公开(公告)号：US20150116072A1

公开(公告)日：2015-04-30

申请号：US14517369

申请日：2014-10-17

Applicant: STMicroelectronics (Rousset) SAS

Inventor： Christian Rivero ,  Pascal Fornara ,  Antonio di-Giacomo ,  Brice Arrazat

IPC: H01H61/02 ,  H01H1/58 ,  H01H9/02

CPC classification number: H01H61/02 ,  B81B3/0021 ,  B81B2201/031 ,  B81B2203/053 ,  H01H1/58 ,  H01H9/02

Abstract: A device includes a thermally deformable assembly accommodated in a cavity of the interconnection part of an integrated circuit. The assembly can bend when there is a variation in temperature, so that its free end zone is displaced vertically. The assembly can be formed in the back end of line of the integrated circuit.

Abstract translation: 一种装置包括容纳在集成电路的互连部分的空腔中的热变形组件。 当温度变化时，组件可以弯曲，使其自由端区垂直移位。 组件可以形成在集成电路的线路的后端。

公开(公告)号：US20140191524A1

公开(公告)日：2014-07-10

申请号：US14206585

申请日：2014-03-12

Applicant: The Johns Hopkins University

Inventor： DAVID H. GRACIAS ,  Timothy G. Leong

IPC: B25J7/00

CPC classification number: B25J7/00 ,  B81B3/0024 ,  B81B3/0032 ,  B81B2201/031 ,  B81C99/002 ,  Y10T436/11

Abstract: A lithographically structured device has an actuation layer and a control layer operatively connected to the actuation layer. The actuation layer includes a stress layer and a neutral layer that is constructed of materials and with a structure such that it stores torsional energy upon being constructed. The control layer is constructed to maintain the actuation layer substantially in a first configuration in a local environmental condition and is responsive to a change in the local environmental condition such that it permits a release of stored torsional energy to cause a change in a structural configuration of the lithographically structured device to a second configuration, the control layer thereby providing a trigger mechanism. The lithographically structured device has a maximum dimension that is less than about 10 mm when it is in the second configuration.

Abstract translation: 光刻结构的器件具有可操作地连接到致动层的致动层和控制层。 致动层包括应力层和中性层，其由材料构成，并具有在构造时存储扭转能的结构。 控制层被构造成在局部环境条件下将致动层基本上保持在第一构型中并且响应于局部环境条件的改变，使得其允许释放存储的扭转能量以引起结构构造的变化 光刻结构的设备到第二配置，控制层由此提供触发机构。 光刻结构的装置在其处于第二构型时的最大尺寸小于约10mm。

公开(公告)号：US08703073B2

公开(公告)日：2014-04-22

申请号：US12864942

申请日：2009-03-06

Applicant: David Hugo Gracias ,  Timothy Gar-Ming Leong

Inventor： David Hugo Gracias ,  Timothy Gar-Ming Leong

IPC: G01N15/06

CPC classification number: B25J7/00 ,  B81B3/0024 ,  B81B3/0032 ,  B81B2201/031 ,  B81C99/002 ,  Y10T436/11

Abstract: A lithographically structured device has an actuation layer and a control layer operatively connected to the actuation layer. The actuation layer includes a stress layer and a neutral layer that is constructed of materials and with a structure such that it stores torsional energy upon being constructed. The control layer is constructed to maintain the actuation layer substantially in a first configuration in a local environmental condition and is responsive to a change in the local environmental condition such that it permits a release of stored torsional energy to cause a change in a structural configuration of the lithographically structured device to a second configuration, the control layer thereby providing a trigger mechanism. The lithographically structured device has a maximum dimension that is less than about 10 mm when it is in the second configuration.

Abstract translation: 光刻结构的器件具有可操作地连接到致动层的致动层和控制层。 致动层包括应力层和中性层，其由材料构成，并具有在构造时存储扭转能的结构。 控制层被构造成在局部环境条件下将致动层基本上保持在第一构型中并且响应于局部环境条件的改变，使得其允许释放存储的扭转能量以引起结构构造的变化 光刻结构的设备到第二配置，控制层由此提供触发机构。 光刻结构的装置在其处于第二构型时的最大尺寸小于约10mm。

公开(公告)号：US08232858B1

公开(公告)日：2012-07-31

申请号：US12033995

申请日：2008-02-20

Applicant: Ernest J. Garcia ,  Clay W. G. Fulcher

Inventor： Ernest J. Garcia ,  Clay W. G. Fulcher

IPC: H01H61/00 ,  H01H71/16 ,  H01H37/52 ,  H01L21/00

CPC classification number: B81B3/0024 ,  B81B2201/031 ,  H01H2061/006 ,  H02N10/00

Abstract: Microelectromechanical (MEM) buckling beam thermal actuators are disclosed wherein the buckling direction of a beam is constrained to a desired direction of actuation, which can be in-plane or out-of-plane with respect to a support substrate. The actuators comprise as-fabricated, linear beams of uniform cross section supported above the substrate by supports which rigidly attach a beam to the substrate. The beams can be heated by methods including the passage of an electrical current through them. The buckling direction of an initially straight beam upon heating and expansion is controlled by incorporating one or more directional constraints attached to the substrate and proximal to the mid-point of the beam. In the event that the beam initially buckles in an undesired direction, deformation of the beam induced by contact with a directional constraint generates an opposing force to re-direct the buckling beam into the desired direction. The displacement and force generated by the movement of the buckling beam can be harnessed to perform useful work, such as closing contacts in an electrical switch.

Abstract translation: 公开了一种微机电（MEM）屈曲梁热致动器，其中梁的弯曲方向被约束到期望的致动方向，其可以相对于支撑基板在平面内或平面外。 致动器包括通过将梁刚性地附接到基板的支撑件支撑在基板上方的具有均匀横截面的制造的线性梁。 可以通过包括电流通过它们的方法来加热梁。 在加热和膨胀时初始直梁的屈曲方向通过结合一个或多个连接到基底并且靠近束的中点的方向约束来控制。 在光束最初以不期望的方向弯曲的情况下，通过与方向约束的接触而引起的光束的变形产生相反的力，以将屈曲光束重新引导到期望的方向。 可以利用由屈曲梁的运动产生的位移和力来执行有用的工作，例如在电气开关中闭合触点。

公开(公告)号：US20100207411A1

公开(公告)日：2010-08-19

申请号：US12305468

申请日：2007-06-21

Applicant: Yu Sun ,  Keekyoung Kim

Inventor： Yu Sun ,  Keekyoung Kim

IPC: B81B7/02 ,  B25J7/00 ,  B81B3/00 ,  H01R43/00

CPC classification number: B81C99/002 ,  B25J9/104 ,  B81B2201/0292 ,  B81B2201/031 ,  B81B2201/033

Abstract: The present invention relates to a design and microfabrication method for microgrippers that are capable of grasping micro and nano objects of a large range of sizes and two-axis force sensing capabilities. Gripping motion is produced by one or more electrothermal actuators. Integrated force sensors along x and y directions enable the measurement of gripping forces as well as the forces applied at the end of microgripper arms along the normal direction, both with a resolution down to nanoNewton. The microfabrication method enables monolithic integration of the actuators and the force sensors.

Abstract translation: 本发明涉及一种微抓爪的设计和微细加工方法，其能够抓住大范围尺寸和双轴力感测能力的微型和纳米物体。 夹持运动由一个或多个电热致动器产生。 沿x和y方向的集成力传感器可以测量夹紧力以及沿着法向方向施加在微夹臂末端的力，并且分辨率低至纳摩顿。 微加工方法可实现致动器和力传感器的整体集成。

公开(公告)号：US07733200B2

公开(公告)日：2010-06-08

申请号：US11904949

申请日：2007-09-29

Applicant: Vladimir Anatolyevich Aksyuk ,  Flavio Pardo ,  Maria Elina Simon

Inventor： Vladimir Anatolyevich Aksyuk ,  Flavio Pardo ,  Maria Elina Simon

IPC: H01H51/22

CPC classification number: H01H1/0036 ,  B81B3/0024 ,  B81B2201/031 ,  H01H2001/0078 ,  H01H2061/006 ,  H01H2061/008

Abstract: Apparatus including substrate, pusher assembly, and flexor assembly adjacent to pusher assembly. Pusher assembly includes hot and cold pusher arms. First ends of hot and cold pusher arms are anchored over substrate. Second ends of hot and cold pusher arms are coupled together and suspended for lateral displacement over substrate. Flexor assembly includes flexor arm, and conductor having actuator contact. First end of flexor arm is anchored over substrate. Pusher assembly is configured for causing lateral displacement of second end of flexor arm and of actuator contact over the substrate. Method includes providing apparatus and causing pusher assembly to laterally displace second end of flexor arm and actuator contact over substrate.

Abstract translation: 包括靠近推进器组件的基底，推动器组件和屈肌组件的装置。 推动器组件包括冷热推杆。 冷热推杆的第一端锚固在基板上。 冷热推杆的第二端连接在一起并悬挂在基板上横向移位。 弯曲组件包括屈肌臂和具有致动器接触的导体。 屈肌臂的第一端锚固在基底上。 推动器组件被构造成使得屈肌臂的第二端和致动器接触的横向位移在基底上。 方法包括提供装置并使得推动器组件横向移动屈肌臂的第二端和致动器接触在基底上。

公开(公告)号：US20080048519A1

公开(公告)日：2008-02-28

申请号：US11757331

申请日：2007-06-01

Applicant: Harold Stalford

Inventor： Harold Stalford

IPC: H02N10/00 ,  F04B9/00

CPC classification number: H02N10/00 ,  B81B3/0024 ,  B81B2201/031 ,  B81B2201/034 ,  B81B2201/037 ,  B81B2201/051 ,  H02K7/00 ,  H02N1/002 ,  H02N11/006

Abstract: A micro rotary machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft comprises a horizontal shaft and is operable to be rotated by the micro actuator. A micro tool is coupled to the micro shaft and is operable to perform work in response to motion of the micro shaft.

Abstract translation: 微型旋转机器可以包括微型致动器和耦合到微型致动器的微型轴。 微型轴包括水平轴，并且可由微型致动器旋转。 微型工具联接到微型轴，并且可操作以响应于微型轴的运动而执行工作。

公开(公告)号：US06978613B2

公开(公告)日：2005-12-27

申请号：US10258518

申请日：2001-05-02

Applicant: Kia Silverbrook

Inventor： Kia Silverbrook

IPC: B41J2/045 ,  B41J2/055 ,  B41J2/14 ,  B41J2/16 ,  B81B3/00 ,  B81C1/00 ,  F01B29/10

CPC classification number: B41J2/1645 ,  B41J2/14427 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1648 ,  B81B3/007 ,  B81B2201/031 ,  B81B2201/036 ,  B81B2201/052 ,  Y10T29/42 ,  Y10T29/49083 ,  Y10T29/49401

Abstract: A thermal bend actuator (6) is provided with upper arms (23, 25, 26) and lower arms (27, 28) which are non planar, so increasing the stiffness of the arms. The arms (23, 25, 26, 27, 28) may be spaced transversely of each other and do not overly each other in plan view, so enabling all arms to be formed by depositing a single layer of arm forming material.

Abstract translation: 热弯曲致动器（6）设置有不平坦的上臂（23,25,26）和下臂（27,28），因此增加了臂的刚度。 臂（23,25,26,27,28）可以彼此横向地间隔开，并且在平面图中不会彼此过大，从而能够通过沉积单层臂形成材料来形成所有臂。

公开(公告)号：US06617185B1

公开(公告)日：2003-09-09

申请号：US10071772

申请日：2002-02-07

Applicant: Aaron Geisberger

Inventor： Aaron Geisberger

IPC: H01L2100

CPC classification number: B81C1/00126 ,  B81B2201/031 ,  B81B2201/13 ,  B81C2201/0109 ,  H01H2001/0047 ,  H01H2001/0063 ,  H01H2061/006

Abstract: In one embodiment, the present invention is directed to a method of fabricating a micro-mechanical latching device, comprising: depositing a structural layer in a fabrication plane, wherein the first structural layer possesses a topography; depositing a sacrificial layer adjacent to the first layer such that the sacrificial layer conforms to the topography of the first layer; depositing a second structural layer that conforms to the topography of the first layer; removing the sacrificial layer; and using at least the first structural layer and second structural layer to fabricate the micro-mechanical latching device.

Abstract translation: 在一个实施例中，本发明涉及一种制造微机械闭锁装置的方法，包括：在制造平面中沉积结构层，其中所述第一结构层具有形貌; 沉积与第一层相邻的牺牲层，使得牺牲层符合第一层的形貌; 沉积符合第一层的形貌的第二结构层; 去除牺牲层; 并且至少使用第一结构层和第二结构层来制造微机械闭锁装置。

公开(公告)号：US06608714B2

公开(公告)日：2003-08-19

申请号：US09892616

申请日：2001-06-28

Applicant: Heather Shannon Hanson ,  Joseph Nathan Mitchell

Inventor： Heather Shannon Hanson ,  Joseph Nathan Mitchell

IPC: G02B2600

CPC classification number: B81B3/0024 ,  B81B2201/031 ,  B81B2201/11 ,  B81B2203/055 ,  H01H2061/008

Abstract: A thermal actuator includes a first arm having a proximal end and a distal end, a second arm, parallel to the first arm, having a proximal end and a distal end, and a third arm arranged between and parallel to the first and second arms, the third arm having a proximal end and a distal end. The third arm has at least one portion at the distal end of the third arm having a width that is substantially larger than a width of the first arm and a width of the second arm. The distal ends of the first, second and third arms are coupled together to form a distal end of the thermal actuator, and the first, second and third arms preferably are made of a single material. A number of thermal actuators can be arranged in an array. The thermal actuator or array of thermal actuators can be coupled to an applicator.

Abstract translation: 热致动器包括具有近端和远端的第一臂，平行于第一臂的第二臂，具有近端和远端，以及布置在第一臂和第二臂之间并平行于第一臂的第三臂， 第三臂具有近端和远端。 第三臂具有在第三臂的远端处的至少一个部分，其宽度基本上大于第一臂的宽度和第二臂的宽度。 第一，第二和第三臂的远端联接在一起以形成热致动器的远端，并且第一，第二和第三臂优选地由单一材料制成。 许多热致动器可以排列成阵列。 热致动器或热致动器阵列可以耦合到施加器。