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公开(公告)号：KR1020020088146A
公开(公告)日：2002-11-27
申请号：KR1020010027084
申请日：2001-05-17
Applicant: 한국과학기술연구원
IPC: B81C1/00
CPC classification number: B81C1/00031 , B81B2201/04 , B81C1/00349 , B81C1/00388 , B81C1/00436
Abstract: PURPOSE: A method for fabricating micro lens array is provided to achieve improved performance and reliability by minimizing the problem of adhesion caused during demolding process for lens array master and polymer material. CONSTITUTION: A method comprises a first step of depositing an oxide film onto a semiconductor substrate(200); a second step of forming a photosensitive film pattern onto the oxide film; a third step of forming an oxide film pattern by using the photosensitive film pattern as an etching barrier; a fourth step of forming a lens array master having an undercut beneath the semiconductor substrate, by performing an isotropic etching using XeF6 etching gas and the oxide film pattern as an etching barrier; a fifth step of removing the oxide film pattern from the semiconductor substrate; a sixth step of depositing polymer into a predetermined thickness all over the resultant structure; and a seventh step of forming shape of a micro lens array(250) by separating the polymer deposited on the semiconductor substrate from the semiconductor substrate master.
Abstract translation: 目的：提供一种制造微透镜阵列的方法，通过最小化透镜阵列母材和聚合物材料的脱模过程中引起的粘附问题来实现改进的性能和可靠性。 构成：一种方法包括在半导体衬底（200）上沉积氧化膜的第一步骤; 在氧化膜上形成感光膜图案的第二步骤; 通过使用感光膜图案作为蚀刻阻挡层来形成氧化膜图案的第三步骤; 通过使用XeF 6蚀刻气体和氧化膜图案作为蚀刻阻挡层进行各向同性蚀刻来形成在半导体衬底下方具有底切的透镜阵列母板的第四步骤; 从半导体衬底去除氧化膜图案的第五步骤; 在所得到的结构上将聚合物沉积到预定厚度的第六步骤; 以及通过将沉积在半导体衬底上的聚合物与半导体衬底母板分离来形成微透镜阵列（250）的形状的第七步骤。
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公开(公告)号：KR1020070047180A
公开(公告)日：2007-05-04
申请号：KR1020050104015
申请日：2005-11-01
Applicant: 삼성전기주식회사
Inventor： 경제홍
CPC classification number: B81B7/02 , B81B1/004 , B81B2201/04 , H01B1/023
Abstract: 기판; 상기 기판 상에 위치하는 절연층; 중앙 부분이 상기 절연층과의 사이에서 구동 공간을 확보할 수 있도록 소정의 간격으로 이격되어 위치하며 상기 구동 공간을 통하여 상하로 움직일 수 있는 구조물층; 상기 구조물층의 중앙 부분 상에 위치하며, 입사광을 반사 또는 회절시키는 알루미늄 합금을 재료로 하는 상부 광반사층; 및 상기 구조물층 상에 위치하고, 상기 구조물층의 중앙 부분을 구동시키기 위한 압전 구동체를 포함하는 알루미늄 합금을 이용한 광 반사층을 갖는 광변조기 소자 및 그 제조 방법이 제시된다. 본 발명에 따르면, 광반사층으로서 열에 의한 표면 열화 및 온도 변화에 따른 스트레스 변화가 작은 알루미늄 합금을 이용함으로써, 상기 광변조기 소자의 광 회절 특성 및 그 신뢰성을 극대화 시킬 수 있는 효과가 있다.
광변조기 소자, 압전 구동체, 광반사층, 알루미늄 합금-
公开(公告)号：KR1020060092053A
公开(公告)日：2006-08-22
申请号：KR1020060010443
申请日：2006-02-03
Applicant: 후지쯔 가부시끼가이샤
CPC classification number: G02B26/0841 , B81B3/0062 , B81B2201/033 , B81B2201/047 , B81B2203/0109 , B81B2203/058 , B81B2201/04 , B81C1/00388 , B81C2201/013 , H02N1/008
Abstract: A micro-oscillating element includes a frame, a movable functional portion, and a torsional joint for joining the frame and the functional portion. The micro-oscillating element also includes first and second comb-tooth electrodes for generation of the driving force for the oscillating motion of the movable functional portion about the torsional joint. The first comb-tooth electrode includes a plurality of first electrode teeth each having a first conductor, an insulator and a second conductor laminated in the direction of the oscillating motion, where the first conductor and the second conductor are electrically connected with each other. The second comb-tooth electrode includes a plurality of second electrode teeth caused not to face the second conductor but to face the first conductor of the first electrode teeth during non-operation. The second electrode teeth are longer than the first conductor in the direction of the oscillating motion.
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公开(公告)号：KR1020030047024A
公开(公告)日：2003-06-18
申请号：KR1020010077395
申请日：2001-12-07
Applicant: 재단법인서울대학교산학협력재단
IPC: B81B7/00
CPC classification number: B81B7/02 , B81B2201/04 , B81B2203/0136
Abstract: PURPOSE: A micro mirror is provided to form a high-efficiency mirror surface in the micro mirror by maintaining a mirror plate in a planar state even if the mirror plate is moved by a comb-finger. CONSTITUTION: A micro mirror includes a mirror plate(11). A bending beam(13) is connected to the mirror plate(11). The bending beam(13) is connected to a supporter(12) in order to support the mirror plate(11). A comb-finger(14) is provided at one side of the mirror plate(11). The comb-finger(14) is connected to the bending beam(13). That is, the bending beam(13) and the comb-finger(14) are positioned in the same direction with respect to the mirror plate(11) so that the mirror plate(11) is maintained in a planar state even if the mirror plate(11) is moved by means of the comb-finger(14).
Abstract translation: 目的：提供微镜，通过将镜板维持在平面状态，即使通过梳指移动镜板，也能在微反射镜中形成高效的镜面。 构成：微镜包括镜板（11）。 弯梁（13）连接到镜板（11）。 弯曲梁（13）连接到支撑件（12）以便支撑镜板（11）。 梳镜（14）设在镜板（11）的一侧。 梳指（14）连接到弯梁（13）。 也就是说，弯梁（13）和梳指（14）相对于镜板（11）位于相同的方向上，使得即使反射镜（11）也可以将镜板（11）保持在平面状态 板（11）借助梳指（14）移动。
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公开(公告)号：KR1020020085541A
公开(公告)日：2002-11-16
申请号：KR1020010025094
申请日：2001-05-09
Applicant: 엘지전자 주식회사
Inventor： 엄기태
IPC: G03B21/00
CPC classification number: G03B21/28 , B81B2201/04 , G02B26/0833 , H04N9/3105 , H04N9/3197
Abstract: PURPOSE: A display system using one-dimensional MEMS device is provided to reduce size of overall system and cost by reducing the space between the panel and projection len and size of the projection lens. CONSTITUTION: A display system comprises a light source(500) for generating parallel light; a first reflector mirror(510) for reflecting the light generated from the light source at a predetermined angle; a panel(520) for controlling the light reflected at the first reflector mirror, to cause a reflection at a signal off state and a diffraction at a signal on state through switching; a second reflector mirror(530) for reflecting the light caused due to the reflection at a signal off state; a projection lens(540) for projecting the light caused due to the diffraction at a signal on state; an absorption plate for absorbing the light reflected at the second reflector mirror; and a screen(560) for the light projected by the projection lens.
Abstract translation: 目的：提供使用一维MEMS器件的显示系统，通过减小面板和投影镜片之间的空间以及投影镜头的尺寸来减小整体系统的尺寸和成本。 构成：显示系统包括用于产生平行光的光源（500）; 第一反射镜（510），用于以预定角度反射从光源产生的光; 用于控制在第一反射镜处反射的光的面板（520），通过切换在信号断开状态引起反射和信号导通状态的衍射; 第二反射镜（530），用于将由反射引起的光反射到信号断开状态; 投影透镜（540），用于将由衍射引起的光投射在信号接通状态; 吸收板，用于吸收在第二反射镜反射的光; 以及用于由投影透镜投影的光的屏幕（560）。
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Patent Agency Ranking
公开(公告)号：KR1020020010322A
公开(公告)日：2002-02-04
申请号：KR1020000043979
申请日：2000-07-29
Applicant: 엘지디스플레이 주식회사
Inventor： 함용성
IPC: B81B7/04
CPC classification number: B81B7/04 , B81B2201/04 , G02B5/20
Abstract: PURPOSE: A transmitted displaying device by MEMS(Micro Electromechanical System) is provided to supply color by arranging a color filter layer in a MEMS structure and to improve pure degree of the color. CONSTITUTION: A transmitted displaying device with MEMS comprises a back light(41) formed on a rear side of a first glass base plate(42a); first, second and third color filter layers(43a,43b,43c) mounted on the first glass base plate with a specific interval; an overcoat(44) formed on the first, second and third color filter layers; a fixed electrode(45) mounted on the overcoat layer; and a movable electrode(47) attached to the fixed electrode. The fixed electrode is formed on the overcoat by having a stripe shape. The movable electrode is fixed on the overcoat and is moved by an electric signal from the overcoat. The fist, second and third color layers is red, green and blue. Thereby, the transmitted displaying device with the MEMS supplies the color by arranging the color filter layers in the MEMS structure to improve pure degree of the color.
Abstract translation: 目的：通过MEMS（微机电系统）的传输显示装置，通过在MEMS结构中布置滤色器层并提高颜色的纯度来提供颜色。 构成：具有MEMS的透射显示装置包括：形成在第一玻璃基板（42a）的后侧的背光（41）; 以特定间隔安装在第一玻璃基板上的第一，第二和第三滤色器层（43a，43b，43c） 形成在第一，第二和第三滤色器层上的外涂层（44） 安装在外涂层上的固定电极（45）; 以及附接到固定电极的可动电极（47）。 固定电极通过条状形成在外涂层上。 可移动电极固定在外涂层上，并通过外涂层的电信号移动。 第一，第二和第三色层是红色，绿色和蓝色。 由此，具有MEMS的透过显示装置通过在MEMS结构中布置滤色器层来提供颜色以改善纯度的颜色。
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公开(公告)号：TWI557061B
公开(公告)日：2016-11-11
申请号：TW102126909
申请日：2013-07-26
Applicant: 智動全球股份有限公司 , GLOBALMEMS TAIWAN CORPORATION LIMITED
Inventor： 林素貞 , LIN, SU JHEN , 吳名清 , WU, MINGCHING
IPC: B81B7/02
CPC classification number: G02B7/08 , B81B3/00 , B81B3/0018 , B81B2201/02 , B81B2201/04 , B81B2201/042 , G02B7/18 , G02B7/182 , G02B26/0833 , G02B26/085 , G02B26/101 , H02K33/18 , H02K35/00 , H02K41/02
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88.发明专利鏡面製程 MIRROR PROCESS USING TUNGSTEN PASSIVATION LAYER FOR PREVENTING METAL-SPIKING INDUCED MIRROR BRIDGING AND IMPROVING MIRROR 审中-公开镜面制程 MIRROR PROCESS USING TUNGSTEN PASSIVATION LAYER FOR PREVENTING METAL-SPIKING INDUCED MIRROR BRIDGING AND IMPROVING MIRROR
公开(公告)号：TW200614360A
公开(公告)日：2006-05-01
申请号：TW094128586
申请日：2005-08-22
Inventor： 王薇雅 WEI-YA WANG , 鄭仲原 CHUNG-YUAN CHENG , 吳子揚 TZU-YANG WU , 洪嘉隆 KEVEN HUNG , 陳斐筠 FEI-YUH CHEN
CPC classification number: C23F4/00 , B81B2201/04 , G02B26/0833
Abstract: 本發明揭示一種鏡面製程，其係使用鎢保護層來防止因金屬突穿(metal–spiking)造成鏡面結構的橋接，並改善鏡面結構的曲率，其步驟包含：在一基底上的第一犧牲層之上，圖形化一鏡面結構；毯覆性地沉積一鎢保護層，以覆蓋上述鏡面結構的側壁及上表面；形成第二犧牲曾於上述鎢保護層上；以及使用含二氟化氙的一蝕刻劑施以一釋出的步驟(releasing process)，以同時移除上述第二犧牲層、上述鎢保護層、與上述第一犧牲層。
Abstract in simplified Chinese: 本发明揭示一种镜面制程，其系使用钨保护层来防止因金属突穿(metal–spiking)造成镜面结构的桥接，并改善镜面结构的曲率，其步骤包含：在一基底上的第一牺牲层之上，图形化一镜面结构；毯覆性地沉积一钨保护层，以覆盖上述镜面结构的侧壁及上表面；形成第二牺牲曾于上述钨保护层上；以及使用含二氟化氙的一蚀刻剂施以一发佈的步骤(releasing process)，以同时移除上述第二牺牲层、上述钨保护层、与上述第一牺牲层。
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公开(公告)号：KR20180015742A
公开(公告)日：2018-02-13
申请号：KR20187000434
申请日：2016-04-20
CPC classification number: B81C1/00317 , B81B7/0041 , B81B7/0058 , B81B2201/0207 , B81B2201/04 , B81C1/00269 , B81C2203/0109 , B81C2203/0118 , B81C2203/0145 , B81C2203/019
Abstract: MEMS(microelectromechanical systems) 패키지는길이를규정하기위해제1 쌍의외부에지들과폭을규정하기위해제2 쌍의외부에지들사이에서연장하는기판을포함한다. 밀봉링 조립체는기판상에배치되고그리고적어도하나의 MEMS 디바이스에인접한제1 경계지점및 외부에지들중 적어도하나의에지에인접한제2 경계지점을생성하는적어도하나의밀봉링을포함한다. 패키지는적어도하나의 MEMS 디바이스를포함하는밀봉갭을규정하기위해밀봉링 조립체상에윈도우리드를더 포함한다. 밀봉링 조립체는, 밀봉갭 내로의윈도우리드의휨이감소되도록제2 경계지점에서기판에윈도우리드를앵커링한다.
Abstract translation: 微机电系统（MEMS）封装包括在第二对外边缘之间延伸的基底以限定第一对外边缘和限定长度的宽度。 该密封环组件包括至少一个密封环，该至少一个密封环设置在基底上并且产生与至少一个MEMS装置相邻的第一边界点和与外边缘的至少一个边缘相邻的第二边界点。 封装还包括在密封环组件上的窗口引线以限定包括至少一个MEMS器件的密封间隙。 密封环组件将窗口引线在第二边界点处锚定到基底，从而减少窗口引线进入密封间隙的翘曲。
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公开(公告)号：KR1020170018438A
公开(公告)日：2017-02-17
申请号：KR1020177001184
申请日：2015-05-29
Applicant: 로베르트 보쉬 게엠베하
CPC classification number: G02B26/085 , B81B3/004 , B81B3/0051 , B81B2201/042 , G02B26/105 , H04N9/312 , B81B2201/04
Abstract: 본발명은, 탄성적으로현수된미러와, 상기미러가자신의정지위치로부터사전설정된방향으로운동할때 그미러의운동을제한하도록형성된하나이상의정지장치(stop device)를구비한마이크로미러어셈블리에관한것이다. 또한, 본발명은투사장치와도관련이있다.
Abstract translation: 本发明涉及一种具有弹性悬挂镜并具有至少一个止动装置的微镜装置，该止动装置被配置为如果反射镜在预定方向上移动离开其静止位置则限制反射镜的运动。 本发明还公开了一种投影装置。
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