公开(公告)号：IL239814D0

公开(公告)日：2015-08-31

申请号：IL23981415

申请日：2015-07-06

Applicant: LAMBDA X ,  BEGHUIN DIDIER ,  LAMBDA X

IPC: G01J20060101

公开(公告)号：WO2022100987A1

公开(公告)日：2022-05-19

申请号：PCT/EP2021/079470

申请日：2021-11-05

Applicant: LAMBDA-X

Inventor： BOUSSEMAERE, Luc ,  ANTOINE, Philippe ,  BOUWENS, Arno ,  JOANNES, Luc

IPC: G01M11/02 ,  G02C7/02

Abstract: Method for conversion of a measurement of an lens (1) comprising the following steps: receiving an experimental lens measurement (EXP) of the lens (1) from a light measurement of the lens (1); determining from the experimental lens measurement (EPX) a digital lens model representing the lens (1) (S1); determining, based on the digital lens model, a converted digital lens measurement (SIM2) representing a 5 converted lens measurement of the lens (1) (S2); determining, based on the experimental lens measurement (EXP1) and the converted digital lens measurement (SIM2), a measurement result (CON) for the lens (1) (S3).

公开(公告)号：WO2009065740A1

公开(公告)日：2009-05-28

申请号：PCT/EP2008/065082

申请日：2008-11-06

Applicant: LAMBDA-X ,  BEGHUIN, Didier ,  JOANNES, Didier

Inventor： BEGHUIN, Didier ,  JOANNES, Didier

IPC: G01N21/956 ,  G01B11/25 ,  G01M11/02

CPC classification number: G01N21/95623 ,  G01B11/25 ,  G01M11/0264 ,  G01M11/0278

Abstract: The present invention relates to a Fourier transform deflectometry system (1) and method for the optical inspection of a phase and amplitude object (2) placed in an optical path between a grating (3) and an imaging system (4), at a distance h of said grating 3. The grating (3) forms a contrast-based periodic pattern with spatial frequencies μ 0 , v 0 in, respectively, orthogonal axes x,y in an image plane, and the imaging system (4) comprises an objective (5) and an imaging sensor (6) comprising a plurality of photosensitive elements. Spatial frequencies μ 0 , v 0 are equal or lower than the Nyquist frequencies of the imaging system in the respective x and y axes. According to the method of the invention, a first image of said pattern, distorted by the phase and amplitude object (2), is first captured through the objective (5) by the imaging sensor (6). Then, a Fourier transform of said first image in a spatial frequency domain is calculated, at least one first- or higher-order spectrum of said Fourier transform is selected and shifted in said frequency domain, so as to substantially place it at a central frequency of said Fourier transform, and a reverse Fourier transform of said at least one shifted first- or higher-order spectrum of said Fourier transform is performed so as to obtain a complex function g(x,y)=l(x,y)eiφ(x,y), wherein l(x,y) is an intensity and φ(x,y) a phase linked to optical deflection angles θ x , θ y in, respectively, the directions of the x and y axes, in the following form: φ(x,y)=- 2ττh(μ 0 tanθ x +v 0 tanθ y ).

Abstract translation: 本发明涉及一种傅里叶变换偏转测量系统（1）和方法，用于对放置在光栅（3）和成像系统（4）之间的光路中的相位和幅度对象（2）进行光学检测， 光栅（3）在图像平面中分别形成空间频率μ0，v0 in的正交轴x，y的基于对比度的周期性图案，并且成像系统（4）包括物镜（5） ）和包括多个感光元件的成像传感器（6）。 空间频率μ0，v0等于或低于成像系统在相应x和y轴上的奈奎斯特频率。 根据本发明的方法，通过成像传感器（6）首先通过物镜（5）捕获由相位和幅度物体（2）失真的所述图案的第一图像。 然后，计算空间频域中的所述第一图像的傅里叶变换，选择所述傅立叶变换的至少一个第一或更高阶频谱，并在所述频域中移位，以便基本上将其置于中心频率 并且执行所述傅里叶变换的所述至少一个移位的第一或更高阶光谱的逆傅立叶变换，以便获得复函数g（x，y）= 1（x，y）eif （x，y），其中l（x，y）是强度，f（x，y）分别与光偏转角θx，θyin相关联的x和y轴方向的相位， 以下形式：f（x，y）= - 2tth（μ0tan？x + v0tan？y）。

公开(公告)号：WO2014114768A1

公开(公告)日：2014-07-31

申请号：PCT/EP2014/051438

申请日：2014-01-24

Applicant: LAMBDA-X

Inventor： BEGHUIN, Didier

IPC: G01J3/453 ,  G01J3/02

CPC classification number: G01J3/2823 ,  G01J3/0208 ,  G01J3/0224 ,  G01J3/45 ,  G01J3/4537

Abstract: Described herein is a hyperspectral imaging system (500) in which a polarising beam splitter (510), a Wollaston prism (520), an optical system (530), and a plane mirror (540) are arranged on an optical axis (550) of the imaging system (500). An imaging detector (560) is provided on which radiation is focussed by an imaging lens (570). The Wollaston prism (520) is imaged on itself by the optical system (530) and the plane mirror (540) so that translation of the Wollaston prism (520) in a direction parallel to a virtual split plane of the prism effectively provides an optical path length difference that is the same for all points in the object field.

Abstract translation: 这里描述的是在光轴（550）上布置偏振分束器（510），渥拉斯顿棱镜（520），光学系统（530）和平面镜（540）的高光谱成像系统（500） 的成像系统（500）。 提供了一种成像检测器（560），辐射被成像透镜（570）聚焦在该成像检测器上。 Wollaston棱镜（520）通过光学系统（530）和平面镜（540）在其自身上成像，使得Wollaston棱镜（520）在平行于棱镜的虚拟剖面的方向上的平移有效地提供光学 对象字段中所有点的路径长度差是相同的。

公开(公告)号：US20230417626A1

公开(公告)日：2023-12-28

申请号：US18037100

申请日：2021-11-05

Applicant: Lambda-X

Inventor： Luc BOUSSEMAERE ,  Philippe ANTOINE ,  Arno BOUWENS ,  Luc JOANNES

IPC: G01M11/02

CPC classification number: G01M11/02

Abstract: Method for conversion of a measurement of an lens (1) comprising the following steps: receiving an experimental lens measurement (EXP) of the lens (1) from a light measurement of the lens (1); determining from the experimental lens measurement (EPX) a digital lens model representing the lens (1) (Si); determining, based on the digital lens model, a converted digital lens measurement (SIM2) representing a converted lens measurement of the lens (1) (S2); determining, based on the experimental lens measurement (EXP1) and the converted digital lens measurement (SIM2), a measurement result (CON) for the lens (1) (S3).

公开(公告)号：US09671287B2

公开(公告)日：2017-06-06

申请号：US14762179

申请日：2014-01-24

Applicant: LAMBDA-X

Inventor： Didier Beghuin

IPC: G01J3/02 ,  G01J3/28 ,  G01J3/45 ,  G01J3/453

CPC classification number: G01J3/2823 ,  G01J3/0208 ,  G01J3/0224 ,  G01J3/45 ,  G01J3/4537

Abstract: Described herein is a hyperspectral imaging system in which a polarizing beam splitter, a Wollaston prism, an optical system, and a plane mirror are arranged on an optical axis of the imaging system. An imaging detector is provided on which radiation is focused by an imaging lens. The Wollaston prism is imaged on itself by the optical system and the plane mirror so that translation of the Wollaston prism in a direction parallel to a virtual split plane of the prism effectively provides an optical path length difference that is the same for all points in the object field.

公开(公告)号：US20220187161A1

公开(公告)日：2022-06-16

申请号：US17605051

申请日：2020-04-24

Applicant: LAMBDA-X

Inventor： Philippe Antoine ,  Didier Beghuin ,  Luc Joannes

IPC: G01M11/02 ,  G01N21/45 ,  G02B27/54 ,  G02F1/1362 ,  G02B27/14

Abstract: A system for measuring (200) a sample (2) by deflectometry comprising: a source (10) for generating a light beam in a source plane (105); an illumination module (19) for forming an illumination beam (9) comprising: a first converging optical element (18); a first selection optical element (16) with a first aperture (160); reflective matrix optical modulation means (30) to form a pattern (7), said first aperture (160) being configured to control the angles of said illumination beam (9) on said reflective matrix optical modulation means (30); a Schlieren lens (20) for obtaining an angle-intensity encoding of said pattern (7) on the sample (2); imaging (40) and detecting means (50) for detecting an image of said sample (2).

公开(公告)号：USD952158S1

公开(公告)日：2022-05-17

申请号：US29710915

申请日：2019-10-28

Applicant: Lambda-X S.A.

Designer： Luc Joannes

公开(公告)号：US12000752B2

公开(公告)日：2024-06-04

申请号：US17605051

申请日：2020-04-24

Applicant: LAMBDA-X OPHTHALMICS

Inventor： Philippe Antoine ,  Didier Beghuin ,  Luc Joannes

IPC: G01M11/02 ,  G01N21/45 ,  G02B27/14 ,  G02B27/54 ,  G02F1/1362 ,  G01N21/17

CPC classification number: G01M11/0228 ,  G01M11/0207 ,  G01N21/455 ,  G02B27/149 ,  G02B27/54 ,  G02F1/136277 ,  G01N2021/1765 ,  G01N2021/456 ,  G02F2203/50

Abstract: A system for measuring (200) a sample (2) by deflectometry comprising:



a source (10) for generating a light beam in a source plane (105);
an illumination module (19) for forming an illumination beam (9) comprising:

a first converging optical element (18);
a first selection optical element (16) with a first aperture (160);


reflective matrix optical modulation means (30) to form a pattern (7), said first aperture (160) being configured to control the angles of said illumination beam (9) on said reflective matrix optical modulation means (30);
a Schlieren lens (20) for obtaining an angle-intensity encoding of said pattern (7) on the sample (2);
imaging (40) and detecting means (50) for detecting an image of said sample (2).

公开(公告)号：US20150355027A1

公开(公告)日：2015-12-10

申请号：US14762179

申请日：2014-01-24

Applicant: LAMBDA-X

Inventor： Didier Beghuin

IPC: G01J3/28 ,  G01J3/45 ,  G01J3/02

CPC classification number: G01J3/2823 ,  G01J3/0208 ,  G01J3/0224 ,  G01J3/45 ,  G01J3/4537

Abstract: Described herein is a hyperspectral imaging system in which a polarising beam splitter, a Wollaston prism, an optical system, and a plane mirror are arranged on an optical axis of the imaging system. An imaging detector is provided on which radiation is focused by an imaging lens. The Wollaston prism is imaged on itself by the optical system and the plane mirror so that translation of the Wollaston prism in a direction parallel to a virtual split plane of the prism effectively provides an optical path length difference that is the same for all points in the object field.

Abstract translation: 这里描述的是一种超光谱成像系统，其中偏振分束器，沃拉斯顿棱镜，光学系统和平面镜布置在成像系统的光轴上。 提供了一种成像检测器，在其上由成像透镜聚焦辐射。 Wollaston棱镜通过光学系统和平面镜在其自身上成像，使得Wollaston棱镜在平行于棱镜的虚拟裂缝平面的方向上的平移有效地提供了光路长度差异，其对于 对象字段。