LIGHT POLARIZATION ANALYZER
    72.
    发明申请
    LIGHT POLARIZATION ANALYZER 有权
    光偏振分析仪

    公开(公告)号:US20170074796A1

    公开(公告)日:2017-03-16

    申请号:US15311311

    申请日:2015-05-08

    Abstract: An excitation light source emits excitation light to a target sample. An image sensor includes pixels arranged one-dimensionally or two-dimensionally, and receives measurement light from the sample according to the excitation light. A polarization selector arranged between the sample and image sensor includes pixels arranged one-dimensionally or two-dimensionally. Each pixel receives a corresponding portion of the measurement light, selects light having a polarization direction that corresponds to a driving signal applied to the pixels, and supplies this light to the image sensor. A measurement control unit supplies the cyclic driving signal having a first period T1 and acquires data I1, I2, I3, and I4 from each pixel of the image sensor for each exposure time segment T2=T1/4 obtained by dividing the first period T1 by 4.

    Abstract translation: 激发光源向目标样品发射激发光。 图像传感器包括一维或二维排列的像素,并且根据激发光接收来自样品的测量光。 布置在样本和图像传感器之间的偏振选择器包括一维或二维布置的像素。 每个像素接收测量光的对应部分,选择具有与施加到像素的驱动信号相对应的偏振方向的光,并将该光提供给图像传感器。 测量控制单元提供具有第一周期T1的循环驱动信号,并且通过将每个曝光时间段T2 = T1 / 4从图像传感器的每个像素获取数据I1,I2,I3和I4, 4。

    Polarization analysis apparatus
    73.
    发明授权
    Polarization analysis apparatus 有权
    极化分析仪

    公开(公告)号:US09488568B2

    公开(公告)日:2016-11-08

    申请号:US14568122

    申请日:2014-12-12

    CPC classification number: G01N21/211 G01N2021/213 G01N2201/0675

    Abstract: Provided is a polarization analysis apparatus that can quickly measure the polarization properties of a sample. The polarization analysis apparatus includes a light source configured to emit light in a predetermined wavelength region, a polarizer configured to transmit the light emitted from the light source, a spatial phase modulator configured to transmit the light from the sample, an analyzer configured to transmit the light that has passed through the spatial phase modulator, and an imaging spectrometer configured to receive the light that has passed through the analyzer. The spatial phase modulator is formed of a birefringent material, and is configured to have different phase differences at respective positions in a first direction in a plane orthogonal to an optical axis. The imaging spectrometer disperses the received light in a second direction that is different from the first direction in the plane orthogonal to the optical axis.

    Abstract translation: 提供了一种可以快速测量样品的偏振特性的偏振分析装置。 所述偏振光分析装置包括被配置为发射预定波长区域的光的光源,被配置为透射从所述光源发射的光的偏振器,被配置为透射来自所述样品的光的空间相位调制器, 已经通过空间相位调制器的光和被配置为接收已经通过分析器的光的成像光谱仪。 空间相位调制器由双折射材料形成,并且被配置为在与光轴正交的平面中的第一方向上的各个位置处具有不同的相位差。 成像光谱仪将接收的光在与光轴正交的平面中与第一方向不同的第二方向分散。

    Optical chemical classification
    74.
    发明授权
    Optical chemical classification 有权
    光学化学分类

    公开(公告)号:US09476824B2

    公开(公告)日:2016-10-25

    申请号:US14054149

    申请日:2013-10-15

    Abstract: A method for measuring a sample to identify a chemical includes receiving respective spectra for each of a plurality of chemicals. Using a processor, a plurality of binary mathematical filters are computed using the received spectra. A spatial light modulator is adjusted according to a selected mathematical filter. Light that has interacted with the sample is dispersed over the surface of the spatial light modulator, so that the spatial light modulator provides light at wavelengths corresponding to the selected mathematical filter. The light provided by the spatial light modulator is measured to provide a score corresponding to the selected mathematical filter. Filter scores are combined to determine a chemical amount. The processor can operate detection apparatus having a light source, an objective for focusing source light onto the sample, a spatial light modulator, and a detector for detecting the modulator output.

    Abstract translation: 用于测量样品以鉴定化学品的方法包括接收多种化学品中的每一种的相应光谱。 使用处理器,使用接收的光谱来计算多个二进制数学滤波器。 根据所选择的数学滤波器调整空间光调制器。 已经与样品相互作用的光分散在空间光调制器的表面上,使得空间光调制器提供对应于所选择的数学滤波器的波长的光。 测量由空间光调制器提供的光以提供对应于所选数学滤波器的分数。 过滤分数结合以确定化学量。 处理器可以操作具有光源的检测装置,用于将源光聚焦到样本上的物镜,空间光调制器和用于检测调制器输出的检测器。

    An image forming method of a fluorescent sample
    77.
    发明申请
    An image forming method of a fluorescent sample 审中-公开
    荧光试样的成像方法

    公开(公告)号:US20160054226A1

    公开(公告)日:2016-02-25

    申请号:US14778351

    申请日:2014-03-22

    CPC classification number: G01N21/6458 G01N2201/0675 G02B21/004 G02B21/0076

    Abstract: A method of imaging a fluorescent sample includes the steps of: scanning fluorescent points of the sample using a scanner apparatus, thereby obtaining scanned fluorescent points; and imaging the scanned fluorescent points on a display, the scanning including the steps of predefining a scan field for the sample, which includes a set of scannable fluorescent points; and sequentially irradiating, at least one first subset of points of the set of points and at least one second subset of the set of points, which complements the first subset with respect to the set of points. The first and second subsets can be irradiated at different focal irradiation distances.

    Abstract translation: 一种对荧光样品进行成像的方法包括以下步骤:使用扫描仪装置扫描样品的荧光点,从而获得扫描的荧光点; 并且对显示器上的扫描荧光点进行成像,所述扫描包括预定义样品的扫描场的步骤,其包括一组可扫描的荧光点; 以及顺序照射该组点的至少一个点的第一子集和该组点的至少一个第二子集,其相对于该组集合补充第一子集。 可以在不同的聚焦照射距离下照射第一和第二子集。

    Illumination System, Inspection Apparatus Including Such an Illumination System, Inspection Method and Manufacturing Method
    78.
    发明申请
    Illumination System, Inspection Apparatus Including Such an Illumination System, Inspection Method and Manufacturing Method 有权
    照明系统,包括这种照明系统的检查装置,检验方法和制造方法

    公开(公告)号:US20160025992A1

    公开(公告)日:2016-01-28

    申请号:US14805402

    申请日:2015-07-21

    Abstract: In an illumination system (12, 13) for a scatterometer, first and second spatial light modulators lie in a common plane and are formed by different portions of a single liquid crystal cell (260). Pre-polarizers (250) apply polarization to first and second radiation prior to the spatial light modulators. A first spatial light modulator (236-S) varies a polarization state of the first radiation in accordance with a first programmable pattern. Second spatial light modulator (236-P) varies a polarization state of the second radiation accordance with a second programmable pattern. A polarizing beam splitter (234) selectively transmits each of the spatially modulated first and second radiation to a common output path, depending on the polarization state of the radiation. In an embodiment, functions of pre-polarizers are performed by the polarizing beam splitter.

    Abstract translation: 在用于散射仪的照明系统(12,13)中,第一和第二空间光调制器位于公共平面中,并且由单个液晶单元(260)的不同部分形成。 预偏光器(250)在空间光调制器之前将偏振应用于第一和第二辐射。 第一空间光调制器(236-S)根据第一可编程模式改变第一辐射的偏振状态。 第二空间光调制器(236-P)根据第二可编程图案改变第二辐射的偏振状态。 偏振分束器(234)根据辐射的偏振状态选择性地将空间调制的第一和第二辐射中的每一个传输到公共输出路径。 在一个实施例中,预偏振器的功能由偏振分束器执行。

    Method of fluorescence imaging
    80.
    发明授权
    Method of fluorescence imaging 有权
    荧光成像方法

    公开(公告)号:US09134236B2

    公开(公告)日:2015-09-15

    申请号:US12601587

    申请日:2008-05-30

    Abstract: Method of fluorescence imaging including: illuminating a sample to excite its fluorescence and acquiring an image thereof; based on fluorescence spectral and spatial information from the sample's fluorescence image, segmenting the image into regions of similar spectral properties; for each image segment, exciting the fluorescence of the corresponding sample region, and detecting the corresponding fluorescence; based on modelling, determining expected fluorescence parameters from the fluorescence signals detected for each region; scanning the sample and determining final fluorescence parameters based on said expected fluorescence parameters.

    Abstract translation: 荧光成像方法包括:照射样品以激发其荧光并获得其图像; 基于来自样品荧光图像的荧光光谱和空间信息,将图像分割成具有相似光谱性质的区域; 对于每个图像片段,激发相应样品区域的荧光,并检测相应的荧光; 基于建模,从为每个区域检测的荧光信号确定预期的荧光参数; 扫描样品并基于所述预期荧光参数确定最终荧光参数。

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