Electron beam plasma formation for surface chemistry
    61.
    发明授权
    Electron beam plasma formation for surface chemistry 失效
    用于表面化学的电子束等离子体形成

    公开(公告)号:US06239543B1

    公开(公告)日:2001-05-29

    申请号:US09379543

    申请日:1999-08-23

    CPC classification number: B29C59/16 B29C59/14 B29C2035/0877 H01J33/02

    Abstract: One or more electron beam tubes are arranged to direct electron beams in air or other ambient gas toward a target object. The electron beams ionize air producing a plasma or glow discharge. An electric or magnetic field in the beam trajectory sustains the plasma by trapping secondary electrons formed by collisions of beam electrons with the ambient atmosphere. Target objects may be placed in the field for surface treatment, such as sterilization, or for thin film growth. In the latter case, the apparatus is enclosed in a housing and a reactive gas is introduced into the beam trajectory. The gas is one which is crackable by the electron beam or plasma, such as an organic silicon compound which would liberate silicon for combination with ionized oxygen to form silicon dioxide layers on a substrate.

    Abstract translation: 一个或多个电子束管布置成将空气或其它环境气体中的电子束引向目标物体。 电子束电离空气产生等离子体或辉光放电。 光束轨迹中的电场或磁场通过俘获由电子束电子与环境气氛的碰撞形成的二次电子来维持等离子体。 目标物体可以放置在现场进行表面处理,例如灭菌或用于薄膜生长。 在后一种情况下,装置被封闭在壳体中,并且反应性气体被引入射束轨迹中。 气体是电子束或等离子体可裂解的气体,例如有机硅化合物,其将释放硅与电离氧组合以在基底上形成二氧化硅层。

    DRAWER-TYPE CARRYING DEVICE FOR ACCELERATOR AND CABIN STRUCTURE FOR ACCELERATOR

    公开(公告)号:US20190198282A1

    公开(公告)日:2019-06-27

    申请号:US16231667

    申请日:2018-12-24

    CPC classification number: H01J33/02 H01J2229/8626 H05H5/03

    Abstract: The present disclosure provides a drawer-type carrying device for an accelerator and an cabin structure for the accelerator, the drawer-type carrying device for the accelerator includes a frame mechanism and a drawing mechanism. The frame mechanism is used for installing the accelerator; the drawing mechanism is connected with the frame mechanism and the frame mechanism is movable relative to the drawing mechanism. The cabin structure for the accelerator includes a cabin, a shielding mechanism and a drawer-type carrying device for the accelerator. The cabin has a working area and a maintenance area. The shielding mechanism is disposed in the working area and has a side opening door facing towards the maintenance area. The frame mechanism is capable of drawn from the shielding mechanism into the maintenance area when the side opening door is opened.

    NON-RADIOACTIVE ION SOURCE USING HIGH ENERGY ELECTRONS
    69.
    发明申请
    NON-RADIOACTIVE ION SOURCE USING HIGH ENERGY ELECTRONS 有权
    使用高能电子的非放射性离子源

    公开(公告)号:US20140034844A1

    公开(公告)日:2014-02-06

    申请号:US13960006

    申请日:2013-08-06

    Abstract: A system and method for producing a continuous or pulsed source of high energy electrons at or near atmospheric pressure is disclosed. High energy electrons are used to ionize analyte molecules in ambient air through collisions with reactant ions. The device includes an electron emitter, electron optics, and a thin membrane in an evacuated tube. The electron emitter may include a photocathode surface mounted on an optically transparent window and an external source of UV photons. The transparent window may include a UV transparent window mounted on an evacuated tube and/or the evacuated tube may be a transparent tube on which a photocathode surface film is deposited. The electron optics may include successive electrodes biased at increasing voltages. The membrane may include a material transparent or semi-transparent to energetic electrons. Upon impacting the membrane, continuous or pulsed electron packets are partially transmitted through to a high pressure ionization region.

    Abstract translation: 公开了一种在大气压或接近大气压下产生高能电子的连续或脉冲源的系统和方法。 高能电子用于通过与反应物离子的碰撞使环境空气中的分析物分子电离。 该装置包括电子发射器,电子光学器件和真空管中的薄膜。 电子发射器可以包括安装在光学透明窗口和外部UV光子源上的光电阴极表面。 透明窗口可以包括安装在真空管上的UV透明窗口和/或真空管可以是其上沉积有光电阴极表面膜的透明管。 电子光学器件可以包括以增加的电压偏置的连续电极。 膜可以包括对高能电子透明或半透明的材料。 在撞击膜时,连续的或脉冲的电子包被部分地传输到高压电离区域。

    COMPACT MODULAR EBEAM SYSTEMS AND METHODS
    70.
    发明申请
    COMPACT MODULAR EBEAM SYSTEMS AND METHODS 审中-公开
    紧凑的模块化的EBEAM系统和方法

    公开(公告)号:US20120175532A1

    公开(公告)日:2012-07-12

    申请号:US13150514

    申请日:2011-06-01

    CPC classification number: G21K5/02 H01J33/02

    Abstract: In an Ebeam system, the cathode assembly and/or the window assembly can be simply and quickly replaced or exchanged as required by conditions of use, without replacing the vacuum chamber, or other component systems. In some cases, replacement may be made without removing the vacuum chamber from its installed position. As a result, the cathode assembly and the window assembly can be readily changed over for maintenance. In addition, modular replacement cathode assemblies and window assemblies having varying characteristics may be selected to match a specific desired application, and then installed into the system. The system may be designed as a compact and lightweight portable device.

    Abstract translation: 在Ebeam系统中,阴极组件和/或窗户组件可以根据使用条件简单快速地更换或更换,而无需更换真空室或其他组件系统。 在某些情况下,可以在不从其安装位置移除真空室的情况下进行更换。 结果,可以容易地改变阴极组件和窗组件以进行维护。 此外,可以选择具有不同特性的模块化替换阴极组件和窗组件以匹配特定的所需应用,然后安装到系统中。 该系统可以被设计为紧凑且轻便的便携式设备。

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