SERIES ABSORBANCE GLASS AND INTERFERENCE FILTERS
    82.
    发明公开
    SERIES ABSORBANCE GLASS AND INTERFERENCE FILTERS 审中-公开
    干燥器中的REIHENABSORPTIONSGLAS

    公开(公告)号:EP2986957A1

    公开(公告)日:2016-02-24

    申请号:EP15785338.3

    申请日:2015-04-29

    Abstract: An imaging assembly and processing system that includes a sample platform having a target region which can hold a sample, where the sample can be marked with fluorescent or phosphorescent markers. The imaging assembly can have an excitation light module proximate to the sample platform that emits light to excite the markers, and a lens module positioned to receive emission light from excited markers in target region. At least one series filter assembly or interference filter can be arranged in front of, behind, or both in front of and behind the lens module. The assembly includes a light sensor and a processor and imaging module configured to process data captured by the light sensor. Images of the sample are generated based on the emission light from the sample that transmit through and are filtered by the lens assembly and series filter assembly or interference filter.

    Abstract translation: 一种成像组件和处理系统,其包括具有可容纳样品的目标区域的样品平台,其中可以用荧光或磷光标记物标记样品。 成像组件可以具有靠近样本平台的激发光模块,其发射光以激发标记;以及透镜模块,定位成接收来自目标区域中的激发标记的发射光。 至少一个串联滤波器组件或干涉滤波器可以布置在镜头模块前面,后面或者两者之间。 组件包括光传感器,以及配置成处理由光传感器捕获的数据的处理器和成像模块。 样品的图像基于来自透射的样品的发射光产生,并由透镜组件和串联滤光器组件或干涉滤光器滤波。

    Catadioptric Illumination System for Metrology
    84.
    发明公开
    Catadioptric Illumination System for Metrology 有权
    Katadioptrisches BeleuchtungssystemfürMetrologie

    公开(公告)号:EP2400345A1

    公开(公告)日:2011-12-28

    申请号:EP11161458.2

    申请日:2011-04-07

    Abstract: A catadioptric optical system (1200) operates in a wide spectral range. In an embodiment, the catadioptric optical system (1200) includes a first reflective surface (57) positioned and configured to reflect radiation; a second reflective surface (58) positioned and configured to reflect radiation reflected from the first reflective surface as a collimated beam, the second reflective surface having an aperture to allow transmission of radiation through the second reflective surface; and a channel structure (1380) extending from the aperture toward the first reflective surface and having an outlet (1330), between the first reflective surface and the second reflective surface, to supply radiation to the first reflective surface.

    Abstract translation: 反折射光学系统(1200)在宽光谱范围内工作。 在一个实施例中,反折射光学系统(1200)包括定位和配置成反射辐射的第一反射表面(57) 第二反射表面(58)被定位和配置为将从第一反射表面反射的辐射反射为准直光束,第二反射表面具有孔,以允许辐射透过第二反射表面; 以及从所述孔向所述第一反射表面延伸并且在所述第一反射表面和所述第二反射表面之间具有出口(1330)的通道结构(1380),以向所述第一反射表面提供辐射。

    CAPILLARY FLOWCELL FOR MULTIPLE WAVELENGTH DETECTION.
    86.
    发明公开
    CAPILLARY FLOWCELL FOR MULTIPLE WAVELENGTH DETECTION. 失效
    KAPILLARE DURCHFLUSSZELLE ZUM NACHWEIS MEHRERERWELLENLÄNGEN。

    公开(公告)号:EP0615617A4

    公开(公告)日:1994-11-23

    申请号:EP93901388

    申请日:1992-12-03

    Inventor: SAPP EDWIN

    CPC classification number: G01N21/05 G01N2021/0346 G01N2201/0638

    Abstract: A capillary flowcell (12) includes an optical axis, the optical axis being defined by, in sequential order, (a) a first (entrance) aperture (14), (b) a first lens (26), (c) a capillary tube (16) having its long axis centered across the optical axis, and (d) a second lens (28). The first lens (26) focuses electromagnetic radiation from the entrance aperture (14), passes through the inner diameter of capillary tube (16) thus maximizing the signal generated by the analyte within the capillary tube (16). The second lens (28) focuses electromagnetic radiation which has passed through the capillary tube (16).

    Abstract translation: 本发明的毛细管流通池包括一个保持装置,该保持装置包括一个光轴,该光轴按顺序定义为(a)一个第一(入口)孔,(b)一个第一透镜,(c)一个毛细管, 其长轴围绕光轴居中,和(d)第二透镜。 聚焦来自入口孔的电磁辐射的第一透镜通过毛细管的内径,从而最大化由毛细管内的分析物产生的信号。 第二个透镜聚焦已经通过毛细管的电磁辐射。 给出了与流池相关的方法和装置。

    LENS ARRAY-BASED ILLUMINATION FOR WAFER INSPECTION
    88.
    发明申请
    LENS ARRAY-BASED ILLUMINATION FOR WAFER INSPECTION 审中-公开
    基于阵列阵列的水轮机检查照明

    公开(公告)号:WO2016090307A1

    公开(公告)日:2016-06-09

    申请号:PCT/US2015/064093

    申请日:2015-12-04

    Inventor: CHEN, Qibiao

    Abstract: Systems configured to provide illumination for wafer inspection performed by a wafer inspection tool are provided. One system includes one or more pupil lenses configured to focus a first far field pattern having a shape different than a shape of light generated by a light source. The system also includes a field lens array positioned between the one or more pupil lenses and an aperture stop. In addition, the system includes a lens group configured to focus a second far field pattern generated by the field lens array to a back focal plane of the lens group. The back focal plane of the lens group is a field plane of a wafer inspection tool at which a wafer to be inspected is placed during wafer inspection.

    Abstract translation: 提供被配置为提供由晶片检查工具执行的用于晶片检查的照明的系统。 一个系统包括配置成聚焦具有不同于由光源产生的光的形状的形状的第一远场图案的一个或多个光瞳透镜。 该系统还包括位于一个或多个光瞳透镜与孔径光阑之间的场透镜阵列。 此外,该系统包括被配置为将由场透镜阵列产生的第二远场图案聚焦到透镜组的后焦平面的透镜组。 透镜组的后焦平面是晶片检查工具的场平面,在晶片检查期间将待检查的晶片放置在晶圆检查工具中。

    COMPACT APPARATUS FOR LASER INDUCED BREAKDOWN SPECTROSCOPY AND METHOD THEREFOR
    89.
    发明申请
    COMPACT APPARATUS FOR LASER INDUCED BREAKDOWN SPECTROSCOPY AND METHOD THEREFOR 审中-公开
    激光诱发断裂光谱的紧凑设备及其方法

    公开(公告)号:WO2016070290A1

    公开(公告)日:2016-05-12

    申请号:PCT/CA2015/051155

    申请日:2015-11-06

    Abstract: The present invention provides a method and compact apparatus for laser induced breakdown atomic emission spectroscopy from a targeted sample having a laser generating a laser beam, the laser beam directed to the sample, optical means for manipulating the laser beam in order maximize laser fluency at the target surface of the sample, the laser beam generating ablation and plasma emission from the sample at the target surface, an emission spectrometer having a detector for detecting a plasma plume from the plasma emission.

    Abstract translation: 本发明提供了一种用于激光诱发击穿原子发射光谱的方法和紧凑装置,其具有产生激光束的激光的目标样品,被引导到样品的激光束,用于操纵激光束的光学装置,以便在 样品的目标表面,激光束产生消融和来自目标表面处的样品的等离子体发射,发射光谱仪具有用于从等离子体发射检测等离子体羽流的检测器。

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