公开(公告)号：JP2005276837A

公开(公告)日：2005-10-06

申请号：JP2005083420

申请日：2005-03-23

Applicant: Burle Technologies Inc ,  バーレ テクノロジーズ,インコーポレイテッド

Inventor： LAPRADE BRUCE

IPC: G01N27/62 ,  G01N27/64 ,  H01J49/40

CPC classification number: G01N27/622

Abstract: PROBLEM TO BE SOLVED: To provide an ion mobility spectrometer improved in function and reliability, as well as small in number of parts and simple in manufacturing.
SOLUTION: The ion mobility spectrometer, in which a reaction ionizing chamber and/or an ion drift tube is structured with one or more single piece of glass tubes, is disclosed. An inner face of the glass tube is structured to have electrical conductivity by heat processing and/or chemical processing. The glass tube is used as substitute for a stacked body formed by a metallic annular member and a ceramic annular member generally used in a device such as a spectrometer.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供功能和可靠性提高的离子迁移谱仪，以及零件数量少，制造简单。 解决方案：公开了其中反应电离室和/或离子漂移管由一个或多个单片玻璃管构成的离子迁移谱仪。 玻璃管的内表面通过热处理和/或化学处理而具有导电性。 玻璃管用作由通常用于诸如光谱仪的装置中的金属环形构件和陶瓷环形构件形成的层叠体的替代物。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2006054183A

公开(公告)日：2006-02-23

申请号：JP2005230767

申请日：2005-08-09

Applicant: Burle Technologies Inc ,  バーレ テクノロジーズ,インコーポレイテッド

Inventor： TOMASETTI CHARLES M ,  MOULZOLF SCOTT C

IPC: H01J43/28 ,  H01J31/50

CPC classification number: H01J43/28 ,  H01J43/246

Abstract: PROBLEM TO BE SOLVED: To provide a photomultiplier tube in which condensing efficiency of radial rays incident, especially from the front side is improved, and the condensed radial rays can be connected much more efficiently to a photoelectric cathode, and has a high packaging density when assembled in an array, thereby imaging characteristics can be improved. SOLUTION: The improved condensing efficiency of the radial rays and the improved packaging density of the photomultiplier tube are obtained by combining many characteristics including that a taper is made at the edge of a face plate so that the face plate may demarcate a cross-sectional area same as or larger than the cross-sectional area of the photomultiplier tube, that the face plate and a metal tube are connected at the lower side of the face plate so that an optical path between the incident radial rays and the photoelectric cathode may not be obstructed, and that the tapered edge of the face plate may be used as a reflector for connecting the radial rays incident into the surroundings of the face plate to the photoelectric cathode. COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种光电倍增管，其中特别是从前侧入射的径向射线的冷凝效率提高，并且冷凝的径向射线可以更有效地连接到光电阴极，并且具有高的 组装成阵列时的封装密度，从而可以提高成像特性。 解决方案：通过结合许多特性可以获得径向射线的提高的冷凝效率和改进的光电倍增管的封装密度，包括在面板的边缘处形成锥形，使得面板可以划分十字 截面面积与光电倍增管的横截面面积相同或者更大，面板和金属管在面板的下侧连接，使得入射的径向光线与光电阴极之间的光路 可能不会被遮挡，并且面板的锥形边缘可以用作将入射到面板周围的径向射线与光电阴极连接的反射器。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2008180717A

公开(公告)日：2008-08-07

申请号：JP2008012315

申请日：2008-01-23

Applicant: Burle Technologies Inc ,  バーレ テクノロジーズ,インコーポレイテッド

Inventor： MITCHELL PAUL ANDREW

IPC: G01J1/02 ,  G01J1/04

CPC classification number: G02B6/34 ,  H01J43/28

Abstract: PROBLEM TO BE SOLVED: To provide a photodetector with excellent sensitivity.
SOLUTION: This photodetector has a photomultiplier provided with a window for receiving incident light. A photoelectric negative electrode is bonded on an inner face of the window by a known manner. The photodetector has further an optical fiber, and a means for connecting the optical fiber to the window to introduce the light into the window at an angle of reflecting totally the light as its result. The connecting means is materialized as an optical fiber terminal connector. Alternatively, the connecting means may include a prism bonded onto an outer face of the window.
COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：提供具有优异灵敏度的光电探测器。 解决方案：该光电检测器具有光电倍增器，其具有用于接收入射光的窗口。 光电负极通过已知的方式结合在窗的内表面上。 光电检测器还具有光纤，以及用于将光纤连接到窗口的装置，以将结果全部反射光的角度将光引入窗口。 连接装置实现为光纤终端连接器。 或者，连接装置可以包括结合到窗的外表面上的棱镜。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：JP2006066394A

公开(公告)日：2006-03-09

申请号：JP2005242450

申请日：2005-08-24

Applicant: Burle Technologies Inc ,  バーレ テクノロジーズ,インコーポレイテッド

Inventor： THOMPSON ROBERT C

IPC: H01J43/30 ,  H01J43/04 ,  H01J43/24

CPC classification number: H01J43/30

Abstract: PROBLEM TO BE SOLVED: To allow a gating circuit to switch the responsivity of a photomultiplier tube between ON and OFF states by modulating the voltage bias of the one or more of its electrodes.
SOLUTION: The gating circuit capacitively couples a voltage pulse to the photocathode 304 or other electrode of the photomultiplier tube 302 in response to a low-voltage triggering signal. A voltage divider 312 network and a high-voltage power supply used to statically bias the photomultiplier tube also power the gating circuitry and transmit a gating voltage pulse. The electrode gating pulse characteristics, including rise- and fall-times, voltage swing amplitude and duration, can be modified by adjusting resistor and capacitor values and Zener diode characteristics of the gating circuit and voltage divider network. The circuit can also be used to gate related devices such as microchannel plates and image intensifiers.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：为了允许选通电路通过调制其一个或多个电极的电压偏压来将光电倍增管的响应度转换为导通和截止状态。 解决方案：门控电路响应于低电压触发信号将电压脉冲电容耦合到光电阴极304或光电倍增管302的其它电极。 用于静电偏置光电倍增管的分压器312网络和高压电源也为选通电路供电并传输门电压脉冲。 可以通过调节电阻和电容值以及门电路和分压网络的齐纳二极管特性来修改电极门控脉冲特性，包括上升和下降时间，电压摆幅幅度和持续时间。 电路也可用于门相关器件，如微通道板和图像增强器。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2007242622A

公开(公告)日：2007-09-20

申请号：JP2007059612

申请日：2007-03-09

Applicant: Burle Technologies Inc ,  バーレ テクノロジーズ,インコーポレイテッド

Inventor： LAPRADE BRUCE N

IPC: H01J49/40

CPC classification number: H01J49/405 ,  C03C4/14 ,  C03C17/23 ,  C03C23/008 ,  C03C2217/228 ,  C03C2217/91 ,  C03C2218/34 ,  C03C2218/35

Abstract: PROBLEM TO BE SOLVED: To provide a reflectro lens for a time-of-flight mass spectrometer, a mass spectrometer using the above reflectro lens, a manufacturing method of the reflectro lens, and its device.
SOLUTION: The reflectro lens includes a glass tube having a conductive surface along the length. The conductive surface has an electrical resistance gradient along its length. The electrical resistance gradient provides an electric field in the interior of the tube that varies in strength along the length of the tube when an electric potential is applied to both ends of the tube.
COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：提供用于飞行时间质谱仪的反射镜，使用上述反射镜的质谱仪，反射镜的制造方法及其装置。

解决方案：反射镜透镜包括具有沿着长度的导电表面的玻璃管。 导电表面沿其长度具有电阻梯度。 当电位施加到管的两端时，电阻梯度在管的内部提供沿着管的长度的强度变化的电场。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2005351887A

公开(公告)日：2005-12-22

申请号：JP2005133352

申请日：2005-04-28

Applicant: Burle Technologies Inc ,  バーレ テクノロジーズ,インコーポレイテッド

Inventor： LAPRADE BRUCE ,  STARCHER RONALD

IPC: G01N27/62 ,  G01T1/20 ,  G01T1/28 ,  G01T1/29 ,  H01J43/24 ,  H01J49/02 ,  H01J49/06 ,  H01J49/40

CPC classification number: H01J43/246 ,  H01J49/025 ,  H01J2237/24435

Abstract: PROBLEM TO BE SOLVED: To provide a replaceable and electronically-insulated micro channel plate electron multiplier-based spectrometer detector cartridge with enhanced sensitivity.
SOLUTION: A mass detector is electro-optically isolated from a charge collector with the electron multiplier for converting a charged particle into a multiplicity of electrons and a scintillator for converting the multiplicity of electrons into a multiplicity of photons. A light sensor is provided to convert the multiplicity of photons back into electrons, which are summed into a charged pulse. The light sensor is realized by any of a plurality of photo-responsive devices.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供具有增强灵敏度的可替换和电绝缘的微通道板电子倍增器基光谱仪检测器盒。 解决方案：质子检测器与电荷收集器与电子倍增器电学隔离，用于将带电粒子转换成多个电子，以及用于将多个电子转换成多个光子的闪烁体。 提供光传感器以将多个光子转换回电子，这些电子被归结为带电脉冲。 光传感器由多个光响应装置中的任何一个实现。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2005340224A

公开(公告)日：2005-12-08

申请号：JP2005172922

申请日：2005-05-17

Applicant: Burle Technologies Inc ,  バーレ テクノロジーズ,インコーポレイテッド

Inventor： LAPRADE BRUCE

IPC: G01N27/62 ,  G01N27/64 ,  H01J49/02 ,  H01J49/06 ,  H01J49/16 ,  H01J49/40

CPC classification number: H01J49/025 ,  H01J49/40

Abstract: PROBLEM TO BE SOLVED: To provide a detector for a coaxial bipolar flight-time type mass spectrometer.
SOLUTION: The detector comprises a microchannel plate, a scintillator provided in parallel with the microchannel, and a mirror oriented with an angle to the scintillator. The angle of the mirror is selected so as to reflect the photons emitted from the scintillator in the direction substantially right angle to the scintillator. The microchannel plate, the scintillator, and the mirror have respectively an aperture in the center. The detector has a transparent tube which extends penetrating through the central aperture formed respectively in the microchannel plate, the scintillator, and the mirror. A photomultiplier tube is coupled to the detector in order to receive the photons reflected by the mirror. A coaxial bipolar flight-time type analyzer incorporating the detector is also described.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供用于同轴双极型飞行时间型质谱仪的检测器。 解决方案：检测器包括微通道板，与微通道平行设置的闪烁体和与闪烁体成角度的反射镜。 反射镜的角度被选择为反射从闪烁体发射的光子与闪烁体基本成直角的方向。 微通道板，闪烁体和反射镜分别具有中心的孔。 检测器具有透明的管，该透明管延伸穿过分别形成在微通道板，闪烁体和反射镜中的中心孔。 光电倍增管耦合到检测器以便接收由反射镜反射的光子。 还描述了并入检测器的同轴双极型飞行时间型分析仪。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2005294269A

公开(公告)日：2005-10-20

申请号：JP2005135376

申请日：2005-04-05

Applicant: Burle Technologies Inc ,  バーレ テクノロジーズ,インコーポレイテッド

Inventor： STARCHER RONALD

IPC: H01J37/02 ,  H01J37/304 ,  H01J37/317 ,  H01L21/265

CPC classification number: H01J37/3171 ,  H01J37/026 ,  H01J2237/0045

Abstract: PROBLEM TO BE SOLVED: To provide a method and an apparatus which has significant advantages over other methods, such as plasma and electron showers and plasma flood system, for neutralizing excess charge due to ion implantation. SOLUTION: A means of neutralizing the excess charge on workpieces, such as semiconductor wafers, that results from ion-implantation processes, wherein the excess positive charge on a small area of the workpiece surface is locally sensed, and in response, an appropriate dose of charge-compensating electrons is delivered from an electron emission source to the area of excess charge on the workpiece. A charge-sensing probe and a voltage-controlled electron generator array are configurationally and operatively coupled in a closed feedback loop, and are made to scan the surface of the workpiece, in close but non-contacting proximity to the surface of the workpiece. Arrays of charge-sensing probes and electron generator arrays can be configured for rapid coverage of the implanted areas of the workpiece. COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种比其他方法（例如等离子体和电子淋浴和等离子体淹水系统）具有显着优点的方法和装置，用于中和由于离子注入引起的过量电荷。 解决方案：中和离子注入工艺产生的诸如半导体晶片的工件上的过量电荷的方法，其中在工件表面的小区域上过量的正电荷被局部感测，并且作为响应， 电荷补偿电子的适当剂量从电子发射源传送到工件上的过量电荷区域。 电荷感测探针和电压控制的电子发生器阵列在闭合反馈回路中构造和操作地耦合，并且被制成扫描工件的表面，在接近工件的表面附近但非接触。 电荷感测探针和电子发生器阵列的阵列可被配置为快速覆盖工件的注入区域。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2004288637A

公开(公告)日：2004-10-14

申请号：JP2004080821

申请日：2004-03-19

Applicant: Burle Technologies Inc ,  バーレ テクノロジーズ,インコーポレイテッド

Inventor： LAPRADE BRUCE

IPC: G01N27/62 ,  H01J3/16 ,  H01J49/00 ,  H01J49/04 ,  H01J49/16 ,  H01J49/40

CPC classification number: H01J49/405

Abstract: PROBLEM TO BE SOLVED: To provide a reflectron lens of a simple structure and enabled to be manufactured at low cost and at the same time, with sensitivity and resolution improved, and provide a direction inversion method of ion beams using the lens. SOLUTION: The reflectron-lenses 500, 600, 650 are composed of tubes, and the tubes have a continuous conductive face each along a longitudinal direction in order to provide inside the tube an electric field in which strength varies along the longitudinal direction. The tube may be formed of glass containing metal ions such as lead, and the conductive face can be formed by reducing the glass. As for the direction inversion method of the ion beams, the ion beams are introduced into a first end part of a dielectric tube having the continuous conductive face along the longitudinal direction of the tube, and an electric field gradient in which strength varies along the longitudinal direction of the tube is formed by applying electrical potential passing through the tube, and the ions are taken outside via the first end part of the tube by inverting the direction of the movement of the ions in that electric field gradient. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种简单结构的反射镜，能够以低成本，同时，灵敏度和分辨率提高制造，并提供使用该透镜的离子束的方向反转方法。 解决方案：反射镜透镜500,600,650由管组成，并且管沿着纵向方向具有连续的导电面，以在管的内部提供强度沿着纵向方向变化的电场 。 该管可以由含有诸如铅的金属离子的玻璃形成，并且可以通过还原玻璃来形成导电面。 对于离子束的方向反转方法，离子束被引入沿着管的纵向方向具有连续导电面的电介质管的第一端部，以及强度沿纵向变化的电场梯度 通过施加通过管的电势来形成管的方向，并且通过在该电场梯度中反转离子的移动方向，通过管的第一端部将离子取出到外部。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：US09425030B2

公开(公告)日：2016-08-23

申请号：US14296577

申请日：2014-06-05

Applicant: Burle Technologies, Inc.

Inventor： Jeffrey DeFazio

IPC: H01J43/24 ,  H01J43/14 ,  H01J43/04

CPC classification number: H01J43/04 ,  H01J43/246

Abstract: A photomultiplier tube having an ion suppression electrode positioned between a photocathode and an electron multiplying device in the photomultiplier tube is disclosed. The ion suppression electrode includes a grid that is configured to provide sufficient rigidity to avoid deformation during operation of the photomultiplier tube. The photomultiplier tube also includes a source of electric potential connected to the electron multiplying device and to the ion suppression electrode to provide a first voltage to the second electrode and a second voltage to the suppression grid electrode wherein the second voltage has a magnitude equal to or greater than the magnitude of the first voltage. A method of making the photomultiplier and a method of using it are also disclosed.

Abstract translation: 公开了一种光电倍增管，其具有位于光电倍增管内的光电阴极和电子倍增装置之间的离子抑制电极。 离子抑制电极包括网格，其被配置为提供足够的刚度以避免在光电倍增管的操作期间的变形。 光电倍增管还包括连接到电子倍增装置和离子抑制电极的电位源，以向第二电极提供第一电压，以及向抑制栅极施加第二电压，其中第二电压的幅度等于或等于 大于第一电压的大小。 还公开了制造光电倍增管的方法及其使用方法。