-
公开(公告)号：JP2003185959A
公开(公告)日：2003-07-03
申请号：JP2001381862
申请日：2001-12-14
Applicant: RICOH KK
Inventor： ONO NOBUAKI , NAKAJIMA TOMOHIRO , ITABASHI AKIHISA , TAKANASHI KENICHI , OSUGI TOMOYA
IPC: B41J2/44 , G02B26/08 , G02B26/10 , G02B26/12 , H01J3/14 , H01J5/16 , H04N1/036 , H04N1/04 , H04N1/113 , H04N1/12 , H04N1/191 , H04N1/50
Abstract: PROBLEM TO BE SOLVED: To obtain a multibeam scanning optical system capable of obtaining a good beam pitch and capable of suppressing the occurrence of an abnormal image such as an image of uneven density. SOLUTION: The multibeam scanning optical system is provided with a pair of light sources and several pairs of coupling lenses, and the system satisfies the following expressions; 12.7 COPYRIGHT: (C)2003,JPO
-
-
公开(公告)号：JPH11160330A
公开(公告)日：1999-06-18
申请号：JP33006497
申请日：1997-12-01
Applicant: SEIKO INSTR INC , MITSUBISHI ELECTRIC CORP
Inventor： WAKIYAMA SHIGERU , FUJINO NAOHIKO
IPC: G01N21/88 , G01N21/93 , G01N21/94 , G01N21/956 , G01N23/00 , G01N37/00 , G01Q10/00 , G01Q10/02 , G01Q30/00 , G01Q30/02 , G01Q60/00 , G01Q60/24 , G01Q60/50 , G01Q70/10 , G02B21/00 , G21K7/00 , H01J3/14 , H01J5/16 , H01J37/00 , H01J40/14
Abstract: PROBLEM TO BE SOLVED: To provide a probe microscope which constitutes a means lessening a scattering light by a wafer pattern through irradiation with a beam light, thereby enabling distinction of a foreign article from a scattering light by the foreign article and a means enabling detection of a position of the foreign article. SOLUTION: A sample 1 is loaded on three-dimensional driving stages 3, 4, 5 via a sample holder 2. A surface of the sample 1 is irradiated with a beam light emitted from a beam light oscillator directly or via a polarizing element 7 different from a polarizing light of the beam light. An image of a foreign article on the surface of the sample 1 scattered by the beam light is displayed through a polarizing element 8 different from the beam light on a monitor 11 via a high-sensitivity CCD camera 10 mounted to an optical microscope 9. In order to guide the beam light onto the surface of the sample 1, there are ways, one using an optical fiber and another using an optical component such as a mirror or the like.
-
公开(公告)号：JPH0568058B2
公开(公告)日：1993-09-28
申请号：JP50529087
申请日：1987-08-24
Applicant: IKURIPUSU ION TEKUNOROJII INC
Inventor： ENGE HERARUDO ANTON
IPC: H01J37/141 , G21K1/00 , H01J3/14 , H01J3/20 , H01J37/00 , H01J37/147 , H01J37/317
-
85.发明专利
公开(公告)号：JP2011018653A
公开(公告)日：2011-01-27
申请号：JP2010184767
申请日：2010-08-20
Applicant: Tel Epion Inc , ティーイーエル エピオン インク.
Inventor： MACK MICHAEL E
IPC: H01J37/04 , C23C16/452 , H01J3/14 , H01J27/00 , H01J37/02 , H01J37/08 , H01J37/317
CPC classification number: H01J37/026 , C23C16/452 , H01J37/08 , H01J37/317 , H01J2237/0041 , H01J2237/0812
Abstract: PROBLEM TO BE SOLVED: To reduce space charge phenomenon and sample charging and increase accuracy in measurement of amount of irradiation currents in a gas cluster ion beam processing system.SOLUTION: A vented Faraday cup 302 includes a conductive shock plate 308 with a surface receiving a gas cluster ion beam 128, a vented container surrounding the shock plate 308 and extending in front of it to provide a cup form and including a plurality of coaxial conductive ring electrodes disposed at intervals, and a conducting means conducting currents collected by the shock plate 308 to a current measuring system 358. The conductive ring electrodes are constituted of at least three groups each consisting of at least two ring electrodes and are electrically connected with one another, and the respective groups are biased independently of one another to prevent disadvantageous leakage of charged particles to the inside and the outside of the cup.
Abstract translation: 要解决的问题：减少空间电荷现象和样品充电，并提高气体簇离子束处理系统中照射电流量的测量精度。解决方案：通风法拉第杯302包括导电冲击板308，表面接收 气体簇离子束128，围绕冲击板308并在其前面延伸的通风容器以提供杯形并且包括间隔设置的多个同轴导电环电极和导电装置，其传导由冲击板308收集的电流 电流测量系统358.导电环电极由至少三个组成，每组由至少两个环形电极组成并且彼此电连接，并且各组彼此独立地被偏置以防止带电的不利的泄漏 颗粒到杯子的内部和外部。
-
Patent Agency Ranking
公开(公告)号：JP4550395B2
公开(公告)日：2010-09-22
申请号：JP2003367134
申请日：2003-10-28
Inventor： ウィン レオン アック , シン グルビール , ミュン リー サイ , フアット ライ ポー
CPC classification number: G06F3/0317
-
公开(公告)号：JP4510629B2
公开(公告)日：2010-07-28
申请号：JP2004533717
申请日：2003-08-11
Applicant: コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ
Inventor： アントン、ペー．エム．ファン、アレンドンク
CPC classification number: H04N5/2257 , H01L31/0203 , H01L31/02325 , H01L2224/05554 , H01L2224/49175 , H01L2224/73265 , H01L2924/181 , H01L2224/48091 , H01L2924/00014 , H01L2924/00012
Abstract: The invention relates to a semiconductor device ( 10 ) comprising a semiconductor element ( 1 ), particularly a solid-state image sensor ( 1 ), comprising a semiconductor body ( 11 ) of which one surface comprises an optically active part ( 1 A) and an optically inactive part ( 1 B) within which electrical connection regions ( 2 ) of the optoelectronic semiconductor element ( 1 ) are present, while a body ( 3 ) is present above the optically active area ( 1 A) of the surface of the semiconductor body ( 11 ) comprising an optical component ( 3 B). According to the invention the body ( 3 ) comprises an optically transparent foil ( 3 ) which is present on the optically active part ( 1 A) of the surface of the semiconductor body ( 11 ) and which is attached thereto with an optically transparent adhesive layer ( 4 ) and in which the optical component ( 3 B) is formed. The device ( 10 ) is very stable, compact and easy to manufacture, that is to say in batches. For example a component ( 3 B) such as a lens ( 3 B) may easily be formed by pressing a suitably formed die ( 13 ) into the foil ( 3 ). A method according to the invention for manufacturing the device according to the invention is cost-effective and easy.
Abstract translation: 本发明涉及包括半导体元件（1），特别是固态图像传感器（1）的半导体器件（10），其包括半导体本体（11），其中一个表面包括光学活性部分（1A）和 存在光电半导体元件（1）的电连接区域（2）的光学非活性部分（1B），而半导体表面的光学有源区域（1A）上方存在主体（3） 主体（11）包括光学部件（3B）。 根据本发明，本体（3）包括光学透明箔（3），其存在于半导体本体（11）的表面的光学活性部分（1A）上，并且附着有光学透明粘合剂层 （4），并且其中形成光学部件（3B）。 设备（10）非常稳定，紧凑且易于制造，即批量地说。 例如，通过将适当形成的模具（13）压入箔（3）中，可以容易地形成诸如透镜（3B）的部件（3B）。 根据本发明的用于制造根据本发明的装置的方法是成本有效且容易的。
-
公开(公告)号：JP4220543B2
公开(公告)日：2009-02-04
申请号：JP2006500335
申请日：2004-03-17
Applicant: ノキア コーポレイション
Inventor： ビーニカノヤ，ヤルッコ
IPC: G02B13/00 , G02B3/12 , G02B3/14 , G02B7/28 , G02B27/64 , G21K5/10 , H01J3/14 , H01J5/16 , H01J40/14 , H01L27/00 , H04N5/232
CPC classification number: G02B27/646 , G02B3/12 , G02B3/14 , G02B26/005 , G03B5/02 , G03B21/147 , H04N5/2254 , H04N5/23248 , H04N5/23287 , H04N2007/145
-
公开(公告)号：JP4187672B2
公开(公告)日：2008-11-26
申请号：JP2004062441
申请日：2004-03-05
Applicant: シャープ株式会社
Inventor： 昌樹 坂
IPC: B41J2/44 , G02B26/12 , G02B26/10 , G03G15/00 , G03G15/04 , G03G21/00 , G03G21/20 , H01J3/14 , H04N1/036 , H04N1/113
CPC classification number: G03G15/04045 , B41J2/471 , G02B7/008 , G02B26/12 , G02B26/122 , G02B27/0006 , G03G21/20 , H04N1/00981 , H04N1/00986 , H04N1/00992 , H04N1/1135
Abstract: The temperature difference between an internal temperature and an external temperature which are detected by an internal temperature sensor and an external temperature sensor, respectively, is calculated. If the internal temperature is lower by not less than predetermined degrees than the external temperature and, hence, condensation on the surface of each optical component within a laser writing unit is highly likely, a motor is driven to rotate a polygonal mirror. During its operation the motor generates heat, which in turn transfers from a flange portion directly to a housing while heating air around the laser writing unit. Further, air within the housing is stirred by rotation of the polygonal mirror. In this way the temperature of the entire laser writing unit is raised.
-
-
-
-
-
-
-
-
-
Search Results
2885
records
(took 0.031 seconds)
