公开(公告)号：WO2003015116A1

公开(公告)日：2003-02-20

申请号：PCT/JP2002/008024

申请日：2002-08-06

Applicant: 浜松ホトニクス株式会社 ,  河合 浩司

Inventor： 河合 浩司

IPC: H01J1/28

CPC classification number: H01J1/28 ,  H01J9/047

Abstract: A sintering type cathode (C1) has a shell−shaped cathode tip end portion (35) consisting of a conical peak portion (31) provided on one edge side facing an anode and a cylindrical base portion (33) provided on the other edge side. The cathode tip end portion (35) forms an electron radiation portion for emitting electrons. The cathode tip end portion (35) contains a particle−form high−melting−point metal (41), an aluminum layer (43) covering at least part of the surface of the high−melting−point metal (41), and a metal oxide (45) as an easily electron−emitting substance. This cathode tip end portion (35) is formed by mixing into the aluminum layer (43)−coated metal (41) a compound (metal carbonate) containing a metal serving as easily electron−emitting substance and changed into a metal oxide (45) on heat treating, and sintering the mixture.

Abstract translation: 烧结型阴极（C1）具有由设置在面向阳极的一个边缘侧的锥形峰部（31）和设置在另一边缘侧的圆筒状基部（33）构成的壳状阴极前端部（35） 。 阴极尖端部分（35）形成用于发射电子的电子辐射部分。 阴极前端部（35）包含粒状高熔点金属（41），覆盖高熔点金属（41）表面的至少一部分的铝层（43），以及 金属氧化物（45）作为容易的电子发射物质。 该阴极前端部（35）通过将包含金属作为容易发生电子发射物质并变成金属氧化物（45）的化合物（金属碳酸盐）混合到铝层（43）涂覆的金属（41）中而形成， 进行热处理，并烧结混合物。

公开(公告)号：WO02054434A1

公开(公告)日：2002-07-11

申请号：PCT/JP2001/011468

申请日：2001-12-26

IPC: H01J1/28 ,  H01J9/04

CPC classification number: H01J1/28 ,  H01J9/047 ,  Y10T29/49002

Abstract: An impregnated cathode structure and a method of manufacturing the structure capable of firmly connecting a porous base metal to a cup body without using an intervenient and increasing the reliability of welding between the porous base metal and the cup body and an yield by eliminating the occurrence of defective welding; the impregnated cathode structure, comprising the porous base metal (11) impregnated with emissive materials and the cup body (12) allowing the surface of the porous base metal (11) to expose and holding the porous base metal (11) so as to cover the bottom and side faces thereof, wherein a non-porous dense part (14) is formed at the bottom face of the porous base metal (11), a close-fitted area (16) is formed by pressingly deforming the bottom part of the cup body (12) along the shape of the dense part (14), and the bottom part of the cup body (12) is welded to the dense part (14) of the porous base metal (11) in the close-fitted area (16).

Abstract translation: 一种浸渍阴极结构和一种制造能够将多孔基底金属牢固地连接到杯体的结构的方法，而不使用介质，并且增加多孔基底金属和杯体之间的焊接的可靠性，并且通过消除 有缺陷的焊接; 浸渍的阴极结构包括浸渍有发射材料的多孔基底金属（11）和允许多孔基底金属（11）的表面露出和保持多孔基底金属（11）的杯体（12）以覆盖 其底面和侧面，其中在多孔基底金属（11）的底面形成无孔致密部分（14），紧密配合区域（16）通过使所述多孔基底金属 沿着致密部分（14）的形状的杯体（12），并且杯体（12）的底部焊接到紧密配合区域中的多孔基底金属（11）的致密部分（14） （16）。

公开(公告)号：WO01015192A1

公开(公告)日：2001-03-01

申请号：PCT/EP2000/007518

申请日：2000-08-02

IPC: H01J37/073 ,  H01J1/14 ,  H01J1/28 ,  H01J1/304 ,  H01J1/144 ,  H01J1/15 ,  H01J1/30

CPC classification number: H01J1/28 ,  H01J1/14 ,  H01J2237/06316 ,  H01J2237/28

Abstract: A electron emission cathode includes an emitter (102) having an apex (118) from which electrons are emitted. The emitter is attached to a heating filament (114) at a junction (116) and extends from the junction both forward toward the apex and rearward. A reservoir (130) of material that lowers the work function of the emitter is positioned on the rearward extending portion (128) of the emitter. By positioning the reservoir on the rearward extending portion, the reservoir can be positioned sufficiently far from the junction to reduce its temperature and thereby greatly increase the useful life of the emitter without adversely affecting the emission characteristics of the source.

Abstract translation: 电子发射阴极包括具有电子发射的顶点（118）的发射极（102）。 发射器在接合处（116）处附接到加热丝（114）并且从接合部朝向顶点向后延伸。 降低发射器的功函数的材料储存器（130）位于发射器的向后延伸部分（128）上。 通过将储存器定位在向后延伸的部分上，储存器可以被定位成足够远离结点以降低其温度，从而大大增加发射器的使用寿命而不会不利地影响源的发射特性。

公开(公告)号：WO1996042100A1

公开(公告)日：1996-12-27

申请号：PCT/JP1996001527

申请日：1996-06-06

Applicant: KABUSHIKI KAISHA TOSHIBA ,  UDA, Eiichirou ,  HIGUCHI, Toshiharu ,  NAKAMURA, Osamu ,  KOYAMA, Kiyomi ,  MATSUMOTO, Sadao ,  OUCHI, Yoshiaki ,  KOBAYASHI, Kazuo ,  SUDO, Takashi ,  HOMMA, Katsuhisa

Inventor： KABUSHIKI KAISHA TOSHIBA

IPC: H01J01/28

CPC classification number: H01J23/087 ,  H01J1/28 ,  H01J9/042 ,  H01J23/04 ,  H01J2223/04

Abstract: An impregnated cathode structure using an impregnated cathode substrate which includes a large grain size, low porosity region and a small grain size, high porosity region disposed on the side of an electron emission surface of the large grain size, low porosity region, having a mean grain size smaller than a mean grain size in the large grain size, low porosity region and having a porosity greater than the porosity in the large grain size, low porosity region, and which is impregnated with an electron emission material.

Abstract translation: 一种浸渍的阴极结构，其使用浸渍的阴极基底，其包括大晶粒尺寸，低孔隙率区域和小晶粒尺寸，高孔隙率区域，其设置在大晶粒尺寸，低孔隙率区域的电子发射表面的一侧，具有平均值 颗粒尺寸小于大晶粒尺寸，低孔隙率区域的平均晶粒尺寸，并且具有大于大晶粒尺寸，低孔隙率区域的孔隙率的孔隙率，并且其被电子发射材料浸渍。

公开(公告)号：TW201532096A

公开(公告)日：2015-08-16

申请号：TW103144743

申请日：2014-12-22

Applicant: 瑪波微影IP公司 ,  MAPPER LITHOGRAPHY IP B. V.

Inventor： 丁努 格特勒 羅拉 ,  DINU-GUERTLER, LAURA ,  胡格佛斯特 艾瑞克 佩圖斯 ,  HOGERVORST, ERIC PETRUS

IPC: H01J1/13 ,  H01J37/065 ,  H01J37/317 ,  G03F7/20

CPC classification number: H01J37/3174 ,  G03F7/70058 ,  H01J1/15 ,  H01J1/28 ,  H01J3/027 ,  H01J3/029 ,  H01J37/075 ,  H01J37/3177 ,  H01J2229/481 ,  H01J2237/061

Abstract: 本發明關於一種陰極配置，其包含：一陰極本體，其容納一發射表面，用以在一縱向方向(Z)中發射電子，其中，該發射表面由一發射周圍界定；一聚焦電極，其在一橫向方向中至少部分封閉該陰極本體，並且包含一電子透射孔徑，用以聚焦由該發射表面所發射的電子，其中，該孔徑由一孔徑周圍界定，其中，該陰極本體以可移動的方式在與一對齊位置相隔一最大橫向距離的上方被排列在該聚焦電極裡面，且其中，該孔徑周圍橫向延伸在該發射表面上方並且在超過該最大橫向距離的重疊距離上方超越該發射周圍。

Abstract in simplified Chinese: 本发明关于一种阴极配置，其包含：一阴极本体，其容纳一发射表面，用以在一纵向方向(Z)中发射电子，其中，该发射表面由一发射周围界定；一聚焦电极，其在一横向方向中至少部分封闭该阴极本体，并且包含一电子透射孔径，用以聚焦由该发射表面所发射的电子，其中，该孔径由一孔径周围界定，其中，该阴极本体以可移动的方式在与一对齐位置相隔一最大横向距离的上方被排列在该聚焦电极里面，且其中，该孔径周围横向延伸在该发射表面上方并且在超过该最大横向距离的重叠距离上方超越该发射周围。

公开(公告)号：EP2962322A4

公开(公告)日：2016-10-26

申请号：EP14756934

申请日：2014-03-03

Applicant: PARK SOO YONG

Inventor： PARK SOO YONG

IPC: H01J25/50 ,  H01J1/28

CPC classification number: H01J23/005 ,  H01J1/28 ,  H01J9/18 ,  H01J9/26 ,  H01J9/385 ,  H01J23/05 ,  H01J23/12 ,  H01J25/50 ,  H01J25/587

Abstract: A 4G magnetron is disclosed. The magnetron may include an anode, having a cylindrical member and anode vanes disposed within the cylindrical member which define resonant cavities therebetween, and a dispenser cathode, suitable for heating and located coaxially within said anode. The magnetron may operate in a temperature range of about 850-1050 C. The magnetron may include conductive cooling. The magnetron may comprise inventive anode and cathode structures. A method for preparing a plurality of magnetron tubes substantially simultaneously is further provided.

公开(公告)号：EP2293316B1

公开(公告)日：2012-04-04

申请号：EP10181079.4

申请日：2004-02-13

Applicant: Mapper Lithography IP B.V.

Inventor： Kruit, Pieter ,  Steenbrink, Stijn Willem Herman Karel

IPC: H01J37/065 ,  H01J1/28

CPC classification number: H01J37/065 ,  B82Y10/00 ,  B82Y40/00 ,  H01J1/28 ,  H01J37/3177 ,  H01J2237/3175 ,  H01J2237/31754 ,  H01J2237/31774

公开(公告)号：EP1367620B1

公开(公告)日：2008-02-27

申请号：EP03101521.7

申请日：2003-05-26

Applicant: Thomson Licensing

Inventor： Pruvost, Jean-Claude ,  Langot, Jérémy ,  Adamski, Jean-Rémy

IPC: H01J1/28

CPC classification number: H01J1/28 ,  H01J9/047

公开(公告)号：EP0848405B1

公开(公告)日：2004-03-10

申请号：EP97309981.5

申请日：1997-12-11

Applicant: LG ELECTRONICS INC.

Inventor： Lee, John Hwan

IPC: H01J1/28

CPC classification number: H01J1/26 ,  H01J1/28

公开(公告)号：EP0848405A3

公开(公告)日：1998-08-05

申请号：EP97309981.5

申请日：1997-12-11

Applicant: LG ELECTRONICS INC.

Inventor： Lee, John Hwan

IPC: H01J1/28

CPC classification number: H01J1/26 ,  H01J1/28

Abstract: A low power impregnated cathode consisting of a pallet, a cup, an inner sleeve, a tap, and an outer sleeve, is characterized in that the diameter of the pellet is less than at least one and half times of the thickness of the pellet, and is characterized in that an outer diameter of the bottom part of the outer sleeve is larger than an outer diameter of the top part thereof.

Abstract translation: 由托盘，杯子，内套筒，龙头和外套筒组成的低功率浸渍阴极的特征在于，丸粒的直径小于丸粒厚度的至少一倍半， 其特征在于，外套筒的底部的外径大于其顶部的外径。