公开(公告)号：WO2013082343A1

公开(公告)日：2013-06-06

申请号：PCT/US2012/067171

申请日：2012-11-30

Applicant: CORNING INCORPORATED ,  HAMILTON, James Patrick ,  HRDINA, Kenneth Edward

Inventor： HAMILTON, James Patrick ,  HRDINA, Kenneth Edward

IPC: C03C23/00 ,  C03C21/00

CPC classification number: C03C23/008 ,  C03C21/006 ,  H01L31/03923 ,  H01L31/03925 ,  Y02E10/541

Abstract: A method of leaching alkali ions from a glass substrate to form a glass substrate having an intrinsic alkali barrier layer including providing a glass substrate comprising alkali metal ions, alkaline earth metal ions, or a combination thereof and contacting the surfaces of the substrate with a solution comprising a hydrogen bearing species such that at least a portion of the hydrogen bearing species replaces at least a portion of the alkali metal ions, alkaline earth metal ions, or the combination thereof in the at least one surface to form the glass substrate having the intrinsic alkali barrier layer.

Abstract translation: 一种从玻璃基板浸出碱离子以形成具有本征碱性阻挡层的玻璃基板的方法，该方法包括提供包括碱金属离子，碱土金属离子或其组合的玻璃基板，并使基板的表面与溶液接触 包括含氢物质，使得至少一部分含氢物质在至少一个表面中替换至少一部分碱金属离子，碱土金属离子或其组合，以形成具有本征态的玻璃基底 碱阻隔层。

公开(公告)号：WO2008140676A2

公开(公告)日：2008-11-20

申请号：PCT/US2008/005487

申请日：2008-04-28

Applicant: CORNING INCORPORATED ,  BOOKBINDER, Dana C ,  FIACCO, Richard M ,  HRDINA, Kenneth

Inventor： BOOKBINDER, Dana C ,  FIACCO, Richard M ,  HRDINA, Kenneth

IPC: C03C3/06 ,  C03B19/14

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/21 ,  C03B2201/22 ,  C03B2201/23 ,  C03B2201/31 ,  C03C2201/22 ,  C03C2201/23 ,  C03C2203/54

Abstract: A fused silica glass and a fused silica article having a combined concentration of at least one of OH and OD of up to about 50 ppm. The fused silica glass is formed by drying a fused silica soot blank or preform in an inert atmosphere containing a drying agent, followed by removal of residual drying agent from the dried soot blank by heating the dried soot blank in an atmosphere comprising an inert gas and of oxygen.

Abstract translation: 熔融石英玻璃和熔融二氧化硅制品，其具有高达约50ppm的OH和OD中的至少一种的组合浓度。 熔融二氧化硅玻璃通过在含有干燥剂的惰性气氛中干燥熔融二氧化硅烟灰坯料或预型体而形成，然后通过在包含惰性气体的气氛中加热干燥的烟灰坯料从干燥的烟灰坯中除去残留的干燥剂， 的氧气。

公开(公告)号：WO2002088035A1

公开(公告)日：2002-11-07

申请号：PCT/US2002/009189

申请日：2002-03-25

Applicant: CORNING INCORPORATED ,  HRDINA, Kenneth E ,  RUSSO, Nikki J ,  WASILEWSKI, Michael H

Inventor： HRDINA, Kenneth E ,  RUSSO, Nikki J ,  WASILEWSKI, Michael H

IPC: C03B8/04

CPC classification number: C03B19/1453 ,  C03B19/1407 ,  C03B19/1484 ,  C03B2201/04 ,  C03B2201/075 ,  C03B2201/42 ,  C03B2207/32

Abstract: A method for forming EUV Lithography large dimension homogeneous glass body is disclosed which includes delivering a silica precursor (28) to a burner (16) and passing the silica precursor (16) through the flame (36) of the burner (16) to form silica particles (38), depositing the silica particles (38) on a planar surface (14) to form a flat porous EUV Lithography large dimension preform (40) and consolidating the flat porous EUV Lithography large dimension preform (40) into a flat dense EUV Lithography large dimension homogeneous glass body.

Abstract translation: 公开了一种用于形成EUV平版印刷大尺寸均匀玻璃体的方法，其包括将二氧化硅前体（28）输送到燃烧器（16）并使二氧化硅前体（16）通过燃烧器（16）的火焰（36）形成 二氧化硅颗粒（38），将二氧化硅颗粒（38）沉积在平坦表面（14）上以形成平坦多孔EUV平版印刷大尺寸预制件（40），并将平面多孔EUV平版印刷大尺寸预成型件（40）固结成扁平密度 EUV平版印刷大尺寸均匀玻璃体。

公开(公告)号：WO2006071936A3

公开(公告)日：2006-07-06

申请号：PCT/US2005/047257

申请日：2005-12-28

Applicant: CORNING INCORPORATED ,  BOOKBINDER, Dana C ,  FIACCO, Richard M ,  HRDINA, Kenneth E ,  TANDON, Pushkar ,  BLEAKING, Daniel J ,  MAXON, John E ,  WILBERT, Kimberly A

Inventor： BOOKBINDER, Dana C ,  FIACCO, Richard M ,  HRDINA, Kenneth E ,  TANDON, Pushkar ,  BLEAKING, Daniel J ,  MAXON, John E ,  WILBERT, Kimberly A

IPC: C03C3/06 ,  C03C4/00 ,  C03B19/14

Abstract: Disclosed are high purity synthetic silica glass material having a high OH concentration homogeneity in a plane perpendicular to the optical axis, and process of making the same. The glass has high refractive index homogeneity. The glass can have high internal transmission of at least 99.65%/cm at 193 nm. The process does not require a post-sintering homogenization step. The controlling factors for high compositional homogeneity, thus high refractive index homogeneity, include high initial local soot density uniformity in the soot preform and slow sintering, notably isothermal treatment during consolidation.

公开(公告)号：WO2006071936A2

公开(公告)日：2006-07-06

申请号：PCT/US2005047257

申请日：2005-12-28

Applicant: CORNING INC ,  BOOKBINDER DANA C ,  FIACCO RICHARD M ,  HRDINA KENNETH E ,  TANDON PUSHKAR ,  BLEAKING DANIEL J ,  MAXON JOHN E ,  WILBERT KIMBERLY A

Inventor： BOOKBINDER DANA C ,  FIACCO RICHARD M ,  HRDINA KENNETH E ,  TANDON PUSHKAR ,  BLEAKING DANIEL J ,  MAXON JOHN E ,  WILBERT KIMBERLY A

IPC: C03C3/06 ,  C03B19/14 ,  C03C4/00

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B2201/03 ,  C03B2201/04 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2201/23 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/23

Abstract: Disclosed are high purity synthetic silica glass material having a high OH concentration homogeneity in a plane perpendicular to the optical axis, and process of making the same. The glass has high refractive index homogeneity. The glass can have high internal transmission of at least 99.65%/cm at 193 nm. The process does not require a post-sintering homogenization step. The controlling factors for high compositional homogeneity, thus high refractive index homogeneity, include high initial local soot density uniformity in the soot preform and slow sintering, notably isothermal treatment during consolidation.

Abstract translation: 公开了在垂直于光轴的平面内具有高OH浓度均匀性的高纯度合成石英玻璃材料及其制造方法。 玻璃具有高折射率均匀性。 该玻璃在193nm下可以具有至少99.65％/ cm的高内部透射率。 该方法不需要烧结后均化步骤。 高成分均匀性因此高折射率均匀性的控制因素包括在烟灰预制棒中的初始局部烟灰密度均匀性和慢速烧结，特别是在固结期间的等温处理。

公开(公告)号：WO2018118964A1

公开(公告)日：2018-06-28

申请号：PCT/US2017/067376

申请日：2017-12-19

Applicant: CORNING INCORPORATED ,  BADDING, Michael Edward ,  BOMBA, Richard Dominic ,  BROWN, Jacqueline Leslie ,  BOUTON, William Joseph ,  HRDINA, Kenneth Edward ,  KETCHAM, Thomas Dale ,  MERZ, Gary Edward ,  MILLER, Eric Lee ,  SHASHIDHAR, Nagaraja ,  ST. JULIEN, Dell Joseph ,  SONG, Zhen ,  TANNER, Cameron Wayne ,  WALSH, Conor James

Inventor： BADDING, Michael Edward ,  BOMBA, Richard Dominic ,  BROWN, Jacqueline Leslie ,  BOUTON, William Joseph ,  HRDINA, Kenneth Edward ,  KETCHAM, Thomas Dale ,  MERZ, Gary Edward ,  MILLER, Eric Lee ,  SHASHIDHAR, Nagaraja ,  ST. JULIEN, Dell Joseph ,  SONG, Zhen ,  TANNER, Cameron Wayne ,  WALSH, Conor James

IPC: C09J7/21 ,  C09J7/30 ,  C09J1/00

Abstract: A system is provided for sintering thin, wide, and/or long tape materials such as in a roll to roll process. The system is arranged to control sintering and limit deformation of the tape during sintering to produce sintered material.

公开(公告)号：WO2013116420A1

公开(公告)日：2013-08-08

申请号：PCT/US2013/023980

申请日：2013-01-31

Applicant: CORNING INCORPORATED ,  ALLEN, Douglas Clippinger ,  HRDINA, Kenneth Edward ,  ROSCH, William Rogers

Inventor： ALLEN, Douglas Clippinger ,  HRDINA, Kenneth Edward ,  ROSCH, William Rogers

IPC: C03C21/00

CPC classification number: C03C21/002

Abstract: The present disclosure is directed to a method for producing constancy of the ion-exchanged product stress profile through adjustment of ion-exchange conditions by taking account of the influence of salt bath poisoning on the baths useful lifetime. The present disclosure is directed to a method of ion-exchange in which the salt bath temperature and salt bath time are adjusted as a function of the amount of alkali metal ions that exchange in the bath. That is, temperature and time are adjusted as a function of salt bath poisoning. Temperature is set to its highest value and time to its shortest value in the starting un-poisoned salt bath, those values chosen to hit target values of surface compressive stress and exchange depth of layer. Temperature is then reduced and time lengthened as salt bath poisoning proceeds, those changes chosen to maintain the same surface compressive stress and exchange depth of layer.

Abstract translation: 本公开涉及一种通过考虑盐浴中毒对浴的使用寿命的影响来调节离子交换条件来产生离子交换产物应力分布的恒定性的方法。 本公开涉及一种离子交换方法，其中盐浴温度和盐浴时间作为在浴中交换的碱金属离子的量的函数来调节。 也就是说，温度和时间被调整为盐浴中毒的功能。 在起始的无毒盐浴中将温度设定为其最小值和时间到其最短值，这些值被选择以达到表面压应力的目标值和层的交换深度。 随着盐浴中毒的进行，温度降低，时间延长，这些变化被选择为保持相同的表面压应力和层的交换深度。

公开(公告)号：WO2012148611A1

公开(公告)日：2012-11-01

申请号：PCT/US2012/030681

申请日：2012-03-27

Applicant: CORNING INCORPORATED ,  COOK, Glen Bennett ,  HRDINA, Kenneth E ,  THOMAS, Christopher S ,  WIGHT, John Forrest Jr

Inventor： COOK, Glen Bennett ,  HRDINA, Kenneth E ,  THOMAS, Christopher S ,  WIGHT, John Forrest Jr

IPC: C30B28/06 ,  C30B35/00 ,  C30B29/06

CPC classification number: C30B28/06 ,  C30B29/06 ,  C30B35/002

Abstract: The disclosure relates to vessels configured to contain molten semiconducting materials. The vessels include a high purity fused silica lining having a base and sidewalls that define an interior volume, and a fused silica backing proximate the external surfaces of the lining.

Abstract translation: 本公开涉及构造成容纳熔融半导体材料的容器。 容器包括具有限定内部容积的基部和侧壁的高纯度熔融石英衬里，以及靠近衬里的外表面的熔融石英衬垫。

公开(公告)号：WO2009070223A1

公开(公告)日：2009-06-04

申请号：PCT/US2008/012897

申请日：2008-11-19

Applicant: CORNING INCORPORATED ,  HRDINA, Kenneth, E. ,  SABIA, Robert

Inventor： HRDINA, Kenneth, E. ,  SABIA, Robert

IPC: C03C3/097

CPC classification number: C03C3/06 ,  C03B19/1407 ,  C03B19/143 ,  C03B19/1484 ,  C03B2201/42 ,  C03C2201/42 ,  C03C2203/40

Abstract: A low expansion glass substrate includes titania and silica and has a thermal expansivity with an average gradient less than 1 ppb/°C /°C in a temperature range of 19°C to 25°C.

Abstract translation: 低膨胀玻璃基板包括二氧化钛和二氧化硅，并且在19℃至25℃的温度范围内具有平均梯度小于1ppb /℃/℃的热膨胀性。

公开(公告)号：WO2005082800A1

公开(公告)日：2005-09-09

申请号：PCT/US2005/005709

申请日：2005-02-23

Applicant: CORNING INCORPORATED ,  BOOKBINDER, Dana C ,  FIACCO, Richard M ,  HRDINA, Kenneth E ,  MOORE, Lisa A ,  SCHIEFELBEIN, Susan L

Inventor： BOOKBINDER, Dana C ,  FIACCO, Richard M ,  HRDINA, Kenneth E ,  MOORE, Lisa A ,  SCHIEFELBEIN, Susan L

IPC: C03C3/06

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B32/00 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2201/23 ,  C03B2207/32 ,  C03C2201/21 ,  C03C2201/23

Abstract: Disclosed is a synthetic silica glass optical material having high resistance to optical damage by ultraviolet radiation in the ultraviolet wavelength range, particularly in the wavelength less than about 250 nm and particularly, exhibiting a low laser induced wavefront distortion; specifically a laser induced wavefront distortion, measured at 633nm, of between about -1.0 and 1.0 nm/cm when subjected to 10 billion pulses of a laser operating at approximately 193 nm and at a fluence of approximately 70µJ/cm 2 . The synthetic silica glass optical material of the present invention comprises OH concentration levels less than about 600ppm, preferably less than 200ppm, and H 2 concentration levels less than about 5.0x10 17 molecules/cm 3 , and preferably less than about 2.0x10 17 molecules/cm 3 . A method of producing a synthetic silica glass optical material is also claimed.

Abstract translation: 公开了一种合成石英玻璃光学材料，其特征在于波长小于约250nm，特别是具有低激光诱导波前失真的紫外线波长范围内具有高抗紫外线辐射的光学损伤。 具体地，当经受在约193nm的操作的激光器和约70μJ/ cm 2的通量时，在633nm处测量的激光诱导波前失真在约-1.0和1.0nm / cm之间。 本发明的合成二氧化硅玻璃光学材料包括OH浓度水平低于约600ppm，优选小于200ppm，H 2浓度水平低于约5.0×10 17分子/ cm 3，优选小于约2.0×10 3 17分子/ cm 3。 还要求生产合成石英玻璃光学材料的方法。