公开(公告)号：WO2011025998A4

公开(公告)日：2011-03-03

申请号：PCT/US2010/047064

申请日：2010-08-28

Applicant: MIRRO, Gene ,  KOOIJMAN, Cornelis, Sander ,  VOS, Hendrik Jan de ,  FEI COMPANY ,  MILLER, Tom

Inventor： MIRRO, Gene ,  KOOIJMAN, Cornelis, Sander ,  VOS, Hendrik Jan de ,  MILLER, Tom

IPC: H01J37/147 ,  H01J37/04

Abstract: An improved method of directing a charged particle beam that compensates for the time required for the charged particles to traverse the system by altering one or more of the deflector signals. According to one embodiment of the invention, a digital filter is applied to the scan pattern prior to digital-to-analog (D/A) conversion in order to reduce or eliminate over-shoot effects that can result from TOF errors. In other embodiments, analog filters or the use of signal amplifiers with a lower bandwidth can also be used to compensate for TOF errors. By altering the scan pattern, over-shoot effects can be significantly reduced or eliminated.

公开(公告)号：WO2011025998A3

公开(公告)日：2011-08-18

申请号：PCT/US2010047064

申请日：2010-08-28

Applicant: MIRRO GENE ,  KOOIJMAN CORNELIS SANDER ,  VOS HENDRIK JAN DE ,  FEI CO ,  MILLER TOM

Inventor： MIRRO GENE ,  KOOIJMAN CORNELIS SANDER ,  VOS HENDRIK JAN DE ,  MILLER TOM

IPC: H01J37/147 ,  H01J37/04

CPC classification number: H01J3/26 ,  H01J37/1472 ,  H01J37/1477 ,  H01J37/3026 ,  H01J2237/1504 ,  H01J2237/1518 ,  H01J2237/1526 ,  H01J2237/30416 ,  H01J2237/3045 ,  H01J2237/30461

Abstract: An improved method of directing a charged particle beam that compensates for the time required for the charged particles to traverse the system by altering one or more of the deflector signals. According to one embodiment of the invention, a digital filter is applied to the scan pattern prior to digital-to-analog (D/A) conversion in order to reduce or eliminate over-shoot effects that can result from TOF errors. In other embodiments, analog filters or the use of signal amplifiers with a lower bandwidth can also be used to compensate for TOF errors. By altering the scan pattern, over-shoot effects can be significantly reduced or eliminated.

Abstract translation: 一种改进的引导带电粒子束的方法，其通过改变一个或多个偏转器信号来补偿带电粒子穿过系统所需的时间。 根据本发明的一个实施例，在数字 - 模拟（D / A）转换之前将数字滤波器应用于扫描图案，以便减少或消除可能由TOF误差导致的过拍效应。 在其他实施例中，也可以使用模拟滤波器或使用具有较低带宽的信号放大器来补偿TOF误差。 通过改变扫描模式，可以显着减少或消除过拍效果。

公开(公告)号：WO2011025998A2

公开(公告)日：2011-03-03

申请号：PCT/US2010047064

申请日：2010-08-28

Applicant: MIRRO GENE ,  KOOIJMAN CORNELIS SANDER ,  VOS HENDRIK JAN DE ,  FEI CO ,  MILLER TOM

Inventor： MIRRO GENE ,  KOOIJMAN CORNELIS SANDER ,  VOS HENDRIK JAN DE ,  MILLER TOM

IPC: H01J37/147 ,  H01J37/04

CPC classification number: H01J3/26 ,  H01J37/1472 ,  H01J37/1477 ,  H01J37/3026 ,  H01J2237/1504 ,  H01J2237/1518 ,  H01J2237/1526 ,  H01J2237/30416 ,  H01J2237/3045 ,  H01J2237/30461

Abstract: An improved method of directing a charged particle beam that compensates for the time required for the charged particles to traverse the system by altering one or more of the deflector signals. According to one embodiment of the invention, a digital filter is applied to the scan pattern prior to digital-to-analog (D/A) conversion in order to reduce or eliminate over-shoot effects that can result from TOF errors. In other embodiments, analog filters or the use of signal amplifiers with a lower bandwidth can also be used to compensate for TOF errors. By altering the scan pattern, over-shoot effects can be significantly reduced or eliminated.

Abstract translation: 引导带电粒子束的改进方法，其补偿带电粒子通过改变一个或多个偏转器信号而穿过系统所需的时间。 根据本发明的一个实施例，在数模（D / A）转换之前，将数字滤波器应用于扫描图案，以便减少或消除可能由TOF误差引起的过拍影响。 在其他实施例中，也可以使用模拟滤波器或具有较低带宽的信号放大器的使用来补偿TOF误差。 通过改变扫描图案，可以显着减少或消除超拍效果。