테스트 표면의 광학 검사
    81.
    发明授权

    公开(公告)号:KR101256391B1

    公开(公告)日:2013-04-25

    申请号:KR1020127021482

    申请日:2005-10-05

    Abstract: 하나의 양상에서, 가령 파로시아미터(Parosiameter)와 같이 스캐터로미터(100)로부터 얻어진 영상 세기 데이터를 저장 할 필요가 있는 데이터의 양은 상기 광도 데이터가 광도에 대한 변화에 따라 그리드의 다른 영역에서 사용되는 해상도를 변화시킴으로써 줄어든다. 또 다른 양상에서, 스캐터로미터는 상기 테스트 샘플에 대한 거울의 중심이 벗어난 배치에 의해 도입된 왜곡을 수정하기 위해 테스트 샘플(180)을 영상화하는 비구면 거울(170,900,1000)로 제공된다. 또 다른 양상에서, 광학 표면 검사 장치는 상기 테스트 표면상에 패턴 그리드(1610)를 투사하기 위하여 테스트 표면(1420)과 조명된 패턴 그리드(1410) 사이에 보조 렌즈(1440)를 사용한다. 카메라(1450)는 실제의 영상으로서 상기 테스트 표면상의 그리드에 초점이 맞춰진다.

    APPARATUS AND METHOD FOR DETERMINING SPECTRAL INFORMATION

    公开(公告)号:WO2019122891A1

    公开(公告)日:2019-06-27

    申请号:PCT/GB2018/053711

    申请日:2018-12-20

    Abstract: Embodiments of the present invention provide an apparatus for determining spectral information of a three-dimensional object, comprising a cavity (110) for location in relation to the object, an imaging light source (120) located in relation to the cavity, wherein the imaging source is controllable to selectively emit light in a plurality of wavelength ranges, structured light source (130) for emitting structured illumination toward the object, wherein the structured light source comprises a plurality of illumination devices arranged around the cavity, one or more imaging devices (140) for generating image data relating to at least a portion of the object, a control unit, wherein the control unit (1100) is arranged to control the structured light source to emit the structured illumination and to control the imaging light source to emit light in a selected one or more of the plurality of wavelength ranges, a data storage unit (1120) arranged to store image data corresponding to the structured illumination and each of the selected one or more of the plurality of wavelength ranges, and processing means (1110) arranged to determine depth information relating to at least a portion of the object in dependence on the image data corresponding to the structured illumination stored in the data storage means.

    GLASS SHEET ACQUISITION AND POSITIONING MECHANISM AND ASSOCIATED METHOD FOR AN INLINE SYSTEM FOR MEASURING THE OPTICAL CHARACTERISTICS OF A GLASS SHEET
    85.
    发明申请
    GLASS SHEET ACQUISITION AND POSITIONING MECHANISM AND ASSOCIATED METHOD FOR AN INLINE SYSTEM FOR MEASURING THE OPTICAL CHARACTERISTICS OF A GLASS SHEET 审中-公开
    用于测量玻璃板的光学特性的在线系统的玻璃板采集和定位机构及相关方法

    公开(公告)号:WO2015167661A1

    公开(公告)日:2015-11-05

    申请号:PCT/US2015/018229

    申请日:2015-03-02

    CPC classification number: G01N21/958 G01N21/896 G01N2021/9586 G01N2201/0635

    Abstract: A glass sheet acquisition and positioning mechanism and associated method are utilized in an in-line glass sheet optical inspection system. The mechanism includes an exterior support frame mounted in proximity to one of the glass sheet processing system conveyors, and an interior support frame operably connected to the exterior support frame such that the interior support frame may be selectively positioned from its first orientation to a second orientation whereby the retained glass sheet is positioned between the camera and the screen at a preselected position. The interior support frame is also operably connected to the exterior support frame to provide for positioning of the interior support frame to a third orientation in which the glass sheet is released from the interior support frame for continued movement on the conveyor. An in-line glass sheet optical inspection system incorporating the glass sheet acquisition and positioning mechanism is also disclosed.

    Abstract translation: 一种玻璃板采集和定位机构及相关方法用于直列玻璃板光学检测系统。 该机构包括安装在玻璃板处理系统输送机之一附近的外部支撑框架和可操作地连接到外部支撑框架的内部支撑框架,使得内部支撑框架可以从其第一取向选择性地定位到第二取向 从而保留的玻璃板在预选位置处定位在相机和屏幕之间。 内部支撑框架还可操作地连接到外部支撑框架以提供将内部支撑框架定位到第三取向,其中玻璃板从内部支撑框架释放以在输送机上继续移动。 还公开了一种并入玻璃板采集和定位机构的在线玻璃板光学检查系统。

    UNIFORM EPI-ILLUMINATION OF PLANAR SAMPLES
    87.
    发明申请
    UNIFORM EPI-ILLUMINATION OF PLANAR SAMPLES 审中-公开
    平面图的均匀平面图

    公开(公告)号:WO2013130183A1

    公开(公告)日:2013-09-06

    申请号:PCT/US2013/021378

    申请日:2013-01-14

    Abstract: A planar sample, particularly of the type used in biological laboratories for detection and sometimes analysis of two-dimensional arrays of proteins, nucleic acids, or other biological species, is illuminated by epi-illumination using optically filtered line lights that are arranged along opposing parallel sides of a rectangle in which the sample array resides, with two coaxial line lights on each side of the rectangle, and the two on any given side being separated by a gap whose optimal width depends on the wavelength band transmitted by the optical filter. Surprisingly, the gap eliminates the peak in intensity at the center of the sample area and the decrease that occurs from the center outward that would otherwise occur with a single continuous filtered line light, producing instead a substantially uniform intensity along the direction parallel to the line lights.

    Abstract translation: 平面样品,特别是用于生物实验室中用于检测和有时分析蛋白质,核酸或其他生物物种的二维阵列的类型的样品,通过使用沿着相对的平行排列的光学滤波的线光照射外照射 其中样品阵列所在的矩形的边,在矩形的每一侧具有两根同轴线灯,并且任一给定侧上的两个被一个间隙隔开,该间隙的最佳宽度取决于由滤光器传输的波长带。 令人惊奇的是,间隙消除了样品区域中心处的强度峰值以及从中心向外发生的减少,否则这将以单个连续过滤的线路光发生,从而产生沿着平行于线的方向的基本均匀的强度 灯。

    OPTICAL INSPECTION OF TEST SURFACES
    88.
    发明申请
    OPTICAL INSPECTION OF TEST SURFACES 审中-公开
    测试表面的光学检查

    公开(公告)号:WO2006038196A1

    公开(公告)日:2006-04-13

    申请号:PCT/IB2005/053277

    申请日:2005-10-05

    Inventor: WADMAN, Sipke

    Abstract: In one aspect, the amount of data needed to store image intensity data obtained from a scatterometer (100) such as a Parousiameter is reduced by varying a resolution with which the intensity data is used in different regions of a grid according to determined variations in the intensity. In another aspect, a scatterometer is provided with an aspherical mirror (170, 900, 1000) for imaging a test sample (180) to correct for distortions introduced by the off center placement of the mirror relative to the test sample. In another aspect, an optical surface inspection apparatus uses an auxiliary lens (1440) between a test surface (1420) and an illuminated patterned grid (1410) to project the patterned grid (1610) on the test surface. A camera (1450) is focused on the grid on the test surface as a real image.

    Abstract translation: 在一个方面,存储从诸如Parousiameter之类的散射仪(100)获得的图像强度数据所需的数据量减少,通过改变在网格的不同区域中使用强度数据的分辨率,根据确定的 强度。 在另一方面,散射仪设置有非球面镜(170,900,1000),用于对测试样品(180)进行成像,以校正由反射镜相对于测试样品的离心放置引入的失真。 在另一方面,光学表面检查设备使用测试表面(1420)和照明图案格栅(1410)之间的辅助透镜(1440)将图案化网格(1610)投影在测试表面上。 相机(1450)作为真实图像聚焦在测试表面上的网格上。

    DEVICE AND METHOD FOR ACQUIRING INFORMATION ON OBJECTIVE SUBSTANCE TO BE DETECTED BY DETECTING A CHANGE OF WAVELENGHT CHARACTERISTICS ON THE OPTICAL TRANSMITTANCE
    89.
    发明申请
    DEVICE AND METHOD FOR ACQUIRING INFORMATION ON OBJECTIVE SUBSTANCE TO BE DETECTED BY DETECTING A CHANGE OF WAVELENGHT CHARACTERISTICS ON THE OPTICAL TRANSMITTANCE 审中-公开
    通过检测光学特性波长特性变化来检测目标物质信息的装置和方法

    公开(公告)号:WO2006030957A1

    公开(公告)日:2006-03-23

    申请号:PCT/JP2005/017326

    申请日:2005-09-14

    Abstract: An information-acquiring device for acquiring information on an objective substance to be detected, which is provided with a sensing element (104) that has a surface capable of fixing the objective substance to be detected thereon, and makes applied light change its wavelength characteristics in response to the fixed state of the objective substance to be detected onto the surface, a light source (102), and light-receiving means (103) for receiving light (111, 112) emitted from the light source (102) through the sensing element (104), has the light-receiving means (103) and the light source (102) arranged on the same substrate (101) so that the light which has been emitted from the light source (102) and has been transmitted through the sensing element (104) can be led to the light-receiving means (103), and has means (107) for varying the wavelength regions of each light incident on each of a plurality of the light-receiving means (103) installed in an optical path from the light source (102) to the light-receiving means (103).

    Abstract translation: 一种用于获取关于待检测目标物质的信息的信息获取装置,该信息获取装置设置有具有能够固定待检测目标物质的表面的感测元件(104),并使施加的光改变其波长特性 响应待检测到的目标物质的固定状态,光源(102)和光接收装置(103),用于接收从光源(102)发射的光(111,112)通过感测 元件(104)具有布置在相同基板(101)上的光接收装置(103)和光源(102),使得已经从光源(102)发射并已经透过 感测元件(104)可以被引导到光接收装置(103),并且具有用于改变入射到安装在光接收装置(103)中的多个光接收装置(103)中的每一个的每个光的波长区域的装置(107) 光路从轻酸 ce(102)连接到光接收装置(103)。

    SPATIAL LIGHT MODULATOR APPARATUS AND METHOD
    90.
    发明申请
    SPATIAL LIGHT MODULATOR APPARATUS AND METHOD 审中-公开
    空调光调制器装置及方法

    公开(公告)号:WO2005043197A2

    公开(公告)日:2005-05-12

    申请号:PCT/US2004/035637

    申请日:2004-10-28

    IPC: G02B

    CPC classification number: G01N21/6458 G01N2201/0635

    Abstract: A device for discriminately illuminating a sample to be viewed with excitation light. For example, an image taken with a CCD provides feedback which is used to modulate the output of an excitation light source, thereby allowing a sample to be viewed within the optimal range of detection for the particular CCD device being used, despite the potential of wide dynamic ranges of sample luminescence.

    Abstract translation: 用于用激发光来区分地照射待观察的样品的装置。 例如,使用CCD拍摄的图像提供用于调制激发光源的输出的反馈,从而允许在正在使用的特定CCD器件的最佳检测范围内观察样品,尽管具有广泛的潜力 样品发光的动态范围。

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