公开(公告)号：EP2924411B1

公开(公告)日：2017-12-27

申请号：EP13857007.2

申请日：2013-11-12

Applicant: National Institute of Advanced Industrial Science and Technology

Inventor： YOSHIDA Hajime ,  ARAI Kenta ,  KOBATA Tokihiko

IPC: G01M3/00 ,  B81B7/00 ,  G01L27/00 ,  G01M3/20

CPC classification number: G01L27/002 ,  B81B7/0009 ,  B81B2201/05 ,  G01M3/007 ,  G01M3/207 ,  G01M3/26

Abstract: There is provided a reference leak generating device capable of precisely generating an ultra-fine reference leak. The reference leak generating device adapted to be connected to an upstream side of a measurement chamber includes a chamber connected to the measurement chamber through an orifice or a porous plug having a molecular flow conductance C and a pressure to establish molecular flow conditions which are known in advance, and is characterized in that a pressure p 1 of testing gas to be introduced into the chamber is precisely determined by using a static expansion method once or more times, and a leak rate of a reference leak at the pressure p 1 is obtained in accordance with a product of C and P 1 .

公开(公告)号：EP3196622A1

公开(公告)日：2017-07-26

申请号：EP15828187.3

申请日：2015-07-29

Applicant: National Institute of Advanced Industrial Science and Technology

Inventor： YOSHIDA Hajime

IPC: G01L27/00 ,  G01L21/32 ,  G01L21/34

CPC classification number: G01L27/00 ,  G01L21/32 ,  G01L21/34 ,  G01L27/007 ,  G01N27/62 ,  H01J27/02 ,  H01J37/08 ,  H01J41/06

Abstract: Provided are: a vacuum gauge that, with a simple configuration, can accurately diagnose the degree of contamination of the vacuum gauge; and a contamination diagnosis method that, with a simple process, can accurately diagnose the degree of contamination of a vacuum gauge. Provided is a cold cathode ionization vacuum gauge that has a normal operation mode and a contamination diagnosis mode, the cold cathode ionization vacuum gauge comprising: an anode 1 and a cathode 3 that are for measuring vacuum pressure in the normal operation mode; an anode 7 and the cathode 3 that are for measuring the vacuum pressure in the contamination diagnosis mode; and a controller 10 that compares the size of a current measured between the anode 7 and the cathode 3 and the size of a current measured between the anode 1 and the cathode 3.

Abstract translation: 提供：真空计，其结构简单，能够准确地诊断真空计的污染程度; 以及通过简单的处理就能够准确地诊断真空计的污染程度的污染诊断方法。 本发明提供一种冷阴极电离真空计，其具有正常运行模式和污染诊断模式，所述冷阴极电离真空计包括：用于在正常运行模式下测量真空压力的阳极1和阴极3; 阳极7和阴极3，用于在污染诊断模式下测量真空压力; 以及控制器10，其比较阳极7和阴极3之间测量的电流的大小和阳极1和阴极3之间测量的电流的大小。

公开(公告)号：EP2924411A1

公开(公告)日：2015-09-30

申请号：EP13857007.2

申请日：2013-11-12

Applicant: National Institute of Advanced Industrial Science and Technology

Inventor： YOSHIDA Hajime ,  ARAI Kenta ,  KOBATA Tokihiko

IPC: G01M3/02 ,  G01M3/20

CPC classification number: G01L27/002 ,  B81B7/0009 ,  B81B2201/05 ,  G01M3/007 ,  G01M3/207 ,  G01M3/26

Abstract: There is provided a reference leak generating device capable of precisely generating an ultra-fine reference leak. The reference leak generating device adapted to be connected to an upstream side of a measurement chamber includes a chamber connected to the measurement chamber through an orifice or a porous plug having a molecular flow conductance C and a pressure to establish molecular flow conditions which are known in advance, and is characterized in that a pressure p 1 of testing gas to be introduced into the chamber is precisely determined by using a static expansion method once or more times, and a leak rate of a reference leak at the pressure p 1 is obtained in accordance with a product of C and P 1 .

Abstract translation: 提供了能够精确地产生超细参考泄漏的参考泄漏产生装置。 适于连接到测量室的上游侧的参考泄漏产生装置包括通过孔或具有分子流导电C和压力的孔的多孔塞连接到测量室的室，以建立分子流动条件 并且其特征在于，通过使用静态膨胀法一次或多次精确地确定要引入室中的测试气体的压力p 1，并且获得在压力p 1处的参考泄漏的泄漏率 符合C和P 1的产品。