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    PARTIAL PRESSURE MEASURING CELL WITH COLD-CATHODE ION SOURCE FOR LEAK DETECTION IN VACUUM SYSTEMS
    71.
    发明申请
    PARTIAL PRESSURE MEASURING CELL WITH COLD-CATHODE ION SOURCE FOR LEAK DETECTION IN VACUUM SYSTEMS 审中-公开
    部分压力测量电池，用于阴极离子源，用于真空系统中的泄漏检测

    公开(公告)号：WO1991009413A1

    公开(公告)日：1991-06-27

    申请号：PCT/CH1990000272

    申请日：1990-11-27

    Applicant: BALZER, Richard

    IPC: H01J41/06

    CPC classification number: H01J41/06 ,  G01M3/202

    Abstract: The partial pressure measuring cell consists of a combination of a magnetically guided cold-cathode discharge to ionise the residual gas (ion source) with magnetic separation of the ion masses (masss spectrometer). Here the discharge is formed by a suitable non-uniform magnetic field in such a way that the scatter of the ion energy is small enough to ensure the resolution of the mass separation needed for partial pressure measurement (in leak detection). The ions are accelerated solely in the electric field of the discharge chamber. The special shape of the cold-cathode discharge used affects the electric field in such a way that the energy of the emitted ions is low and virtually independent of the discharge voltage. Owing to the low ion energy, only a modest magnetic field is required for mass separation so that the mass spectrometer and the ion source can be integrated with the magnetic discharge guide system into a single magnetic system.

    Abstract translation: 分压测量单元由磁导向冷阴极放电与离子源（质谱仪）的磁分离电离残留气体（离子源）组成。 在这里，放电由合适的非均匀磁场形成，使得离子能量的散射足够小以确保分压测量所需的质量分离（在泄漏检测中）。 离子仅在放电室的电场中加速。 所使用的冷阴极放电的特殊形状以这样的方式影响电场，使得所发射的离子的能量低，并且几乎不依赖于放电电压。 由于低离子能量，质量分离仅需要适度的磁场，使得质谱仪和离子源可以与磁放电引导系统集成成单个磁系统。

    Ionization gauge
    74.
    发明专利
    Ionization gauge 审中-公开

    公开(公告)号：JP2007529096A

    公开(公告)日：2007-10-18

    申请号：JP2007503017

    申请日：2005-03-10

    Applicant: ブルックス オートメーション インコーポレイテッド

    Inventor： アーノルド・ポール・シー ,  ラット・ポール・エム

    IPC: H01J41/04 ,  H01J49/42

    CPC classification number: G01L21/32 ,  H01J41/06 ,  H01J49/26

    Abstract: 電子源を気体分子から隔離している電離真空計は、電子を発生する電子源と、電子と気体分子の衝突により生成されるイオンを捕集する捕集電極と、電子源を気体分子から隔離する電子窓とを含む。 電離真空計は陽極空間を形成し、および陽極領域内に電子を保持する陽極を有する。 電離真空計は複数の電子源および／または捕集電極を有する。 捕集電極は陽極空間内または陽極空間の外側に置く。 電離真空計は質量−電荷比に基づいてイオンを分離するマスフィルタを有することができる。 電離真空計は、圧力を測定するベアード−アルパート型または気体の種類を決定する残留ガス分析計である。
    【選択図】図２Ａ

    Ionization vacuum gauge
    75.
    发明专利
    Ionization vacuum gauge 审中-公开
    离子真空计

    公开(公告)号：JP2005062176A

    公开(公告)日：2005-03-10

    申请号：JP2004226004

    申请日：2004-08-02

    Applicant: Varian Spa ,  ヴァリアン ソシエタ ペル アジオーニ

    Inventor： CORREALE RAFFAELE

    IPC: G01L21/34 ,  H01J41/06 ,  H01J41/10

    CPC classification number: B82Y10/00 ,  H01J41/06

    Abstract: PROBLEM TO BE SOLVED: To provide a miniaturized vacuum gauge that has high sensitivity and does not give any disturbance for affecting the measurement of pressure. SOLUTION: An ionization vacuum gauge measures a residual pressure of a gaseous substance remaining in a container 10 especially after operating a vacuum pump. The vacuum gauge comprises an electron emission cathode 31 created by utilizing a nano tube technique, a grid 13 for accelerating electrons emitted by the cathode, and a plate 15 for capturing gas ions and/or positive ionized molecules. A residual value in the container can be determined by measuring a plate current by a galvanometer. COPYRIGHT: (C)2005,JPO&NCIPI

    Abstract translation: 要解决的问题：提供具有高灵敏度并且不会对影响测量压力产生任何干扰的小型化真空计。 解决方案：电离真空计测量残留在容器10中的气态物质的残留压力，特别是在操作真空泵之后。 真空计包括通过利用纳米管技术产生的电子发射阴极31，用于加速由阴极发射的电子的栅极13和用于捕获气体离子和/或阳离子分子的板15。 通过用电流计测量板电流可以确定容器中的残留值。 版权所有（C）2005，JPO＆NCIPI

    VACUUM INTERRUPTER WITH MEANS FOR DETERMINING THE RESIDUAL GAS PRESSURE AND METHOD OF DETERMINING THE SAME
    78.
    发明公开
    VACUUM INTERRUPTER WITH MEANS FOR DETERMINING THE RESIDUAL GAS PRESSURE AND METHOD OF DETERMINING THE SAME 审中-公开
    具有确定残余气体压力装置的真空中断器和确定同样气体压力的方法

    公开(公告)号：EP3244433A1

    公开(公告)日：2017-11-15

    申请号：EP16168840.3

    申请日：2016-05-10

    Applicant: ABB Schweiz AG

    Inventor： Gentsch, Dietmar, Dr. ,  Hencken, Kai, Dr. ,  Kaufmann, Tobias, Dr.

    IPC: H01H33/668 ,  G01L21/34 ,  H01J41/06

    CPC classification number: H01H33/668 ,  G01L21/34 ,  G01L27/002 ,  H01H2033/6686 ,  H01J41/06

    Abstract: The invention relates to a vacuum interrupter with at least one movable and at least one fixed contact, arranged inside of a vacuum tight ceramic housing, wherein the vacuum interrupter is provided with means to determine the actual residual gas pressure inside the vacuum tight ceramic housing. In order to measure the actual residual pressure inside a vacuum interrupter, even when the vacuum interrupter is in operation, and to realize it with compact means, the invention is, that the means for determing the residual gas pressure inside the vacuum tight ceramic housing are means for generating an inhomogenous magnetic field inside the vacuum tight ceramic housing, operating as an electron trap, and that furthermore one of the contacts represents an anode, and a further element implemented inside the vacuum interrupter represents the cathode for measing a current, which represents the aforesaid residual gas pressure.

    Abstract translation: 本发明涉及一种真空断续器，其具有至少一个可移动的和至少一个固定触点，该真空断续器布置在真空密封陶瓷外壳内部，其中真空断续器设有用于确定真空密封陶瓷外壳内的实际残留气体压力的装置。 为了测量真空断续器内部的实际残余压力，即使在真空断续器处于操作中并且以紧凑的方式实现真空断路器时，本发明确定真空密封陶瓷外壳内的残余气体压力的装置是 用于在真空密封陶瓷外壳内部产生非均匀磁场的装置，作为电子陷阱工作，而且其中一个触点代表阳极，在真空断续器内实现的另一个元件代表用于测量电流的阴极， 上述残余气体压力。

    VACUUM GAUGE AND CONTAMINATION DIAGNOSIS METHOD
    79.
    发明公开
    VACUUM GAUGE AND CONTAMINATION DIAGNOSIS METHOD 审中-公开
    真空计量和污染诊断方法

    公开(公告)号：EP3196622A1

    公开(公告)日：2017-07-26

    申请号：EP15828187.3

    申请日：2015-07-29

    Applicant: National Institute of Advanced Industrial Science and Technology

    Inventor： YOSHIDA Hajime

    IPC: G01L27/00 ,  G01L21/32 ,  G01L21/34

    CPC classification number: G01L27/00 ,  G01L21/32 ,  G01L21/34 ,  G01L27/007 ,  G01N27/62 ,  H01J27/02 ,  H01J37/08 ,  H01J41/06

    Abstract: Provided are: a vacuum gauge that, with a simple configuration, can accurately diagnose the degree of contamination of the vacuum gauge; and a contamination diagnosis method that, with a simple process, can accurately diagnose the degree of contamination of a vacuum gauge. Provided is a cold cathode ionization vacuum gauge that has a normal operation mode and a contamination diagnosis mode, the cold cathode ionization vacuum gauge comprising: an anode 1 and a cathode 3 that are for measuring vacuum pressure in the normal operation mode; an anode 7 and the cathode 3 that are for measuring the vacuum pressure in the contamination diagnosis mode; and a controller 10 that compares the size of a current measured between the anode 7 and the cathode 3 and the size of a current measured between the anode 1 and the cathode 3.

    Abstract translation: 提供：真空计，其结构简单，能够准确地诊断真空计的污染程度; 以及通过简单的处理就能够准确地诊断真空计的污染程度的污染诊断方法。 本发明提供一种冷阴极电离真空计，其具有正常运行模式和污染诊断模式，所述冷阴极电离真空计包括：用于在正常运行模式下测量真空压力的阳极1和阴极3; 阳极7和阴极3，用于在污染诊断模式下测量真空压力; 以及控制器10，其比较阳极7和阴极3之间测量的电流的大小和阳极1和阴极3之间测量的电流的大小。

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