-12-27

Applicant: Kouichi Iwamoto

Inventor： Kouichi Iwamoto

IPC: H01J1/02 ,  H01B13/06

CPC classification number: H01J1/02 ,  C04B35/117 ,  C04B35/478 ,  C04B35/62655 ,  C04B35/6455 ,  C04B2235/3217 ,  C04B2235/3234 ,  C04B2235/658 ,  C04B2235/6582 ,  H01B13/06 ,  H01J37/147 ,  H01J2237/047 ,  H01J2237/04735 ,  H01J2237/04756

Abstract: A ceramic member containing an insulating member is disclosed. The ceramic member comprises a ceramic body and an insulating layer on the ceramic body. The ceramic body contains aluminum oxide crystals and aluminum titanate crystals. The insulating layer contains silicon oxide as a main component. The ceramic body includes a first region that includes a first surface portion covered by the insulating layer, and a second region outside the first region, and having a surface resistivity of 1×106 to 1×109Ω/□. A surface resistivity of the first region is higher than the surface resistivity of the second region.

Abstract translation: 公开了一种包含绝缘构件的陶瓷构件。 陶瓷构件包括陶瓷体和陶瓷体上的绝缘层。 陶瓷体含有氧化铝晶体和钛酸铝晶体。 绝缘层包含氧化硅作为主要成分。 陶瓷体包括第一区域，其包括由绝缘层覆盖的第一表面部分和第一区域外部的第二区域，并且具有1×10 6至1×10 9Ω/□的表面电阻率。 第一区域的表面电阻率高于第二区域的表面电阻率。

公开(公告)号：US08536481B2

公开(公告)日：2013-09-17

申请号：US12020735

申请日：2008-01-28

Applicant: Peter C Kong ,  Jon D Grandy ,  Brent A Detering ,  Larry D Zuck

Inventor： Peter C Kong ,  Jon D Grandy ,  Brent A Detering ,  Larry D Zuck

IPC: B23K9/00

CPC classification number: H01J1/02 ,  H05H1/50 ,  H05H7/00

Abstract: Electrode assemblies for plasma reactors include a structure or device for constraining an arc endpoint to a selected area or region on an electrode. In some embodiments, the structure or device may comprise one or more insulating members covering a portion of an electrode. In additional embodiments, the structure or device may provide a magnetic field configured to control a location of an arc endpoint on the electrode. Plasma generating modules, apparatus, and systems include such electrode assemblies. Methods for generating a plasma include covering at least a portion of a surface of an electrode with an electrically insulating member to constrain a location of an arc endpoint on the electrode. Additional methods for generating a plasma include generating a magnetic field to constrain a location of an arc endpoint on an electrode.

Abstract translation: 用于等离子体反应器的电极组件包括用于将电弧端点约束到电极上的选定区域或区域的结构或装置。 在一些实施例中，结构或装置可以包括覆盖电极的一部分的一个或多个绝缘构件。 在另外的实施例中，结构或装置可以提供被配置为控制电极上的电弧终点的位置的磁场。 等离子体发生模块，装置和系统包括这样的电极组件。 用于产生等离子体的方法包括用电绝缘构件覆盖电极的至少一部分表面以约束电极上的电弧端点的位置。 用于产生等离子体的附加方法包括产生磁场以约束电极上的电弧终点的位置。

公开(公告)号：US20060220521A1

公开(公告)日：2006-10-05

申请号：US11353791

申请日：2006-02-14

Applicant: Jer-Shien Yang ,  Yen-Shan Chuang ,  Jen-Shou Cheng ,  Yui-Shin Fran

Inventor： Jer-Shien Yang ,  Yen-Shan Chuang ,  Jen-Shou Cheng ,  Yui-Shin Fran

IPC: H01J63/04 ,  H01J1/62

CPC classification number: H01J65/046 ,  H01J1/02

Abstract: An electrode structure is provided. The electrode structure contains a first auxiliary electrode and a second auxiliary electrode, a first edge electrode and a second edge electrode disposed between the first auxiliary electrode and the second auxiliary electrode, wherein the first edge electrode forming an electrode pair with the first auxiliary electrode and having a same polarity as that of the first auxiliary electrode and the second edge electrode forming an electrode pair with the second auxiliary electrode and having a same polarity as that of the second auxiliary electrode, and at least one middle electrode disposed between the first edge electrode and the second edge electrode. The electrode structure respectively enhance an interaction between the first edge electrode and the second edge electrode and a neighboring electrode by means of the first auxiliary electrode and the second auxiliary electrode. Alternatively, the width of the edge electrode increase to be 1.5 to 4 times of its original value in order to increase the current density on the edge electrode and to increase the brightness of the edge discharging zone so that the brightness difference between the middle zone and the edge zone is not great.

Abstract translation: 提供电极结构。 电极结构包括第一辅助电极和第二辅助电极，第一边缘电极和设置在第一辅助电极和第二辅助电极之间的第二边缘电极，其中第一边缘电极与第一辅助电极形成电极对， 具有与第一辅助电极和第二边缘电极相同的极性，与第二辅助电极形成具有与第二辅助电极相同极性的电极对，并且至少一个中间电极设置在第一边缘电极 和第二边缘电极。 电极结构通过第一辅助电极和第二辅助电极分别增强第一边缘电极和第二边缘电极之间的相互作用以及相邻的电极。 或者，边缘电极的宽度增加为其原始值的1.5至4倍，以便增加边缘电极上的电流密度并增加边缘放电区的亮度，使得中间区域和中间区域之间的亮度差异 边缘区不是很大。

公开(公告)号：US20050147780A1

公开(公告)日：2005-07-07

申请号：US10509794

申请日：2003-04-02

Applicant: Tetsuro Jin ,  Hong Lin ,  Tetsuo Yazawa

Inventor： Tetsuro Jin ,  Hong Lin ,  Tetsuo Yazawa

IPC: C03C11/00 ,  C03C17/245 ,  H01G9/20 ,  H01J1/02 ,  H01J5/04 ,  H01J40/02 ,  H01L31/0224 ,  H01L31/18 ,  B44F1/06

CPC classification number: C03C17/245 ,  C03C11/00 ,  C03C2217/229 ,  C03C2217/23 ,  C03C2217/24 ,  C03C2218/152 ,  H01G9/2027 ,  H01J1/02 ,  H01J5/04 ,  H01J40/02 ,  H01L31/022466 ,  H01L31/1884 ,  Y02E10/542

Abstract: A porous electroconductive material having light transmitting property which comprises a porous glass and, formed on the outer surface thereof and also on the surface inside fine pores thereof, an electroconductive oxide film; and a method for preparing the porous electroconductive material which comprises using the chemical vapor transporting method, the sputtering method, the impregnation method, a method wherein a silanol group present on the surface of the porous glass is reacted with an organic metal compound and the product is oxidized by heating in air, or a method wherein a mixture of a polymer compound or an amine group-containing organic metal compound with a raw material for a film is applied to a substrate and then the polymer compound or the organic component is burned and removed.

Abstract translation: 具有透光性的多孔导电材料包括多孔玻璃，并且在其外表面以及在其细孔内的表面上形成导电氧化物膜; 以及制备多孔导电材料的方法，其包括使用化学气相传输法，溅射法，浸渍法，将存在于多孔玻璃表面上的硅烷醇基与有机金属化合物反应的方法， 通过在空气中加热而氧化，或者将其中将高分子化合物或含胺基的有机金属化合物与膜的原料的混合物施加到基材上，然后将高分子化合物或有机成分燃烧， 删除。

公开(公告)号：US20030122468A1

公开(公告)日：2003-07-03

申请号：US10322640

申请日：2002-12-19

Applicant: LG Electronics Inc.

Inventor： Soo Je Cho ,  Byung Gil Ryu

IPC: H01J001/02

CPC classification number: H01J11/22 ,  H01J1/02 ,  H01J9/02 ,  H01J11/10 ,  H01J11/12 ,  H01J11/24 ,  H01J2211/225

Abstract: An electrode in a plasma display panel and a fabrication process thereof that is capable of reducing a line width of the electrode without increasing a resistance component of the electrode. In the method, a bus electrode is provided by laminating a metal film on a certain substrate and then patterning it. A transparent electrode is provided on the substrate in a shape of surrounding the bus electrode. Accordingly, the electrode is provided by the metal film such that a limit for a selection in a width or thickness of the electrode, so that a line width of the electrode can be reduced to improve the visible light transmissivity and the electrode is formed into a large thickness instead of making a minute electrode width to lower the resistance component, thereby reducing a power consumption of the PDP.

Abstract translation: 等离子体显示面板中的电极及其制造方法，其能够减小电极的线宽而不增加电极的电阻分量。 在该方法中，通过在某一基板上层叠金属膜然后对其进行图案化来提供总线电极。 在基板上设置有围绕总线电极的形状的透明电极。 因此，电极由金属膜提供，使得在电极的宽度或厚度上进行选择的极限，使得可以减小电极的线宽度以改善可见光透射率，并且将电极形成为 而不是制造微小的电极宽度以降低电阻分量，从而降低PDP的功耗。