CATHODE FOR ELECTRON EMISSION
    61.
    发明申请
    CATHODE FOR ELECTRON EMISSION 审中-公开
    电子发射阴极

    公开(公告)号:WO2006061774A1

    公开(公告)日:2006-06-15

    申请号:PCT/IB2005/054061

    申请日:2005-12-05

    CPC classification number: H01J1/28

    Abstract: A cathode for electron emission, comprising a heating device (1, 2) for generating temperatures above 300°C, an electrically conductive cathode support (3) which is connected to the heating device (1, 2), and a cathode coating which is applied to the cathode support (3) and consists of an electron-emitting material (4) comprising at least one alkali metal selected from the group consisting of sodium, potassium, rubidium and cesium, with an emission current density > 10 A/m2 at an operating temperature between 300°C and 600°C.

    Abstract translation: 一种用于电子发射的阴极,包括用于产生高于300℃的温度的加热装置(1,2),连接到加热装置(1,2)的导电阴极支撑件(3)和阴极涂层 施加到阴极支撑体(3)上并且由包含至少一种选自钠,钾,铷和铯的碱金属的电子发射材料(4)组成,发射电流密度> 10A / m 2 工作温度在300°C至600°C之间。

    CATHODE FOR CATHODE RAY TUBE WITH IMPROVED LIFETIME
    62.
    发明申请
    CATHODE FOR CATHODE RAY TUBE WITH IMPROVED LIFETIME 审中-公开
    阴茎阴茎管改善生命

    公开(公告)号:WO2003050837A1

    公开(公告)日:2003-06-19

    申请号:PCT/EP2002/013465

    申请日:2002-11-29

    CPC classification number: H01J1/28

    Abstract: Impregnated cathode for a vacuum tube comprising an emissive part in the form of a porous pellet 11 impregnated with a compound of alkaline earth metals; the pellet is placed in a dish 12 made of a refractory material and covered with a porous metal foil 13 forming the emissive surface of the cathode. Moreover, the pellet has a separation surface 18 between a heavily impregnated zone and a zone 10 which is not impregnated or weakly impregnated so that the said separation surface comprises at least a hollow part facing the emissive surface. By virtue of the shape of this separation surface, the lifetime of the cathode is improved.

    Abstract translation: 一种用于真空管的浸渍阴极,包括浸渍有碱土金属化合物的多孔沉淀11形式的发射部分; 将颗粒放置在由耐火材料制成的盘12中并用形成阴极的发射表面的多孔金属箔13覆盖。 此外,颗粒在重浸渍区域和未浸渍或弱浸渍的区域10之间具有分离表面18,使得所述分离表面至少包括面向发射表面的中空部分。 由于该分离面的形状,阴极的寿命得到改善。

    CONTROLLED POROSITY DISPENSER CATHODE
    63.
    发明申请
    CONTROLLED POROSITY DISPENSER CATHODE 审中-公开
    控制型多孔分配器阴极

    公开(公告)号:WO1984001664A1

    公开(公告)日:1984-04-26

    申请号:PCT/US1983001572

    申请日:1983-10-06

    CPC classification number: H01J1/28 H01J9/04

    Abstract: An emitter-dispenser housing (48) for a controlled porosity dispenser cathode manufactured of a single material as a unitary piece by a chemical vapor deposition process in which a configured mandrel (20) is coated with a layer of material (36 and 40) such as tungsten, for example, so that when the mandrel (20) is removed from the coating of material (36), a hollow housing (48) is formed having a side wall (36 and 40) and an end wall (42) which define a reservoir (44). In addition, intersecting strips (28 and 30) of this same material as the coating, which had been placed in the mandrel (20), extend transversely across the reservoir (44) with the edges thereof bonded by atomic-crystalline growth to the coating (36 and 40) during the chemical vapor deposition to form a unitary piece. Thereafter, an array of apertures (46) is formed in the end wall (42) of the housing by laser drilling to create an emitter-dispenser (42).

    Abstract translation: 一种用于通过化学气相沉积工艺由单一材料制成的单一材料的发射器 - 分配器壳体(48),其中所配置的心轴(20)涂覆有一层材料(36和40),例如 作为钨,例如使得当心轴(20)从材料(36)的涂层移除时,形成具有侧壁(36和40)和端壁(42)的中空壳体(48),所述侧壁 限定一个储存器(44)。 此外,已经放置在心轴(20)中的与涂层相同的材料的相交条(28和30)横向延伸穿过储存器(44),其边缘通过原子晶生长结合到涂层 (36和40),以形成整体。 此后,通过激光钻孔在壳体的端壁(42)中形成孔阵列(46)以产生发射器 - 分配器(42)。

    함침형 음극 구성체 및 그 제조 방법
    64.
    发明公开
    함침형 음극 구성체 및 그 제조 방법 无效
    浸渍阴极结构及其制造方法

    公开(公告)号:KR1020020077915A

    公开(公告)日:2002-10-14

    申请号:KR1020027010957

    申请日:2001-12-26

    CPC classification number: H01J1/28 H01J9/047 Y10T29/49002

    Abstract: 본발명은개재물을사용하지않고, 다공질베이스체금속과컵체를견고하게접합할수 있고, 더구나용접불량의발생을없애서, 다공질베이스체금속과컵체사이의용접의신뢰성과제품비율을향상시킬수 있는함침형음극구성체및 그제조방법에관한것이다. 전자방사물질이함침되는다공질베이스체금속(11)과, 상기다공질베이스체금속(11)의표면을노출시켜서, 그저면및 측면을덮도록상기다공질베이스체금속(11)을유지하는컵체(12)로이루어지는함침형음극구성체에있어서, 상기다공질베이스체금속(11)의저면에다공질이아닌치밀부(14)를형성함과동시에, 상기치밀부(14)의형상에따라서상기컵체(12)의저부를가압변형하여밀착영역(l6)을형성하고, 상기밀착영역(16)에서상기컵체(12)의저부와상기다공질베이스체금속(11)의치밀부(14)를용접하게되는함침형음극구성체

    Abstract translation: 一种浸渍型阴极单元及其制造方法,其中多孔金属基底和杯形构件可以牢固地接合在一起而不需要任何插入,并且可以消除焊接缺陷的发生,从而提高多孔金属基底之间的焊接的可靠性和产量 和杯子。 浸渍型阴极单元由浸渍有电子发射材料的多孔金属基底(11)和用于保持多孔金属基底(11)的杯状构件(12)构成,以覆盖多孔金属基底的底表面和侧表面 金属基体(11)并露出多孔金属基底(11)的前表面。 在多孔金属基体(11)的底面形成无孔致密部(14)。 杯部件(12)的底部被按压以使其跟随致密部分(14)的形状变形,从而形成紧密接触区域(16)。 杯状构件(12)的底部和多孔金属基底(11)的致密部分(14)在紧密接触区域(16)处焊接在一起。

    CATHODE ARRANGEMENT, ELECTRON GUN, AND LITHOGRAPHY SYSTEM COMPRISING SUCH ELECTRON GUN
    67.
    发明申请
    CATHODE ARRANGEMENT, ELECTRON GUN, AND LITHOGRAPHY SYSTEM COMPRISING SUCH ELECTRON GUN 审中-公开
    包括这种电子枪的阴极布置,电子枪和光刻系统

    公开(公告)号:WO2015101538A1

    公开(公告)日:2015-07-09

    申请号:PCT/EP2014/078995

    申请日:2014-12-22

    Abstract: The invention relates to a cathode arrangement (20) comprising: • - a thermionic cathode comprising an emission portion (30) provided with an emission surface for emitting electrons, and a reservoir (38) for holding a material, wherein the material, when heated, releases work function lowering particles that diffuse towards the emission portion and emanate at the emission surface at a first evaporation rate; • - a focusing electrode (40) comprising a focusing surface for focusing the electrons emitted from the emission surface of the cathode; and • - an adjustable heat source (50) configured for keeping the focusing surface at a temperature at which accumulation of work function lowering particles on the focusing surface is prevented.

    Abstract translation: 本发明涉及阴极布置(20),其包括:·热阴极,其包括设置有用于发射电子的发射表面的发射部分(30)和用于保持 材料,其中所述材料在被加热时释放朝向所述发射部分扩散并在所述发射表面以第一蒸发速率发散的功函数降低颗粒; - 聚焦电极(40),其包括用于聚焦从阴极的发射表面发射的电子的聚焦表面; 和 - 可调节热源(50),其被配置用于将聚焦表面保持在防止聚焦表面上的功函数下降颗粒的聚集的温度。

    EMITTER FOR A THERMIONIC DISPENSER CATHODE, METHOD OF MANUFACTURING IT AND THERMIONIC DEVICE INCLUDING IT
    68.
    发明申请
    EMITTER FOR A THERMIONIC DISPENSER CATHODE, METHOD OF MANUFACTURING IT AND THERMIONIC DEVICE INCLUDING IT 审中-公开
    用于THERMIONIC DISPENSER CATHODE的发射器,其制造方法和包括其中的THERMIONIC器件

    公开(公告)号:WO2008035053A3

    公开(公告)日:2008-05-29

    申请号:PCT/GB2007003529

    申请日:2007-09-18

    Abstract: A method of manufacturing an emitter (8; 10) for a thermionic dispenser cathode, includes forming a porous emitter body with substantially interconnected pores, having an emission surface (11; 16) from which, upon application of heat, electrons are emitted. The porous emitter body is suitable for transporting through the substantially interconnected pores, a compound released upon application of heat, to the emission surface (11; 16), which compound, when deposited on the emission surface (11; 16), serves to lower an effective work function of the emitter (8; 10). The porous emitter body is formed by means of a process of deposition of material. At least a region of the porous emitter body is provided with a continuously varying porosity. The porosity is continuously varied by controlling at least one parameter of the deposition process.

    Abstract translation: 一种用于制造用于热离子分配器阴极的发射器(8; 10)的方法,包括形成具有基本上互连的孔的多孔发射体,具有发射表面(11; 16),在施加热量时,发射电子。 多孔发射器体适于将通过基本互连的孔(即施加热释放的化合物)输送到发射表面(11; 16),当沉积在发射表面(11; 16)上时,该化合物用于降低 发射器(8; 10)的有效功函数。 多孔发射体通过沉积材料的方法形成。 多孔发射体的至少一个区域具有连续变化的孔隙率。 通过控制沉积过程的至少一个参数来连续地改变孔隙度。

    DISPENSER CATHODE
    69.
    发明申请
    DISPENSER CATHODE 审中-公开
    分配器CATHODE

    公开(公告)号:WO2004072732A3

    公开(公告)日:2005-02-24

    申请号:PCT/NL2004000112

    申请日:2004-02-13

    Abstract: A dispenser cathode which comprises an emission surface (4), a reservoir (1) for material releasing, when heated, work-function-lowering particles, and at least one passage (7) for allowing diffusion of work-function-lowering particles from said reservoir to said emission surface, said emission surface comprising at least one emission area (9) and at least one non-emission area (8) covered with emission-suppressing material and surrounding each emission area, said non-emission area comprising at least one passage connecting said reservoir with said non-emission area and debouching within a diffusion length distance from an emission area for allowing diffusion of work-function-lowering particles from said reservoir to said emission area.

    Abstract translation: 一种分配器阴极,其包括排放表面(4),用于当加热时材料释放的储存器(1),功能降低颗粒和至少一个通道(7),用于允许功能降低功能颗粒从 所述发射表面包括至少一个发射区域(9)和被发射抑制材料覆盖并围绕每个发射区域的至少一个非发射区域(8),所述非发射区域至少包括 一个通道,其将所述储存器与所述非发射区域连接,并且在与发射区域的扩散长度距离内脱模,以允许将功函数降低的颗粒从所述储存器扩散到所述发射区域。

    DISPENSER CATHODE
    70.
    发明申请
    DISPENSER CATHODE 审中-公开
    分配器CATHODE

    公开(公告)号:WO2004072732A2

    公开(公告)日:2004-08-26

    申请号:PCT/NL2004/000112

    申请日:2004-02-13

    IPC: G03F

    Abstract: A dispenser cathode which comprises an emission surface, a reservoir for material releasing, when heated, work-function-lowering particles, and at least one passage for allowing diffusion of work-function-lowering particles from said reservoir to said emission surface, said emission surface comprising at least one emission area and at least one non-emission area covered with emission-suppressing material and surrounding each emission area, said non-emission area comprising at least one passage connecting said reservoir with said non-emission area and debouching within a diffusion length distance from an emission area for allowing diffusion of work-function-lowering particles from said reservoir to said emission area.

    Abstract translation: 分配器阴极,其包括排放表面,用于材料释放的储存器,当被加热时,功能降低颗粒和至少一个通道,用于允许功能降低颗粒从所述储存器扩散到所述发射表面,所述发射 表面包括至少一个发射区域和至少一个覆盖有发射抑制材料并且围绕每个发射区域的非发射区域,所述非发射区域包括将所述储层与所述非发射区域连接的至少一个通道,并在 从放射区域的扩散长度距离,用于允许功能降低颗粒从所述储存器扩散到所述发射区域。

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