一种粒子能量带通装置及电子能量分析器、光电子能谱仪

    公开(公告)号:CN222440524U

    公开(公告)日:2025-02-07

    申请号:CN202420438104.X

    申请日:2024-03-07

    Inventor: 汪晓平 王振中

    Abstract: 本发明公开了一种带电粒子能量带通装置及电子能量分析器、光电子能谱仪,在反射腔上设置入射通道和出射通道,在入射通道和/或出射通道处设置粒子透射器,在反射腔内部设置粒子反射器,通过调节反射器和透射器的电场分布,实现粒子带通功能。本发明所设计的粒子能量带通装置还可以与各类透镜系统、能量分析器兼容,灵活转换,适用于各种粒子能量选择的场景。本发明装置结构简单、紧凑,特别适合一些小型化粒子选择和分析的应用场景。

    一种基于微通道板的飞行时间质谱仪检测器

    公开(公告)号:CN215118828U

    公开(公告)日:2021-12-10

    申请号:CN202121251288.1

    申请日:2021-06-04

    Inventor: 钟晟 郑杰

    Abstract: 本实用新型公开了一种基于微通道板的飞行时间质谱仪检测器,包括第一夹板、第二夹板、第一微通道板、第二微通道板和压差电路,压差电路包括压差电源、阳极板和多块阴极电极板,所述第一夹板与第一微通道板之间垫有第一电极板,所述第一微通道板与第二微通道板之间垫有第二电极板,所述第二微通道板与第二夹板之间垫有第三电极板,所述第二夹板的下方设有前置放大器,所述第一夹板、第二夹板、第一微通道板和第二微通道板之间通过螺栓螺帽固定。本实用新型经过两次微通道板放大处理,产生的电子个数是原来进入的离子的数百倍,再经过前置放大器放大后,离子信号被放大后更易被数据采集卡采集,检测器的电子的放大倍数高,以保证采集灵敏度高。

    MASS SPECTROMETER
    74.
    发明专利

    公开(公告)号:JPH05325881A

    公开(公告)日:1993-12-10

    申请号:JP12489992

    申请日:1992-05-18

    Inventor: KINOSHITA OSAMU

    Abstract: PURPOSE:To accurately measure a specific component even if a plurality of component gases exist as production sources in ions generated during mass spectrometry and at least one of the components is likely to undergo thermal dissociation. CONSTITUTION:In a mass spectrometer having an electron impact ion source, a shielding plate 34 having a slit 34A for allowing thermoelectrons released from a filament 32 to pass therethrough in the direction in which the thermoelectrons are accelerated is disposed over the electron impact ion source and in a position near the filament 32 serving as a thermelectron generation means. The length of the filament 32 is almost equal to the width of the slit 34A and the filament 32 is made of Ta of a low work function. The thermoelectrons from the filament 32 are allowed to pass through the slit 34A without causing thermal dissociation of Cl2 gas, whereby an electron beam having a narrow width of energy distribution can be produced. Cl radicals in a plasma can therefore selectively be ionized by the electron beam.

    75.
    实用新型
    失效

    公开(公告)号:JPH0587798U

    公开(公告)日:1993-11-26

    申请号:JP3668892

    申请日:1992-04-30

    ELECTRON SPECTROSCOPIC IMAGE MEASURING METHOD

    公开(公告)号:JPH04334861A

    公开(公告)日:1992-11-20

    申请号:JP10534191

    申请日:1991-05-10

    Applicant: JEOL LTD

    Inventor: SEKINE SATORU

    Abstract: PURPOSE:To measure information required for obtaining a two dimensional image in a short time. CONSTITUTION:Plural electrodes 9 are disposed in the out-going port of a HSA1 in the scattering directions of energy spectrum. A control device 10 is equipped with a voltage setting table 11 in which optimum input lens voltage is stored for the combination of electron energy and pass energy. When both electron energy and pass energy are directed by an input device 12, the control device 10 determines voltage to be applied to the HSA1 based on directed pass energy, and concurrently determines lens voltage VL1 and VL2 with the voltage setting table referred. This thereby permits (-VR+VA) and (-VR-VA) corresponding to directed pass energy to be applied to the inside and outside electrodes 6 and 7 of the HSA1, and also permits lens voltage VL1 and VL2 optimum to directed electron energy and directed pass energy to be applied to electrostatic lenses 32 and 33 respectively.

    DIFFERENTIAL EXHAUST TYPE ELECTRON GUN

    公开(公告)号:JPH04280051A

    公开(公告)日:1992-10-06

    申请号:JP40941090

    申请日:1990-12-28

    Abstract: PURPOSE:To prevent the deterioration of the degree of vacuum in a vacuum container when an electron beam is emitted into the vacuum container. CONSTITUTION:A vacuum casing 5 fitted to a vacuum container 1 is provided. The vacuum casing 5 has an electron beam outgoing port 5a communicated to the inside of the vacuum container 1. An electron gun 6 is arranged in the vacuum casing 5 with its tip section faced to the electron beam outgoing port 5a side. A vacuum exhaust device 7 is connected to the vacuum casing 5. An electron beam is emitted by the electron gun 6 while the vacuum casing 5 is vacuum-exhausted by the vacuum exhaust device 7.

    ELECTRON GUN
    78.
    发明专利

    公开(公告)号:JPH04196039A

    公开(公告)日:1992-07-15

    申请号:JP32252790

    申请日:1990-11-28

    Applicant: TOSHIBA CORP

    Abstract: PURPOSE:To perform easy adjustment of the intensity of an electron beam and reduce the capacity of a power supply connected to a cathode, by providing a magnetic field generating device for generating a magnetic field parallel to the longitudinal direction of a wire placed in an ionization chamber. CONSTITUTION:When a pulsive voltage is applied between an anode wire 1 provided in an ionization chamber 3 and the wall 4 of the ionization chamber, and also applying the same voltage to a magnetic field generating device 20 synchronously, a gas in the ionization chamber 3 is ionized by a pulsive discharge to generate electrons and the resulting electrons move in spiral motion in the longitudinal direction of the anode wire 1. As the result, collisions with gas atoms are so promoted that ionization efficiency is increased as well as a plasma density. Thus, even if the same electron beam intensity is required as in a conventional device, ionic current can be increased by generating a magnetic field parallel to the longitudinal direction of the anode wire 1 by the magnetic field generating device 20. Consequently a negative biasing voltage V applied to a cathode 7 and a pulsive voltage applied to the anode wire 1 can be reduced so that a power supply capacity can be reduced.

    ELECTRONIC SPECTRAL ANALYZING DEVICE

    公开(公告)号:JPH04112444A

    公开(公告)日:1992-04-14

    申请号:JP23001790

    申请日:1990-08-30

    Applicant: SHIMADZU CORP

    Abstract: PURPOSE:To analyze a wide scope on a specimen surface by installing an electron deflecting means between a cylindrical mirror type energy analyzer (CMA) and the surface of a specimen. CONSTITUTION:An electron deflecting electrode 3 for both x and y axes is furnished centering on the optical axis A of an electron sensor 2, while an electron beam deflecting electrode 5 for two directions x and y is arranged in such a way as surrounding the optical axis E of an electron beam source 4. A specimen in a scan signal generator 6 is impressed on these two sets of deflecting electrodes 3, 5, and the optical axis A of an energy analyzer (CMA) 1 and the one E of the electron source 4 are bent by these electrodes, and scan over the specimen surface is made while their intersection points with the specimen surface are identical at all times. According to this constitution a wide scope specimen image with electrons having a specific energy can be obtained because the view point of the CMA scans over the specimen surface even though the CMA image itself has a narrow view field.

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