公开(公告)号：JP2005505774A

公开(公告)日：2005-02-24

申请号：JP2003536696

申请日：2002-10-18

Applicant: ジ・オーストラリアン・ナショナル・ユニバーシティー

Inventor： ジョン・ハワード

IPC: G01J3/45 ,  G01J5/00 ,  G01J5/60 ,  G02B5/30

CPC classification number: G01J5/58 ,  G01J3/45 ,  G01J5/00 ,  G01J5/0834 ,  G01J2005/583 ,  G01J2005/586

Abstract: 灰色体または黒体放射体の温度の遠隔検知は、その放射線（２４）を変調された赤外フィルター分光計を通すことによって行われる。 該赤外フィルターは、順次、帯域通過フィルター２０、放射線を偏光させる第１の偏光子（２１）、偏光された放射線を２つの直交する偏光成分に分裂させる電気光学エレメント（２２）を含む。 レンズ（２８）は第２の偏光子を去る放射線をディテクター（２７）にイメージする。 ディテクター２７からの電気信号は数値アナライザーに入力される。 典型的には、複屈折性結晶アセンブリ（２５）および複屈折性トリムプレート（２６）を含む電気光学エレメントは、直交する偏光成分が、再度合成された成分がそれらのインターフェログラム中のピークまたはトラフにおける、またはその近くにあるように、直交する偏光成分の正味の遅れがそのようになるように配置される。 正弦的に変化する電圧が電気光学エレメントに印加されて、電気光学エレメントを通過した成分の正味の遅れを変調させる。 数値アナライザーは、ディテクター（２７）からそれを受領する信号の高調波振幅比（変調電圧の周波数の基本波および第２高調波における信号振幅の比率）を計算するようにプログラムされる。 高調波振幅比は、キャリブレーション検索表を参照して見積もることができる放射体の温度の関数である。

公开(公告)号：EP1953510A3

公开(公告)日：2008-10-29

申请号：EP08103926.5

申请日：2006-08-22

Applicant: Aselsan Elektronik Sanayi ve Ticaret Anonim Sirketi

Inventor： Urey, Hakan ,  Torun, Hamdi

IPC: G01J5/38 ,  G01J5/40 ,  G01J5/58

CPC classification number: G01J5/58 ,  G01J5/38 ,  G01J5/40 ,  G01J2005/583

Abstract: The present invention relates to thermal detectors and the application of such to devices and methods of detecting the infrared images using thermal detectors. For example, by using optical measuring systems in combination with at least one light source to measure changes position of a movable anchored surface coupled to an absorption surface such that the movable anchored surface changes position due to absorption of infrared radiation by the absorption surface. In another example, by combining a detector pixel (infrared radiation sensitive) with an optical measuring device such as an interferometer.

公开(公告)号：EP1757914A3

公开(公告)日：2008-08-06

申请号：EP06119282.9

申请日：2006-08-22

Applicant: Aselsan Elektronik Sanayi ve Ticaret Anonim Sirketi

Inventor： Urey, Hakan ,  Torun, Hamdi

IPC: G01J5/38 ,  G01J5/40 ,  G01J5/58

CPC classification number: G01J5/58 ,  G01J5/38 ,  G01J5/40 ,  G01J2005/583

Abstract: The present invention relates to thermal detectors and the application of such to devices and methods of detecting the infrared images using thermal detectors. For example, by using optical measuring systems in combination with at least one light source to measure changes position of a movable anchored surface coupled to an absorption surface such that the movable anchored surface changes position due to absorption of infrared radiation by the absorption surface. In another example, by combining a detector pixel (infrared radiation sensitive) with an optical measuring device such as an interferometer.

公开(公告)号：EP1757914A2

公开(公告)日：2007-02-28

申请号：EP06119282.9

申请日：2006-08-22

Applicant: Aselsan Elektronik Sanayi ve Ticaret Anonim Sirketi

Inventor： Urey, Hakan ,  Torun, Hamdi

IPC: G01J5/38

CPC classification number: G01J5/58 ,  G01J5/38 ,  G01J5/40 ,  G01J2005/583

Abstract: The present invention relates to thermal detectors and the application of such to devices and methods of detecting the infrared images using thermal detectors. For example, by using optical measuring systems in combination with at least one light source to measure changes position of a movable anchored surface coupled to an absorption surface such that the movable anchored surface changes position due to absorption of infrared radiation by the absorption surface. In another example, by combining a detector pixel (infrared radiation sensitive) with an optical measuring device such as an interferometer.

Abstract translation: 本发明涉及热检测器及其应用于使用热检测器检测红外图像的装置和方法。 例如，通过使用与至少一个光源组合的光学测量系统来测量耦合到吸收表面的可移动锚定表面的变化位置，使得可移动锚定表面由于吸收表面吸收红外辐射而改变位置。 在另一示例中，通过将检测器像素（红外辐射敏感）与诸如干涉仪之类的光学测量装置组合。

公开(公告)号：EP0943085B1

公开(公告)日：2004-03-10

申请号：EP97947154.7

申请日：1997-12-01

Applicant: Graham Thomas Consultants Limited

Inventor： ANDREOU, Michael Paul

IPC: G01N21/35

CPC classification number: G01J5/0014 ,  G01J3/453 ,  G01J3/4535 ,  G01J2005/0077 ,  G01J2005/068 ,  G01J2005/583 ,  G01N21/3504 ,  G01N21/3518 ,  G01N2021/1765 ,  G01N2021/1774 ,  G01N2021/1793 ,  G01N2021/3595 ,  H04N5/33

公开(公告)号：EP0995087A4

公开(公告)日：2002-08-14

申请号：EP98933362

申请日：1998-07-16

Applicant: UNIV AUSTRALIAN

Inventor： HOWARD JOHN

IPC: G01J1/04 ,  G01J3/447 ,  G01J3/45 ,  G01J3/453 ,  G01J4/04 ,  G01J5/00 ,  G01J5/58 ,  G01J5/60

CPC classification number: G01J5/04 ,  G01J1/04 ,  G01J1/0429 ,  G01J3/45 ,  G01J3/453 ,  G01J5/0014 ,  G01J5/0018 ,  G01J5/0044 ,  G01J5/08 ,  G01J5/0803 ,  G01J5/0834 ,  G01J5/58 ,  G01J2005/583 ,  G01J2005/586

Abstract: A method and apparatus for measurement of the brightness, flow velocity and temperature of radiant media. A substantially collimated beam (3) of light is directed to a linear polarizer (5) through an interference filter (4). An electro-optically active birefringent crystal (7) separates the linearly polarized output of the polarizer (5) into two characteristic waves and introduces a final phase delay between the wave. The birefringent crystal (7) is electro-optically modulated to introduce a variable phase delay between the characteristic waves. The resultant characteristic waves are combined to interfere and the combination is sampled to produce a signal from which the emission moment of the radiant media can be determined.

公开(公告)号：EP0995087A1

公开(公告)日：2000-04-26

申请号：EP98933362.0

申请日：1998-07-16

Applicant: THE AUSTRALIAN NATIONAL UNIVERSITY

Inventor： HOWARD, John

IPC: G01J3/45 ,  G01J3/453

CPC classification number: G01J5/04 ,  G01J1/04 ,  G01J1/0429 ,  G01J3/45 ,  G01J3/453 ,  G01J5/0014 ,  G01J5/0018 ,  G01J5/0044 ,  G01J5/08 ,  G01J5/0803 ,  G01J5/0834 ,  G01J5/58 ,  G01J2005/583 ,  G01J2005/586

Abstract: A method and apparatus for measurement of the brightness, flow velocity and temperature of radiant media. A substantially collimated beam (3) of light is directed to a linear polarizer (5) through an interference filter (4). An electro-optically active birefringent crystal (7) separates the linearly polarized output of the polarizer (5) into two characteristic waves and introduces a final phase delay between the wave. The birefringent crystal (7) is electro-optically modulated to introduce a variable phase delay between the characteristic waves. The resultant characteristic waves are combined to interfere and the combination is sampled to produce a signal from which the emission moment of the radiant media can be determined.

公开(公告)号：KR20210029678A

公开(公告)日：2021-03-16

申请号：KR1020200111110A

申请日：2020-09-01

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 킵뻬이 스기타 ,  켄지 나가이

IPC: H01L21/67 ,  H01J37/32 ,  H01L21/683

CPC classification number: H01L21/67288 ,  H01L21/67248 ,  H01L21/67253 ,  G01N21/25 ,  G01N21/45 ,  G01N21/9501 ,  H01J37/32532 ,  H01J37/32642 ,  H01J37/32715 ,  H01J37/3288 ,  H01L21/67017 ,  H01L21/67098 ,  H01L21/6831 ,  G01J2005/583

Abstract: 처리 장치의 이상을 판정할 수 있는 시스템 및 방법을 제공한다. 처리 장치를 검사하는 시스템은, 처리 장치의 처리실 내의 부품의 온도를 조정하는 온도 조정 기구와, 측정광을 발생시키는 광원과, 온도 조정 기구에 의한 부품의 온도 조정 중에, 광원에서 발생된 측정광을 출사광으로서 처리 장치의 처리실 내의 부품에 출사하고 또한 반사광을 입사하는 복수의 광학 소자와, 반사광에 기초하여 광학 소자에 대응하는 측정 개소마다 부품의 온도를 측정하고, 측정 개소의 부품의 온도 각각의 비교에 기초하여 처리 장치의 이상을 판정하는 제어부를 구비한다.

公开(公告)号：JP6180924B2

公开(公告)日：2017-08-16

申请号：JP2013268968

申请日：2013-12-26

Applicant: 東京エレクトロン株式会社

Inventor： 輿水 地塩 ,  松土 龍夫

IPC: H01L21/3065 ,  H05H1/46 ,  H05H1/00

CPC classification number: G01K17/20 ,  H01J37/32724 ,  H01J37/32917 ,  H01J37/32935 ,  H05H1/0043 ,  H05H1/24 ,  G01J2005/583

公开(公告)号：JP5993111B2

公开(公告)日：2016-09-14

申请号：JP2010214347

申请日：2010-09-24

Applicant: 東京エレクトロン株式会社

Inventor： 山涌 純 ,  輿水 地塩 ,  松土 龍夫 ,  永井 健治

IPC: C23C16/52 ,  G05D23/19 ,  H01L21/203 ,  H01L21/205 ,  H01L21/3065

CPC classification number: H01L21/67248 ,  G01J2005/583 ,  G01J9/02