公开(公告)号：JPH0382013A

公开(公告)日：1991-04-08

申请号：JP22005689

申请日：1989-08-24

Applicant: CANON KK

Inventor： OTSUKA HIROYUKI ,  HOSAKA KOTARO ,  HIGOMURA MAKOTO

IPC: H01L21/30 ,  H01L21/027

Abstract: PURPOSE:To reduce cost and the burden of a delivery data in the manufacturing process of a stage, and to enable positioning with high accuracy without the constraint of severe environmental conditions by measuring an attitude before and after the positioning of the stage and correcting and controlling an Abbe error generated by the tilt-displacement of the stage on the basis of the variation section of the attitude during that time. CONSTITUTION:The attitude of a mirror 5 for a laser interferometer placed on direct- acting stages 6, 8 through a tilt stage 7 is measured, and a first measured value is acquired. The positioning of the direct-acting stages 6, 8 is controlled by using laser beams applied to the mirror 5 for the laser interferometer at a preceding time, the attitude of the mirror 5 for the laser interferometer is measured again, and a second measured value is obtained. The quantity of the variation of the attitude of the mirror 5 for the laser interferometer is computed on the basis of the first and second measured values at the preceding time, and the tilt stage 7 is controlled on the basis of the quantity of the variation of the attitude at the preceding time in order to correct an Abbe error. When the quantity of the variation of the attitude at the preceding time is kept outside a specified tolerance, the tilt stage 7 is controlled on the basis of the quantity of the variation of the attitude.

公开(公告)号：JPH0273411A

公开(公告)日：1990-03-13

申请号：JP22470988

申请日：1988-09-09

Applicant: CANON KK

Inventor： OTSUKA HIROYUKI ,  HOSAKA KOTARO ,  HIGOMURA MAKOTO ,  IKEDA TAKASHI

IPC: H01L21/30 ,  G03F7/20 ,  G05D3/12 ,  H01L21/027

Abstract: PURPOSE:To simplify a positioning command method to a stage positioning device by providing a function which gives the preference to the fine adjustment and selecting a rough or fine adjustment axis. CONSTITUTION:When a target positioning position 8 is designated, the present positioning position is measured by a laser interferometer to calculate a consumption stroke for positioning up to the position 8. Then a positioning enable stroke for fine adjustment is calculated by a non-contact displacement sensor 5, and the positioning operation is performed to the position by means of a fine adjustment axis only if possible. However, when the position 8 exceeds the range of an effective stroke 6, a fine adjustment stage 3 is set at an intermediate position 9 of the positioning enable stroke of the stage 3. Then a rough adjustment axis of a rough adjustment stage 4 is positioned within a range of the rough adjustment positioning resolution. Thus the final positioning action is carried out by the stage 3 with fine adjustment so that the target positioning accuracy is satisfied.

公开(公告)号：JPH01173805A

公开(公告)日：1989-07-10

申请号：JP5831087

申请日：1987-03-13

Applicant: CANON KK

Inventor： NARUMI KOJI ,  WATANABE KEIJI ,  HOSAKA KOTARO ,  HIGOMURA MAKOTO ,  YAMAMOTO SEKINORI ,  NOSE TETSUSHI ,  NIWA YUKICHI ,  OWADA MITSUTOSHI

IPC: G01B11/24 ,  G01B11/255 ,  G01M11/00

Abstract: PURPOSE:To shorten a length measurement stroke and to take a measurement at a high speed by setting a polar coordinate system (r-theta) which has its coordinate origin in the center of curvature of a curved surface to be detected and detecting a shift in (r)-directional relative position to theta. CONSTITUTION:While the center of curvature of the body 30 to be measured is regarded as a measurement origin, an R matching slide 7 is adjusted according to the radius of curvature and an automatic focus microscope 20 is preset by a rough adjusting slide 11 and a fine adjusting slide 16. Then a swivel shaft 21 is rotated to scan the ridge line of the body 30 to be measured. Further, an indexing shaft 22 is driven to rotate the body 30 to be measured around a shaft 22. Consequently, when the body to be measured which has a large opening angle such as a lens is measured, the length measurement stroke may be short, the thickness need not be considered for setting, and the measurement is speeded up.

公开(公告)号：JPS63209186A

公开(公告)日：1988-08-30

申请号：JP4151687

申请日：1987-02-26

Applicant: CANON KK

Inventor： TAKIZAWA NAOKI ,  HIGOMURA MAKOTO

IPC: H01L41/09 ,  H01L41/04 ,  H01L41/083

Abstract: PURPOSE:To remove the hysteresis characteristics of a piezoelectric element and to contrive to be able to obtain a linear displacement to a command signal by a method wherein a piezoelectric element of the same kind as the above piezoelectric element is connected in series with the above piezoelectric element to detect the amount of charge of the above piezoelectric element and the voltage of the latter piezoelectric element is feeded back. CONSTITUTION:The amount of charge of a piezoelectric element 1 is detected to obtain a feedback signal. As a detecting means for the amount of charge, a piezoelectric element 2 of the same kind as the element 1 is used in series connection, for example, with the element 1 and the detected signal is feeded back by a high input impedance amplifier. Accordingly, the amounts of charge of the element 1 for an actuator and the element 2 for detection become equal to each other and when the voltage of the element 2 is feeded back, the feedback signal to correspond to the amount of charge of the element 1 can be obtained. Moreover, when the voltage of the element 2 is feeded back through a high input impedance amplifier 4, the hysteresis of the element 1 is removed.

公开(公告)号：JPS63169739A

公开(公告)日：1988-07-13

申请号：JP109987

申请日：1987-01-08

Applicant: CANON KK

Inventor： HIGOMURA MAKOTO ,  OKAWA SHINKICHI ,  MATSUSHITA KOICHI

IPC: H01L21/68 ,  B23Q5/40 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30

Abstract: PURPOSE:To enable positioning with high precision by storing a feed means and a drive means into a sealed vessel while penetrating a direct-acting rod to a wall body in the sealed vessel and slidably constituting the rod. CONSTITUTION:Since the revolution of a nut 4 screwed to a screw section 3a for a feed screw shaft 3 is prevented by rollers 13a, 13b and a guide rail 14, the nut 14 linearly moves along the guide rail 14 when the screw section 3a is turned. Consequently, a direct-acting rod 5 which the nut 4 is fixed linearly operates in response to the direction of rotation of the screw section 3a in the axial direction of the rod 5 as shown in the arrow B. As a result, a movable stage 6 in a vacuum atmosphere is shifted in the desired direction. When the movable stage 6 reaches a predetermined position, a piezoelectric element 7 is driven, a chuck 8 is pushed and the direct-acting rod 5 is clamped, thus locking the direct-acting rod 5. The inside of a sealed vessel 102 is kept at atmospheric pressure during operation in such a vacuum atmosphere. Accordingly, a normal lubricant can be used, and smooth working is attained, thus allowing positioning with high precision.

公开(公告)号：JPS6313930A

公开(公告)日：1988-01-21

申请号：JP15785986

申请日：1986-07-07

Applicant: CANON KK

Inventor： SAKAI RIICHI ,  HIGOMURA MAKOTO

IPC: F16F9/10 ,  F16F6/00 ,  F16F13/00 ,  F16F13/08

Abstract: PURPOSE:To shorten the time required for positioning a movable substance through inhibiting the movable substance from vibrating when it is positioned by applying an oil damper to a space between the movable substance being caused to float up by air and a stationary platen. CONSTITUTION:The whole assembly is placed on a stationary platen made of a magnetic material, and then, when a movable substance moves, the electric current is not caused to flow into a coil 5. At this point, an iron core 4 floats up above the surface of the stationary platen, and it is out of contact with the stationary platen. Subsequently, when the movable substance is positioned, the electric current is caused to flow into the coil 5. Hereupon, the iron core 4 becomes a magnet, and it is adsorbed to the surface of the stationary platen so that an oil receiver 3 is fixed on the surface of the stationary platen. While the movable substance is caused by the force of inertia to move together with a fitting member 1 in the direction of proceeding, a preat restraint caused by the viscosity acts between the oil filled in the oil receiver 3 and the fitting member 1 so that the vibration of the movable substance is absorbed, and accordingly, the movable substance is caused to stop immediately.

公开(公告)号：JPS62245310A

公开(公告)日：1987-10-26

申请号：JP8720986

申请日：1986-04-17

Applicant: CANON KK

Inventor： OISHI SHINJI ,  HIGOMURA MAKOTO

IPC: G05D3/12 ,  H02P29/00

Abstract: PURPOSE:To stabilize a response characteristics, by switching a control mode corresponding to a command speed. CONSTITUTION:A servomotor control device is constituted of a system controller 1 which generates a command pulse train and the control signal of a control mode, a deviation counter 2, a D/A conveter 3, and F/V converters 8-9, etc. At such a time, the titled device is constituted so that an analog switch 11 switches by a command from the controller 1, is added, and only a difference between a command speed voltage by the F/V converter 9, and a motor speed voltage by the F/V converter 8, is supplied to a driver 4 as a speed control signal, at a high speed command time. In this way, a control for a position and a speed is performed by a deviation from the deviation counter 2 at a low speed command time. Also, a speed control can be performed by switching the analog switch 11 to B side by the controller 1 at the high speed command time, and furthermore, a position control can be performed by switching it to A side at a targeted place.

公开(公告)号：JPS62230384A

公开(公告)日：1987-10-09

申请号：JP6847986

申请日：1986-03-28

Applicant: CANON KK

Inventor： OISHI SHINJI ,  HIGOMURA MAKOTO

IPC: H02P25/06 ,  H02P7/00

Abstract: PURPOSE:To obtain a linear servomotor device, in which torque nonuniformity is reduced and which is stabilized to a temperature change, etc., by using ar optical means such as a reflection type photo-in terrupter as a position detecting element for a moving piece. CONSTITUTION:A servomotor has a field system section with field magnets l, a lower yoke 2, an upper yoke 3 and side yokes 4 and a moving piece 5. The moving piece 5 has coils 6, 6' movable among magnetic fields forced by the field system section and reflection type photo-interrupters 8, 8', 9, 9' fixed to the moving piece 5 by a mount 10. A reflecting plate l11shaped by patterns in response to the polarity of the magnets l is mounted to a field magnet section. Each photo-iutcrrupter 8, 8', 9, 9' outputs position detecting signals corresponding to thc white and black patterns formed to the reflecting plate ll in response to the movement of the moving piece 5. An input command signal and a control signal having one level relationship in plural kinds of predetermined level relationship are outputted in response to the position detecting signals.

公开(公告)号：JPS62171013A

公开(公告)日：1987-07-28

申请号：JP1114686

申请日：1986-01-23

Applicant: CANON KK

Inventor： HIGOMURA MAKOTO

IPC: G05D3/12 ,  H01L21/027 ,  H01L21/30

Abstract: PURPOSE:To shorten positioning time and to improve positioning accuracy by driving a moving body so that an actual speed can coincide with a target one so as to move at a high speed and then driving it so that a current position deviation comes to zero. CONSTITUTION:When a target position and a maximum speed Vmax are set, the oscillation frequency of an oscillator 40 is set so as to obtain a reference clock corresponding to the accelerating and decelerating speed of the moving body 10, thereby controlling speed. When the oscillator 40 operates, a counter 41 counts up at every fixed time, and a normalizing speed data (9n) is read out of a speed curve table 38 in accordance with the counted value (n). A multi plier 34 multiplies the speed Vmax by K(n) and output it as the reference speed V of the moving body. When the counted value attains 256, the speed becomes maximum to attain a speed constant state. If a decelerating start position comes, the counter 41 is used as a subtractor counter to obtain a decelerating speed curve. When the moving body 10 reaches near the target position, the operation is shifted to position control, and the position control in a variable gain mode is executed.

公开(公告)号：JPS6248249A

公开(公告)日：1987-03-02

申请号：JP18578585

申请日：1985-08-26

Applicant: CANON KK

Inventor： OISHI SHINJI ,  HIGOMURA MAKOTO

IPC: H02K33/18

Abstract: PURPOSE:To prevent a movable section from colliding against the yoke of a stator despite of the runaway of the movable section, by arranging the permanent magnet of polarity opposite to that of a driving permanent magnet independently on the stator at both end sections in the moving direction of the movable section. CONSTITUTION:So far as a linear motor using a permanent magnet 3 for a stator 1 and using a coil 40 for a movable section is concerned, the permanent magnets 30 of opposite polarities are arranged by separating them from the driving permanent magnet 3 magnetically, at both end sections in the movable range of the movable coil 40. By this organization, even with the runaway of the movable coil 40, opposite thrust works at both end sections, and so the thrust works as the braking force, and the movable coil 40 can be exactly prevented from colliding against a stator yoke 1'.